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1. 发明申请

US20060197415A1 Piezoelectric element and method for manufacturing piezoelectric element 失效
公开(公告)号：US20060197415A1
公开(公告)日：2006-09-07
申请号：US11367996
申请日：2006-03-03
申请人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
发明人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
IPC分类号： H01L41/00 , H04R17/00
CPC分类号： G01C19/5663 , H01L41/094 , H01L41/316 , Y10T29/42 , Y10T29/49155
摘要： There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

2. 发明授权

US07583012B2 Piezoelectric element and method for manufacturing piezoelectric element 失效
标题翻译：压电元件及其制造方法
公开(公告)号：US07583012B2
公开(公告)日：2009-09-01
申请号：US11367996
申请日：2006-03-03
申请人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
发明人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
IPC分类号： H01L41/08
CPC分类号： G01C19/5663 , H01L41/094 , H01L41/316 , Y10T29/42 , Y10T29/49155
摘要： There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.
摘要翻译：需要能够在不损害压电特性的情况下提高生产率和产量的压电元件及其制造方法。压电元件设置有基板，设置在基板上的第一电极膜，设置在第一电极膜上的压电膜和设置在压电膜上的第二电极膜。压电薄膜具有由多个结晶化的压电薄膜构成的叠层结构。具有预定厚度的压电膜通过形成压电薄膜的成膜步骤和对压电薄膜进行热处理以结晶化的结晶热处理步骤的重复循环形成。以这种方式，可以产生在膜厚度方向上显示均匀结晶度的压电膜。

3. 发明申请

US20080222865A1 PIEZOELECTRIC ELEMENT AND METHOD FOR MANUACTURING PIEZOELECTRIC ELEMENT 审中-公开
标题翻译：压电元件和制造压电元件的方法
公开(公告)号：US20080222865A1
公开(公告)日：2008-09-18
申请号：US12123109
申请日：2008-05-19
申请人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
发明人： Eiji Nakashio , Junichi Honda , Takashi Tamura , Koji Suzuki , Teruo Inaguma , Manabu Aizawa , Kazuo Takahashi , Tadashi Sakurai
IPC分类号： H01L41/22
CPC分类号： G01C19/5663 , H01L41/094 , H01L41/316 , Y10T29/42 , Y10T29/49155
摘要： A piezoelectric element with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film, and a method of forming same. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film has a predetermined thickness and is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization.
摘要翻译：具有基板的压电元件，设置在基板上的第一电极膜，设置在第一电极膜上的压电膜和设置在压电膜上的第二电极膜及其形成方法。压电薄膜具有由多个结晶化的压电薄膜构成的叠层结构。压电膜具有预定的厚度，并且通过形成压电薄膜的成膜步骤和对压电薄膜进行热处理以进行结晶的结晶热处理步骤的重复循环形成。

4. 发明授权

US07723905B2 Vibrating gyrosensor driven with offset potential 有权
标题翻译：用偏移电位驱动的振动陀螺仪
公开(公告)号：US07723905B2
公开(公告)日：2010-05-25
申请号：US12116646
申请日：2008-05-07
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/08
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.
摘要翻译：振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。振动元件安装在支撑基板的表面上。振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。

5. 发明授权

US07400078B2 Vibrating gyrosensor 有权
标题翻译：振动陀螺传感器
公开(公告)号：US07400078B2
公开(公告)日：2008-07-15
申请号：US11368144
申请日：2006-03-03
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/04 , H03H9/21
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.
摘要翻译：振动陀螺传感器包括支撑基板，其上形成有多个平台的布线图案，以及安装在支撑基板的表面上的振动元件，其中至少两个振动元件安装在支撑基板上，用于检测不同的振动轴向。

6. 发明申请

US20090174292A1 VIBRATING GYROSENSOR 有权
标题翻译：振动陀螺仪
公开(公告)号：US20090174292A1
公开(公告)日：2009-07-09
申请号：US12116646
申请日：2008-05-07
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/04
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.
摘要翻译：振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。振动元件安装在支撑基板的表面上。振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。

