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1. 发明授权

US07267842B2 Method for removing titanium dioxide deposits from a reactor 失效
标题翻译：从反应器中除去二氧化钛沉积物的方法
公开(公告)号：US07267842B2
公开(公告)日：2007-09-11
申请号：US10800880
申请日：2004-03-15
申请人： Dingjun Wu , Bing Ji , Philip Bruce Henderson , Eugene Joseph Karwacki, Jr.
发明人： Dingjun Wu , Bing Ji , Philip Bruce Henderson , Eugene Joseph Karwacki, Jr.
IPC分类号： C23C16/00 , H05H1/24
CPC分类号： C23C16/405 , C23C14/083 , C23C14/564 , C23C16/4405
摘要： A process for the selective removal of a TiO2-containing substance from an article for cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a TiO2-containing substance from an article comprising: providing the article having the TiO2-containing substance deposited thereupon; reacting the substance with a reactive gas comprising at least one selected from a fluorine-containing cleaning agent, a chlorine-containing cleaning agent and mixtures thereof to form a volatile product; and removing the volatile product from the article to thereby remove the substance from the article.
摘要翻译：本文公开了用于从用于清洁应用的制品中选择性除去含TiO 2的物质的方法。在一个实施方案中，提供了从制品中除去含TiO 2的物质的方法，包括：提供其上沉积有含TiO 2的物质的制品; 使物质与包含选自含氟清洗剂，含氯清洗剂及其混合物中的至少一种的反应性气体反应以形成挥发性产物; 并从制品中除去挥发性产物，从而从制品中除去物质。

2. 发明授权

US06857433B2 Process for cleaning a glass-coating reactor using a reactive gas 失效
标题翻译：使用反应气体清洗玻璃涂层反应器的方法
公开(公告)号：US06857433B2
公开(公告)日：2005-02-22
申请号：US10201354
申请日：2002-07-22
申请人： Philip Bruce Henderson , Mario Joseph Moniz , Andrew David Johnson , Eugene Joseph Karwacki, Jr. , Richard R. Bodette , Christopher Robert Cording , Herbert David Johnson
发明人： Philip Bruce Henderson , Mario Joseph Moniz , Andrew David Johnson , Eugene Joseph Karwacki, Jr. , Richard R. Bodette , Christopher Robert Cording , Herbert David Johnson
IPC分类号： C23C14/00 , C23C16/44 , B08B3/08
CPC分类号： C23C16/4405 , Y10S438/905
摘要： A process for cleaning a glass-coating reactor includes: (a) providing the reactor to be cleaned, wherein the reactor contains a glass substrate within a chamber and the chamber has an internal surface coated with at least one substance selected from the group consisting of Si3N4 or SiO2; (b) terminating a flow of a deposition gas to the reactor; (c) adding to the reactor at least one cleaning gas to react with the at least one substance to form at least one volatile product; and (d) removing from the reactor the at least one volatile product.
摘要翻译：用于清洁玻璃包衣反应器的方法包括：（a）提供要清洁的反应器，其中反应器在室内包含玻璃基板，并且室具有涂覆有至少一种选自以下的物质的内表面： Si3N4或SiO2; （b）终止沉积气体流向反应器; （c）向所述反应器中加入至少一种清洁气体以与所述至少一种物质反应以形成至少一种挥发性产物; 和（d）从反应器中除去至少一种挥发性产物。

3. 发明授权

US07396381B2 Storage and delivery systems for gases held in liquid medium 失效
标题翻译：保存在液体介质中的气体的储存和输送系统
公开(公告)号：US07396381B2
公开(公告)日：2008-07-08
申请号：US10887561
申请日：2004-07-08
申请人： David Ross Graham , Daniel Joseph Tempel , Bernard Allen Toseland , Philip Bruce Henderson , James Joseph Hart , John Bruce Appleby , Jeffrey Richard Brzozowski , Pushpinder Singh Puri
发明人： David Ross Graham , Daniel Joseph Tempel , Bernard Allen Toseland , Philip Bruce Henderson , James Joseph Hart , John Bruce Appleby , Jeffrey Richard Brzozowski , Pushpinder Singh Puri
IPC分类号： F17C11/00 , B01D19/00
CPC分类号： F17C11/00
摘要： The present invention is directed to improvements in storage and delivery systems that allow for rapid fill and delivery of gases reversibly stored in a nonvolatile liquid medium, improvements in delivery and purity of the delivered gas. The low pressure storage and delivery system for gas which comprises:a container having an interior portion containing a reactive Lewis basic or Lewis acidic reactive liquid medium that is reversibly reacted with a gas having opposing Lewis acidity or basicity; a system for transferring energy into or out of the reactive liquid medium; or, a product gas purifier (e.g. a gas/liquid separator); or both.
摘要翻译：本发明涉及储存和输送系统的改进，其允许可逆地储存在非挥发性液体介质中的气体的快速填充和输送，输送气体的输送和纯度的改善。用于气体的低压储存和输送系统包括：容器，其具有含有反应性路易斯碱性或路易斯酸性反应性液体介质的内部部分，其与具有相反路易斯酸度或碱度的气体可逆地反应; 用于将能量转移到或流出反应性液体介质的系统; 或产品气体净化器（例如气/液分离器）; 或两者。

