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1. 发明授权

US07193492B2 Monolithic MEMS device having a balanced cantilever plate 失效
标题翻译：具有平衡悬臂板的单片MEMS器件
公开(公告)号：US07193492B2
公开(公告)日：2007-03-20
申请号：US10953612
申请日：2004-09-29
申请人： Dennis S. Greywall , Dan Mark Marom
发明人： Dennis S. Greywall , Dan Mark Marom
IPC分类号： H01H51/22
CPC分类号： B81B3/0021 , B81B2201/042 , G02B6/3518 , G02B6/357 , G02B6/3584 , G02B26/0841 , H01H59/0009
摘要： A MEMS device fabricated from a single multi-layered wafer, which alleviates the alignment problem associated with a two-piece prior-art design. In one embodiment, the MEMS device has a stationary part and a movable part rotatably coupled to the stationary part. The stationary part has an electrode and a first conducting structure electrically isolated from the electrode. The movable part has a rotatable plate and a second conducting structure located on the plate and electrically connected to the plate. The mass and location of the second conducting structure are selected such as to compensate for the plate's imbalance with respect to the rotation axis. In addition, at the rest position, the first and second conducting structures form, around the electrode, a substantially continuous barrier adapted to provide electrical shielding for the electrode. The movable part is adapted to rotate with respect to the stationary part in response to a voltage applied between the second conducting structure and the electrode such that the movable part cannot come into physical contact with the electrode during the rotation, which alleviates the snap-down problem inherent to many prior-art devices.
摘要翻译：由单个多层晶片制造的MEMS器件，其减轻了与两件式现有技术设计相关联的对准问题。在一个实施例中，MEMS器件具有固定部分和可旋转地联接到静止部分的可动部分。固定部分具有电极和与电极电隔离的第一导电结构。可移动部件具有可旋转板和位于板上并与板电连接的第二导电结构。选择第二导电结构的质量和位置，以补偿板相对于旋转轴的不平衡。此外，在静止位置，第一和第二导电结构在电极周围形成适于为电极提供电屏蔽的基本上连续的屏障。响应于施加在第二导电结构和电极之间的电压，可移动部分适于相对于静止部分旋转，使得可移动部件在旋转期间不能与电极物理接触，这减轻了坠落许多现有技术装置固有的问题。

2. 发明授权

US07180652B2 Mars optical modulators 有权
标题翻译：火星光学调制器
公开(公告)号：US07180652B2
公开(公告)日：2007-02-20
申请号：US11060870
申请日：2005-02-18
申请人： David John Bishop , Keith Wayne Goossen , Dennis S. Greywall , James Albert Walker
发明人： David John Bishop , Keith Wayne Goossen , Dennis S. Greywall , James Albert Walker
IPC分类号： G02B26/00
CPC分类号： G02B26/0825
摘要： The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
摘要翻译：该规范描述了改进的移动防反射开关（MARS）器件结构，其大大消除了可移动膜上的电荷积累，并且减少了引起膜卷曲的应力。改进的装置使用由单晶硅制成的可移动膜。

