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1. 发明申请

US20100053809A1 EMBEDDED SERVO ON TRACK FOR BIT-PATTERNED MEDIA (BPM) 有权
标题翻译：嵌入式服务器用于比特型媒体（BPM）
公开(公告)号：US20100053809A1
公开(公告)日：2010-03-04
申请号：US12202570
申请日：2008-09-02
申请人： Dieter Klaus Weller , Hans Jurgen Richter , David S. Kuo , Kim Yang Lee
发明人： Dieter Klaus Weller , Hans Jurgen Richter , David S. Kuo , Kim Yang Lee
IPC分类号： G11B5/127 , B05D5/12
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59688 , G11B5/743 , G11B5/855
摘要： A method of making a disc for a computer disc drive and a disc made in accordance with the same. The disc includes a deposited magnetic layer of a thin film medium over a disc-shaped substrate. A master pattern having a plurality of tracks is recorded on the disc. Each track on the disc includes a plurality of magnetic islands, each having a size and magnetic properties. The size and/or magnetic properties of one or more of the magnetic islands of each track are modulated such that each track has a modulation frequency, so as to imprint a magnetic topology on the disc. The modulation frequency of each track is either a fundamental frequency or an overtone of the fundamental frequency.
摘要翻译：一种制造用于计算机盘驱动器的盘的方法和根据其制造的盘。盘包括在盘形基底上的薄膜介质的沉积磁性层。具有多个轨迹的主图案被记录在盘上。盘上的每个轨道包括多个磁岛，每个磁岛具有尺寸和磁性。每个磁道的一个或多个磁岛的尺寸和/或磁性能被调制，使得每个轨道具有调制频率，以便在磁盘上印刷磁拓扑。每个轨道的调制频率是基频或基频的泛音。

2. 发明授权

US08154813B2 Embedded servo on track for bit-patterned device 有权
标题翻译：嵌入式伺服轨道上的位图案设备
公开(公告)号：US08154813B2
公开(公告)日：2012-04-10
申请号：US12202570
申请日：2008-09-02
申请人： Dieter Klaus Weller , Hans Jurgen Richter , David S. Kuo , Kim Yang Lee
发明人： Dieter Klaus Weller , Hans Jurgen Richter , David S. Kuo , Kim Yang Lee
IPC分类号： G11B5/02 , G11B5/596
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59688 , G11B5/743 , G11B5/855
摘要： A method of making a disc for a computer disc drive and a disc made in accordance with the same. The disc includes a deposited magnetic layer of a thin film medium over a disc-shaped substrate. A master pattern having a plurality of tracks is recorded on the disc. Each track on the disc includes a plurality of magnetic islands, each having a size and magnetic properties. The size and/or magnetic properties of one or more of the magnetic islands of each track are modulated such that each track has a modulation frequency, so as to imprint a magnetic topology on the disc. The modulation frequency of each track is either a fundamental frequency or an overtone of the fundamental frequency.
摘要翻译：一种制造用于计算机盘驱动器的盘的方法和根据其制造的盘。盘包括在盘形基底上的薄膜介质的沉积磁性层。具有多个轨道的主图案被记录在盘上。盘上的每个轨道包括多个磁岛，每个磁岛具有尺寸和磁性。每个磁道的一个或多个磁岛的尺寸和/或磁性能被调制，使得每个轨道具有调制频率，以便在磁盘上印刷磁拓扑。每个轨道的调制频率是基频或基频的泛音。

