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1. 发明授权

US07972421B2 Rectangular parallelepiped fluid storage and dispensing vessel 有权
标题翻译：矩形平行六面体流体储存和分配容器
公开(公告)号：US07972421B2
公开(公告)日：2011-07-05
申请号：US12401325
申请日：2009-03-10
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Phillip A. Moroco , Judith A. Moroco, legal representative
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Phillip A. Moroco
IPC分类号： B01D53/04
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。

2. 发明申请

US20090173225A1 RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL 有权
标题翻译：矩形平行流体储存和分配容器
公开(公告)号：US20090173225A1
公开(公告)日：2009-07-09
申请号：US12401325
申请日：2009-03-10
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
IPC分类号： B01D53/02 , B01J20/00 , B01J20/10 , B01J20/22 , B01J20/20
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。

3. 发明授权

US08506689B2 Rectangular parallelepiped fluid storage and dispensing vessel 有权
公开(公告)号：US08506689B2
公开(公告)日：2013-08-13
申请号：US13168987
申请日：2011-06-26
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Judith A. Moroco
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Phillip A. Moroco
IPC分类号： B01D53/04
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

4. 发明申请

US20110277846A1 RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL 有权
标题翻译：矩形平行流体储存和分配容器
公开(公告)号：US20110277846A1
公开(公告)日：2011-11-17
申请号：US13168987
申请日：2011-06-26
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
IPC分类号： F15D1/00 , B67D7/06
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。

5. 发明授权

US06991671B2 Rectangular parallelepiped fluid storage and dispensing vessel 有权
公开(公告)号：US06991671B2
公开(公告)日：2006-01-31
申请号：US10314777
申请日：2002-12-09
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers
IPC分类号： B01D53/04 , B01D53/14
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

6. 发明授权

US08821640B2 Solid precursor-based delivery of fluid utilizing controlled solids morphology 有权
标题翻译：使用受控固体形态的基于固体前体的流体输送
公开(公告)号：US08821640B2
公开(公告)日：2014-09-02
申请号：US12438502
申请日：2007-08-31
申请人： John M. Cleary , Jose I. Arno , Bryan C. Hendrix , Donn Naito , Scott Battle , John N. Gregg , Michael J. Wodjenski , Chongying Xu
发明人： John M. Cleary , Jose I. Arno , Bryan C. Hendrix , Donn Naito , Scott Battle , John N. Gregg , Michael J. Wodjenski , Chongying Xu
IPC分类号： C23C16/54 , C23C16/44 , C23C16/00 , C23C16/448
CPC分类号： C23C16/4481 , C23C14/48 , C23C16/08 , C23C16/16 , C23C16/18 , C23C16/30 , C23C16/4402 , C23C16/45525 , C23C16/45544
摘要： Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.
摘要翻译：挥发易于产生颗粒的源试剂的源试剂的装置和方法，其中通过蒸气发生系统的结构或加工特征抑制了这种颗粒产生或存在的相应源试剂蒸气。这种装置和方法适用于液体和固体源试剂，特别是固体源试剂如金属卤化物，例如氯化铪。一种具体实施方案中的源试剂由源试剂材料的多孔整体块形式构成。本发明的装置和方法有用地用于提供用于例如原子层沉积（ALD）和离子注入的应用的源试剂蒸气。

7. 发明授权

US07018448B2 Gas cabinet including integrated effluent scrubber 失效
标题翻译：燃气柜包括综合污水洗涤器
公开(公告)号：US07018448B2
公开(公告)日：2006-03-28
申请号：US10694648
申请日：2003-10-28
申请人： Michael J. Wodjenski , Jose I. Arno
发明人： Michael J. Wodjenski , Jose I. Arno
IPC分类号： B01D53/04
CPC分类号： B01D53/0446 , B01D53/0454 , B01D2253/104 , B01D2253/11 , B01D2253/202 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/40009 , B01D2259/402 , B01D2259/4525
摘要： A gas cabinet assembly for dispensing of gas to a process facility such as a semiconductor manufacturing tool. A purge gas dry scrubber is integrated with the gas flow circuitry and a venturi pump in the gas cabinet. Purge gas is flowed through the flow circuitry in the gas cabinet subsequent to on-stream dispensing of process gas through such flow circuitry, and forms a purge effluent including the residual process gas. The purge effluent is flowed through a dry scrubber unit to sorptively remove the process gas species from the purge effluent. The resultant process gas-depleted purge effluent is vented from the gas cabinet, e.g., into the ducting of the house exhaust system of the process facility. Monitoring of the relative depletion of the dry scrubbing medium in the dry scrubber may be carried out with endpoint detection, e.g., using colorimetric change techniques, toxic gas monitor devices, or PLC/CPU arrangements.
摘要翻译：一种用于将气体分配到诸如半导体制造工具的处理设备的气柜组件。吹扫气干燥洗涤器与气体流路和气柜中的文丘里泵集成。在通过这种流动电路的流程分配工艺气体之后，吹扫气体通过气体柜中的流动回路流动，并形成包括剩余工艺气体的净化流出物。清洗流出物流过干洗单元以从吹扫流出物中吸附去除工艺气体物质。所得到的工艺废气净化流出物从气柜排出，例如进入处理设备的房屋排气系统的管道。干洗涤器中干洗涤介质的相对耗尽的监测可以通过终点检测进行，例如使用比色改变技术，有毒气体监测装置或PLC / CPU装置。

