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1. 发明授权

US07085080B2 Low-deformation support device of an optical element 失效
标题翻译：光学元件的低变形支撑装置
公开(公告)号：US07085080B2
公开(公告)日：2006-08-01
申请号：US11004692
申请日：2004-12-03
申请人： Dirk Schaffer , Andreas Wurmbrand , Thomas Schletterer
发明人： Dirk Schaffer , Andreas Wurmbrand , Thomas Schletterer
IPC分类号： G02B7/02
CPC分类号： G03F7/70825
摘要： In a low-deformation support device of an optical element (8, 24), in particular an end plate (14) of a projection objective (7) of a projection exposure machine (3) for microlithography for the purpose of producing semiconductor components, in a mount (13), the optical element (8, 14) is connected to the mount (13) at least partly via a bonded connection. The bonded connection is located between the adjacent circumferential wails of mount (13) and optical element (14). The mount (13) is provided with at least three bearing elements (20) which are distributed over the circumference and by means of which the optical element (8, 14) is laterally and axially supported. The mount (13) has spring elements (15) which are constructed monolithically with the bearing elements (20) and are soft in axial and radial directions.
摘要翻译：在用于制造半导体部件的光学元件（8,24）的低变形支撑装置中，特别是用于微光刻的投影曝光机（3）的投影物镜（7）的端板（14）在安装件（13）中，光学元件（8,14）至少部分地通过粘合连接件连接到安装件（13）。接合连接位于安装件（13）和光学元件（14）的相邻周向部分之间。安装件（13）设置有至少三个轴承元件（20），其分布在圆周上并且光学元件（8,14）被横向和轴向支撑。安装件（13）具有与轴承元件（20）整体构造并且在轴向和径向方向上柔软的弹簧元件（15）。

2. 发明申请

US20050128607A1 Low-deformation support device of an optical element 失效
标题翻译：光学元件的低变形支撑装置
公开(公告)号：US20050128607A1
公开(公告)日：2005-06-16
申请号：US11004692
申请日：2004-12-03
申请人： Dirk Schaffer , Andreas Wurmbrand , Thomas Schletterer
发明人： Dirk Schaffer , Andreas Wurmbrand , Thomas Schletterer
IPC分类号： G03F7/20 , G02B7/02
CPC分类号： G03F7/70825
摘要： In a low-deformation support device of an optical element (8, 14), in particular an end plate (14) of a projection objective (7) of a projection exposure machine (3) for microlithography for the purpose of producing semiconductor components, in a mount (13), the optical element (8, 14) is connected to the mount (13) at least partly via a bonded connection. The bonded connection is located between the adjacent circumferential walls of mount (13) and optical element (14). The mount (13) is provided with at least three bearing elements (20) which are distributed over the circumference and by means of which the optical element (8, 14) is laterally and axially supported. The mount (13) has spring elements (15) which are constructed monolithically with the bearing elements (20) and are soft in axial and radial directions.
摘要翻译：在用于制造半导体部件的光学元件（8,14）的低变形支撑装置中，特别是用于微光刻的投影曝光机（3）的投影物镜（7）的端板（14）在安装件（13）中，光学元件（8,14）至少部分地通过粘合连接件连接到安装件（13）。粘合连接位于安装件（13）和光学元件（14）的相邻周壁之间。安装件（13）设置有至少三个轴承元件（20），其分布在圆周上并且光学元件（8,14）被横向和轴向支撑。安装件（13）具有与轴承元件（20）整体构造并且在轴向和径向方向上柔软的弹簧元件（15）。

3. 发明申请

US20090122288A1 DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL ELEMENT 有权
标题翻译：用于光学元件的低变形可更换安装的装置
公开(公告)号：US20090122288A1
公开(公告)日：2009-05-14
申请号：US12274583
申请日：2008-11-20
申请人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
发明人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
IPC分类号： G03B27/42
CPC分类号： G02B7/00 , G02B7/025 , G02B7/026 , G03F7/70825
摘要： The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).
摘要翻译：本发明涉及一种用于光学元件的低变形可替换安装的装置，特别是用于在安装件（12）中生产半导体部件的用于微光刻的投影曝光系统的目标的封闭板。光学元件至少部分地通过粘合剂连接连接到安装件（12）。它位于安装件（12）的相邻圆周壁和光学元件之间。安装件（12）设置有分布在圆周上的至少三个支撑脚（14），光学元件通过该支撑脚侧向和轴向安装。安装件（12）经由三个安装支承点（15）以至少近似变形 - 解耦的方式连接到物镜的壳体。

