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    • 2. 发明授权
    • Method of making electrically-erasable, electrically-programmable
read-only memory cell having a tunnel window insulator and forming
implanted regions for isolation between wordlines
    • 制造具有隧道窗绝缘体并形成用于字线间隔离的注入区域的电可擦除电可编程只读存储单元的方法
    • US5081055A
    • 1992-01-14
    • US648248
    • 1991-01-31
    • Manzur GillSebastiano D'ArrigoSung-Wei Lin
    • Manzur GillSebastiano D'ArrigoSung-Wei Lin
    • H01L27/115H01L29/788
    • H01L27/115H01L29/7883
    • An electrically-erasable, programmable ROM cell, or an EEPROM cell, is constructed using an enhancement transistor merged with a floating-gate transistor, where the floating-gate transistor has a small tunnel window, in a contact-free cell layout, enhancing the ease of manufacture and reducing cell size. The bitlines and source/drain regions are buried beneath relatively thick silicon oxide, which allows a favorable ration of control gate to floating gate capacitance. Programming and erasure are provided by the tunnel window area, which is located near or above the channel side of the source. The window has a thinner dielectric than the remainder of the floating gate, to allow Fowler-Nordheim tunneling. By using dedicated drain or ground lines, rather than a virtual-ground layout, and by using thick oxide for isolation between bitlines, the floating gate can extend onto adjacent bitlines and isolation area, resulting in a favorable coupling ratio. Isolation between cells in the wordline direction is by a self-aligned implanted region, in this embodiment.
    • 使用与浮栅晶体管合并的增强晶体管构造电可擦除可编程ROM单元或EEPROM单元,其中浮栅晶体管具有小的隧道窗,以无接触电池布局,增强了 易于制造和减小电池尺寸。 位线和源极/漏极区域被埋在相对厚的氧化硅之下,这允许控制栅极对浮置栅极电容的有利比例。 编程和擦除由位于源的通道侧附近或上方的隧道窗口区域提供。 窗口具有比浮动栅极的其余部分更薄的电介质,以允许Fowler-Nordheim隧道。 通过使用专用的漏极或接地线,而不是虚拟接地布局,并且通过使用厚氧化物在位线之间隔离,浮动栅极可以延伸到相邻的位线和隔离区域,从而产生良好的耦合比。 在本实施例中,字线方向上的单元之间的隔离是通过自对准注入区域。
    • 3. 发明授权
    • Electrically-erasable, electrically-programmable read-only memory
    • 电可擦除,电可编程只读存储器
    • US5012307A
    • 1991-04-30
    • US494060
    • 1990-03-15
    • Manzur GillSebastiano D'ArrigoSung-Wei Lin
    • Manzur GillSebastiano D'ArrigoSung-Wei Lin
    • H01L27/115H01L29/788
    • H01L27/115H01L29/7883
    • An electrically-erasable, programmable ROM cell, or an EEPROM cell, is constructed using an enhancement transistor merged with a floating-gate transistor, where the floating-gate transistor has a small tunnel window, in a contact-free cell layout, enhancing the ease of manufacture and reducing cell size. The bitlines and source/drain regions are buried beneath relatively thick silicon oxide, which allows a favorable ratio of control gate to floating gate capacitance. Programming and erasing are provided by the tunnel window are near or above the channel side of the source. The window has a thinner dielectric than the remainder of the floating gate, to allow Fowler-Nordheim tunneling. By using dedicated drain or ground lines, rather than a virtual-ground layout, and by using thick oxide for isolation between bitlines, the floating gate can extend onto adjacent bitlines and isolation area, resulting in a favorable coupling ratio. Isolation between wordlines is also by thick thermal oxide in a preferred embodiment, further improving the coupling ratio. Bitline and wordline spacing may be selected for optimum pitch or aspect ratio. Bitline to substrate capacitance is minimized.