8. 发明申请

US20110048063A1 COMPONENT FOR SOLAR ADSORPTION REFRIGERATION SYSTEM AND METHOD OF MAKING SUCH COMPONENT 有权
标题翻译：太阳能吸附制冷系统的组件和制造这种组件的方法
公开(公告)号：US20110048063A1
公开(公告)日：2011-03-03
申请号：US12666208
申请日：2008-06-22
申请人： J. Donald Carruthers , Karl Boggs , Luping Wang , Shaun Wilson , Jose I. Arno , Paul J. Marganski , Steven M. Bilodeau , Peng Zou , Brian Bobita , Joseph D. Sweeney , Douglas Edwards
发明人： J. Donald Carruthers , Karl Boggs , Luping Wang , Shaun Wilson , Jose I. Arno , Paul J. Marganski , Steven M. Bilodeau , Peng Zou , Brian Bobita , Joseph D. Sweeney , Douglas Edwards
IPC分类号： F25B15/00 , B01J20/00 , C09K5/00 , C01B31/08 , B01J20/26
CPC分类号： B01J20/26 , B01J20/20 , B01J20/28054 , B01J20/28092 , B01J20/30 , B01J20/305 , B01J20/3078 , B01J2220/445 , C09K5/047 , F25B17/08 , F25B27/007 , F25B35/04 , F25B37/00 , F25B2500/01
摘要： An adsorption structure is described that includes at least one adsorbent member formed of an adsorbent material and at least one porous member provided in contact with a portion of the adsorbent member to allow gas to enter and exit the portion of the adsorbent member. Such adsorption structure is usefully employed in adsorbent-based refrigeration systems. A method also is described for producing an adsorbent material, in which a first polymeric material is provided having a first density and a second polymeric material is provided having a second density, in which the second polymeric material is in contact with the first polymeric material to form a structure. The structure is pyrolyzed to form a porous adsorbent material including a first region corresponding to the first polymeric material and a second region corresponding to the second polymeric material, in which at least one of the pore sizes and the pore distribution differs between the first region and the second region.
摘要翻译：描述了吸附结构，其包括由吸附剂材料形成的至少一个吸附构件和与吸附构件的一部分接触设置的至少一个多孔构件，以允许气体进入和离开吸附构件的该部分。这种吸附结构在吸附剂型制冷系统中有用。描述了一种用于生产吸附材料的方法，其中提供具有第一密度的第一聚合物材料，并且提供具有第二密度的第二聚合物材料，其中第二聚合物材料与第一聚合物材料接触，形成一个结构。该结构被热解以形成多孔吸附材料，其包括对应于第一聚合物材料的第一区域和对应于第二聚合物材料的第二区域，其中孔径和孔分布中的至少一个在第一区域和第第二个地区。

9. 发明申请

US20100255198A1 SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS MORPHOLOGY 有权
标题翻译：使用固体前驱体的流体利用控制固体物质的流体
公开(公告)号：US20100255198A1
公开(公告)日：2010-10-07
申请号：US12438502
申请日：2007-08-31
申请人： John M. Cleary , Jose I. Arno , Bryan C. Hendrix , Donn Naito , Scott Battle , John N. Gregg , Michael J. Wodjenski , Chongying Xu
发明人： John M. Cleary , Jose I. Arno , Bryan C. Hendrix , Donn Naito , Scott Battle , John N. Gregg , Michael J. Wodjenski , Chongying Xu
IPC分类号： C23C16/44 , C23C16/00
CPC分类号： C23C16/4481 , C23C14/48 , C23C16/08 , C23C16/16 , C23C16/18 , C23C16/30 , C23C16/4402 , C23C16/45525 , C23C16/45544
摘要： Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.
摘要翻译：挥发易于产生颗粒的源试剂的源试剂的装置和方法，其中通过蒸气发生系统的结构或加工特征抑制了这种颗粒产生或存在的相应源试剂蒸气。这种装置和方法适用于液体和固体源试剂，特别是固体源试剂如金属卤化物，例如氯化铪。一种具体实施方案中的源试剂由源试剂材料的多孔整体块形式构成。本发明的装置和方法有用地用于提供用于例如原子层沉积（ALD）和离子注入的应用的源试剂蒸气。

10. 发明授权

US07780747B2 Apparatus and method for hydrogen generation from gaseous hydride 失效
标题翻译：氢气生成氢气的装置及方法
公开(公告)号：US07780747B2
公开(公告)日：2010-08-24
申请号：US10575556
申请日：2004-10-14
申请人： J. Donald Carruthers , Jose I. Arno
发明人： J. Donald Carruthers , Jose I. Arno
IPC分类号： C01B3/04
CPC分类号： B01D53/228 , B01D2257/108 , C01B3/04 , C01B6/00 , C01B2203/066 , F17C11/005 , F17C2205/0338 , F17C2205/0391 , H01M8/04208 , H01M8/04216 , H01M8/065 , Y02E60/321 , Y02E60/364
摘要： An apparatus and method including storage and dispensing vessels to safely store and dispense gaseous hydrides, where the storage and dispensing vessels contain a solid-phase physical sorbent medium having a physically sorptive affinity for gaseous hydrides, and wherein the gaseous hydride is decomposed in the apparatus to generate hydrogen gas. The gaseous hydrides include, but are not limited to, silane, germane, stibine and diborane. The gaseous hydrides decompose spontaneously and/or decomposition is enhanced using surface modified adsorbents. The hydrogen generated by the apparatus may be used in a fuel cell or other hydrogen gas consuming unit.
摘要翻译：一种装置和方法，包括储存和分配容器以安全地存储和分配气态氢化物，其中所述储存和分配容器含有对气态氢化物具有物理吸附亲和性的固相物理吸附剂介质，并且其中所述气态氢化物在所述装置中分解产生氢气。气态氢化物包括但不限于硅烷，锗烷，苯胺和乙硼烷。气态氢化物自发分解和/或使用表面改性吸附剂增强分解。由该装置产生的氢气可用于燃料电池或其它氢气消耗单元。

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