4. 发明申请

US20060158749A1 Device for the low-deformation replaceable mounting of an optical element 有权
标题翻译：用于光学元件的低变形可替换安装的装置
公开(公告)号：US20060158749A1
公开(公告)日：2006-07-20
申请号：US11233846
申请日：2005-09-22
申请人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
发明人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
IPC分类号： G02B7/02
CPC分类号： G02B7/00 , G02B7/025 , G02B7/026 , G03F7/70825
摘要： The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).
摘要翻译：本发明涉及一种用于光学元件的低变形可替换安装的装置，特别是用于在安装件（12）中生产半导体部件的用于微光刻的投影曝光系统的目标的封闭板。光学元件至少部分地通过粘合剂连接连接到安装件（12）。它位于安装件（12）的相邻圆周壁和光学元件之间。安装件（12）设置有分布在圆周上的至少三个支撑脚（14），光学元件通过该支撑脚侧向和轴向安装。安装件（12）经由三个安装支承点（15）以至少近似变形 - 解耦的方式连接到物镜的壳体。

5. 发明授权

US08582081B2 Device for the low-deformation replaceable mounting of an optical element 有权
标题翻译：用于光学元件的低变形可替换安装的装置
公开(公告)号：US08582081B2
公开(公告)日：2013-11-12
申请号：US12274583
申请日：2008-11-20
申请人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
发明人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
IPC分类号： G03B27/42
CPC分类号： G02B7/00 , G02B7/025 , G02B7/026 , G03F7/70825
摘要： The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).
摘要翻译：本发明涉及一种用于光学元件的低变形可替换安装的装置，特别是用于在安装件（12）中生产半导体部件的用于微光刻的投影曝光系统的目标的封闭板。光学元件至少部分地通过粘合剂连接连接到安装件（12）。它位于安装件（12）的相邻圆周壁和光学元件之间。安装件（12）设置有分布在圆周上的至少三个支撑脚（14），光学元件通过该支撑脚侧向和轴向安装。安装件（12）经由三个安装支承点（15）以至少近似变形 - 解耦的方式连接到物镜的壳体。

6. 发明授权

US07471469B2 Device for the low-deformation replaceable mounting of an optical element 有权
标题翻译：用于光学元件的低变形可替换安装的装置
公开(公告)号：US07471469B2
公开(公告)日：2008-12-30
申请号：US11233846
申请日：2005-09-22
申请人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
发明人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
IPC分类号： G02B7/02
CPC分类号： G02B7/00 , G02B7/025 , G02B7/026 , G03F7/70825
摘要： The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).
摘要翻译：本发明涉及一种用于光学元件的低变形可替换安装的装置，特别是用于在安装件（12）中生产半导体部件的用于微光刻的投影曝光系统的目标的封闭板。光学元件至少部分地通过粘合剂连接连接到安装件（12）。它位于安装件（12）的相邻圆周壁和光学元件之间。安装件（12）设置有分布在圆周上的至少三个支撑脚（14），光学元件通过该支撑脚侧向和轴向安装。安装件（12）经由三个安装支承点（15）以至少近似变形 - 解耦的方式连接到物镜的壳体。

7. 发明授权

US09046795B2 Optical element unit for exposure processes having sealing element 有权
标题翻译：用于具有密封元件的曝光工艺的光学元件单元
公开(公告)号：US09046795B2
公开(公告)日：2015-06-02
申请号：US12046186
申请日：2008-03-11
申请人： Tilman Schwertner , Ulrich Bingel , Guido Limbach , Julian Kaller , Hans-Juergen Scherle , Jens Kugler , Dirk Schaffer , Bernhard Gellrich
发明人： Tilman Schwertner , Ulrich Bingel , Guido Limbach , Julian Kaller , Hans-Juergen Scherle , Jens Kugler , Dirk Schaffer , Bernhard Gellrich
IPC分类号： G03F7/20
CPC分类号： G03F7/7015 , G02B27/0006 , G03F7/70808 , G03F7/70825 , G03F7/70883 , G03F7/70908 , G03F7/70916 , G03F7/70933 , Y10T29/49
摘要： An optical element unit includes a first optical element module and a sealing arrangement. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially pre-vents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.
摘要翻译：光学元件单元包括第一光学元件模块和密封装置。第一光学元件模块占据第一模块空间并且包括第一组件类型的第一模块组件和第二组件类型的相关联的第二模块组件。第一部件类型是光学元件，第二部件类型与第一部件类型不同。密封装置将第一模块空间分隔成第一空间和第二空间，并且至少在第一方向上基本上预先将物质从第一空间和第二空间中的一个进入另一个第一空间空间和第二空间。第一模块部件至少部分地接触第一空间，并且至少在其光学使用的区域中不接触第二空间。第二模块组件至少部分地接触第二空间。

