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1. 发明授权

US07161247B2 Polishing composition for noble metals 有权
标题翻译：贵金属抛光组合物
公开(公告)号：US07161247B2
公开(公告)日：2007-01-09
申请号：US10901420
申请日：2004-07-28
申请人： Francesco De Rege Thesauro , Vlasta Brusic , Christopher C. Thompson , Benjamin P. Bayer
发明人： Francesco De Rege Thesauro , Vlasta Brusic , Christopher C. Thompson , Benjamin P. Bayer
IPC分类号： H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： C09G1/02 , C23F3/00 , H01L21/3212 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a polishing composition and a method of chemically-mechanically polishing a substrate comprising a noble metal, the polishing composition comprising (a) an oxidizing agent that oxidizes a noble metal, (b) an anion selected from the group consisting of sulfate, borate, nitrate, and phosphate, and (c) a liquid carrier. The invention further provides a polishing composition and a method of chemically-mechanically polishing a substrate comprising ruthenium, the polishing composition comprising (a) an oxidizing agent that oxidizes ruthenium above the +4 oxidation state, (b) a polishing additive selected from the group consisting of metal sequestering polymers, metal chelators, organic thiols, compounds that reduce ruthenium tetraoxide, lactones, and α-hydroxycarbonyl compounds.
摘要翻译：本发明提供一种抛光组合物和一种化学机械抛光包含贵金属的基材的方法，所述抛光组合物包含（a）氧化贵金属的氧化剂，（b）选自硫酸盐，硼酸盐，硝酸盐和磷酸盐，和（c）液体载体。本发明还提供一种抛光组合物和一种化学机械抛光包含钌的基材的方法，该抛光组合物包含（a）氧化高于+4氧化态的钌的氧化剂，（b）选自下组的抛光添加剂：由金属螯合聚合物，金属螯合剂，有机硫醇，还原四氧化钌的化合物，内酯和α-羟基羰基化合物组成。

2. 发明授权

US07160807B2 CMP of noble metals 有权
标题翻译：贵金属的CMP
公开(公告)号：US07160807B2
公开(公告)日：2007-01-09
申请号：US10610407
申请日：2003-06-30
申请人： Francesco De Rege Thesauro , Vlasta Brusic , Benjamin P. Bayer
发明人： Francesco De Rege Thesauro , Vlasta Brusic , Benjamin P. Bayer
IPC分类号： H01L21/461 , H01L21/302
CPC分类号： C09G1/02 , C23F3/00 , H01L21/3212
摘要： The invention provides a method of polishing a substrate comprising (i) contacting a substrate comprising a noble metal layer with a chemical-mechanical polishing system comprising (a) a polishing component, (b) an oxidizing agent, and (c) a liquid carrier, and (ii) abrading at least a portion of the noble metal layer to polish the substrate. The polishing component is selected from the group consisting of an abrasive, a polishing pad, or a combination thereof, and the oxidizing agent is selected from the group consisting of bromates, bromites, hypobromites, chlorates, chlorites, hypochlorites, perchlorates, iodates, hypoiodites, periodates, peroxyacetic acid, organo-halo-oxy compounds, salts thereof, and combinations thereof. The chemical-mechanical polishing system has a pH of about 9 or less, and the oxidizing agent does not produce a substantial amount of elemental halogen. The invention also provides a method of polishing a substrate comprising a noble metal layer and a second layer using the aforementioned polishing system that further comprises a stopping compound.
摘要翻译：本发明提供了一种抛光衬底的方法，其包括（i）使包含贵金属层的衬底与化学机械抛光系统接触，所述化学机械抛光系统包括（a）抛光组分，（b）氧化剂和（c）液体载体，和（ii）研磨贵金属层的至少一部分以抛光基底。抛光组分选自研磨剂，抛光垫或其组合，氧化剂选自溴酸盐，溴酸盐，次溴酸盐，氯酸盐，亚氯酸盐，次氯酸盐，高氯酸盐，碘酸盐，次碘酸盐，高碘酸酯，过氧乙酸，有机卤代氧化合物，其盐，及其组合。化学机械抛光系统的pH值约为9或更低，氧化剂不产生大量的元素卤素。本发明还提供了一种使用上述抛光系统抛光包含贵金属层和第二层的衬底的方法，所述抛光系统还包括停止化合物。

