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1. 发明授权

US06842025B2 Apparatus and method for multiple identical continuous records of characteristics on the surface of an object after selected stages of manufacture and treatment 失效
标题翻译：在选定的制造和处理阶段之后，物体表面上的多个相同连续记录特征的装置和方法
公开(公告)号：US06842025B2
公开(公告)日：2005-01-11
申请号：US10695173
申请日：2003-10-29
申请人： Elik Gershenzon , Boris Kesil , Leonid Velikov , Yuri Vorobyev
发明人： Elik Gershenzon , Boris Kesil , Leonid Velikov , Yuri Vorobyev
IPC分类号： G01N21/00 , G01P11/00 , G01R27/04 , G01R27/26 , G01R27/32 , G01R31/02
CPC分类号： G01B7/105
摘要： An apparatus of the invention is intended for multiple identical continuous records of characteristics on the surface of an object, e.g., a semiconductor wafer, after selected stages of manufacture and treatment. The apparatus is provided with a rotary table for rotation of the wafer with a mechanism for installing the wafer in a predetermined initial position for starting measurements from the same point after each selected stage of manufacture or treatment. The measurements are synchronized for all sequential manufacturing stages of the wafer and are carried out with the use of a resonance sensor based on the principles of resonance sensor technology. The recorded information is stored on a memory device, and if the final product has a defect or deviations, the stored information can be easily retrieved for revealing the time, place on the product, and the source of the defect. The same records can also be used for correlation between the defects or deviations and the failure of the final product on quality control and even during exploitation of the chip in a semiconductor device.
摘要翻译：本发明的装置旨在在选定的制造和处理阶段之后，在物体的表面上（例如半导体晶片）上的多个相同的连续记录特性。该设备设置有用于使晶片旋转的旋转台，其具有用于将晶片安装在预定初始位置的机构，用于在每个选定的制造或处理阶段之后的相同点开始测量。对于晶片的所有顺序制造阶段，测量是同步的，并且是基于谐振传感器技术的原理使用谐振传感器来执行的。所记录的信息被存储在存储设备上，如果最终产品有缺陷或偏差，则可以容易地检索所存储的信息以揭示产品上的时间，地点和缺陷的来源。相同的记录也可用于缺陷或偏差之间的相关性以及最终产品在质量控制上的失败，甚至在芯片在半导体器件中的利用过程中的相互关系。

2. 发明授权

US06891380B2 System and method for measuring characteristics of materials with the use of a composite sensor 失效
标题翻译：使用复合传感器测量材料特性的系统和方法
公开(公告)号：US06891380B2
公开(公告)日：2005-05-10
申请号：US10449892
申请日：2003-06-02
申请人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
发明人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
IPC分类号： G01B7/06 , G01R27/04 , G01R27/32 , G01R33/12
CPC分类号： G01B7/105
摘要： The system of the invention for measuring characteristics of thin conductive and non-conductive material, such as bulk material or films, is based on the use of a resonance oscillating circuit that incorporates at least two components selected from the group consisting of an inductive coil and a capacitor, which in combination form a sensor that could be approached close to the surface to be measured. The measurement of the film or material characteristics, such as film resistance (film thickness) or a dielectric constant (film thickness) of a non-conductive material, is based on the principle that the sensor is approached to the measured surface at a distance, at which the inductance and capacitance of the sensor generate in the measured material a virtual coil and an additional capacitance, which strongly depend on the characteristics of the measured material. As the sensor approached towards the surface to be measured, the sensor-material system generates a series of resonances having different values of power. One of these resonances can be defined as the so-called full resonance, which is characterized by the maximum value of the power, and hence provides the most accurate measurement and can be used for precisely determining the measurement distance. By comparing the results of measurements with those known from measuring the precalibrated films or materials under the same conditions, it becomes possible to determine the target characteristics of the films or materials.
摘要翻译：用于测量薄导电和非导电材料（例如散装材料或薄膜）的特性的本发明的系统基于使用谐振振荡电路，该谐振振荡电路并入至少两个选自由感应线圈和电容器组合形成可以接近待测表面的传感器。不导电材料的薄膜或材料特性，如薄膜电阻（薄膜厚度）或介电常数（薄膜厚度）的测量是基于传感器距离被测表面接近的原理，传感器的电感和电容在测量材料中产生虚拟线圈和附加电容，这强烈依赖于测量材料的特性。当传感器靠近要测量的表面时，传感器材料系统产生具有不同功率值的一系列谐振。这些共振中的一个可以被定义为所谓的全共振，其特征在于功率的最大值，因此提供最精确的测量并且可以用于精确地确定测量距离。通过将测量结果与在相同条件下测量预校准的膜或材料已知的结果进行比较，可以确定膜或材料的目标特性。