7. 发明申请

US20060197414A1 Vibrating gyrosensor 有权
标题翻译：振动陀螺传感器
公开(公告)号：US20060197414A1
公开(公告)日：2006-09-07
申请号：US11368144
申请日：2006-03-03
申请人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
发明人： Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
IPC分类号： H01L41/113
CPC分类号： G01C19/5663 , G01C19/5783
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.
摘要翻译：振动陀螺传感器包括支撑基板，其上形成有多个平台的布线图案，以及安装在支撑基板的表面上的振动元件，其中至少两个振动元件安装在支撑基板上，用于检测不同的振动轴向。

8. 发明授权

US07723901B2 Vibrating gyrosensor and vibrating element 失效
标题翻译：振动陀螺传感器和振动元件
公开(公告)号：US07723901B2
公开(公告)日：2010-05-25
申请号：US11363395
申请日：2006-02-27
申请人： Teruo Inaguma , Junichi Honda , Koji Suzuki , Kazuo Takahashi , Eiji Nakashio
发明人： Teruo Inaguma , Junichi Honda , Koji Suzuki , Kazuo Takahashi , Eiji Nakashio
IPC分类号： H01L41/08
CPC分类号： B81B3/0067 , B81B2201/0285 , B81B2203/0118 , G01C19/5663 , G01P15/0802
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.
摘要翻译：振动陀螺传感器包括：支撑基板，其上形成有多个焊盘的布线图案;以及安装在支撑基板的表面上的振动元件。所述振动元件包括基部，所述基部具有安装面，多个端子和从所述基部的一个侧面以悬臂方式一体地突出的振动器部，并且具有与所述基板的安装面共面的面向基板的表面的基础部分。振子部具有依次形成在面向基板的表面上的第一电极层，压电层和第二电极层。此外，在振动部的基端形成有加强部，使得振动部的截面积朝向基部逐渐增大。

9. 发明申请

US20060202591A1 Method for manufacturing vibrating gyrosensor and vibrating element 失效
标题翻译：制造振动传感器和振动元件的方法
公开(公告)号：US20060202591A1
公开(公告)日：2006-09-14
申请号：US11363395
申请日：2006-02-27
申请人： Teruo Inaguma , Junichi Honda , Koji Suzuki , Kazuo Takahashi , Eiji Nakashio
发明人： Teruo Inaguma , Junichi Honda , Koji Suzuki , Kazuo Takahashi , Eiji Nakashio
IPC分类号： H01L41/00
CPC分类号： B81B3/0067 , B81B2201/0285 , B81B2203/0118 , G01C19/5663 , G01P15/0802
摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.
摘要翻译：振动陀螺传感器包括：支撑基板，其上形成有多个焊盘的布线图案;以及安装在支撑基板的表面上的振动元件。所述振动元件包括基部，所述基部具有安装面，多个端子和从所述基部的一个侧面以悬臂方式一体地突出的振动器部，并且具有与所述基板的安装面共面的面向基板的表面的基础部分。振子部具有依次形成在面向基板的表面上的第一电极层，压电层和第二电极层。此外，在振动部的基端形成有加强部，使得振动部的截面积朝向基部逐渐增大。

10. 发明申请

US20080257044A1 Vibratory Gyrosensor 有权
标题翻译：振动陀螺仪
公开(公告)号：US20080257044A1
公开(公告)日：2008-10-23
申请号：US10599833
申请日：2006-02-23
申请人： Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
发明人： Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
IPC分类号： G01C19/56
CPC分类号： G01C19/5663 , G01C19/5656
摘要： To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.
摘要翻译：通过简单的结构实现尺寸缩小和高Q值提高特性。根据本发明的振动陀螺传感器1包括其上安装有电路元件的支撑基板2和布置在其上的多个焊盘4的布线图案; 以及安装在支撑基板的表面2-1上的振动元件20。振动元件20包括基部22，基部22具有安装表面22-2，该安装表面22-2设置有连接到焊盘的多个端子25; 以及从基部22的一侧以悬臂方式一体地延伸并具有与基部22的安装面齐平的面向基板的表面的振动部23，面向基板的表面设置有第一电极堆叠在第一电极层上的压电层28和堆叠在压电层上的第二电极层29,30。振动元件20通过将端子25与设置在它们之间的金属突起26接合到平台4而安装在支撑基板2上。

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