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1. 发明授权

US07729084B2 Formation of low resistance damascene coils 有权
标题翻译：形成低阻力镶嵌线圈
公开(公告)号：US07729084B2
公开(公告)日：2010-06-01
申请号：US11644446
申请日：2006-12-22
申请人： Daniel Wayne Bedell , David Patrick Druist , Edward Hin Pong Lee , Jennifer Ai-Ming Loo , Vladimir Nikitin
发明人： Daniel Wayne Bedell , David Patrick Druist , Edward Hin Pong Lee , Jennifer Ai-Ming Loo , Vladimir Nikitin
IPC分类号： G11B5/17
CPC分类号： G11B5/3123 , Y10T29/49043 , Y10T29/4906 , Y10T29/49064
摘要： In one embodiment and method of the present invention, a coil of a write head is created by forming a P1 pedestal layer and a back gap layer and further forming a coil pattern consistent with the coil to be formed and insulator spacers dispersed in the coil pattern, using a non-damascene process, thereafter the coil is formed by plating using a damascene process.
摘要翻译：在本发明的一个实施例和方法中，通过形成P1基座层和后间隙层，并且进一步形成与要形成的线圈一致的线圈图案并且将绝缘体间隔物分散在线圈图案中，形成写入头的线圈，使用非镶嵌工艺，然后通过使用镶嵌工艺电镀形成线圈。

2. 发明申请

US20100163523A1 FORMATION OF LOW RESISTANCE DAMASCENE COILS 失效
标题翻译：形成低电阻大线圈
公开(公告)号：US20100163523A1
公开(公告)日：2010-07-01
申请号：US12707652
申请日：2010-02-17
申请人： Daniel Wayne Bedell , David Patrick Druist , Edward Hin Pong Lee , Jennifer Ai-Ming Loo , Vladimir Nikitin , Sue Siyang Zhang
发明人： Daniel Wayne Bedell , David Patrick Druist , Edward Hin Pong Lee , Jennifer Ai-Ming Loo , Vladimir Nikitin , Sue Siyang Zhang
IPC分类号： G11B5/127
CPC分类号： G11B5/3123 , Y10T29/49043 , Y10T29/4906 , Y10T29/49064
摘要： In one embodiment and method of the present invention, a coil of a write head is created by forming a P1 pedestal layer and a back gap layer and further forming a coil pattern consistent with the coil to be formed and insulator spacers dispersed in the coil pattern, using a non-damascene process, thereafter the coil is formed by plating using a damascene process.
摘要翻译：在本发明的一个实施例和方法中，通过形成P1基座层和后间隙层，并且进一步形成与要形成的线圈一致的线圈图案并且将绝缘体间隔物分散在线圈图案中，形成写入头的线圈，使用非镶嵌工艺，然后通过使用镶嵌工艺电镀形成线圈。

3. 发明授权

US08397371B2 Process of manufacturing low resistance damascene coils 失效
标题翻译：制造低阻大马士革线圈的工艺
公开(公告)号：US08397371B2
公开(公告)日：2013-03-19
申请号：US12707652
申请日：2010-02-17
申请人： Daniel Wayne Bedell , David Patrick Druist , Edward Hin Pong Lee , Jennifer Ai-Ming Loo , Vladimir Nikitin , Sue Siyang Zhang
发明人： Daniel Wayne Bedell , David Patrick Druist , Edward Hin Pong Lee , Jennifer Ai-Ming Loo , Vladimir Nikitin , Sue Siyang Zhang
IPC分类号： G11B5/17 , G11B5/187
CPC分类号： G11B5/3123 , Y10T29/49043 , Y10T29/4906 , Y10T29/49064
摘要： In one embodiment and method of the present invention, a coil of a write head is created by forming a P1 pedestal layer and a back gap layer and further forming a coil pattern consistent with the coil to be formed and insulator spacers dispersed in the coil pattern, using a non-damascene process, thereafter the coil is formed by plating using a damascene process.
摘要翻译：在本发明的一个实施例和方法中，通过形成P1基座层和后间隙层，并且进一步形成与要形成的线圈一致的线圈图案并且将绝缘体间隔物分散在线圈图案中，形成写入头的线圈，使用非镶嵌工艺，然后通过使用镶嵌工艺电镀形成线圈。

