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1. 发明申请

US20120272731A1 TWO DEGREE OF FREEDOM DITHERING PLATFORM FOR MEMS SENSOR CALIBRATION 有权
标题翻译：用于MEMS传感器校准的自由度平台的两个程度
公开(公告)号：US20120272731A1
公开(公告)日：2012-11-01
申请号：US13345132
申请日：2012-01-06
申请人： Ryan Supino , Eugen Cabuz , Burgess R. Johnson , Robert D. Horning
发明人： Ryan Supino , Eugen Cabuz , Burgess R. Johnson , Robert D. Horning
IPC分类号： G01C19/56 , H05K13/00 , G01P15/13
CPC分类号： B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
摘要： Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.
摘要翻译：提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分转子层连接到MEMS传感器。此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。

2. 发明授权

US08887550B2 Two degree of freedom dithering platform for MEMS sensor calibration 有权
标题翻译：用于MEMS传感器校准的两自由度抖动平台
公开(公告)号：US08887550B2
公开(公告)日：2014-11-18
申请号：US13345132
申请日：2012-01-06
申请人： Ryan Supino , Eugen Cabuz , Burgess R. Johnson , Robert D. Horning
发明人： Ryan Supino , Eugen Cabuz , Burgess R. Johnson , Robert D. Horning
IPC分类号： G01P21/00 , G01D5/34
CPC分类号： B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
摘要： Systems and methods for two degree of freedom dithering for micro-electro-mechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.
摘要翻译：提供了用于微机电系统（MEMS）传感器校准的两自由度抖动的系统和方法。在一个实施例中，用于器件的方法包括形成MEMS传感器层，所述MEMS传感器层包括MEMS传感器和面内旋转器以在MEMS传感器层的平面内旋转MEMS传感器。此外，该方法包括形成第一转子层和第二转子层，并将第一转子层结合到顶表面，将第二转子层结合到MEMS传感器层的底表面，使得第一和第二转子部分的第一和第二转子部分转子层连接到MEMS传感器。此外，该方法包括从第一和第二转子层分离第一和第二转子部分，其中第一和第二转子部分和MEMS传感器围绕MEMS传感器层的面内轴线旋转。

3. 发明授权

US08847143B2 Systems and methods for an encoder and control scheme 有权
标题翻译：编码器和控制方案的系统和方法
公开(公告)号：US08847143B2
公开(公告)日：2014-09-30
申请号：US13307432
申请日：2011-11-30
申请人： Eugen Cabuz , Robert D. Horning , Ryan Supino , Burgess R. Johnson
发明人： Eugen Cabuz , Robert D. Horning , Ryan Supino , Burgess R. Johnson
IPC分类号： G01D5/34
CPC分类号： B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
摘要： Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.
摘要翻译：提供了编码器和控制方案的系统和方法。在一个实施例中，微机电系统（MEMS）装置包括：定子，其具有布置在定子的表面上的第一标记和第二标记，以形成感测图案; 扫掠元件，其沿着与穿过所述第一标记和第二标记的扫掠路径平行于所述定子的表面的平面中抖动; 重叠检测电路，其可操作以测量扫描元件和感测图案之间的区域重叠，其中重叠检测电路产生根据区域重叠而变化的脉冲串信号输出。

4. 发明申请

US20120272730A1 SYSTEMS AND METHODS FOR AN ENCODER AND CONTROL SCHEME 有权
标题翻译：编码器和控制方案的系统和方法
公开(公告)号：US20120272730A1
公开(公告)日：2012-11-01
申请号：US13307432
申请日：2011-11-30
申请人： Eugen Cabuz , Robert D. Horning , Ryan Supino , Burgess R. Johnson
发明人： Eugen Cabuz , Robert D. Horning , Ryan Supino , Burgess R. Johnson
IPC分类号： G01M1/14 , G01D5/36
CPC分类号： B81C1/00134 , B81B2201/03 , B81C2203/03 , G01D5/34 , G01P21/00 , Y10T29/49002
摘要： Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.
摘要翻译：提供了编码器和控制方案的系统和方法。在一个实施例中，微机电系统（MEMS）装置包括：定子，其具有布置在定子的表面上的第一标记和第二标记，以形成感测图案; 扫掠元件，其沿着与穿过所述第一标记和第二标记的扫掠路径平行于所述定子的表面的平面中抖动; 重叠检测电路，其可操作以测量扫描元件和感测图案之间的区域重叠，其中重叠检测电路产生根据区域重叠而变化的脉冲串信号输出。