4. 发明申请

US20070287812A1 Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom 有权
标题翻译：用于形成路易斯气体/液体体系的接触方法和从其中回收路易斯气体
公开(公告)号：US20070287812A1
公开(公告)日：2007-12-13
申请号：US11437326
申请日：2006-05-19
申请人： Wayne Thomas McDermott , Philip Bruce Henderson , Daniel Joseph Tempel , Ronald Martin Pearlstein , James Joseph Hart , Rosaleen Patricia Morris-Oskanian , Diwakar Garg
发明人： Wayne Thomas McDermott , Philip Bruce Henderson , Daniel Joseph Tempel , Ronald Martin Pearlstein , James Joseph Hart , Rosaleen Patricia Morris-Oskanian , Diwakar Garg
IPC分类号： C08F2/00
CPC分类号： B01D53/1493 , B01D53/1456 , B01D2258/0216 , C01B7/0706 , C01B7/093 , C01B7/135 , C01B7/191 , C01B9/00 , C01B17/16 , C01B19/04 , C01C1/003 , C01C3/06 , F17C11/00
摘要： The invention relates to an improvement in apparatus and process for the formation of a complex of Lewis acidic or Lewis basic gases in a reactive liquid of opposite character and for the breaking (fragmentation) of said complex associated with the recovery of the Lewis gas therefrom. The improvement resides in forming finely divided droplets of reactive liquid and controlling the temperature, pressure and concentration of said Lewis gas of opposite character to provide for (a) the formation of said complex between said gas and reactive liquid or (b) the breaking of said complex and the recovery of the atomized droplets of reactive liquid.
摘要翻译：本发明涉及在相反特征的反应性液体中形成路易斯酸性或路易斯碱性气体的复合物的装置和方法的改进，以及所述络合物与从其中回收的路易斯气体相关的破碎（碎裂）。改进在于形成精细分离的反应液体的液滴并控制相反特性的所述Lewis气体的温度，压力和浓度以提供（a）在所述气体和反应性液体之间形成所述络合物，或（b）说复合物和反应液体的雾化液滴的回收。

5. 发明授权

US07282084B2 Liquid media containing Lewis basic reactive compounds for storage and delivery of Lewis acidic gases 有权
标题翻译：含有路易斯碱性反应性化合物的液体介质用于储存和输送路易斯酸性气体
公开(公告)号：US07282084B2
公开(公告)日：2007-10-16
申请号：US10966803
申请日：2004-10-15
申请人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein
发明人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein
IPC分类号： F17C11/00 , B01D19/00
CPC分类号： F17C11/00 , F17C2223/0123
摘要： This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis acidity, particularly hazardous specialty gases such as BF3 and diborane, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis basicity capable of effecting a reversible reaction between a gas having Lewis acidity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
摘要翻译：本发明涉及用于电子工业中的具有路易斯酸性的气体的低压储存和输送系统的改进，特别是危险特种气体如BF 3和乙硼烷。改进在于将气体储存在结合有能够在具有路易斯酸度的气体之间实现可逆反应的路易斯碱性的反应性化合物的液体中。反应性化合物包括溶解，悬浮，分散或以其它方式与非挥发性液体混合的反应性物质。