3. 发明授权

US06815958B2 Method and apparatus for measuring thickness of thin films with improved accuracy 失效
公开(公告)号：US06815958B2
公开(公告)日：2004-11-09
申请号：US10359378
申请日：2003-02-07
申请人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
发明人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
IPC分类号： G01R2726
CPC分类号： G01B7/105
摘要： The invention relates to an apparatus and method for measuring thickness and deviations from the thickness of very thin conductive coatings on various non-conductive substrates, or of very thin non-conductive coatings on conductive substrates. The apparatus consists of an inductive coil having specific parameters, an external AC generator operating on frequencies, e.g., from 50 MHz to 2.5 GHz, preferably from 100 MHz to 200 MHz, and a measuring instrument, such as an oscilloscope, voltmeter, etc. for measuring output of the sensor. The coil has miniature dimensions. The invention is based on the principle that inductive coil of the sensor, active resistance of the coil winding, inherent capacitance of the inductive coil (or a separate capacitor built into the sensor's circuit), and the aforementioned AC generator form a parallel oscillating circuit. The apparatus operates on very high resonance frequencies, preferably within the range of 100 to 200 MHz, at which a capacitive coupling is established between the coil of the oscillating circuit and the thin films being measured. By measuring the parameters of the resonance oscillating circuit, it becomes possible to measure film thickness below 500 Angstroms.

4. 发明授权

US06989675B2 Method and apparatus for precision measurement of film thickness 失效
标题翻译：用于精密测量膜厚度的方法和装置
公开(公告)号：US06989675B2
公开(公告)日：2006-01-24
申请号：US10386648
申请日：2003-03-13
申请人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
发明人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
IPC分类号： G01R27/32
CPC分类号： G01B15/02
摘要： An apparatus for measuring thickness in super-thin films consists of a special resonator unit in the form of an open-bottom cylinder which is connected to a microwave swept frequency microwave source via a decoupler and a matching unit installed in a waveguide that connects the resonator unit with the microwave source. The apparatus operates on the principle that thin metal film F, the thickness of which is to be measured, does not contact the end face of the open bottom of the cylindrical resonator sensor unit and functions as a bottom of the cylindrical body. The design of the resonator excludes generation of modes other than the resonance mode and provides the highest possible Q-factor. As the conductivity directly related to the film thickness, it is understood that measurement of the film thickness is reduced to measurement of the resonance peak amplitudes. This means that superhigh accuracy inherent in measurement of the resonance peaks is directly applicable to the measurement of the film thickness or film thickness deviations.
摘要翻译：用于测量超薄膜厚度的装置由开 - 底圆柱体形式的特殊谐振器单元组成，该谐振器单元经由去耦器连接到微波扫频频率微波源，并且匹配单元安装在将谐振器单位与微波源。该装置的工作原理是，其厚度要测量的薄金属薄膜F不与圆柱形谐振器传感器单元的开口底部的端面接触并用作圆柱体的底部。谐振器的设计不包括谐振模式以外的模式的产生，并提供最高可能的Q因子。作为与膜厚度直接相关的电导率，可以理解，膜厚度的测量减小到谐振峰值振幅的测量。这意味着测量共振峰值固有的超高精度直接适用于膜厚度或膜厚偏差的测量。