3. 发明授权

US06993219B2 Waveguide/MEMS switch 有权
标题翻译：波导/ MEMS开关
公开(公告)号：US06993219B2
公开(公告)日：2006-01-31
申请号：US10387852
申请日：2003-03-13
申请人： Vladimir A. Aksyuk , Ho Bun Chan , Dan Fuchs , Dennis S. Greywall , Maria E. Simon
发明人： Vladimir A. Aksyuk , Ho Bun Chan , Dan Fuchs , Dennis S. Greywall , Maria E. Simon
IPC分类号： G02B6/35
CPC分类号： G02B6/3516 , G02B6/2821 , G02B6/3518 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B6/3596
摘要： A waveguide/MEMS switch adapted to redirect optical signals between output ports based on a phase shift change generated by motion of one or more movable MEMS mirrors incorporated therein. Advantageously, such a switch has a relatively high switching speed and low power consumption. A switch according to one embodiment of the invention includes a planar waveguide device and a planar MEMS device. The MEMS device implements in-plane (i.e., parallel to the plane of that device) translation of the mirrors. As a result, in certain embodiments of the switch, the waveguide and MEMS devices are connected into a compact planar assembly.
摘要翻译：一种波导/ MEMS开关，其适于基于由其中结合的一个或多个可移动MEMS镜的运动产生的相移变化在输出端口之间重定向光信号。有利地，这种开关具有相对高的开关速度和低功耗。根据本发明的一个实施例的开关包括平面波导器件和平面MEMS器件。 MEMS器件实现了反射镜的平面（即平行于该器件的平面）平移。结果，在开关的某些实施例中，波导和MEMS器件被连接到紧凑的平面组件中。

4. 发明授权

US06924581B2 Split spring providing multiple electrical leads for MEMS devices 有权
标题翻译：分离弹簧为MEMS器件提供多个电引线
公开(公告)号：US06924581B2
公开(公告)日：2005-08-02
申请号：US10261087
申请日：2002-09-30
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： B81B3/00 , B81C99/00 , G02B26/08 , H02N1/00
CPC分类号： B81B3/0051 , B81B2201/038 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , B81C1/00214 , G02B26/0841 , H02N1/006
摘要： An integrated device has a spring having at least two split parts that are not in direct electrical contact with each other. The integrated device also has a substrate and a movable part, where both parts of the spring are configured between the substrate and the movable part to support the movable part on the substrate. The two or more split parts of the spring enable two or more independent voltages to be applied to the movable part. The split spring of the invention may be used in MEMS devices for optical switches in order to provide independent voltages to the movable part(s) in those devices.
摘要翻译：集成装置具有至少两个彼此不直接电接触的分开部分的弹簧。集成装置还具有基板和可动部，弹簧的两部分构造在基板和可动部之间，以支撑基板上的可动部。弹簧的两个或多个分开部分能够将两个或多个独立电压施加到可动部件。本发明的裂缝弹簧可以用于光学开关的MEMS装置中，以便为这些装置中的可移动部件提供独立的电压。

5. 发明授权

US06442307B1 Solder-packaged optical MEMs device and method for making the same 有权
标题翻译：焊料封装的光学MEM器件及其制造方法
公开(公告)号：US06442307B1
公开(公告)日：2002-08-27
申请号：US09705350
申请日：2000-11-03
申请人： Dustin W. Carr , Dennis S. Greywall , Sungho Jin , Flavio Pardo , Hyongsok Soh
发明人： Dustin W. Carr , Dennis S. Greywall , Sungho Jin , Flavio Pardo , Hyongsok Soh
IPC分类号： G02B626
CPC分类号： G02B6/3584 , B81B2201/042 , B81C3/002 , B81C2203/035 , G02B6/266 , G02B6/3518 , G02B6/3556 , G02B6/356 , G02B6/357 , G02B6/3594 , G02B26/0841 , G02B2006/12104
摘要： In accordance with the invention, a MEMs mirror device comprises a mirror layer including a frame structure and at least one mirror movably coupled to the frame and an actuator layer including at least one conductive path and at least one electrode for moving the mirror. The mirror layer and the actuator layer are provided with metallization pads and are bonded together in lateral alignment and with predetermined vertical gap spacing by solder bonds between the pads. The device has utility in optical cross connection, variable attenuation and power gain equalization.
摘要翻译：根据本发明，MEM镜反射镜装置包括镜面层，该镜层包括框架结构和至少一个可移动地联接到框架的镜子，以及包括至少一个导电路径和至少一个用于移动镜子的电极的致动器层。镜层和致动器层设置有金属化焊盘，并且通过焊盘之间的焊接接合以横向对准并且具有预定的垂直间隙间隔结合在一起。该器件具有光交叉连接，可变衰减和功率增益均衡功能。

