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1. 发明授权

US07972421B2 Rectangular parallelepiped fluid storage and dispensing vessel 有权
标题翻译：矩形平行六面体流体储存和分配容器
公开(公告)号：US07972421B2
公开(公告)日：2011-07-05
申请号：US12401325
申请日：2009-03-10
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Phillip A. Moroco , Judith A. Moroco, legal representative
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Phillip A. Moroco
IPC分类号： B01D53/04
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。

2. 发明授权

US08821640B2 Solid precursor-based delivery of fluid utilizing controlled solids morphology 有权
标题翻译：使用受控固体形态的基于固体前体的流体输送
公开(公告)号：US08821640B2
公开(公告)日：2014-09-02
申请号：US12438502
申请日：2007-08-31
申请人： John M. Cleary , Jose I. Arno , Bryan C. Hendrix , Donn Naito , Scott Battle , John N. Gregg , Michael J. Wodjenski , Chongying Xu
发明人： John M. Cleary , Jose I. Arno , Bryan C. Hendrix , Donn Naito , Scott Battle , John N. Gregg , Michael J. Wodjenski , Chongying Xu
IPC分类号： C23C16/54 , C23C16/44 , C23C16/00 , C23C16/448
CPC分类号： C23C16/4481 , C23C14/48 , C23C16/08 , C23C16/16 , C23C16/18 , C23C16/30 , C23C16/4402 , C23C16/45525 , C23C16/45544
摘要： Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.
摘要翻译：挥发易于产生颗粒的源试剂的源试剂的装置和方法，其中通过蒸气发生系统的结构或加工特征抑制了这种颗粒产生或存在的相应源试剂蒸气。这种装置和方法适用于液体和固体源试剂，特别是固体源试剂如金属卤化物，例如氯化铪。一种具体实施方案中的源试剂由源试剂材料的多孔整体块形式构成。本发明的装置和方法有用地用于提供用于例如原子层沉积（ALD）和离子注入的应用的源试剂蒸气。

3. 发明申请

US20090173225A1 RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL 有权
标题翻译：矩形平行流体储存和分配容器
公开(公告)号：US20090173225A1
公开(公告)日：2009-07-09
申请号：US12401325
申请日：2009-03-10
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
IPC分类号： B01D53/02 , B01J20/00 , B01J20/10 , B01J20/22 , B01J20/20
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。

4. 发明授权

US07018448B2 Gas cabinet including integrated effluent scrubber 失效
标题翻译：燃气柜包括综合污水洗涤器
公开(公告)号：US07018448B2
公开(公告)日：2006-03-28
申请号：US10694648
申请日：2003-10-28
申请人： Michael J. Wodjenski , Jose I. Arno
发明人： Michael J. Wodjenski , Jose I. Arno
IPC分类号： B01D53/04
CPC分类号： B01D53/0446 , B01D53/0454 , B01D2253/104 , B01D2253/11 , B01D2253/202 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/40009 , B01D2259/402 , B01D2259/4525
摘要： A gas cabinet assembly for dispensing of gas to a process facility such as a semiconductor manufacturing tool. A purge gas dry scrubber is integrated with the gas flow circuitry and a venturi pump in the gas cabinet. Purge gas is flowed through the flow circuitry in the gas cabinet subsequent to on-stream dispensing of process gas through such flow circuitry, and forms a purge effluent including the residual process gas. The purge effluent is flowed through a dry scrubber unit to sorptively remove the process gas species from the purge effluent. The resultant process gas-depleted purge effluent is vented from the gas cabinet, e.g., into the ducting of the house exhaust system of the process facility. Monitoring of the relative depletion of the dry scrubbing medium in the dry scrubber may be carried out with endpoint detection, e.g., using colorimetric change techniques, toxic gas monitor devices, or PLC/CPU arrangements.
摘要翻译：一种用于将气体分配到诸如半导体制造工具的处理设备的气柜组件。吹扫气干燥洗涤器与气体流路和气柜中的文丘里泵集成。在通过这种流动电路的流程分配工艺气体之后，吹扫气体通过气体柜中的流动回路流动，并形成包括剩余工艺气体的净化流出物。清洗流出物流过干洗单元以从吹扫流出物中吸附去除工艺气体物质。所得到的工艺废气净化流出物从气柜排出，例如进入处理设备的房屋排气系统的管道。干洗涤器中干洗涤介质的相对耗尽的监测可以通过终点检测进行，例如使用比色改变技术，有毒气体监测装置或PLC / CPU装置。

5. 发明授权

US08506689B2 Rectangular parallelepiped fluid storage and dispensing vessel 有权
公开(公告)号：US08506689B2
公开(公告)日：2013-08-13
申请号：US13168987
申请日：2011-06-26
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Judith A. Moroco
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Phillip A. Moroco
IPC分类号： B01D53/04
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

6. 发明申请

US20110277846A1 RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL 有权
标题翻译：矩形平行流体储存和分配容器
公开(公告)号：US20110277846A1
公开(公告)日：2011-11-17
申请号：US13168987
申请日：2011-06-26
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
IPC分类号： F15D1/00 , B67D7/06
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。