5. 发明授权

US06801044B2 Universal electromagnetic resonance system for detecting and measuring local non-uniformities in metal and non-metal objects 失效
标题翻译：通用电磁共振系统，用于检测和测量金属和非金属物体的局部非均匀性
公开(公告)号：US06801044B2
公开(公告)日：2004-10-05
申请号：US10654759
申请日：2003-09-05
申请人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
发明人： Boris Kesil , Leonid Velikov , Yuri Vorobyev
IPC分类号： G01R2726
CPC分类号： G01B7/105
摘要： A universal electromagnetic resonance system is aimed at detecting and measuring local non-uniformities in objects made from conductive or non-conductive materials. The system comprises a composite measuring unit composed of two identical and symmetrically arranged individual oscillation circuits with measurement elements in the form of identical and symmetrically arranged inductive coils or capacitor chips. The unit is connected to an impedance analyzer for supplying RF current and for measuring the voltage signal in the oscillation circuit. Since all the elements of individual oscillation circuits are identical, in the case of non-uniformity of the object on the scanned area, the parameters of the resonance will hanged. This change will violate the symmetry in the operation of the individual oscillation circuits. The variation in measured signal can be calibrated in terms of the target parameter or characteristic of the object.
摘要翻译：通用电磁共振系统旨在检测和测量由导电材料或非导电材料制成的物体中的局部不均匀性。该系统包括由两个相同和对称布置的各个振荡电路组成的复合测量单元，其具有相同和对称布置的感应线圈或电容器芯片形式的测量元件。该单元连接到用于提供RF电流并用于测量振荡电路中的电压信号的阻抗分析器。由于各个振荡电路的所有元件是相同的，所以在被扫描区域上的物体不均匀的情况下，谐振的参数将被悬挂。这种变化将违反各个振荡电路的操作对称性。测量信号的变化可以根据目标参数或对象的特性进行校准。

6. 发明申请

US20220344701A1 Solid-State Electrolyte for Lithium-Ion Battery and a Method of Synthesis thereof 有权
公开(公告)号：US20220344701A1
公开(公告)日：2022-10-27
申请号：US17239593
申请日：2021-04-24
申请人： Ali Sadeghi , Yuri Vorobyev , Gene Kristul , Leonid Velikov
发明人： Ali Sadeghi , Yuri Vorobyev , Gene Kristul , Leonid Velikov
IPC分类号： H01M10/0562 , H01M10/0525
摘要： Proposed is a method of synthesizing a solid-state electrolyte of Li3HaIO formula for use in a lithium-ion battery. The method consists of uniformly mixing at least LiOH and LiHaI in a stoichiometric quantities, heating the prepared mixture to a melting temperature and causing a reaction of formula (2LiOH+LiHaI=Li3HaIO+H2O) between the at least LiOH and LiHaI in a process free of forming a perovskite structure and at a temperature, at which H2O that forms at the aforementioned reaction is converted into a bound form, whereby a reaction product is obtained. According to another modification of the method, prior to the stage of melting the mixture, a reinforcement mesh is immersed into the mixture, whereby after mixture is solidified, a solid-state electrolyte reinforced with the mixture embedded into its material is obtained.

7. 发明授权

US11817570B2 Method of manufacturing a solid-state lithium battery and a battery manufactured by the method 有权
公开(公告)号：US11817570B2
公开(公告)日：2023-11-14
申请号：US17395434
申请日：2021-08-05
申请人： Ali Sadeghi , Yuri Vorobyev , Gene Kristul , Leonid Velikov
发明人： Ali Sadeghi , Yuri Vorobyev , Gene Kristul , Leonid Velikov
IPC分类号： H01M10/058 , H01M10/0525 , H01M4/04 , H01M4/62 , H01M4/50 , H01M4/505 , H01M4/525 , H01M4/485 , H01M4/02
CPC分类号： H01M4/043 , H01M4/0471 , H01M10/058 , H01M10/0525 , H01M4/485 , H01M4/505 , H01M4/525 , H01M4/623 , H01M4/625 , H01M2004/028
摘要： The propose method of manufacturing a solid-state lithium battery consists of preparing an anode coated with a solid-state electrolyte precursor and a cathode unit coated with solid-state electrolyte, both precursors containing a predetermined amount of a redundant water. The thus prepared anode unit and cathode unit are pressed to each other through their respective electrolyte precursor layers in a closed chamber at a predetermined elevated temperature and under a predetermined mechanical pressure, whereby an integral pre-final solid-state battery unit is formed. The manufacture of the battery is completed by inserting the prefinal product into a casing that leaves parts of the metal current collectors of the prefinal product exposed for use as a battery anode and a battery cathode.

