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1. 发明授权

US08115556B2 Resonant device with improved features 有权
标题翻译：具有改进功能的共振器件
公开(公告)号：US08115556B2
公开(公告)日：2012-02-14
申请号：US12710678
申请日：2010-02-23
申请人： Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Sebastien Hentz , Eric Ollier
发明人： Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Sebastien Hentz , Eric Ollier
IPC分类号： H03L7/00
CPC分类号： H03B5/323
摘要： The device resonant comprises a plurality of synchronized oscillators. Each oscillator comprises a resonator which comprises detection means providing detection signals representative of oscillation of the resonator to a feedback loop connected to an excitation input of the resonator. The detection signals control the conductivity of the feedback loop of the oscillator. The excitation inputs of all the resonators are connected to a common point which constitutes the output of the resonant device. A capacitive load is connected between said common point and a reference voltage.
摘要翻译：器件谐振包括多个同步振荡器。每个振荡器包括谐振器，该谐振器包括检测装置，其将表示谐振器的振荡的检测信号提供给连接到谐振器的激励输入的反馈环路。检测信号控制振荡器的反馈回路的电导率。所有谐振器的激励输入连接到构成谐振装置的输出的公共点。电容性负载连接在所述公共点和参考电压之间。

2. 发明授权

US08030690B2 Device sensitive to a movement comprising at least one transistor 有权
标题翻译：对包括至少一个晶体管的运动敏感的装置
公开(公告)号：US08030690B2
公开(公告)日：2011-10-04
申请号：US12300715
申请日：2007-05-16
申请人： Eric Ollier , Laurent Duraffourg , Philippe Andreucci
发明人： Eric Ollier , Laurent Duraffourg , Philippe Andreucci
IPC分类号： H01L29/84
CPC分类号： G01P15/124 , G01P15/0802 , G01P15/097 , G01P15/131 , G01P15/18 , G01P2015/0814 , G01P2015/0817 , G01P2015/082
摘要： The invention relates to a detection device using at least one transistor (2) with a vertical channel, comprising a mechanical structure (14), free to move relative to the transistor, in a plane containing the transistor drain (10), source (8) and channel (12).
摘要翻译：本发明涉及一种使用具有垂直通道的至少一个晶体管（2）的检测装置，包括在包含晶体管漏极（10），源极（8）的平面中相对于晶体管自由移动的机械结构（14））和通道（12）。

3. 发明授权

US08018291B2 Transistor-based micrometric or nanometric resonant device 有权
标题翻译：基于晶体管的微米或纳米谐振装置
公开(公告)号：US08018291B2
公开(公告)日：2011-09-13
申请号：US12710817
申请日：2010-02-23
申请人： Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Sebastien Hentz , Eric Ollier
发明人： Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Sebastien Hentz , Eric Ollier
IPC分类号： H03B5/30
CPC分类号： H03B5/323 , H03H9/02259
摘要： The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed element to a feedback loop that is connected to an excitation input of the resonator. The resonator is formed on the same substrate as the detection means and feedback loop. The feedback loop comprises at most first and second transistors connected in series between a reference voltage and the excitation terminal. A capacitive load is connected between the excitation terminal and reference voltage. The detection signals control the conductivity of the first transistor.
摘要翻译：谐振装置包括纳米级或微米尺寸的机电谐振器，其包括移动元件和固定元件。检测装置将表示移动元件相对于固定元件的移动的检测信号提供给连接到谐振器的激励输入的反馈环路。谐振器形成在与检测装置和反馈回路相同的基板上。反馈回路包括至多第一和第二晶体管串联连接在参考电压和激励端子之间。电容性负载连接在励磁端子和参考电压之间。检测信号控制第一晶体管的电导率。

4. 发明申请

US20090321793A1 DEVICE SENSITIVE TO A MOVEMENT COMPRISING AT LEAST ONE TRANSISTOR 有权
标题翻译：对至少包含一个晶体管的运动敏感的设备
公开(公告)号：US20090321793A1
公开(公告)日：2009-12-31
申请号：US12300715
申请日：2007-05-16
申请人： Eric Ollier , Laurent Duraffourg , Philippe Andreucci
发明人： Eric Ollier , Laurent Duraffourg , Philippe Andreucci
IPC分类号： H01L29/84
CPC分类号： G01P15/124 , G01P15/0802 , G01P15/097 , G01P15/131 , G01P15/18 , G01P2015/0814 , G01P2015/0817 , G01P2015/082
摘要： The invention relates to a detection device using at least one transistor (2) with a vertical channel, comprising a mechanical structure (14), free to move relative to the transistor, in a plane containing the transistor drain (10), source (8) and channel (12).
摘要翻译：本发明涉及一种使用具有垂直通道的至少一个晶体管（2）的检测装置，包括在包含晶体管漏极（10），源极（8）的平面中相对于晶体管自由移动的机械结构（14））和通道（12）。

