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    • 1. 发明申请
    • TWO DEGREE OF FREEDOM DITHERING PLATFORM FOR MEMS SENSOR CALIBRATION
    • 用于MEMS传感器校准的自由度平台的两个程度
    • US20120272731A1
    • 2012-11-01
    • US13345132
    • 2012-01-06
    • Ryan SupinoEugen CabuzBurgess R. JohnsonRobert D. Horning
    • Ryan SupinoEugen CabuzBurgess R. JohnsonRobert D. Horning
    • G01C19/56H05K13/00G01P15/13
    • B81C1/00134B81B2201/03B81C2203/03G01D5/34G01P21/00Y10T29/49002
    • Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.
    • 提供了用于微机电系统(MEMS)传感器校准的两自由度抖动的系统和方法。 在一个实施例中,用于器件的方法包括形成MEMS传感器层,所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外,该方法包括形成第一转子层和第二转子层,并将第一转子层结合到顶表面,将第二转子层结合到MEMS传感器层的底表面,使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外,该方法包括从第一和第二转子层分离第一和第二转子部分,其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。
    • 2. 发明授权
    • Two degree of freedom dithering platform for MEMS sensor calibration
    • 用于MEMS传感器校准的两自由度抖动平台
    • US08887550B2
    • 2014-11-18
    • US13345132
    • 2012-01-06
    • Ryan SupinoEugen CabuzBurgess R. JohnsonRobert D. Horning
    • Ryan SupinoEugen CabuzBurgess R. JohnsonRobert D. Horning
    • G01P21/00G01D5/34
    • B81C1/00134B81B2201/03B81C2203/03G01D5/34G01P21/00Y10T29/49002
    • Systems and methods for two degree of freedom dithering for micro-electro-mechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.
    • 提供了用于微机电系统(MEMS)传感器校准的两自由度抖动的系统和方法。 在一个实施例中,用于器件的方法包括形成MEMS传感器层,所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。 此外,该方法包括形成第一转子层和第二转子层,并将第一转子层结合到顶表面,将第二转子层结合到MEMS传感器层的底表面,使得第一和第二转子部分的第一和第二转子部分 转子层连接到MEMS传感器。 此外,该方法包括从第一和第二转子层分离第一和第二转子部分,其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。