    • 使用与浮栅晶体管合并的增强晶体管构造电可擦除可编程ROM单元或EEPROM单元,其中浮栅晶体管具有小的隧道窗,无接触电池布局,增强了 易于制造和减小电池尺寸。 位线和源极/漏极区域被埋在相对较厚的氧化硅之下,这允许控制栅极与浮动栅极电容的有利比例。 隧道窗口提供的编程和擦除靠近或高于源的通道侧。 窗口具有比浮动栅极的其余部分更薄的电介质,以允许Fowler-Nordheim隧道。 通过使用专用的漏极或接地线,而不是虚拟接地布局,并且通过使用厚氧化物在位线之间隔离,浮动栅极可以延伸到相邻的位线和隔离区域,从而产生良好的耦合比。 在优选实施例中,字线之间的隔离也是厚氧化物,进一步提高了耦合比。 可以选择位线和字线间距来获得最佳间距或宽高比。 位线到基板电容最小化。
    • 5. 发明授权
    • Electrically-erasable, electrically-programmable read-only memory cell
    • 电可擦除,电可编程只读存储单元
    • US5017980A
    • 1991-05-21
    • US494051
    • 1990-03-15
    • Manzur GillSebastiano D'ArrigoSung-Wei Lin
    • Manzur GillSebastiano D'ArrigoSung-Wei Lin
    • H01L27/115H01L29/788
    • H01L27/115H01L29/7883
    • An electrically-erasable, programmable ROM cell, or an EEPROM cell, is constructed using an enhancement transistor merged with a floating-gate transistor, where the floating-gate transistor has a small tunnel window, in a contact-free cell layout, enhancing the ease of manufacture and reducing cell size. The bitlines and source/drain regions are buried beneath relatively thick silicon oxide, which allows a favorable ratio of control gate to floating gate capacitance. Programming and erasure are provided by the tunnel window area, which is located near or above the channel side of the source. The window has a thinner dielectric than the remainder of the floating gate, to allow Fowler-Nordheim tunneling. By using dedicated drain or ground lines, rather than a virtual-ground layout, and by using thick oxide for isolation between bitlines, the floating gate can extend onto adjacent bitlines and isolation area, resulting in a favorable coupling ratio. Isolation between cells in the wordline direction is by a self-aligned implanted region, in this embodiment.
    • 使用与浮栅晶体管合并的增强晶体管构造电可擦除可编程ROM单元或EEPROM单元,其中浮栅晶体管具有小的隧道窗,无接触电池布局,增强了 易于制造和减小电池尺寸。 位线和源极/漏极区域被埋在相对较厚的氧化硅之下,这允许控制栅极与浮动栅极电容的有利比例。 编程和擦除由位于源的通道侧附近或上方的隧道窗口区域提供。 窗口具有比浮动栅极的其余部分更薄的电介质,以允许Fowler-Nordheim隧道。 通过使用专用的漏极或接地线,而不是虚拟接地布局,并且通过使用厚氧化物在位线之间隔离,浮动栅极可以延伸到相邻的位线和隔离区域,从而产生良好的耦合比。 在本实施例中,字线方向上的单元之间的隔离是通过自对准注入区域。
    • 6. 发明授权
    • Method for programming EEPROM memory arrays
    • EEPROM存储器阵列编程方法
    • US5187683A
    • 1993-02-16
    • US576307
    • 1990-08-31
    • Manzur GillSung-Wei LinSebastiano D'Arrigo
    • Manzur GillSung-Wei LinSebastiano D'Arrigo
    • G11C17/00G11C16/02G11C16/08G11C16/10H01L21/8247H01L27/115
    • G11C16/08G11C16/10
    • A method is described for programming a semiconductor array of EEPROM cells. A selected cell is connected, by definition, to a selected source-column line, a selected drain-column line and a selected wordline. Each deselected memory cell in the array is connected to a deselected source-column line, a deselected drain-column line and/or a deselected wordline. The method includes preselecting first, second, third, fourth and fifth programming voltages such that the second programming voltage is more positive than the first programming voltage and such that the third, fourth and fifth programming voltages are intermediate between the first and second programming voltages. The first programming voltage is applied at least to a selected column line and to each of the same-type deselected column lines. The third programming voltage is applied to the selected wordline and the fourth programming voltage is applied to each deselected wordline. After a pre-charge time interval, the fifth programming voltage is applied to each same-type deselected column line and, after an optional additional pre-charge time interval, the second programming voltage is applied to the selected wordline. After a program time interval, the third programming voltage is applied to the selected wordline and, after an optional discharge time interval, the first programming voltage is applied to each same-type deselected column line. Each deselected wordline is maintained at the fourth programming voltage for an additional discharge time interval. The third, fourth and fifth programming voltages may have the same value.