5. 发明申请

US20120009713A1 MAKING OF A MICROELECTRONIC DEVICE INCLUDING A MONOCRYSTALLINE SILICON NEMS COMPONENT AND A TRANSISTOR THE GATE OF WHICH IS MADE IN THE SAME LAYER AS THE MOBILE STRUCTURE OF THIS COMPONENT 有权
标题翻译：包括单晶硅元件和晶体管的微电子器件的制造作为本组件的移动结构在同一层中形成的门
公开(公告)号：US20120009713A1
公开(公告)日：2012-01-12
申请号：US13257756
申请日：2010-03-26
申请人： Eric Ollier , Audrey Berthelot
发明人： Eric Ollier , Audrey Berthelot
IPC分类号： H01L21/8234
CPC分类号： B81C1/00246 , B81C2203/0735
摘要： A method for making a microelectronic device including, on a same substrate, at least one electro-mechanical component including a mobile structure of a monocrystalline semi-conductor material and a mechanism actuating and/or detecting the mobile structure, and with at least one transistor. The method a) provides a substrate including at least one first semi-conducting layer including at least one region in which a channel area of the transistor is provided, b) etches a second semi-conducting layer based on a given semi-conductor material, lying on an insulating layer placed on the first semi-conducting layer, to form at least one pattern of the mobile structure of the component in an area of monocrystalline semi-conductor material of the second semi-conducting layer, and at least one pattern of gate of the transistor on a gate dielectric area located facing the given region.
摘要翻译：一种制造微电子器件的方法，该微电子器件包括在同一衬底上的至少一个机电元件，其包括单晶半导体材料的移动结构和致动和/或检测该移动结构的机构，以及至少一个晶体管。方法a）提供包括至少一个第一半导电层的衬底，所述至少一个第一半导体层包括至少一个其中提供了晶体管的沟道面积的区域，b）基于给定的半导体材料蚀刻第二半导体层，位于设置在第一半导体层上的绝缘层上，以在第二半导体层的单晶半导体材料的区域中形成至少一种图案的部件的移动结构，以及至少一种图案位于面向给定区域的栅极电介质区域上的晶体管的栅极。

6. 发明申请

US20100314668A1 DEVICE WITH INTEGRATED CIRCUIT AND ENCAPSULATED N/MEMS AND METHOD FOR PRODUCTION 有权
标题翻译：具有集成电路和封装的N / MEMS的器件及其制造方法
公开(公告)号：US20100314668A1
公开(公告)日：2010-12-16
申请号：US12744827
申请日：2008-12-03
申请人： Eric Ollier , Thomas Baron
发明人： Eric Ollier , Thomas Baron
IPC分类号： H01L23/02 , H01L21/50
CPC分类号： B81C1/00246 , B81C2203/0728 , H01L2924/0002 , H01L2924/00
摘要： A method for producing a device including at least one integrated circuit and at least one N/MEMS. The method produces the N/MEMS in at least one upper layer arranged at least above a first section of a substrate, produces the integrated circuit in a second section of the substrate and/or in a semiconductor layer arranged at least above the second section of the substrate, and further produces a cover encapsulating the N/MEMS from at least one layer used for production of a gate in the integrated circuit and/or for producing at least one electrical contact of the integrated circuit.
摘要翻译：一种用于制造包括至少一个集成电路和至少一个N / MEMS的器件的方法。该方法在至少布置在衬底的第一部分上方的至少一个上层中产生N / MEMS，在衬底的第二部分中和/或在至少在第二部分的第二部分上方布置的半导体层中产生集成电路并且进一步从用于在集成电路中生产栅极的至少一个层和/或用于产生集成电路的至少一个电接触件产生封装N / MEMS的覆盖层。

7. 发明授权

US5848206A Device for compensating deformations of a part of an optomechanical or micromechanical system 失效
标题翻译：用于补偿机械或微机械系统的一部分变形的装置
公开(公告)号：US5848206A
公开(公告)日：1998-12-08
申请号：US549970
申请日：1995-10-30
申请人： Pierre Labeye , Eric Ollier
发明人： Pierre Labeye , Eric Ollier
IPC分类号： G01L1/24 , G01P15/093 , G02B6/35 , G02B6/26 , G01P15/00
CPC分类号： G02B6/3508 , G01L1/24 , G01P15/093 , G01P2015/0817 , G02B6/355 , G02B6/3566 , G02B6/357 , G02B6/3584 , G02B6/3596
摘要： Device for compensating deformations of a part of an optomechanical or micromechanical system. This device compensates deformations, in a first direction (z), of a mobile part (26) of an apparatus, e.g. of a micromechanical and optomechanical nature, said mobile part being displaceable in a second direction (y), and having at least one arm (50, 52) connecting on the one hand a free end of the mobile part and a fixed part (16) of the apparatus, said arm having an adequate flexibility in the second direction (y), so as not to impede the displacement of the mobile part in said second direction (y), and an adequate rigidity in the first direction (z), so as to limit the deformations of the mobile part in said first direction.
摘要翻译：用于补偿机械或微机械系统的一部分变形的装置。该装置补偿装置的可移动部件（26）在第一方向（z）上的变形，例如，所述移动部件可以在第二方向（y）上移动，并且具有至少一个臂（50,52），一个臂连接在所述可移动部件的自由端和固定部分（16）之间，所述臂在所述第二方向（y）上具有足够的柔性，以便不妨碍所述可移动部件在所述第二方向（y）上的位移和所述第一方向（z）上的足够的刚性，因此以限制移动部件在所述第一方向上的变形。

