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    • 5. 发明授权
    • Disk filter sector having an attachment system outside of flow area
    • 磁盘过滤器扇区具有在流动区域之外的附接系统
    • US5925248A
    • 1999-07-20
    • US897113
    • 1997-07-18
    • Richard D. MooreRichard GustafsonRichard Moody
    • Richard D. MooreRichard GustafsonRichard Moody
    • B01D33/23B01D39/00
    • B01D33/23
    • A disc filter sector having an improved attachment system includes a sector base and a sector neck. The sector base includes stiffening members that extend through the sector base and include an attachment end, such as a threaded fastener or region, at the neck mating end of the sector base. The sector neck includes a hold down member proximate the base mating end of the sector neck. To attach the sector base to the sector neck, a mating attachment member, such as a bolt extends through the hold down member of the sector neck and engages with the attachment end of the stiffening members. In one embodiment, the stiffening members, attachment end, and mating attachment members are disposed outside of the flow regions in the sector base and sector neck.
    • 具有改进的附接系统的盘式过滤器扇区包括扇形基座和扇形颈部。 扇形基座包括延伸穿过扇形基座的加强构件,并且在扇形基座的颈部配合端处包括诸如螺纹紧固件或区域的附接端。 扇形颈部包括靠近扇形颈部的底部配合端的压紧构件。 为了将扇形基座附接到扇形颈部,诸如螺栓的配合附接构件延伸穿过扇形颈部的压紧构件并与加强构件的附接端接合。 在一个实施例中,加强构件,附接端和配合附接构件设置在扇区基部和扇形颈部中的流动区域的外部。
    • 7. 发明授权
    • Pattern inspection tool - method and apparatus
    • 图案检查工具 - 方法和装置
    • US4365163A
    • 1982-12-21
    • US218323
    • 1980-12-19
    • Donald E. DavisRichard D. MoorePhilip M. RyanEdward V. Weber
    • Donald E. DavisRichard D. MoorePhilip M. RyanEdward V. Weber
    • G03F1/86H01J37/304H01J37/00
    • G03F1/86H01J37/3045
    • This describes an automatic defect inspection system as could be applied to metallized masks or other patterns. The system causes each subfield to be individually aligned for inspection irrespective of the previous alignment of the pattern or any other sub-field. This is accomplished by scanning a preselected portion of each sub-field and adjusting the position of the scan based on the resulting signal while scanning a pre-established portion of the sub-field. In this way a portion of each sub-field is used as an alignment mark and stepping errors avoided.Once alignment is achieved a probe, comparable to the size of the minimum defect to be detected is scanned over the sub-field with an overlapping pattern to find defects such as excessive metal, metal in improper places or points where the metal is missing.
    • 这描述了可应用于金属化掩模或其它图案的自动缺陷检查系统。 无论模式或任何其他子场的先前对齐如何,系统都会使每个子区域单独对齐。 这是通过扫描每个子场的预选部分并且在扫描子场的预先建立的部分的同时基于所得到的信号来调整扫描的位置来实现的。 以这种方式,每个子场的一部分被用作对准标记并避免了步进错误。 一旦实现了对准,就可以通过重叠图案在子场上扫描与待检测的最小缺陷尺寸相当的探针,以发现缺陷,例如过多的金属,金属在不适当的位置或金属缺失点。