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1. 发明授权

US5351938A Apparatus for fabricating a foil 失效
标题翻译：用于制造箔的装置
公开(公告)号：US5351938A
公开(公告)日：1994-10-04
申请号：US16515
申请日：1993-02-11
申请人： Frank Hegner , Elke Schmidt , Thomas Klahn , Peter Reimann , Heinz Breitenstein , Stephan Messmer
发明人： Frank Hegner , Elke Schmidt , Thomas Klahn , Peter Reimann , Heinz Breitenstein , Stephan Messmer
IPC分类号： B23K35/32 , B22D11/06 , B23K35/02 , B23K35/40 , C04B37/00 , C04B37/02 , C22C16/00 , C30B33/06 , G01L9/12 , G05D16/00 , B22D41/01
CPC分类号： G01L9/0075 , B22D11/0611 , B22D11/064 , B23K35/0233 , B23K35/32
摘要： This active brazing serves to braze ceramic parts or single crystals or metal parts or to braze ceramic parts to single crystals or ceramic parts or single crystals to metal parts. In addition to the zirconium-nickel alloy, which is composed of 70 atom % to 85 atom % zirconium and 15 atom % to 30 atom % nickel, it contains titanium. In an apparatus for fabricating a foil (6) from this ternary active-brazing alloy by melt spinning which has a uniform thickness and two surfaces that are as smooth as possible, the alloy, after being melted by high-frequency heating in a cylindrical crucible (1) made completely of a high-temperature-resistant and highly thermally conductive nonmetallic material, particularly of high-density graphite or of boron nitride, is forced through an opening (3) in the bottom of the crucible onto a metal drum (5) of high thermal conductivity rotating at a high circumferential speed, on which the liquid alloy solidifies at a cooling rate on the order of 10.sup.3 to 10.sup.6 .degree. C./s. A product made using this ternary active brazing is a pressure sensor (10) having a substrate (12) and a diaphragm (11) of ceramic, particularly alumina ceramic, preferably with a purity of 96 wt.%, which are thermally joined around the periphery in a defined spaced relationship (d) and parallel to each other by means of the active brazing, e.g., by means of a preform (20) made therefrom, thus forming a chamber (13).
摘要翻译：这种活性钎焊用于钎焊陶瓷部件或单晶或金属部件或将陶瓷部件钎焊到单晶或陶瓷部件或单晶到金属部件。除了由70原子％至85原子％的锆和15原子％至30原子％的镍组成的锆 - 镍合金之外，还含有钛。在通过熔融纺丝从均匀的厚度和两个表面尽可能平滑的熔融纺丝制造箔（6）的装置中，该合金在通过高频加热在圆柱形坩埚中熔化之后（1）完全由高温高导热非金属材料，特别是高密度石墨或氮化硼制成，被迫穿过坩埚底部的开口（3）到金属鼓（5 ）的高导热率以高圆周速度旋转，液体合金以约103至106℃/ s的冷却速率固化。使用这种三元活性钎焊制成的产品是压力传感器（10），其具有衬底（12）和陶瓷的隔膜（11），特别是氧化铝陶瓷，优选纯度为96重量％，它们围绕周边以限定的间隔关系（d）并且通过活性钎焊彼此平行，例如通过由其制成的预成型件（20），从而形成腔室（13）。