3. 发明授权

US07288021B2 Chemical-mechanical polishing of metals in an oxidized form 有权
标题翻译：化学机械抛光氧化形式的金属
公开(公告)号：US07288021B2
公开(公告)日：2007-10-30
申请号：US10753138
申请日：2004-01-07
申请人： Francesco De Rege Thesauro , Vlasta Brusic , Benjamin P. Bayer
发明人： Francesco De Rege Thesauro , Vlasta Brusic , Benjamin P. Bayer
IPC分类号： B24B1/00 , B24B7/19 , B24B7/30 , B24C1/00
CPC分类号： H01L21/3212
摘要： The invention provides a method for polishing a substrate comprising a metal in an oxidized form, the method comprising the steps of: (a) providing a substrate comprising a metal in an oxidized form, (b) contacting a portion of the substrate with a chemical-mechanical polishing system comprising: (i) a polishing component, (ii) a reducing agent, and (iii) a liquid carrier, and (c) abrading at least a portion of the metal in an oxidized form to polish the substrate. The reducing agent can be selected from the group consisting of 3-hydroxy-4-pyrones, α-hydroxy-γ-butyrolactones, ascorbic acid, borane, borohydrides, dialkylamine boranes, formaldehyde, formic acid, hydrogen, hydroquinones, hydroxylamine, hypophosphorous acid, phosphorous acid, a metal or metal ions in an oxidation state having a standard redox potential that is less than the standard redox potential of the metal in an oxidized form, trihydroxybenzenes, solvated electrons, sulfurous acid, salts thereof, and mixtures thereof.
摘要翻译：本发明提供了一种用于抛光包含氧化形式的金属的衬底的方法，所述方法包括以下步骤：（a）提供包含氧化形式的金属的衬底，（b）将衬底的一部分与化学 - 机械抛光系统，包括：（i）抛光组分，（ii）还原剂和（iii）液体载体，和（c）研磨至少一部分氧化形式的金属以抛光所述基材。还原剂可以选自3-羟基-4-吡咯烷酮，α-羟基-γ-丁内酯，抗坏血酸，硼烷，硼氢化物，二烷基胺硼烷，甲醛，甲酸，氢，氢醌，羟胺，次磷酸亚磷酸，氧化态的金属或金属离子具有小于氧化形式的金属的标准氧化还原电位，三羟基苯，溶剂化电子，亚硫酸，其盐及其混合物的标准氧化还原电位。

4. 发明申请

US20060024967A1 Polishing composition for noble metals 有权
标题翻译：贵金属抛光组合物
公开(公告)号：US20060024967A1
公开(公告)日：2006-02-02
申请号：US10901420
申请日：2004-07-28
申请人： Francesco De Rege Thesauro , Vlasta Brusic , Christopher Thompson , Benjamin Bayer
发明人： Francesco De Rege Thesauro , Vlasta Brusic , Christopher Thompson , Benjamin Bayer
IPC分类号： H01L21/461
CPC分类号： C09G1/02 , C23F3/00 , H01L21/3212 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a polishing composition and a method of chemically-mechanically polishing a substrate comprising a noble metal, the polishing composition comprising (a) an oxidizing agent that oxidizes a noble metal, (b) an anion selected from the group consisting of sulfate, borate, nitrate, and phosphate, and (c) a liquid carrier. The invention further provides a polishing composition and a method of chemically-mechanically polishing a substrate comprising ruthenium, the polishing composition comprising (a) an oxidizing agent that oxidizes ruthenium above the +4 oxidation state, (b) a polishing additive selected from the group consisting of metal sequestering polymers, metal chelators, organic thiols, compounds that reduce ruthenium tetraoxide, lactones, and α-hydroxycarbonyl compounds.
摘要翻译：本发明提供一种抛光组合物和一种化学机械抛光包含贵金属的基材的方法，所述抛光组合物包含（a）氧化贵金属的氧化剂，（b）选自硫酸盐，硼酸盐，硝酸盐和磷酸盐，和（c）液体载体。本发明还提供一种抛光组合物和一种化学机械抛光包含钌的基材的方法，该抛光组合物包含（a）氧化高于+4氧化态的钌的氧化剂，（b）选自下组的抛光添加剂：由金属螯合聚合物，金属螯合剂，有机硫醇，还原四氧化钌的化合物，内酯和α-羟基羰基化合物组成。