6. 发明授权

US07736420B2 Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom 有权
标题翻译：用于形成路易斯气体/液体体系的接触方法和从其中回收路易斯气体
公开(公告)号：US07736420B2
公开(公告)日：2010-06-15
申请号：US11437326
申请日：2006-05-19
申请人： Wayne Thomas McDermott , Philip Bruce Henderson , Daniel Joseph Tempel , Ronald Martin Pearlstein , James Joseph Hart , Rosaleen Patricia Morris-Oskanian , Diwakar Garg
发明人： Wayne Thomas McDermott , Philip Bruce Henderson , Daniel Joseph Tempel , Ronald Martin Pearlstein , James Joseph Hart , Rosaleen Patricia Morris-Oskanian , Diwakar Garg
IPC分类号： B01D53/14
CPC分类号： B01D53/1493 , B01D53/1456 , B01D2258/0216 , C01B7/0706 , C01B7/093 , C01B7/135 , C01B7/191 , C01B9/00 , C01B17/16 , C01B19/04 , C01C1/003 , C01C3/06 , F17C11/00
摘要： The invention relates to an improvement in apparatus and process for the formation of a complex of Lewis acidic or Lewis basic gases in a reactive liquid of opposite character and for the breaking (fragmentation) of said complex associated with the recovery of the Lewis gas therefrom. The improvement resides in forming finely divided droplets of reactive liquid and controlling the temperature, pressure and concentration of said Lewis gas of opposite character to provide for (a) the formation of said complex between said gas and reactive liquid or (b) the breaking of said complex and the recovery of the atomized droplets of reactive liquid.
摘要翻译：本发明涉及在相反特征的反应性液体中形成路易斯酸性或路易斯碱性气体的复合物的装置和方法的改进，以及所述络合物与从其中回收的路易斯气体相关的破碎（碎裂）。改进在于形成精细分离的反应液体的液滴并控制相反特性的所述Lewis气体的温度，压力和浓度以提供（a）在所述气体和反应性液体之间形成所述络合物，或（b）说复合物和反应液体的雾化液滴的回收。

7. 发明授权

US07087102B2 Process for purification of germane 有权
标题翻译：锗烷纯化方法
公开(公告)号：US07087102B2
公开(公告)日：2006-08-08
申请号：US10788223
申请日：2004-02-26
申请人： Howard Paul Withers, Jr. , Philip Bruce Henderson
发明人： Howard Paul Withers, Jr. , Philip Bruce Henderson
IPC分类号： B01D53/04
CPC分类号： C22B41/00 , C22B3/24 , Y02P10/234
摘要： A process and system for the synthesis and/or purification of crude germane to provide a purified germane product are disclosed herein. In one aspect of the present invention, there is provided a process for making a purified germane product containing less than 1 volume percent of one or more germanium-containing impurities comprising: providing a crude germane fluid; passing at least a portion of the crude germane fluid through a first adsorbent which selectively adsorbs water and carbon dioxide contained therein and withdrawing therefrom a partially purified germane fluid; passing at least a portion of the partially purified germane fluid through a second adsorbent which selectively adsorbs the one or more germanium-containing impurities contained therein and withdrawing therefrom a hydrogen-enriched purified germane fluid; and separating the purified germane product hydrogen from the hydrogen-enriched purified germane fluid.
摘要翻译：本文公开了用于合成和/或纯化粗锗烷以提供纯化的锗烷产物的方法和系统。在本发明的一个方面，提供了一种制备含有少于1体积％的一种或多种含锗杂质的纯化的锗烷产物的方法，包括：提供粗锗烷流体; 使至少一部分粗锗烷流体通过第一吸附剂，该第一吸附剂选择性地吸附其中含有的水和二氧化碳并从其中提取部分纯化的锗烷流体; 使部分纯化的锗烷流体的至少一部分通过第二吸附剂，所述第二吸附剂选择性地吸附其中含有的一种或多种含锗杂质并从其中提取富含氢的纯化的锗烷流体; 并将纯化的锗烷产物氢与富氢纯化的锗烷流体分离。

8. 发明授权

US06764670B2 Removal of thiothionylfluoride from sulfur tetrafluoride 失效
标题翻译：从四氟化硫中除去硫代硫代氟化物
公开(公告)号：US06764670B2
公开(公告)日：2004-07-20
申请号：US10016034
申请日：2001-11-01
申请人： Philip Bruce Henderson
发明人： Philip Bruce Henderson
IPC分类号： C01B1745
CPC分类号： C01B17/4523 , B01J20/20 , B01J20/28064 , B01J20/3416 , B01J20/3458 , B01J20/3483
摘要： A process for removing thiothionylfluoride from a composition containing sulfur tetrafluoride and thiothionylfluoride includes contacting the composition with a high surface area material, such as activated carbon. The process can provide purified sulfur tetrafluoride free of thiothionylfluoride. The high surface area material can be replaced for further processing. Alternatively, the material can be regenerated by contacting it with a gas mixture of oxygen and nitrogen at 150-450° C. and converting the adsorbed elemental sulfur to sulfur dioxide without oxidation of the material.
摘要翻译：从含有四氟化硫和硫代硫代氟化物的组合物中除去硫代硫代氟化物的方法包括使组合物与高表面积的材料如活性炭接触。该方法可以提供不含硫代硫代氟化物的纯化的四氟化硫。可以更换高表面积材料进行进一步加工。或者，可以通过使其与氧和氮的气体混合物在150-450℃下接触并将吸附的元素硫转化成二氧化硫而不使材料氧化，从而再生材料。

