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    • 2. 发明申请
    • Method of forming guanidine group on carbon nanotubes, method of attaching carbon nanotubes having guanidine groups to substrate, and carbon nanotubes and substrate manufactured by same
    • 在碳纳米管上形成胍基的方法,将具有胍基的碳纳米管附着在基材上的方法以及由其制造的碳纳米管和基材
    • US20060165587A1
    • 2006-07-27
    • US11126375
    • 2005-05-11
    • Hai Lee
    • Hai Lee
    • D01F9/12
    • B82Y30/00D01F11/12D01F11/14Y10S977/745Y10S977/746Y10S977/847
    • Disclosed herein is a method of forming a guanidine group on carbon nanotubes to improve the dispersibility of carbon nanotubes, a method of attaching carbon nanotubes having guanidine groups to a substrate, and carbon nanotubes and a substrate manufactured by the above methods. The method of forming the guanidine group on the carbon nanotubes includes forming a carboxyl group on the carbon nanotubes, and forming the guanidine group on the carboxyl group of the carbon nanotubes. In addition, the method of attaching the carbon nanotubes having guanidine groups to the substrate includes coating a substrate with a polymer having crown ether attached thereto, drying the polymer layer having crown ether attached thereto formed on the substrate to be semi-dried, and coating the semi-dried polymer layer with a solution including carbon nanotubes having guanidine groups dispersed therein. The carbon nanotubes having guanidine groups, which are manufactured by the method of the current invention, are hydrogen bonded with the solvent molecule capable of reacting with the guanidine group to form the hydrogen bond, and thus, are uniformly dispersed in the solvent. Further, by using the properties of the guanidine group capable of being selectively combined with crown ether, the carbon nanotubes having guanidine groups are aligned perpendicularly to the substrate at regular intervals thereon.
    • 本文公开了一种在碳纳米管上形成胍基以提高碳纳米管的分散性的方法,将具有胍基的碳纳米管连接到基材上的方法,以及通过上述方法制造的基材。 在碳纳米管上形成胍基的方法包括在碳纳米管上形成羧基,并在碳纳米管的羧基上形成胍基。 此外,将具有胍基的碳纳米管附着在基板上的方法包括用附着有冠醚的聚合物涂布基板,干燥其上附着有冠醚的聚合物层,形成在待半干燥的基板上,涂布 该半干燥聚合物层具有包含其中分散有胍基的碳纳米管的溶液。 通过本发明的方法制造的具有胍基的碳纳米管与能够与胍基反应形成氢键的溶剂分子氢键合,从而均匀地分散在溶剂中。 此外,通过使用能够与冠醚选择性组合的胍基的性质,具有胍基的碳纳米管在其上以规则的间隔垂直于基底排列。
    • 3. 发明申请
    • Fabrication method of extreme ultraviolet radiation mask mirror using atomic force microscope lithography
    • 使用原子力显微镜光刻的极紫外辐射掩模镜的制造方法
    • US20070054196A1
    • 2007-03-08
    • US10578683
    • 2004-06-08
    • Hai LeeSun LeeJin AhnSuk Bae
    • Hai LeeSun LeeJin AhnSuk Bae
    • G03F1/00
    • G03F1/24B82Y10/00B82Y30/00B82Y40/00G03F7/2049
    • The present invention relates to a method for manufacturing a reflective multi-layered thin film mirror for an extreme ultraviolet radiation (EUV) exposure process that is one of the next generation exposure process masks using an atomic force microscope (AFM). This reflective multi-layered thin film mirror for extreme ultraviolet radiation (EUV) exposure process allows metal oxide structures with fixed height and width to be obtained using anodic oxidization phenomenon between the cantilever tip of a atomic force microscope and an absorber material during the patterning of an absorber layer on a multi-layered thin film of a substrate, followed by forming the ultra-fine line width absorber patterns via etching of the metal oxide structure. Use of the manufacturing process of this invention is advantageous in manufacturing of extreme ultraviolet radiation exposure mask mirrors with high resolution and in manufacturing of reflective multi-layered thin film mirrors with minute absorber pattern sizes (less than 20 nm line width) compared to traditional manufacturing methods.
    • 本发明涉及一种制造用于使用原子力显微镜(AFM)的下一代曝光处理掩模之一的用于极紫外辐射(EUV)曝光工艺的反射型多层薄膜反射镜的方法。 这种用于极紫外辐射(EUV)曝光工艺的反光多层薄膜反射镜允许使用原子力显微镜的悬臂尖端与吸收材料之间的阳极氧化现象在图案化期间获得具有固定高度和宽度的金属氧化物结构 在基板的多层薄膜上形成吸收层,然后通过金属氧化物结构的蚀刻形成超细线宽度的吸收体图案。 使用本发明的制造方法在制造具有高分辨率的极紫外辐射曝光掩模反射镜和制造具有小的吸收体图案尺寸(小于20nm线宽)的反射多层薄膜反射镜相比传统制造方面是有利的 方法。