5. 发明申请

US20050148290A1 Chemical-mechanical polishing of metals in an oxidized form 有权
标题翻译：化学机械抛光氧化形式的金属
公开(公告)号：US20050148290A1
公开(公告)日：2005-07-07
申请号：US10753138
申请日：2004-01-07
申请人： Francesco De Rege Thesauro , Vlasta Brusic , Benjamin Bayer
发明人： Francesco De Rege Thesauro , Vlasta Brusic , Benjamin Bayer
IPC分类号： C09G1/02 , H01L21/321 , H01L21/768 , B24B1/00
CPC分类号： H01L21/3212
摘要： The invention provides a method for polishing a substrate comprising a metal in an oxidized form, the method comprising the steps of: (a) providing a substrate comprising a metal in an oxidized form, (b) contacting a portion of the substrate with a chemical-mechanical polishing system comprising: (i) a polishing component, (ii) a reducing agent, and (iii) a liquid carrier, and (c) abrading at least a portion of the metal in an oxidized form to polish the substrate. The reducing agent can be selected from the group consisting of 3-hydroxy-4-pyrones, α-hydroxy-γ-butyrolactones, ascorbic acid, borane, borohydrides, dialkylamine boranes, formaldehyde, formic acid, hydrogen, hydroquinones, hydroxylamine, hypophosphorous acid, phosphorous acid, a metal or metal ions in an oxidation state having a standard redox potential that is less than the standard redox potential of the metal in an oxidized form, trihydroxybenzenes, solvated electrons, sulfurous acid, salts thereof, and mixtures thereof.
摘要翻译：本发明提供了一种用于抛光包含氧化形式的金属的衬底的方法，所述方法包括以下步骤：（a）提供包含氧化形式的金属的衬底，（b）将衬底的一部分与化学 - 机械抛光系统，包括：（i）抛光组分，（ii）还原剂和（iii）液体载体，和（c）研磨至少一部分氧化形式的金属以抛光所述基材。还原剂可以选自3-羟基-4-吡咯烷酮，α-羟基-γ-丁内酯，抗坏血酸，硼烷，硼氢化物，二烷基胺硼烷，甲醛，甲酸，氢，氢醌，羟胺，次磷酸亚磷酸，氧化态的金属或金属离子具有小于氧化形式的金属的标准氧化还原电位，三羟基苯，溶剂化电子，亚硫酸，其盐及其混合物的标准氧化还原电位。