9. 发明授权

US06669760B1 Separation of C2F6 from CF4 by adsorption on activated carbon 失效
标题翻译：通过在活性炭上吸附分离C2F6与CF4
公开(公告)号：US06669760B1
公开(公告)日：2003-12-30
申请号：US10409230
申请日：2003-04-08
申请人： Philip Bruce Henderson , Timothy Christopher Golden
发明人： Philip Bruce Henderson , Timothy Christopher Golden
IPC分类号： B01D5304
CPC分类号： B01D53/04 , B01D53/0462 , B01D53/047 , B01D2253/102 , B01D2253/304 , B01D2257/2066 , B01D2259/40083 , Y02C20/30 , Y10S95/901
摘要： This invention relates to an improvement in a process for removing C2F6 as an impurity from a CF4 containing gas, preferably CF4 produced by the reaction of F2 with carbon. The improvement in the process comprises the steps: contacting the CF4 containing gas, containing C2F6 impurity, with an activated carbon having a CCl4 activity from 43 to 55 in an adsorption bed to effect adsorption of the C2F6 impurity; and, recovering purified CF4 product in the effluent from the adsorbent bed.
摘要翻译：本发明涉及从含有CF 4的气体中除去作为杂质的C2F6的方法的改进，优选通过F2与碳的反应制备的CF4。该方法的改进包括以下步骤：在吸附床中将含有C 2 F 6杂质的含CF 4的气体与CCl 4活性的活性炭从43至55接触以实现C2F6杂质的吸附; 并且在来自吸附床的流出物中回收纯化的CF 4产物。

10. 发明授权

US08404024B2 Recovery of NF3 from adsorption operation 有权
标题翻译：吸附操作回收NF3
公开(公告)号：US08404024B2
公开(公告)日：2013-03-26
申请号：US12760843
申请日：2010-04-15
申请人： Philip Bruce Henderson , Patrick Michael Colleran , Forrest Eli Hulbert
发明人： Philip Bruce Henderson , Patrick Michael Colleran , Forrest Eli Hulbert
IPC分类号： B01D59/26
CPC分类号： B01D53/0462 , B01D53/565 , B01D53/685 , B01D2253/108 , B01D2256/26 , B01D2257/2045 , B01D2257/402 , B01D2257/504 , B01D2257/80 , B01D2258/0216 , B01D2259/40056 , B01D2259/4006 , B01D2259/402 , Y02C10/08 , Y02C20/10
摘要： During the conventional temperature swing adsorption (TSA) process, NF3 co-adsorbed with the impurities is vented during regeneration. This invention is a novel TSA cycle in which the co-adsorbed NF3 is recovered. In this novel TSA cycle, a control scheme is used to stop the adsorption prior to the saturation of the adsorber with impurities and use a recovery purge gas (either co-current or counter-current) to release the co-adsorbed NF3 off the saturated adsorber. The effluent of the inert purge gas can be combined with the effluent of the on-stream vessel or can be recycled to the feed of the on-stream vessel. 10%-100% of the co-adsorbed NF3 is recovered and made available as product in this novel TSA cycle. Thus the overall process yield of NF3 is increased. The removing of the co-adsorbed NF3 from the adsorber also prevents adsorber degradation thus prolonging the useful life of the adsorber.
摘要翻译：在传统的变温吸附（TSA）过程中，在再生期间与杂质共吸附的NF3被排出。本发明是一种新的TSA循环，其中回收了共吸附的NF3。在这种新型的TSA循环中，使用控制方案在吸附剂饱和之前停止吸附，并使用回收吹扫气体（或者是电流或逆流）来释放饱和吸附的NF3。吸附剂。惰性吹扫气体的流出物可以与流动容器的流出物组合，或者可以再循环到流动容器的进料中。共同吸附的NF3的10％-100％被回收，并在本新型TSA循环中作为产品获得。因此，NF3的总工艺产量增加。从吸附器除去共吸附的NF3也可以防止吸附剂的降解，从而延长吸附器的使用寿命。

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