3. 发明申请

US20110128647A1 METHOD OF DISK ALIGNMENT USING PRINTED ALIGNMENT MARKS 有权
标题翻译：使用打印对齐标记进行磁盘对准的方法
公开(公告)号：US20110128647A1
公开(公告)日：2011-06-02
申请号：US12629791
申请日：2009-12-02
申请人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
发明人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
IPC分类号： G11B21/02 , G11B5/82 , G11B33/00 , G11B33/10
CPC分类号： G11B25/043 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T29/49021
摘要： Processes include aligning a disc with a template at a location so that the pattern from the template is transferred to the disc in a relative orientation. The relative orientation provides that when the disc with the transferred pattern is finally assembled into a hard disc drive, an inner diameter of the spindle hole of the disc may be abutted against an outer diameter of the disc drive spindle, and the data-containing patterns on the discs will be aligned concentrically with a center of the disc drive spindle. While the data-containing patterns are aligned concentrically with the disc drive spindle, the substrate itself is allowed to be non-concentric. Still other aspects include a disc having eccentric formations including PIM and one or more of bit patterns and servo information formed on a disc surface, the eccentricity of the formations is determined based on an expected difference between the radius of the spindle hole of the disc and the radius of the spindle on which the disc will be placed during assembly, with the PIM used to determine the angular alignment of the disc with the spindle.
摘要翻译：过程包括将光盘与模板在一个位置对齐，使得来自模板的图案以相对方向被传送到光盘。相对方向规定，当具有转印图案的光盘最终组装成硬盘驱动器时，盘的主轴孔的内径可以抵靠盘驱动主轴的外径，并且包含数据的图案碟盘将与盘片驱动主轴的中心同心对齐。当包含数据的图案与盘驱动器心轴同心对准时，衬底本身被允许为非同心的。其它方面还包括具有包括PIM和形成在盘表面上的位图形和伺服信息中的一种或多种的偏心构造的盘，基于盘的主轴孔的半径和在组装过程中将放置光盘的主轴的半径，PIM用于确定光盘与主轴的角度对齐。

4. 发明申请

US20100062282A1 BIT PATTERNED MEDIA 有权
标题翻译：位图形媒体
公开(公告)号：US20100062282A1
公开(公告)日：2010-03-11
申请号：US12208095
申请日：2008-09-10
申请人： Bing K. Yen , Jim Hennessey , Eric Freeman , Kim Yang Lee , David S. Kuo , Mark Ostrowski
发明人： Bing K. Yen , Jim Hennessey , Eric Freeman , Kim Yang Lee , David S. Kuo , Mark Ostrowski
IPC分类号： G11B5/127 , B05D3/12
CPC分类号： G11B5/84 , B82Y10/00 , G11B5/743 , G11B5/82 , G11B5/855
摘要： The invention relates to bit patterned recording media having a stop layer for chemical mechanical polishing. One embodiment of the present invention is a method of manufacturing a magnetic recording medium comprising the step of planarizing by chemical mechanical polishing until the stop layer is reached. The present invention also provides a magnetic recording medium having a stop layer.
摘要翻译：本发明涉及具有用于化学机械抛光的停止层的位图形记录介质。本发明的一个实施例是一种制造磁记录介质的方法，包括通过化学机械抛光进行平面化的步骤，直到达到停止层。本发明还提供一种具有停止层的磁记录介质。

5. 发明授权

US08792201B2 Method of disc alignment using printed alignment marks 有权
标题翻译：使用印刷对准标记的盘对准方法
公开(公告)号：US08792201B2
公开(公告)日：2014-07-29
申请号：US12629791
申请日：2009-12-02
申请人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
发明人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
IPC分类号： G11B21/02 , G11B5/82 , B82Y10/00 , G11B5/855 , G11B5/74 , G11B25/04
CPC分类号： G11B25/043 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T29/49021
摘要： Processes include aligning a disc with a template at a location so that the pattern from the template is transferred to the disc in a relative orientation. The relative orientation provides that when the disc with the transferred pattern is finally assembled into a hard disc drive, an inner diameter of the spindle hole of the disc may be abutted against an outer diameter of the disc drive spindle, and the data-containing patterns on the discs will be aligned concentrically with a center of the disc drive spindle. While the data-containing patterns are aligned concentrically with the disc drive spindle, the substrate itself is allowed to be non-concentric. Still other aspects include a disc having eccentric formations including PIM and one or more of bit patterns and servo information formed on a disc surface, the eccentricity of the formations is determined based on an expected difference between the radius of the spindle hole of the disc and the radius of the spindle on which the disc will be placed during assembly, with the PIM used to determine the angular alignment of the disc with the spindle.
摘要翻译：过程包括将光盘与模板在一个位置对齐，使得来自模板的图案以相对方向被传送到光盘。相对方向规定，当具有转印图案的光盘最终组装成硬盘驱动器时，盘的主轴孔的内径可以抵靠盘驱动主轴的外径，并且包含数据的图案碟盘将与盘片驱动主轴的中心同心对齐。当包含数据的图案与盘驱动器心轴同心对准时，衬底本身被允许为非同心的。其它方面还包括具有包括PIM和形成在盘表面上的位图形和伺服信息中的一种或多种的偏心构造的盘，基于盘的主轴孔的半径和在组装过程中将放置光盘的主轴的半径，PIM用于确定光盘与主轴的角度对齐。