6. 发明申请

US20070181535A1 COMPOSITIONS AND METHODS FOR CMP OF SEMICONDUCTOR MATERIALS 有权
标题翻译：用于半导体材料的CMP的组合物和方法
公开(公告)号：US20070181535A1
公开(公告)日：2007-08-09
申请号：US11673399
申请日：2007-02-09
申请人： Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
发明人： Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
IPC分类号： H01L21/461 , C09K13/00 , C03C15/00 , B44C1/22 , H01L21/302
CPC分类号： C09G1/02 , H01L21/3212
摘要： The invention provides a composition for chemical-mechanical polishing, The composition comprises an abrasive, a first metal rate polishing modifier agent, a second metal rate polishing modifier agent, and a liquid carrier. In one embodiment, the first metal rate polishing modifier agent has a standard reduction potential less than 0.34 V relative to a standard hydrogen electrode, and the second metal rate polishing modifier agent has a standard reduction potential greater than 0.34 V relative to a standard hydrogen electrode. In other embodiments, the first and second metal rate polishing modifier agents are different oxidizing agents.
摘要翻译：本发明提供了一种用于化学机械抛光的组合物。该组合物包括研磨剂，第一金属速率抛光改性剂，第二金属速率抛光改性剂和液体载体。在一个实施方案中，第一金属速率抛光改性剂相对于标准氢电极具有小于0.34V的标准还原电位，并且第二金属速率抛光改性剂相对于标准氢电极具有大于0.34V的标准还原电位。在其它实施方案中，第一和第二金属速率抛光改性剂是不同的氧化剂。

7. 发明授权

US08529680B2 Compositions for CMP of semiconductor materials 有权
标题翻译：半导体材料CMP的组成
公开(公告)号：US08529680B2
公开(公告)日：2013-09-10
申请号：US12854470
申请日：2010-08-11
申请人： Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
发明人： Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
IPC分类号： C09G1/02 , B24D3/02 , C09C1/68 , C09K3/14
CPC分类号： C09G1/02 , H01L21/3212
摘要： The invention provides a composition for chemical-mechanical polishing. The composition comprises an abrasive, a first metal rate polishing modifier agent, a second metal rate polishing modifier agent, and a liquid carrier. In one embodiment, the first metal rate polishing modifier agent has a standard reduction potential less than 0.34 V relative to a standard hydrogen electrode, and the second metal rate polishing modifier agent has a standard reduction potential greater than 0.34 V relative to a standard hydrogen electrode. In other embodiments, the first and second metal rate polishing modifier agents are different oxidizing agents.
摘要翻译：本发明提供了用于化学机械抛光的组合物。组合物包含研磨剂，第一金属速率抛光改性剂，第二金属速率抛光改性剂和液体载体。在一个实施方案中，第一金属速率抛光改性剂相对于标准氢电极具有小于0.34V的标准还原电位，并且第二金属速率抛光改性剂相对于标准氢电极具有大于0.34V的标准还原电位。在其它实施方案中，第一和第二金属速率抛光改性剂是不同的氧化剂。

8. 发明授权

US07803203B2 Compositions and methods for CMP of semiconductor materials 有权
标题翻译：半导体材料CMP的组成和方法
公开(公告)号：US07803203B2
公开(公告)日：2010-09-28
申请号：US11673399
申请日：2007-02-09
申请人： Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
发明人： Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
IPC分类号： C09K3/14 , B24B1/00 , B24B7/10
CPC分类号： C09G1/02 , H01L21/3212
摘要： The invention provides a composition for chemical-mechanical polishing. The composition comprises an abrasive, a first metal rate polishing modifier agent, a second metal rate polishing modifier agent, and a liquid carrier. In one embodiment, the first metal rate polishing modifier agent has a standard reduction potential less than 0.34 V relative to a standard hydrogen electrode, and the second metal rate polishing modifier agent has a standard reduction potential greater than 0.34 V relative to a standard hydrogen electrode. In other embodiments, the first and second metal rate polishing modifier agents are different oxidizing agents.
摘要翻译：本发明提供了用于化学机械抛光的组合物。组合物包含研磨剂，第一金属速率抛光改性剂，第二金属速率抛光改性剂和液体载体。在一个实施方案中，第一金属速率抛光改性剂相对于标准氢电极具有小于0.34V的标准还原电位，并且第二金属速率抛光改性剂相对于标准氢电极具有大于0.34V的标准还原电位。在其它实施方案中，第一和第二金属速率抛光改性剂是不同的氧化剂。

