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    • 10. 发明申请
    • Custom electrodes for molecular memory and logic devices
    • 用于分子存储器和逻辑器件的定制电极
    • US20050026427A1
    • 2005-02-03
    • US10930062
    • 2004-08-30
    • Patricia BeckDouglas OhlbergDuncan StewartZhiyong Li
    • Patricia BeckDouglas OhlbergDuncan StewartZhiyong Li
    • H01L21/28G11C13/02H01L21/285H01L27/28H01L29/06H01L21/00
    • H01L27/28G11C13/02H01L2924/0002H01L2924/00
    • A method is provided for fabricating molecular electronic devices comprising at least a bottom electrode and a molecular switch film on the bottom electrode. The method includes forming the bottom electrode by a process including: cleaning portions of the substrate where the bottom electrode is to be deposited; pre-sputtering the portions; depositing a conductive layer on at least the portions; and cleaning the top surface of the conductive layer. Advantageously, the conductive electrode properties include: low or controlled oxide formation (or possibly passivated), high melting point, high bulk modulus, and low diffusion. Smooth deposited film surfaces are compatible with Langmuir-Blodgett molecular film deposition. Tailored surfaces are further useful for SAM deposition. The metallic nature gives high conductivity connection to molecules. Barrier layers may be added to the device stack, i.e., Al2O3 over the conductive layer.
    • 提供了一种用于制造分子电子器件的方法,该分子电子器件至少包括底部电极和底部电极上的分子开关膜。 该方法包括通过以下工艺形成底部电极,该方法包括:清洗要沉积底部电极的衬底的部分; 预溅射部分; 在至少部分上沉积导电层; 并清洁导电层的顶表面。 有利地,导电电极的性质包括:低或受控的氧化物形成(或可能钝化),高熔点,高体积弹性模量和低扩散。 光滑的沉积膜表面与Langmuir-Blodgett分子膜沉积相容。 定制的表面对于SAM沉积是更有用的。 金属性质使分子具有高导电性。 阻挡层可以被添加到器件堆叠,即在导电层上的Al 2 O 3。