8. 发明申请

US20230044416A1 METHOD OF MANUFACTURING A SOLID-STATE LITHIUM BATTERY AND A BATTERY MANUFACTURED BY THE METHOD 有权
公开(公告)号：US20230044416A1
公开(公告)日：2023-02-09
申请号：US17395434
申请日：2021-08-05
申请人： Ali Sadeghi , Yuri Vorobyev , Gene Kristul , Leonid Velikov
发明人： Ali Sadeghi , Yuri Vorobyev , Gene Kristul , Leonid Velikov
IPC分类号： H01M4/04 , H01M10/058 , H01M10/0525
摘要： The propose method of manufacturing a solid-state lithium battery consists of preparing an anode coated with a solid-state electrolyte precursor and a cathode unit coated with solid-state electrolyte, both precursors containing a predetermined amount of a redundant water. The thus prepared anode unit and cathode unit are pressed to each other through their respective electrolyte precursor layers in a closed chamber at a predetermined elevated temperature and under a predetermined mechanical pressure, whereby an integral pre-final solid-state battery unit is formed. The manufacture of the battery is completed by inserting the prefinal product into a casing that leaves parts of the metal current collectors of the prefinal product exposed for use as a battery anode and a battery cathode.

9. 发明申请

US20060056488A1 Method and apparatus for measuring temperature with the use of an inductive sensor 审中-公开
标题翻译：使用电感式传感器测量温度的方法和装置
公开(公告)号：US20060056488A1
公开(公告)日：2006-03-16
申请号：US10940519
申请日：2004-09-15
申请人： Boris Surname , Yuri Vorobyev , Leonid Velikov , Matt Fauss
发明人： Boris Surname , Yuri Vorobyev , Leonid Velikov , Matt Fauss
IPC分类号： G01K1/14 , G01K7/00 , G01K1/08 , G01K13/00
CPC分类号： G01K7/32 , G01K7/36
摘要： The invention provides a method and apparatus for measuring temperature of a conductive film or coating on a non-conductive substrate or on a substrate having conductivity significantly lower than that of the film or coating. The temperature is measured with the use of an inductive sensor as at least one of electrical characteristics of the film or coating the relation of which with the temperature is known. The invention is intended for use in processes that involve heating of the conductive film or coating, e.g., annealing. The sensor is located on the side of the object-holding chuck opposite to the object but at a distance from the object that provides sensitivity of the sensor. A distinguishing feature of the invention is a shield formed from a layer of a dielectric-liquid that is permeable to electromagnetic waves but resistant to permeation of heat flow. This shield is arranged between the aforementioned conductive film or coating on a semiconductive substrate and the inductive sensor for shielding the sensor against influence of heat developed in the processing chamber. Preferably, the sensor is an inductive resonance-type sensor.
摘要翻译：本发明提供了一种用于测量导电膜或涂层在导电性基材上或基材上的温度的方法和装置，该导电膜或涂层的导电性明显低于膜或涂层的导电膜或涂层。使用感应传感器测量温度，其中膜或涂层的电特性中的至少一种与已知的温度的关系是已知的。本发明旨在用于涉及加热导电膜或涂层的方法，例如退火。传感器位于物体保持卡盘的与物体相对的一侧上，但距离提供传感器灵敏度的物体一定距离。本发明的一个突出特征是由电磁波层可透过电阻而不受热流渗透的电介质层形成的屏蔽。该屏蔽层布置在上述导电膜或半导体衬底上的涂层和感应传感器之间，用于屏蔽传感器以防止在处理室中产生的热量的影响。优选地，传感器是感应谐振型传感器。

10. 发明授权

US11817550B2 Method of synthesizing a solid-state electrolyte for use in a lithium-ion battery 有权
公开(公告)号：US11817550B2
公开(公告)日：2023-11-14
申请号：US17239593
申请日：2021-04-24
申请人： Ali Sadeghi , Yuri Vorobyev , Gene Kristul , Leonid Velikov
发明人： Ali Sadeghi , Yuri Vorobyev , Gene Kristul , Leonid Velikov
IPC分类号： H01M10/0562 , H01M10/0525
CPC分类号： H01M10/0562 , H01M10/0525 , H01M2300/008
摘要： Proposed is a method of synthesizing a solid-state electrolyte of Li3HalO formula for use in a lithium-ion battery. The method consists of uniformly mixing at least LiOH and LiHal in a stoichiometric quantities, heating the prepared mixture to a melting temperature and causing a reaction of formula (2LiOH+LiHal=Li3HalO+H2O) between the at least LiOH and LiHal in a process free of forming a perovskite structure and at a temperature, at which H2O that forms at the aforementioned reaction is converted into a bound form, whereby a reaction product is obtained. According to another modification of the method, prior to the stage of melting the mixture, a reinforcement mesh is immersed into the mixture, whereby after mixture is solidified, a solid-state electrolyte reinforced with the mixture embedded into its material is obtained.

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