6. 发明申请

US20110038082A1 COMBINED CMP AND ETCH PLANARIZATION 审中-公开
标题翻译：组合CMP和ETCH平面化
公开(公告)号：US20110038082A1
公开(公告)日：2011-02-17
申请号：US12540185
申请日：2009-08-12
申请人： Zhaohui Fan , David S. Kuo , Kim Yang Lee
发明人： Zhaohui Fan , David S. Kuo , Kim Yang Lee
IPC分类号： G11B5/74 , B05D5/12
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855
摘要： A magnetic device having a magnetic feature, the magnetic feature including magnetic portions, a stop layer portion on each magnetic portion, and a region of non-magnetic material adjacent to the magnetic portions and the stop layer portions, where the stop layer portions define planar upper boundaries for the magnetic portions and an endpoint in planarization of the magnetic feature.
摘要翻译：具有磁性特征的磁性装置，磁性部分包括磁性部分，每个磁性部分上的停止层部分和与磁性部分和止挡层部分相邻的非磁性材料区域，其中阻挡层部分限定平面磁性部分的上边界和磁性特征的平坦化终点。

7. 发明申请

US20110027407A1 PROFILE CONTROL UTILIZING A RECESSED IMPRINT TEMPLATE 审中-公开
标题翻译：配置文件控制使用一个被压印的模版
公开(公告)号：US20110027407A1
公开(公告)日：2011-02-03
申请号：US12510894
申请日：2009-07-28
申请人： Kim Yang Lee , David S. Kuo , Zhaoning Yu
发明人： Kim Yang Lee , David S. Kuo , Zhaoning Yu
IPC分类号： B29C59/00 , B44C1/22 , C23F1/00 , G03F7/20
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , H01L2251/105
摘要： An imprint template is provided with a shallower field bordering the patterned region. The shallower field can be formed with additional lithography/etch steps after (or before) the formation of the features in the patterned region. The template is used to establish a thin film pattern with a field thickness that is shallower than the pattern. A shallower field bordering the patterned region alleviates sidewall re-deposition during ion mill. In a planarization/etch-back process, a thinner field helps to achieve a flat top surface by compensating for the thickness variation caused by different filling ratios. Fabrication of the recessed field template comprises a multi-step patterning process. The initial patterns are formed using a convention fabrication process. A second patterning step is used to reduce the height of the field region, which can be applied by coating the “half-finished” template with a suitable resist pattern and patterning the resist using a second lithography step that is aligned to the original pattern. Template material in the field region is then etched with the resist as a mask, forming a template with a recessed field region after the remaining resist is removed. It should be appreciated that the order of these etch steps can be reversed to obtain the same result.
摘要翻译：压印模板设置有与图案化区域相邻的较浅的场。可以在（或之前）在图案化区域中形成特征之后的附加光刻/蚀刻步骤形成较浅的场。该模板用于建立具有比图案浅的场厚的薄膜图案。与图案区域相邻的较浅的场减轻离子磨中的侧壁再沉积。在平坦化/回蚀刻工艺中，通过补偿由不同填充率引起的厚度变化，较薄的场有助于实现平坦的顶表面。凹陷场模板的制造包括多步图案化工艺。使用惯例制作工艺形成初始图案。使用第二图案化步骤来减小场区域的高度，其可以通过用合适的抗蚀剂图案涂覆“半成品”模板并且使用与原始图案对准的第二光刻步骤来图案化抗蚀剂来施加。然后用抗蚀剂作为掩模蚀刻场区域中的模板材料，在除去剩余的抗蚀剂之后，形成具有凹陷场区域的模板。应当理解，可以颠倒这些蚀刻步骤的顺序以获得相同的结果。