7. 发明申请

US20100255198A1 SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS MORPHOLOGY 有权
标题翻译：使用固体前驱体的流体利用控制固体物质的流体
公开(公告)号：US20100255198A1
公开(公告)日：2010-10-07
申请号：US12438502
申请日：2007-08-31
申请人： John M. Cleary , Jose I. Arno , Bryan C. Hendrix , Donn Naito , Scott Battle , John N. Gregg , Michael J. Wodjenski , Chongying Xu
发明人： John M. Cleary , Jose I. Arno , Bryan C. Hendrix , Donn Naito , Scott Battle , John N. Gregg , Michael J. Wodjenski , Chongying Xu
IPC分类号： C23C16/44 , C23C16/00
CPC分类号： C23C16/4481 , C23C14/48 , C23C16/08 , C23C16/16 , C23C16/18 , C23C16/30 , C23C16/4402 , C23C16/45525 , C23C16/45544
摘要： Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.
摘要翻译：挥发易于产生颗粒的源试剂的源试剂的装置和方法，其中通过蒸气发生系统的结构或加工特征抑制了这种颗粒产生或存在的相应源试剂蒸气。这种装置和方法适用于液体和固体源试剂，特别是固体源试剂如金属卤化物，例如氯化铪。一种具体实施方案中的源试剂由源试剂材料的多孔整体块形式构成。本发明的装置和方法有用地用于提供用于例如原子层沉积（ALD）和离子注入的应用的源试剂蒸气。

8. 发明授权

US06991671B2 Rectangular parallelepiped fluid storage and dispensing vessel 有权
公开(公告)号：US06991671B2
公开(公告)日：2006-01-31
申请号：US10314777
申请日：2002-12-09
申请人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers
发明人： Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers
IPC分类号： B01D53/04 , B01D53/14
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

9. 发明授权

US09340878B2 TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same 有权
标题翻译：用于监测六氟化钨处理以检测气相成核的TPIR装置及其利用方法和系统
公开(公告)号：US09340878B2
公开(公告)日：2016-05-17
申请号：US13375053
申请日：2010-05-28
申请人： Jose I. Arno , Joseph R. Despres , Shkelqim Letaj , Steven M. Lurcott , Thomas H. Baum , Peng Zou
发明人： Jose I. Arno , Joseph R. Despres , Shkelqim Letaj , Steven M. Lurcott , Thomas H. Baum , Peng Zou
IPC分类号： G01N31/00 , C23C16/52 , G01N21/3504 , C23C16/14
CPC分类号： C23C16/52 , C23C16/14 , C23C16/455 , G01N21/3504
摘要： Apparatus and method for monitoring a vapor deposition installation in which a gas mixture can undergo gas phase nucleation (GPN) and/or chemically attack the product device, under process conditions supportive of such behavior. The apparatus includes a radiation source arranged to transmit source radiation through a sample of the gas mixture, and a thermopile detector assembly arranged to receive output radiation resulting from interaction of the source radiation with the gas mixture sample, and to responsively generate an output indicative of onset of the gas phase nucleation and/or chemical attack when such onset occurs. Such monitoring apparatus and methodology is useful in tungsten CVD processing to achieve high rate tungsten film growth without GPN or chemical attack.
摘要翻译：用于监测气相沉积装置的装置和方法，其中气体混合物可以在支持这种行为的工艺条件下经历气相成核（GPN）和/或化学侵蚀产品装置。该装置包括被布置成通过气体混合物的样本传送源辐射的辐射源，以及布置成接收由源辐射与气体混合物样品的相互作用产生的输出辐射的热电堆检测器组件，并且响应地产生指示发生这种发生时气相成核和/或化学侵蚀的发生。这种监测装置和方法在钨CVD处理中可用于实现无GPN或化学侵蚀的高速钨膜生长。

10. 发明授权

US08244482B2 Photometrically modulated delivery of reagents 有权
标题翻译：光度调制递送试剂
公开(公告)号：US08244482B2
公开(公告)日：2012-08-14
申请号：US13085476
申请日：2011-04-12
申请人： Jose I. Arno
发明人： Jose I. Arno
IPC分类号： H01L21/66
CPC分类号： H01L22/20 , G01N21/3504 , Y10T137/0329 , Y10T137/2509 , Y10T137/87676
摘要： A process system adapted for processing of or with a material therein. The process system includes: a sampling region for the material; an infrared photometric monitor constructed and arranged to transmit infrared radiation through the sampling region and to responsively generate an output signal correlative of the material in the sampling region, based on its interaction with the infrared radiation; and process control means arranged to receive the output of the infrared photometric monitor and to responsively control one or more process conditions in and/or affecting the process system.
摘要翻译：一种适于处理其中或与其中的材料一起的过程系统。处理系统包括：材料的采样区域; 红外测光监测器，其构造和布置成基于其与红外辐射的相互作用，将红外辐射透射通过采样区域并且响应地产生与采样区域中的材料相关的输出信号; 以及过程控制装置，其布置成接收红外测光监视器的输出并且响应地控制处理系统中的一个或多个处理条件和/或影响处理系统。

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