9. 发明申请

US20100029181A1 Methods and compositions for polishing silicon-containing substrates 有权
标题翻译：抛光含硅基材的方法和组合物
公开(公告)号：US20100029181A1
公开(公告)日：2010-02-04
申请号：US12221023
申请日：2008-07-30
申请人： Francesco De Rege Thesauro , Zhan Chen
发明人： Francesco De Rege Thesauro , Zhan Chen
IPC分类号： B24B29/00 , C09G1/02 , C09K3/14 , B24B1/00
CPC分类号： C09K3/1463 , B24B37/044 , C09G1/02 , H01L21/31053 , H01L21/3212
摘要： The invention provides chemical-mechanical polishing (CMP) compositions and methods for polishing a silicon-containing substrate. A method of the invention comprises the steps of contacting a silicon-containing substrate with a polishing pad and an aqueous CMP composition, and causing relative motion between the polishing pad and the substrate while maintaining a portion of the CMP composition in contact with the surface of the substrate to abrade at least a portion of the substrate. The CMP composition comprises a ceria abrasive, a polishing additive bearing a functional group with a pKa of about 4 to about 9, a nonionic surfactant with an hydrophilic portion and a lipophilic portion wherein the hydrophilic portion has a number average molecular weight of about 500 g/mol or higher, and an aqueous carrier, wherein the pH of the composition is 7 or less. The method reduces defects on the wafers, particularly local areas of high removal. The method is also useful for polishing dielectric silicon-containing substrates at a high rate relative to semiconductor silicon-containing substrates.
摘要翻译：本发明提供用于抛光含硅基材的化学机械抛光（CMP）组合物和方法。本发明的方法包括以下步骤：使含硅衬底与抛光垫和水性CMP组合物接触，并且在保持CMP组合物的一部分与表面接触的同时引起抛光垫和衬底之间的相对运动所述衬底磨损所述衬底的至少一部分。 CMP组合物包括二氧化铈研磨剂，具有pKa约4至约9的官能团的抛光添加剂，具有亲水部分和亲油部分的非离子表面活性剂，其中亲水部分的数均分子量为约500g / mol以上，和水性载体，其中组合物的pH为7以下。该方法减少了晶片上的缺陷，特别是高去除的局部区域。该方法对于相对于含半导体硅的衬底以高速率抛光介电含硅衬底也是有用的。

10. 发明授权

US08691695B2 CMP compositions and methods for suppressing polysilicon removal rates 有权
标题翻译： CMP组合物和抑制多晶硅去除速率的方法
公开(公告)号：US08691695B2
公开(公告)日：2014-04-08
申请号：US13379911
申请日：2010-06-18
申请人： Kevin Moeggenborg , William Ward , Ming-Shih Tsai , Francesco De Rege Thesauro
发明人： Kevin Moeggenborg , William Ward , Ming-Shih Tsai , Francesco De Rege Thesauro
IPC分类号： H01L21/302 , B44C1/22 , H01L21/3105 , H01L21/321 , C09K3/14 , C09G1/02
CPC分类号： H01L21/31053 , C09G1/02 , C09K3/1463 , H01L21/3212
摘要： The present invention provides a chemical-mechanical polishing (CMP) composition suitable for polishing a silicon nitride-containing substrate while suppressing polysilicon removal from the substrate. The composition comprises abrasive particles suspended in an acidic aqueous carrier containing a surfactant comprising an alkyne-diol, an alkyne diol ethoxylate, or a combination thereof. Methods of polishing a semiconductor substrate therewith are also disclosed.
摘要翻译：本发明提供了一种适于抛光含氮化硅的衬底同时抑制从衬底去除多晶硅的化学机械抛光（CMP）组合物。该组合物包含悬浮在酸性含水载体中的磨料颗粒，该载体含有包含炔二醇，炔二醇乙氧基化物或其组合的表面活性剂。还公开了对其半导体衬底进行抛光的方法。

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