6. 发明授权

US08553903B2 Sound-direction detector having a miniature sensor 有权
标题翻译：声光检测器具有微型传感器
公开(公告)号：US08553903B2
公开(公告)日：2013-10-08
申请号：US11769142
申请日：2007-06-27
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： H04R3/00
CPC分类号： H04R3/005 , H04R1/406 , H04R2430/20 , H04S2400/11
摘要： A representative embodiment of the invention provides a sound-direction detector having a miniature sensor coupled to a signal-processing block. The sensor has (i) a microphone responsive to a sound wave and (ii) a differential pressure sensor (DPS) responsive to a pressure difference induced by the sound wave between two inlet ports located in proximity to the microphone. The signal-processing block applies phase-sensitive detection to the output signal generated by the DPS, while using the output signal generated by the microphone as a reference for the phase-sensitive detection, to measure the pressure difference. The signal-processing block then determines direction to the sound-wave source based on the amplitude of the sound wave at the microphone and the measured pressure difference.
摘要翻译：本发明的代表性实施例提供一种具有耦合到信号处理块的微型传感器的声音检测器。传感器具有（i）响应于声波的麦克风和（ii）响应于位于麦克风附近的两个入口之间由声波引起的压力差的差压传感器（DPS）。信号处理块对DPS产生的输出信号应用相敏检测，同时使用由麦克风产生的输出信号作为相敏检测的参考，来测量压差。然后，信号处理块基于麦克风上的声波的振幅和所测量的压力差确定到声波源的方向。

7. 发明申请

US20090003621A1 SOUND-DIRECTION DETECTOR HAVING A MINIATURE SENSOR 有权
标题翻译：具有微型传感器的方向探测器
公开(公告)号：US20090003621A1
公开(公告)日：2009-01-01
申请号：US11769142
申请日：2007-06-27
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： H04R3/00
CPC分类号： H04R3/005 , H04R1/406 , H04R2430/20 , H04S2400/11
摘要： A representative embodiment of the invention provides a sound-direction detector having a miniature sensor coupled to a signal-processing block. The sensor has (i) a microphone responsive to a sound wave and (ii) a differential pressure sensor (DPS) responsive to a pressure difference induced by the sound wave between two inlet ports located in proximity to the microphone. The signal-processing block applies phase-sensitive detection to the output signal generated by the DPS, while using the output signal generated by the microphone as a reference for the phase-sensitive detection, to measure the pressure difference. The signal-processing block then determines direction to the sound-wave source based on the amplitude of the sound wave at the microphone and the measured pressure difference.
摘要翻译：本发明的代表性实施例提供一种具有耦合到信号处理块的微型传感器的声音检测器。传感器具有（i）响应于声波的麦克风和（ii）响应于位于麦克风附近的两个入口之间由声波引起的压力差的差压传感器（DPS）。信号处理块对DPS产生的输出信号应用相敏检测，同时使用由麦克风产生的输出信号作为相敏检测的参考，来测量压差。然后，信号处理块基于麦克风上的声波的振幅和所测量的压力差确定到声波源的方向。