2. 发明授权

US5334344A Ternary active brazing based on a zirconium-nickel alloy 失效
标题翻译：基于锆 - 镍合金的三元有源钎焊
公开(公告)号：US5334344A
公开(公告)日：1994-08-02
申请号：US791092
申请日：1991-11-12
申请人： Frank Hegner , Elke Schmidt , Thomas Klahn , Peter Reimann , Heinz Breitenstein , Stephan Messmer
发明人： Frank Hegner , Elke Schmidt , Thomas Klahn , Peter Reimann , Heinz Breitenstein , Stephan Messmer
IPC分类号： B23K35/32 , B22D11/06 , B23K35/02 , B23K35/40 , C04B37/00 , C04B37/02 , C22C16/00 , C30B33/06 , G01L9/12 , G05D16/00
CPC分类号： G01L9/0075 , B22D11/0611 , B22D11/064 , B23K35/0233 , B23K35/32
摘要： This active brazing preferably serves to braze (join) ((aluminum-)oxide-)ceramic parts or single crystals or metal parts or to braze (join) ((aluminum-)oxide-)ceramic parts to single crystals or ((aluminum-)oxide-)ceramic parts or single crystals to metal parts. In addition to the zirconium-nickel alloy, which is composed of 70 atom % to 85 atom % zirconium and 15 atom % to 30 atom % nickel, it contains titanium. In an apparatus for fabricating a foil (6) from this ternary active-brazing alloy by melt spinning which has a uniform thickness and two surfaces that are as smooth as possible, the alloy, after being melted by high-frequency heating in a cylindrical crucible (1) made completely of a high-temperature-resistant and highly thermally conductive nonmetallic material, particularly of high-density graphite or of boron nitride, is forced through an opening (3) in the bottom of the crucible onto a metal drum (5) of high thermal conductivity rotating at a high circumferential speed, on which the liquid alloy solidifies at a cooling rate on the order of 10.sup.3 .degree. to 10.sup.6 .degree. C./s. A product made using this ternary active brazing is a pressure sensor (10 ) having a substrate (12) and a diaphragm (11) of ceramic, particularly alumina ceramic, preferably with a purity of 96 wt. %, which are thermally joined around the periphery in a defined spaced relationship (d) and parallel to each other by means of the active brazing , e.g., by means of a preform (20) made therefrom, thus forming a chamber (13) .
摘要翻译：这种活性钎焊优选用于将（（铝）氧化物）陶瓷部件或（单独的）氧化物 - 陶瓷部件或单晶体或金属部件钎焊（（连接）（（ - ）氧化物）陶瓷部件到单晶或（（铝 - ）氧化物 - ）陶瓷部件或单晶到金属部件。除了由70原子％至85原子％的锆和15原子％至30原子％的镍组成的锆 - 镍合金之外，还含有钛。在通过熔融纺丝从均匀的厚度和两个表面尽可能平滑的熔融纺丝制造箔（6）的装置中，该合金在通过高频加热在圆柱形坩埚中熔化之后（1）完全由高温高导热非金属材料，特别是高密度石墨或氮化硼制成，被迫穿过坩埚底部的开口（3）到金属鼓（5 ）以高圆周速度旋转的高热导率，液体合金以约103〜106℃/秒的冷却速度固化。使用这种三元活性钎焊制成的产品是具有基底（12）和陶瓷的隔膜（11），特别是氧化铝陶瓷的压力传感器（10），优选纯度为96wt。％，它们以限定的间隔关系（d）围绕周边热连接并且通过活性钎焊彼此平行，例如通过由其制成的预成型件（20），从而形成腔室（13）。

3. 发明授权

US06715356B2 Pressure sensor having metallic diaphragm seal mount 有权
标题翻译：压力传感器具有金属隔膜密封安装
公开(公告)号：US06715356B2
公开(公告)日：2004-04-06
申请号：US09734739
申请日：2000-12-13
申请人： Peter Gerst , Karlheinz Banholzer , Karl Flögel , Thomas Uehlin , Frank Hegner , Elke Schmidt , Ulfert Drewes , Rainer Martin
发明人： Peter Gerst , Karlheinz Banholzer , Karl Flögel , Thomas Uehlin , Frank Hegner , Elke Schmidt , Ulfert Drewes , Rainer Martin
IPC分类号： G01L708
CPC分类号： G01L9/0075
摘要： A pressure sensor that is particularly suitable for the food industry and the measuring accuracy of which is stable over a long time, having a diaphragm seal with a separating diaphragm on which a pressure to be measured acts and having a ceramic measuring cell which is connected to the diaphragm seal exclusively by inorganic materials, is provided, in which sensor the separating diaphragm and all further sensor components coming into contact during measurement with a medium of which the pressure is to be measured are metallic.
摘要翻译：一种特别适用于食品工业的压力传感器，其测量精度长时间是稳定的，具有隔膜密封件，隔膜在其上被测量的压力作用并具有陶瓷测量单元，该陶瓷测量单元连接到隔离膜仅由无机材料密封，其中分离膜和所有其它传感器组件在测量期间与测量压力的介质接触的传感器是金属的。