8. 发明授权

US08351139B2 Optical element module with minimized parasitic loads 有权
标题翻译：具有最小化寄生负载的光学元件模块
公开(公告)号：US08351139B2
公开(公告)日：2013-01-08
申请号：US12708034
申请日：2010-02-18
申请人： Jens Kugler , Ulrich Weber , Dirk Schaffer
发明人： Jens Kugler , Ulrich Weber , Dirk Schaffer
IPC分类号： G02B7/02
CPC分类号： G02B7/02 , G02B7/021 , G03F7/70825
摘要： An optical element module is provided. The optical module includes an optical element unit that includes an optical element and a support structure that supports the optical element unit. The support structure includes a support device and a contact device mounted to the support device. The contact device exerts a force on the optical element unit in a first direction via a first contact surface of the contact device. The first contact surface contacts a second contact surface of the optical element unit. The contact device includes a first linking section and a second linking section extending along a second direction running transverse to the first direction and arranged kinematically in series between the first contact surface and the support device. The first linking section and the second linking section are elastically deformed in response to a bending moment resulting from the force. The first linking section and the second linking section are arranged on opposite sides of a reference plane. The reference plane includes the force and runs transverse to the second direction.
摘要翻译：提供了一种光学元件模块。光学模块包括光学元件单元，其包括光学元件和支撑光学元件单元的支撑结构。支撑结构包括支撑装置和安装到支撑装置的接触装置。接触装置经由接触装置的第一接触面沿第一方向在光学元件单元上施加力。第一接触表面接触光学元件单元的第二接触表面。接触装置包括第一连接部分和第二连接部分，该第二连接部分沿着横向于第一方向的第二方向延伸并且在运动学上串联布置在第一接触表面和支撑装置之间。第一连接部分和第二连接部分响应于由力产生的弯矩而弹性变形。第一连接部分和第二连接部分布置在参考平面的相对侧上。参考平面包括力并横向于第二方向延伸。

9. 发明申请

US20090147229A1 Optical element unit and method of supporting an optical element 有权
标题翻译：光学元件单元和支撑光学元件的方法
公开(公告)号：US20090147229A1
公开(公告)日：2009-06-11
申请号：US11901131
申请日：2007-09-14
申请人： Dirk Schaffer , Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner
发明人： Dirk Schaffer , Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner
IPC分类号： G03B27/54 , G02B7/02
CPC分类号： G02B7/026 , G02B7/008 , G03F7/70825
摘要： There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.
摘要翻译：提供了包括光学元件，连接器元件和光学元件保持器的光学元件单元。光学元件具有主要延伸的平面以及外圆周并限定径向方向。连接器元件连接光学元件和光学元件保持器，连接器元件具有在外周连接到光学元件的第一连接器部分和连接到光学元件保持器的第二连接器部件。第一连接器部分和第二连接器部分经由至少一个联接部分连接，联接部分在径向上是柔性的，并且基本上防止第一连接器部分和第二连接器部分之间在基本上平行于主要延伸。

10. 发明授权

US09134501B2 Optical element unit and method of supporting an optical element 有权
公开(公告)号：US09134501B2
公开(公告)日：2015-09-15
申请号：US11901131
申请日：2007-09-14
申请人： Dirk Schaffer , Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner
发明人： Dirk Schaffer , Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner
IPC分类号： G03B27/68 , G03B27/52 , G03B27/54 , G02B7/02 , G03F7/20 , G03B27/42 , G02B7/00
CPC分类号： G02B7/026 , G02B7/008 , G03F7/70825
摘要： There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.

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