4. 发明申请

US20080151424A1 Formation of low resistance damascene coils 有权
标题翻译：形成低阻力镶嵌线圈
公开(公告)号：US20080151424A1
公开(公告)日：2008-06-26
申请号：US11644446
申请日：2006-12-22
申请人： Daniel Wayne Bedell , David Patrick Druist , Edward Hin Pong Lee , Jennifer Ai-Ming Loo , Vladimir Nikitin
发明人： Daniel Wayne Bedell , David Patrick Druist , Edward Hin Pong Lee , Jennifer Ai-Ming Loo , Vladimir Nikitin
IPC分类号： G11B5/17
CPC分类号： G11B5/3123 , Y10T29/49043 , Y10T29/4906 , Y10T29/49064
摘要： In one embodiment and method of the present invention, a coil of a write head is created by forming a P1 pedestal layer and a back gap layer and further forming a coil pattern consistent with the coil to be formed and insulator spacers dispersed in the coil pattern, using a non-damascene process, thereafter the coil is formed by plating using a damascene process.
摘要翻译：在本发明的一个实施例和方法中，通过形成P 1基座层和后间隙层，并且进一步形成与要形成的线圈一致的线圈图案，并且将绝缘体间隔物分散在线圈中，形成写入头的线圈图案，使用非镶嵌工艺，此后通过使用镶嵌工艺的镀层形成线圈。

5. 发明申请

US20080002290A1 Damascene coil design for a perpendicular magnetic recording head 有权
标题翻译：大马士革线圈设计用于垂直磁记录头
公开(公告)号：US20080002290A1
公开(公告)日：2008-01-03
申请号：US11478925
申请日：2006-06-30
申请人： Donald G. Allen , Edward Hin Pong Lee , Jennifer Ai-Ming Loo
发明人： Donald G. Allen , Edward Hin Pong Lee , Jennifer Ai-Ming Loo
IPC分类号： G11B5/17
CPC分类号： G11B5/1278 , G11B5/3123 , G11B5/3163
摘要： A magnetic recording head for use in perpendicular magnetic recording having a design that allows the write coil to be manufactured by a damascene process for increased coil pitch and reduced coil resistance. The magnetic write head includes a photoresist dam structure that allows a hard baked photoresist to be formed that does not extend to the air bearing surface (ABS). Since the photoresist dam prevents the hard baked photoresist from reaching the ABS, the a damascene process, in which the hard baked photoresist remains in the finished write head, can be used to produce the write head. The use of such a damascene process advantageously allows the space between the coil turns to be reduced, which maximizes the number of turns that can be used and also maximizes the number width to which the coil turns can be constructed, thereby minimizing the electrical resistance of the write coil.
摘要翻译：一种用于垂直磁记录的磁记录头，其具有允许通过镶嵌工艺制造写入线圈以增加线圈间距并减小线圈电阻的设计。磁写头包括光致抗蚀剂阻挡结构，其允许形成不延伸到空气轴承表面（ABS）的硬烘烤光致抗蚀剂。由于光致抗蚀剂防止了硬烘烤的光致抗蚀剂到达ABS，所以可以使用其中硬烘烤的光致抗蚀剂保留在完成的写入头中的镶嵌工艺来产生写入头。使用这种镶嵌工艺有利地减小了线圈匝之间的空间，这使得可以使用的匝数最大化，并且还使构造线圈匝数的数量最大化，从而最小化电阻写线圈。

6. 发明授权

US07633711B2 Magnetic write head with helical coil structure using multiple materials 有权
标题翻译：磁性写头用螺旋线圈结构使用多种材料
公开(公告)号：US07633711B2
公开(公告)日：2009-12-15
申请号：US11672483
申请日：2007-02-07
申请人： Wen-Chien David Hsiao , Edward Hin Pong Lee , Jennifer Ai-Ming Loo
发明人： Wen-Chien David Hsiao , Edward Hin Pong Lee , Jennifer Ai-Ming Loo
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3123 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic recording that has a helical coil design that reduces manufacturing complexity and increases cycle time for manufacture. The write head includes a write pole and a helical write coil having upper coil portions that pass above the write pole and lower coil portions that pass below the write pole. The upper and lower coil portions are connected with another by connection studs. Whereas the upper and lower coil portions are constructed of a non-magnetic, electrically conductive material such as Cu, the connection studs are constructed of a magnetic, electrically conductive material such as NiFe. By constructing the connection studs of a magnetic material, they can be constructed in the same manufacturing steps used to manufacture various magnetic structures of the write head, such as a magnetic shaping layer and/or the back gap. This greatly simplifies the manufacture of the write head by eliminating many additional manufacturing steps that would otherwise be required to manufacture a helical coil having non-magnetic connection studs.
摘要翻译：一种用于垂直磁记录的磁头，具有螺旋线圈设计，可降低制造复杂性并增加制造周期。写入头包括写入极和螺旋写入线圈，其具有通过写入磁极之下的上部线圈部分和通过写入极下方的下部线圈部分。上下线圈部分通过连接柱连接。尽管上部和下部线圈部分由诸如Cu的非磁性导电材料构成，但是连接柱由诸如NiFe的磁性导电材料构成。通过构造磁性材料的连接柱，它们可以以用于制造写入头的各种磁性结构的相同的制造步骤，例如磁性成形层和/或后部间隙来构造。这通过消除制造具有非磁性连接柱螺旋线圈的另外制造步骤而大大简化了写入头的制造。