4. 发明授权

US06267009B1 Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same 失效
标题翻译：电容式压力传感器单元或差压传感器单元及其制造方法
公开(公告)号：US06267009B1
公开(公告)日：2001-07-31
申请号：US09505489
申请日：2000-02-16
申请人： Ulfert Drewes , Elke Schmidt , Andreas Rossberg , Frank Hegner , Thomas Velten
发明人： Ulfert Drewes , Elke Schmidt , Andreas Rossberg , Frank Hegner , Thomas Velten
IPC分类号： G01L912
CPC分类号： G01L9/0075 , G01L9/0044
摘要： These capacitive pressure sensor cells have joints between substrates and diaphragms being both pressure and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a ceramic substrate (1) having a cylindrical surface (11), a major surfaces (12, 13). The major surface (12) includes a concave central area (121) merging, in the direction of and up to said cylindrical surface (11), into a convex surface (124) having a vertex line (125) and forming a planar ring surface (126) in its area. An electrode (122) is located in the concave area (121). An electrical connection (123) extends from electrode (122) through the substrate (1) to surface (13). A ceramic diaphragm (5) has a planar inner surface (51) on which an electrode (52) is located and which rests on the ring surface (126) of the substrate (1). The diaphragm (5) is joined to the substrate by an active brazing solder forming a circumferential wedge zone (91) in the area of the substrate between the ring surface (126) and the cylindrical surface (11). An electrical connection to the electrode (52) is made through the wedge zone (91). Respective differential pressure sensors can comprise a central substrate (2) and two outer diaphragms (61, 71) or a central diaphragm (8) and two outer substrates (3, 4).
摘要翻译：这些电容式压力传感器单元在基板和隔膜之间具有接头，其压力和/或抗张力和高真空密封性和长期稳定性。传感器单元包括具有圆柱形表面（11），主表面（12,13）的陶瓷基底（1）。主表面（12）包括凹入的中心区域（121），其在所述圆柱形表面（11）的方向上并且与所述圆柱形表面（11）一起合并成具有顶点线（125）的凸形表面（124）并形成平面环表面（126）。电极（122）位于凹部（121）中。电连接（123）从电极（122）穿过衬底（1）延伸到表面（13）。陶瓷膜片（5）具有平面的内表面（51），电极（52）位于该平面内表面上，并且该陶瓷膜片位于衬底（1）的环表面（126）上。膜片（5）通过在环形表面（126）和圆柱形表面（11）之间的衬底区域中形成周向楔形区域（91）的活性钎焊焊料与衬底接合。通过楔形区域（91）制成与电极（52）的电连接。各差压传感器可以包括中央基板（2）和两个外隔膜（61,71）或中央隔膜（8）和两个外基板（3,4）。

5. 发明申请

US20100199778A1 CAPACITIVE PRESSURE SENSOR 有权
标题翻译：电容式压力传感器
公开(公告)号：US20100199778A1
公开(公告)日：2010-08-12
申请号：US12451209
申请日：2008-06-04
申请人： Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
发明人： Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
IPC分类号： G01L9/12 , H01R43/00
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
摘要： A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane 2 comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode 6, which faces the surface of the platform 2, the surface of the platform 1 has at least a second electrode 5, which faces that of the measuring membrane 2, wherein the capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
摘要翻译：压力传感器包括平台1和弹性测量膜2，其与平台1的表面接合以形成密封在边缘处的测量室3，其中平台1和/或测量膜2包括陶瓷，玻璃或单晶材料，测量膜至少具有面向平台2的表面的第一电极6，平台1的表面至少具有与测量膜2的表面相对的第二电极5，其中所述第一电极和所述第二电极之间的电容是待测压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

6. 发明授权

US06374680B1 Capacitive pressure sensor or capacitive differential pressure sensor 失效
标题翻译：电容式压力传感器或电容差压传感器
公开(公告)号：US06374680B1
公开(公告)日：2002-04-23
申请号：US09511723
申请日：2000-02-21
申请人： Ulfert Drewes , Andreas Rossberg , Elke Schmidt , Frank Hegner , Thomas Velten
发明人： Ulfert Drewes , Andreas Rossberg , Elke Schmidt , Frank Hegner , Thomas Velten
IPC分类号： G01L912
CPC分类号： G01L9/0075
摘要： The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.
摘要翻译：这些压力传感器或差压传感器的电极使用丝网印刷或溅射以外的技术来形成：压力传感器（10）具有基板（1）和第一主表面（11），第二主表面（12））和圆周表面（13）。导电材料的板状电极（14）以高耐压和高真空密封的方式固定在主表面（11）的凹部（15）中，由连接材料（16），从电极（14）穿过基板（1）到主表面（12）或圆周表面（13）提供贯通连接件（17），陶瓷的隔膜（2）玻璃或单晶材料通过接合材料（26）沿着接头（18）附接到凹部（15）外部的基板（1）上，并且在其上面形成另外的电极或被覆盖在面向电极（14），具有通过接头（18）接触的另一个电极（24）。基板和隔膜 t的陶瓷，玻璃或单晶材料。各差压传感器具有共同的中心隔膜和两个基板或公共基板和两个隔膜。