8. 发明授权

US5734490A Microoptical components and optomechanical microdeflectors with microlens displacement 失效
标题翻译：微透镜组件和微机械微型偏转器与微透镜位移
公开(公告)号：US5734490A
公开(公告)日：1998-03-31
申请号：US636961
申请日：1996-04-24
申请人： Marc Rabarot , Engin Molva , Eric Ollier
发明人： Marc Rabarot , Engin Molva , Eric Ollier
IPC分类号： G02B26/08 , G02B7/02 , G02B27/10
CPC分类号： G02B26/0875
摘要： A microoptical component including a microlens having a focal axis and a microbeam to which said microlens, is integrally fixed said microbeam extending along an axis substantially perpendicular to the focal axis of the microlens and undergoing elastic deformations along an axis substantially perpendicular to the focal axis of the microlens and to the axis along which the microbeam extends.
摘要翻译：微光学部件包括具有焦轴和微束的微透镜，所述微透镜与所述微透镜一体地固定，所述微束沿着基本上垂直于微透镜的焦点轴线的轴延伸并且沿着基本上垂直于微透镜的焦点轴线的轴线进行弹性变形微透镜和微束延伸的轴线。

9. 发明授权

US08183078B2 Device with integrated circuit and encapsulated N/MEMS and method for production 有权
标题翻译：具有集成电路和封装的N / MEMS器件及其制造方法
公开(公告)号：US08183078B2
公开(公告)日：2012-05-22
申请号：US12744827
申请日：2008-12-03
申请人： Eric Ollier , Thomas Baron
发明人： Eric Ollier , Thomas Baron
IPC分类号： H01L21/00
CPC分类号： B81C1/00246 , B81C2203/0728 , H01L2924/0002 , H01L2924/00
摘要： A method for producing a device including at least one integrated circuit and at least one N/MEMS. The method produces the N/MEMS in at least one upper layer arranged at least above a first section of a substrate, produces the integrated circuit in a second section of the substrate and/or in a semiconductor layer arranged at least above the second section of the substrate, and further produces a cover encapsulating the N/MEMS from at least one layer used for production of a gate in the integrated circuit and/or for producing at least one electrical contact of the integrated circuit.
摘要翻译：一种用于制造包括至少一个集成电路和至少一个N / MEMS的器件的方法。该方法在至少布置在衬底的第一部分上方的至少一个上层中产生N / MEMS，在衬底的第二部分中和/或在至少在第二部分的第二部分上方布置的半导体层中产生集成电路并且进一步从用于在集成电路中生产栅极的至少一个层和/或用于产生集成电路的至少一个电接触件产生封装N / MEMS的覆盖层。

10. 发明授权

US6163639A Passive process for fitting connectors to optical elements with an integrated optical circuit and template for embodiment of the process 失效
标题翻译：用于将具有集成光学电路和模板的连接器连接到光学元件的被动过程用于该过程的实施例
公开(公告)号：US6163639A
公开(公告)日：2000-12-19
申请号：US234845
申请日：1999-01-22
申请人： Eric Ollier , Nicole Devoldere , Dominique Pavy , Sebastien Fontaine
发明人： Eric Ollier , Nicole Devoldere , Dominique Pavy , Sebastien Fontaine
IPC分类号： G02B6/122 , G02B6/30 , G02B6/42 , G02B6/26
CPC分类号： G02B6/423 , G02B6/30 , G02B6/4224 , G02B6/4232
摘要： The invention relates to a process for fitting connectors to optical elements to an integrated optical circuit (26) consisting of connecting at least one optical element to this circuit such that the outputs and/or inputs of each element are located approximately in the same plane (xoz) as the inputs and/or outputs of this integrated optical circuit (26), also located in the same plane (xoz). This process comprises the following steps:the circuit (26) is positioned on a template (35) with patterns that enable subsequent precise alignment of optical elements with inputs and/or outputs of the circuit (26);at least one block (29, 30) capable of holding the optical element(s), is positioned on the template facing the inputs and/or outputs of the circuit (26), and is fixed to the circuit (26);the template is removed, and the optical element(s) is (are) placed in each block (29, 30) the blocks then being aligned with the inputs and/or outputs of the circuit (26).
摘要翻译：本发明涉及一种将光学元件的连接器装配到集成光学电路（26）的方法，所述集成光学电路（26）包括将至少一个光学元件连接到该电路，使得每个元件的输出和/或输入大致位于同一平面（ xoz）作为该集成光电路（26）的输入和/或输出，也位于同一平面（xoz）中。该过程包括以下步骤：电路（26）定位在具有图案的模板（35）上，使得光学元件随后能够与电路（26）的输入和/或输出的精确对准。能够保持光学元件的至少一个块（29,30）位于面向电路（26）的输入和/或输出的模板上，并被固定到电路（26）; 去除模板，并且将光学元件放置在每个块（29,30）中，然后将块与电路（26）的输入和/或输出对准。

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