7. 发明申请

US20080186628A1 MAGNETIC WRITE HEAD WITH HELICAL COIL STRUCTURE USING MULTIPLE MATERIALS 有权
标题翻译：具有螺旋线圈结构的磁性写头使用多种材料
公开(公告)号：US20080186628A1
公开(公告)日：2008-08-07
申请号：US11672483
申请日：2007-02-07
申请人： Wen-Chien David Hsiao , Edward Hin Pong Lee , Jennifer Ai-Ming Loo
发明人： Wen-Chien David Hsiao , Edward Hin Pong Lee , Jennifer Ai-Ming Loo
IPC分类号： G11B5/60
CPC分类号： G11B5/1278 , G11B5/3123 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic recording that has a helical coil design that reduces manufacturing complexity and increases cycle time for manufacture. The write head includes a write pole and a helical write coil having upper coil portions that pass above the write pole and lower coil portions that pass below the write pole. The upper and lower coil portions are connected with another by connection studs. Whereas the upper and lower coil portions are constructed of a non-magnetic, electrically conductive material such as Cu, the connection studs are constructed of a magnetic, electrically conductive material such as NiFe. By constructing the connection studs of a magnetic material, they can be constructed in the same manufacturing steps used to manufacture various magnetic structures of the write head, such as a magnetic shaping layer and/or the back gap. This greatly simplifies the manufacture of the write head by eliminating many additional manufacturing steps that would otherwise be required to manufacture a helical coil having non-magnetic connection studs.
摘要翻译：一种用于垂直磁记录的磁头，具有螺旋线圈设计，可降低制造复杂性并增加制造周期。写入头包括写入极和螺旋写入线圈，其具有通过写入磁极之下的上部线圈部分和通过写入极下方的下部线圈部分。上下线圈部分通过连接柱连接。尽管上部和下部线圈部分由诸如Cu的非磁性导电材料构成，但是连接柱由诸如NiFe的磁性导电材料构成。通过构造磁性材料的连接柱，它们可以以用于制造写入头的各种磁性结构的相同的制造步骤，例如磁性成形层和/或后部间隙来构造。这通过消除制造具有非磁性连接柱螺旋线圈的另外制造步骤而大大简化了写入头的制造。

8. 发明申请

US20090057160A1 INTERLEAVED HELICAL COILS ON PERPENDICULAR HEADS 审中-公开
标题翻译：特殊头部交替的螺旋线圈
公开(公告)号：US20090057160A1
公开(公告)日：2009-03-05
申请号：US11845222
申请日：2007-08-27
申请人： Donald G. Allen , Ming Jiang , Jennifer Ai-Ming Loo , Aron Neuhaus , Vladimir Nikitin , Yuan Yao
发明人： Donald G. Allen , Ming Jiang , Jennifer Ai-Ming Loo , Aron Neuhaus , Vladimir Nikitin , Yuan Yao
IPC分类号： B05D5/12 , C25D3/48
CPC分类号： C25D5/022 , G11B5/1278 , G11B5/17 , G11B5/3123
摘要： A method for manufacturing a write head with a helical coil having a very small and well controlled spacing between adjacent coil leads. The method includes forming a first set of coil leads, then conformally depositing a thin layer of electrically insulating material such as alumina over the first set of coil leads and over the substrate. An electrically conductive seed layer is then deposited over the thin layer of non-magnetic, electrically insulating material An electrically conductive material such as Cu is then deposited by electroplating in order to form a second set of electrically conductive leads interspersed within the first set of electrically conductive leads, each of the second set of leads being separated from the second set of leads by a portion of the thin layer of non-magnetic, electrically insulating material.
摘要翻译：一种用于制造具有螺旋线圈的写入头的方法，所述螺旋线圈在相邻线圈引线之间具有非常小且受控的间隔。该方法包括形成第一组线圈引线，然后在第一组线圈引线上方和衬底上共形沉积诸如氧化铝之类的电绝缘材料的薄层。然后将导电种子层沉积在非磁性，电绝缘材料的薄层上。然后通过电镀沉积诸如Cu的导电材料，以便形成散布在第一组电气中的第二组导电引线导电引线，第二组引线中的每一个通过非磁性，电绝缘材料的薄层的一部分与第二组引线分离。

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