7. 发明授权

US06925884B2 Capacitive differential pressure sensor 失效
标题翻译：电容差压传感器
公开(公告)号：US06925884B2
公开(公告)日：2005-08-09
申请号：US10472766
申请日：2002-04-04
申请人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
发明人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
IPC分类号： G01L13/06 , G01L9/00 , G01L13/02 , G01L15/00
CPC分类号： G01L9/0073 , G01L9/0075 , G01L13/025
摘要： In a differential pressure sensor, the measurement value is corrected with the help of the nominal pressure NP. In this way, influences on the measurement value because of deformations of the body of the differential pressure sensor and change in the material stiffness of the membrane are decreased.
摘要翻译：在差压传感器中，借助标称压力NP来校正测量值。以这种方式，由于差压传感器的主体的变形和膜的材料刚度的变化，对测量值的影响减小。

8. 发明授权

US06848318B2 Pressure sensor having metallic diaphragm seal joint 失效
标题翻译：压力传感器具有金属隔膜密封接头
公开(公告)号：US06848318B2
公开(公告)日：2005-02-01
申请号：US10762287
申请日：2004-01-23
申请人： Peter Gerst , Karlheinz Banholzer , Karl Flögel , Thomas Uehlin , Frank Hegner , Elke Schmidt , Ulfert Drewes , Rainer Martin
发明人： Peter Gerst , Karlheinz Banholzer , Karl Flögel , Thomas Uehlin , Frank Hegner , Elke Schmidt , Ulfert Drewes , Rainer Martin
IPC分类号： G01L9/12 , G01L9/00 , G01L19/14 , G01L7/08
CPC分类号： G01L9/0075
摘要： A pressure sensor that is particularly suitable inter alia for the food industry and the measuring accuracy of which is stable over a long time, having a diaphragm seal (3, 45) with a separating diaphragm (7, 53) on which a pressure (P) to be measured acts and having a ceramic measuring cell (9, 57) which is connected to the diaphragm seal (3, 45) exclusively by inorganic materials, is provided, in which sensor the separating diaphragm (7, 53) and all further sensor components coming into contact during measurement with a medium of which the pressure (P) is to be measured are metallic.
摘要翻译：一种压力传感器，特别适用于食品工业，其测量精度长期稳定，具有隔膜密封件（3,45），隔膜密封件（3,45）具有压力（P ）作用并且具有仅由无机材料连接到隔膜密封件（3,45）的陶瓷测量单元（9,57），其中分离膜（7,53）和所有其它传感器在测量压力（P）的介质测量时，传感器组件是金属的。

9. 发明授权

US08104353B2 Capacitive pressure sensor 有权
标题翻译：电容式压力传感器
公开(公告)号：US08104353B2
公开(公告)日：2012-01-31
申请号：US12451209
申请日：2008-06-04
申请人： Ulfert Drewes , Frank Hegner , Andreas Rossberg , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
发明人： Ulfert Drewes , Frank Hegner , Andreas Rossberg , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
IPC分类号： G01L9/12 , H01R43/00
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
摘要： A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
摘要翻译：压力传感器包括平台和弹性测量膜，其与平台的表面结合以形成密封在边缘处的测量室，其中平台和/或测量膜包括陶瓷，玻璃或单晶材料测量膜至少具有面向平台表面的第一电极，平台的表面具有至少第二电极，其面向测量膜的表面。第一电极和第二电极之间的电容是测量压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

10. 发明授权

US06941814B2 Hydrophobically coated pressure sensor 有权
标题翻译：疏水涂层压力传感器
公开(公告)号：US06941814B2
公开(公告)日：2005-09-13
申请号：US10498515
申请日：2002-12-18
申请人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
发明人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
IPC分类号： G01L19/06 , G01L7/00 , G01L9/00 , G01L9/12
CPC分类号： G01L9/0075
摘要： A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.
摘要翻译：用于测量压力的压力传感器包括压力室; 以及变形体，其可以在压力下暴露于介质，并且另外至少部分地限定压力室并且与介质如此压力地密封; 其中传感器室的壁具有通过气相和/或气相沉积施加的疏水涂层。疏水涂层优选包括硅烷。特别优选的是具有一个或多个疏水基团R和一个或多个锚定基团X的硅烷。特别优选的是：R-Si-X 3，R 1 R 1， 2 -Si-X 2，R 1 R 2 R 3 -Si-X。疏水性基团R优选为烷基，全氟烷基，苯基或全氟苯基。锚定基团X优选为-OH（硅烷醇），-X（卤化物，例如-Cl），-OR（酯，例如-OCH 3），-NH 2（胺）或-SH（巯基甲硅烷）。另外，脂族或环状硅氮烷-Si-NH-Si-，例如六甲基二硅氮烷。同样合适的是类型R a-Me-X z z的化合物，其中Me = Zr，Ti。

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