    • 描述了一种用于编程EEPROM单元的半导体阵列的方法。 根据定义,所选择的单元格连接到所选择的源列行,所选的排列列线和所选择的字线。 阵列中的每个取消选择的存储单元连接到未选择的源 - 列线,取消选择的漏 - 列线和/或未选择的字线。 该方法包括预选第一,第二,第三,第四和第五编程电压,使得第二编程电压比第一编程电压更正,并且使得第三,第四和第五编程电压在第一和第二编程电压之间。 至少将第一编程电压施加到所选择的列线和每个相同类型的未选择的列线。 将第三编程电压施加到所选择的字线,并且将第四编程电压施加到每个取消选择的字线。 在预充电时间间隔之后,将第五编程电压施加到每个相同类型的未选择的列线,并且在可选的附加预充电时间间隔之后,将第二编程电压施加到所选择的字线。 在编程时间间隔之后,将第三编程电压施加到所选择的字线,并且在可选的放电时间间隔之后,将第一编程电压施加到每个相同类型的未选择的列线。 每个取消选择的字线保持在第四个编程电压下一个额外的放电时间间隔。 第三,第四和第五编程电压可以具有相同的值。
    • 7. 发明授权
    • Fabricating an electrically-erasable, electrically-programmable
read-only memory having a tunnel window insulator and thick oxide
isolation between wordlines
    • 制造具有隧道窗绝缘体和字线之间的厚氧化物隔离的电可擦除的电可编程只读存储器
    • US5156991A
    • 1992-10-20
    • US648087
    • 1991-01-31
    • Manzur GillSebastiano D'ArrigoSung-Wei Lin
    • Manzur GillSebastiano D'ArrigoSung-Wei Lin
    • H01L27/115H01L29/788
    • H01L27/115H01L29/7883Y10S438/981
    • An electrically-erasable, programmable ROM cell, or an EEPROM cell, is constructed using an enhancement transistor merged with a floating-gate transistor, where the floating-gate transistor has a small tunnel window, in a contact-free cell layout, enhancing the ease of manufacture and reducing cell size. The bitlines and source/drain regions are buried beneath relatively thick silicon oxide, which allows a favorable ratio of control gate to floating gate capacitance. Programming and erasing are provided by the tunnel window are near or above the channel side of the source. The window has a thinner dielectric than the remainder of the floating gate, to allow Fowler-Nordheim tunneling. By using dedicated drain or ground lines, rather than a virtual-ground layout, and by using thick oxide for isolation between bitlines, the floating gate can extend onto adjacent bitlines and isolation area, resulting in a favorable coupling ratio. Isolation between wordlines is also by thick thermal oxide in a preferred embodiment, further improving the coupling ratio. Bitline and wordline spacing may be selected for optimum pitch or aspect ratio. Bitline to substrate capacitance is minimized.
    • 使用与浮栅晶体管合并的增强晶体管构造电可擦除可编程ROM单元或EEPROM单元,其中浮栅晶体管具有小的隧道窗,无接触电池布局,增强了 易于制造和减小电池尺寸。 位线和源极/漏极区域被埋在相对较厚的氧化硅之下,这允许控制栅极与浮动栅极电容的有利比例。 隧道窗口提供的编程和擦除靠近或高于源的通道侧。 窗口具有比浮动栅极的其余部分更薄的电介质,以允许Fowler-Nordheim隧道。 通过使用专用的漏极或接地线,而不是虚拟接地布局,并且通过使用厚氧化物在位线之间隔离,浮动栅极可以延伸到相邻的位线和隔离区域,从而产生良好的耦合比。 在优选实施例中,字线之间的隔离也是厚氧化物,进一步提高了耦合比。 可以选择位线和字线间距来获得最佳间距或宽高比。 位线到基板电容最小化。
    • 8. 发明授权
    • Method of manufacturing an EEPROM with trench-isolated bitlines
    • 制造具有沟槽隔离位线的EEPROM的方法
    • US5173436A
    • 1992-12-22
    • US722732
    • 1991-06-27
    • Manzur GillSebastiano D'ArrigoDavid J. McElroy
    • Manzur GillSebastiano D'ArrigoDavid J. McElroy
    • H01L21/28H01L21/762H01L21/8247H01L27/115H01L29/788
    • H01L27/11517H01L21/28273H01L21/76202H01L27/115H01L29/7883
    • An electrically-erasable, electrically-programmable ROM or an EEPROM is constructed using a floating-gate transistor with or without a split gate. The floating-gate transistor may have a self-aligned tunnel window of sublithographic dimension positioned on the opposite side of the source from the channel and drain, in a contact-free cell layout, enhancing the ease of manufacture and reducing cell size. In this cell, the bitlines and source/drain regions are buried beneath relatively thick silicon oxide and the floating gate extends over the thick silicon oxide. Programming and erasing are accomplished by causing electrons to tunnel through the oxide in the tunnel window. The tunnel window has a thinner dielectric than the remainder of the oxides under the floating gate to allow Fowler-Nordheim tunneling. Trenches and ditches are used for electrical isolation between individual memory cells, allowing an increase in cell density.
    • 使用具有或不具有分裂栅极的浮栅晶体管构造电可擦除的电可编程ROM或EEPROM。 浮栅晶体管可以具有位于与源极和漏极相反侧的亚光刻尺寸的自对准隧道窗口,在无接触电池布局中,增强了制造的容易性并减小了单元尺寸。 在该单元中,位线和源极/漏极区域被埋在相对较厚的氧化硅之下,并且浮置栅极延伸在厚的氧化硅上。 通过使电子穿过隧道窗中的氧化物来实现编程和擦除。 隧道窗口的电介质比浮动栅极下方的氧化物的电介质薄,以允许Fowler-Nordheim隧道。 沟槽和沟渠用于各个记忆体之间的电隔离,允许增加细胞密度。