8. 发明授权

US09284649B2 Method of patterning a stack 有权
标题翻译：堆叠图案的方法
公开(公告)号：US09284649B2
公开(公告)日：2016-03-15
申请号：US13173906
申请日：2011-06-30
申请人： Michael R. Feldbaum , Justin Jia-Jen Hwu , David S. Kuo , Gennady Gauzner , Kim Yang Lee , Li-Ping Wang
发明人： Michael R. Feldbaum , Justin Jia-Jen Hwu , David S. Kuo , Gennady Gauzner , Kim Yang Lee , Li-Ping Wang
IPC分类号： B32B9/00 , C23F4/00 , G03F7/00 , G11B5/855 , B82Y10/00 , B82Y40/00
CPC分类号： C23F4/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/855 , Y10T428/265
摘要： The embodiments disclose a method of fabricating a stack, including replacing a metal layer of a stack imprint structure with an oxide layer, patterning the oxide layer stack using chemical etch processes to transfer the pattern image and cleaning etch residue from the stack imprint structure to substantially prevent contamination of the metal layers.
摘要翻译：实施方案公开了一种制造叠层的方法，包括用氧化物层代替堆叠印记结构的金属层，使用化学蚀刻工艺对氧化物层堆叠进行图案化以将图案图像转移并将蚀刻残留物从堆叠印记结构清洗到基本上防止金属层的污染。

9. 发明申请

US20100119778A1 ULTRA THIN ALIGNMENT WALLS FOR DI-BLOCK COPOLYMER 失效
标题翻译：用于双嵌段共聚物的超薄对准壁
公开(公告)号：US20100119778A1
公开(公告)日：2010-05-13
申请号：US12270511
申请日：2008-11-13
申请人： Kim Yang Lee , David S. Kuo , Dorothea Buechel , Kalman Pelhos
发明人： Kim Yang Lee , David S. Kuo , Dorothea Buechel , Kalman Pelhos
IPC分类号： B32B3/30 , B44C1/22
CPC分类号： G11B5/855 , B81C1/00111 , B81C2201/0154 , B81C2201/038 , Y10T428/2457 , Y10T428/26
摘要： Methods comprising providing a pre-patterned substrate having an array of thick walls, depositing a conforming layer on the pre-patterned substrate, etching the conforming layer from the top of the thick walls and the space between the walls, and etching the thick walls while leaving thin walls of conforming layer.
摘要翻译：方法包括提供具有厚壁阵列的预图案化衬底，在预图案化衬底上沉积合适层，从厚壁的顶部和壁之间的空间蚀刻适形层，并蚀刻厚壁，同时留下薄壁的合格层。

10. 发明申请

US20130004763A1 METHOD OF PATTERNING A STACK 有权
标题翻译：堆叠堆栈的方法
公开(公告)号：US20130004763A1
公开(公告)日：2013-01-03
申请号：US13173906
申请日：2011-06-30
申请人： Michael R. Feldbaum , Justin Jia-Jen Hwu , David S. Kuo , Gennady Gauzner , Kim Yang Lee , Li-Ping Wang
发明人： Michael R. Feldbaum , Justin Jia-Jen Hwu , David S. Kuo , Gennady Gauzner , Kim Yang Lee , Li-Ping Wang
IPC分类号： B32B3/00 , C23F1/08 , B32B19/00 , C23F1/00
CPC分类号： C23F4/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/855 , Y10T428/265
摘要： The embodiments disclose a method of fabricating a stack, including replacing a metal layer of a stack imprint structure with an oxide layer, patterning the oxide layer stack using chemical etch processes to transfer the pattern image and cleaning etch residue from the stack imprint structure to substantially prevent contamination of the metal layers.
摘要翻译：实施方案公开了一种制造叠层的方法，包括用氧化物层代替堆叠印记结构的金属层，使用化学蚀刻工艺对氧化物层堆叠进行图案化以将图案图像转移并将蚀刻残留物从堆叠印记结构清洗到基本上防止金属层的污染。

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