5. 发明申请

US20110290021A1 HEMITOROIDAL RESONATOR GYROSCOPE 有权
标题翻译： HEMITOROIDAL谐振器GYROSCOPE
公开(公告)号：US20110290021A1
公开(公告)日：2011-12-01
申请号：US13112551
申请日：2011-05-20
申请人： Robert D. Horning , Burgess R. Johnson , Robert Compton , Eugen Cabuz
发明人： Robert D. Horning , Burgess R. Johnson , Robert Compton , Eugen Cabuz
IPC分类号： G01C19/56 , H05K13/00
CPC分类号： G01C25/00 , G01C19/5691 , H03H9/2405 , Y10T29/49002 , Y10T29/49117
摘要： One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.
摘要翻译：一个示例性实施例涉及具有具有顶表面的基板的振动结构陀螺仪。振动结构陀螺仪还可以包括具有椭圆形形状的谐振器，谐振器包括杆和围绕杆的外唇缘，杆附接到基底的顶表面和与顶表面分开的外唇以允许谐振器振动。

6. 发明授权

US08631702B2 Hemitoroidal resonator gyroscope 有权
标题翻译：血管型谐振陀螺仪
公开(公告)号：US08631702B2
公开(公告)日：2014-01-21
申请号：US13112551
申请日：2011-05-20
申请人： Robert D. Horning , Burgess R. Johnson , Robert Compton , Eugen Cabuz
发明人： Robert D. Horning , Burgess R. Johnson , Robert Compton , Eugen Cabuz
IPC分类号： G01C19/56
CPC分类号： G01C25/00 , G01C19/5691 , H03H9/2405 , Y10T29/49002 , Y10T29/49117
摘要： One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.
摘要翻译：一个示例性实施例涉及具有具有顶表面的基板的振动结构陀螺仪。振动结构陀螺仪还可以包括具有椭圆形形状的谐振器，谐振器包括杆和围绕杆的外唇缘，杆附接到基底的顶表面和与顶表面分开的外唇以允许谐振器振动。

7. 发明申请

US20120130671A1 VIBRATION ISOLATION INTERPOSER DIE 有权
标题翻译：振动隔离阀
公开(公告)号：US20120130671A1
公开(公告)日：2012-05-24
申请号：US13299485
申请日：2011-11-18
申请人： Robert D. Horning , Ryan Supino
发明人： Robert D. Horning , Ryan Supino
IPC分类号： G01P15/02 , F16F7/00 , G06F15/00
CPC分类号： B81B7/0016 , B81B2201/025 , B81B2207/07
摘要： In an example, an interposer chip is provided. The interposer chip includes a base portion and a chip mounting portion. The interposer chip also includes one or more flexures connecting the base portion to the chip mounting portion. Additionally, a first plurality of projections extends from the base portion towards the chip mounting portion, and a second plurality of projections extends from the chip mounting portion towards the base portion and extending into interstices formed by first plurality of projections.
摘要翻译：在一个示例中，提供了插入器芯片。插入片包括基部和芯片安装部。插入器芯片还包括将基部连接到芯片安装部分的一个或多个挠曲件。此外，第一多个突起从基部朝向芯片安装部分延伸，并且第二多个突起从芯片安装部分朝向基部延伸并延伸到由第一多个突起形成的间隙中。