8. 发明授权

US07468828B2 Spot array generation using a MEMS light modulator 有权
标题翻译：使用MEMS光调制器的阵列阵列生成
公开(公告)号：US07468828B2
公开(公告)日：2008-12-23
申请号：US11550867
申请日：2006-10-19
申请人： Dennis S. Greywall , Dan M. Marom
发明人： Dennis S. Greywall , Dan M. Marom
IPC分类号： G02F1/01 , G02B27/00
CPC分类号： G02B26/0866 , G02B26/0841 , G02B26/085
摘要： An optical system having a spatial light modulator (SLM), in which each pixel has an optical cavity and is adapted to: (i) change the intensity of a reflected beam by changing the size of the cavity and (ii) change the phase of the reflected beam by changing the position of the cavity with respect to a reference plane. In one embodiment, the optical system has optics configured to image the apertures of an optical input mask onto the pixels of the SLM and to form an optical spot array by imaging the light reflected by the pixels onto a plane orthogonal to the plane of the mask. Each aperture can be configured to have a transmission pattern to spatially modulate the light imaged onto the corresponding pixel, thereby enabling control of the spatial mode at the corresponding spot in the optical spot array.
摘要翻译：一种具有空间光调制器（SLM）的光学系统，其中每个像素具有光学腔，并且适于：（i）通过改变空腔的尺寸来改变反射光束的强度，和（ii）反射光束通过改变空腔相对于参考平面的位置。在一个实施例中，光学系统具有光学配置以将光学输入掩模的孔径图像到SLM的像素上，并且通过将由像素反射的光成像到与掩模的平面正交的平面上而形成光点阵列。每个孔可以被配置成具有传输图案以空间调制成像到相应像素上的光，从而能够控制光点阵列中对应点处的空间模式。

9. 发明申请

US20080094682A1 SPOT ARRAY GENERATION USING A MEMS LIGHT MODULATOR 有权
标题翻译：使用MEMS光调制器的点阵生成
公开(公告)号：US20080094682A1
公开(公告)日：2008-04-24
申请号：US11550867
申请日：2006-10-19
申请人： Dennis S. Greywall , Dan M. Marom
发明人： Dennis S. Greywall , Dan M. Marom
IPC分类号： G02F1/03
CPC分类号： G02B26/0866 , G02B26/0841 , G02B26/085
摘要： An optical system having a spatial light modulator (SLM), in which each pixel has an optical cavity and is adapted to: (i) change the intensity of a reflected beam by changing the size of the cavity and (ii) change the phase of the reflected beam by changing the position of the cavity with respect to a reference plane. In one embodiment, the optical system has optics configured to image the apertures of an optical input mask onto the pixels of the SLM and to form an optical spot array by imaging the light reflected by the pixels onto a plane orthogonal to the plane of the mask. Each aperture can be configured to have a transmission pattern to spatially modulate the light imaged onto the corresponding pixel, thereby enabling control of the spatial mode at the corresponding spot in the optical spot array.
摘要翻译：一种具有空间光调制器（SLM）的光学系统，其中每个像素具有光学腔，并且适于：（i）通过改变空腔的尺寸来改变反射光束的强度，和（ii）反射光束通过改变空腔相对于参考平面的位置。在一个实施例中，光学系统具有光学配置以将光学输入掩模的孔径图像到SLM的像素上，并且通过将由像素反射的光成像到与掩模的平面正交的平面上而形成光点阵列。每个孔可以被配置成具有传输图案以空间调制成像到相应像素上的光，从而能够控制光点阵列中对应点处的空间模式。

10. 发明申请

US20080083599A1 MEMS SAFETY AND ARMING DEVICES HAVING LAUNCH AND ROTATION INTERLOCKS AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：具有发射和旋转互锁的MEMS安全和装备装置及其制造方法
公开(公告)号：US20080083599A1
公开(公告)日：2008-04-10
申请号：US11193870
申请日：2005-07-29
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： H01H35/14
CPC分类号： F42C15/26
摘要： A device, a Micro-Electrical-Mechanical-Switch (MEMS) safety and arming (S&A) device and a method of manufacturing the MEMS S&A. In one embodiment, the device includes a body and a MEMS shuttle movably coupled to the body. In this embodiment, the shuttle is configured to close a switch in response to being accelerated in two directions that are substantially orthogonal.
摘要翻译：一种器件，微机电开关（MEMS）安全和布防（S＆A）器件以及制造MEMS S＆A的方法。在一个实施例中，该装置包括主体和可移动地联接到主体的MEMS梭。在该实施例中，梭子被配置为响应于在基本正交的两个方向上加速而闭合开关。

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