8. 发明授权

US07943874B2 Ground contact switch for personal navigation system 有权
标题翻译：个人导航系统接地开关
公开(公告)号：US07943874B2
公开(公告)日：2011-05-17
申请号：US12019363
申请日：2008-01-24
申请人： Robert D. Horning , Ryan Supino , Alan B. Touchberry
发明人： Robert D. Horning , Ryan Supino , Alan B. Touchberry
IPC分类号： H01H3/14 , H01H3/02 , H01H35/00
CPC分类号： G01C22/006 , G01C21/16 , Y10S2/905
摘要： A ground contact switch system comprises a first object configured to contact a ground surface during a stride, and one or more switches coupled to the first object. An inertial measurement unit can be coupled to the first object. The one or more switches are configured to detect when the first object is at a stationary portion of the stride. The one or more switches can also be configured to send a signal to activate an error correction scheme for the inertial measurement unit.
摘要翻译：地面接触开关系统包括构造成在步幅期间接触地面的第一物体和耦合到第一物体的一个或多个开关。惯性测量单元可耦合到第一物体。一个或多个开关被配置为检测第一对象何时处于步幅的静止部分。一个或多个开关也可以被配置为发送信号以激活惯性测量单元的纠错方案。

9. 发明申请

US20090071805A1 GROUND CONTACT SWITCH FOR PERSONAL NAVIGATION SYSTEM 有权
标题翻译：用于个人导航系统的接地开关
公开(公告)号：US20090071805A1
公开(公告)日：2009-03-19
申请号：US12019363
申请日：2008-01-24
申请人： Robert D. Horning , Ryan Supino , Alan B. Touchberry
发明人： Robert D. Horning , Ryan Supino , Alan B. Touchberry
IPC分类号： H01H35/14
CPC分类号： G01C22/006 , G01C21/16 , Y10S2/905
摘要： A ground contact switch system comprises a first object configured to contact a ground surface during a stride, and one or more switches coupled to the first object. An inertial measurement unit can be coupled to the first object. The one or more switches are configured to detect when the first object is at a stationary portion of the stride. The one or more switches can also be configured to send a signal to activate an error correction scheme for the inertial measurement unit.
摘要翻译：地面接触开关系统包括构造成在步幅期间接触地面的第一物体和耦合到第一物体的一个或多个开关。惯性测量单元可耦合到第一物体。一个或多个开关被配置为检测第一对象何时处于步幅的静止部分。一个或多个开关也可以被配置为发送信号以激活惯性测量单元的纠错方案。

10. 发明申请

US20120126881A1 MEMS SENSOR USING MULTI-LAYER MOVABLE COMBS 有权
标题翻译： MEMS传感器使用多层可移动COMBS
公开(公告)号：US20120126881A1
公开(公告)日：2012-05-24
申请号：US13301145
申请日：2011-11-21
申请人： Robert D. Horning , Ryan Supino
发明人： Robert D. Horning , Ryan Supino
IPC分类号： G05F3/02 , H01L29/84
CPC分类号： B81B3/0086 , B81B2201/025 , B81B2203/0136
摘要： A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs, wherein the proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one fixed anchor having a second plurality of combs. The first plurality of combs is interleaved with the second plurality of combs. Each of the combs in the first plurality of combs and the second plurality of combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that fringing electric fields are screened to reduce motion of the first plurality of combs along a sense axis due to the fringing electric fields.
摘要翻译： MEMS传感器包括基板和至少一个具有第一多个梳子的检测质量块，其中所述检测质量块经由一个或多个悬架梁耦合到所述基板，使得所述检验质量块和所述第一多个梳子是可移动的。 MEMS传感器还包括具有第二多个梳子的至少一个固定锚固件。第一组多个梳子与第二组梳子交错。第一多个梳子中的每个梳子和第二个多个梳子包括通过一个或多个非导电层彼此电隔离的多个导电层。每个导电层单独地耦合到相应的电位，使得边缘电场被屏蔽以由于边缘电场而沿着感测轴减小第一组多个梳的运动。

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