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    • 4. 发明申请
    • Vacuum closure with linear drive unit
    • 带线性驱动单元的真空关闭
    • US20060102863A1
    • 2006-05-18
    • US11143822
    • 2005-06-02
    • Stefan BangertMichael KonigRalph LindenbergUwe SchusslerTobias StolleyFrank Fuchs
    • Stefan BangertMichael KonigRalph LindenbergUwe SchusslerTobias StolleyFrank Fuchs
    • F16K11/074
    • F16K31/04F16K51/02
    • This invention relates to a vacuum treatment installation and a device therefor for the tight, especially vacuum-tight closing of an aperture, in particular a slit-like or rectangular aperture with a length that is preferably a multiple of the width of the aperture, in particular for a lock arrangement of a vacuum treatment installation, said device having a closure member (2) and for said closure member a linear drive unit (3,4,5) which, by way of a translational movement, can move the closure member from an open position into a closed position, said closure member having a sealing surface which is disposed in a plane (16) and which, in the closed position, makes sealing contact with a counter-sealing surface on the aperture side, and said plane running perpendicular to the direction of the translational movement (14) and at an oblique angle to the aperture normal (13).
    • 本发明涉及一种真空处理装置及其装置,用于紧密,特别地真空密封孔,特别是狭缝状或矩形孔,其长度优选为孔的宽度的倍数,在 特别是用于真空处理装置的锁定装置,所述装置具有闭合构件(2),并且对于所述闭合构件,线性驱动单元(3,4,5)通过平移运动可移动闭合构件 从打开位置到关闭位置,所述封闭构件具有设置在平面(16)中的密封表面,并且在关闭位置与密封面密封接触开口侧上的反向密封表面,并且所述平面 垂直于平移运动(14)的方向延伸并且与孔径法线(13)成倾斜的角度。
    • 7. 发明授权
    • Drive mechanism for a vacuum treatment apparatus
    • 真空处理设备的驱动机构
    • US07153367B2
    • 2006-12-26
    • US10898018
    • 2004-07-23
    • Ralph LindenbergMichael KonigUwe SchusslerStefan Bangert
    • Ralph LindenbergMichael KonigUwe SchusslerStefan Bangert
    • C23C16/00C23C14/00C23F1/00H01L21/306H01L21/677
    • C23C14/568C23C16/54H01L21/67196H01L21/67742
    • The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A—A) from an entrance airlock to an exit airlock. A stationary supporting column (1) is disposed in the center and on it a rotatory drive chamber (6) is borne which has control rods (9) for a rotation and a radial displacement of the substrate holders. In the rotatory drive chamber (6), a motor (4) and rotatory displacement drives for the control rods (9) are arranged on the supporting column (1), the control rods being in active connection each with a corresponding substrate holder. To solve the problem of carrying substrates through the vacuum treatment apparatus, even substrates of great area, smoothly, at a slight angle to the vertical, not fastened to the substrate holders, it is provided that a) the motor (4) is joined to a stationary bearing carrier (5) in which a rotatory star-shaped array of cantilevers (14) is mounted, b) the cantilevers (14) are articulated at one end to bell-crank levers (16), each of which has a pivot pin (17), c) the other end of each of the bell-crank levers (16) is articulated to one of the control rods (9), and that d) the pivot pins (17) of the bell-crank levers (16) are guided in a first stationary radial cam (11) whose shape determines the radial movements of the control rods (9). A periodic, variable superposition of the radial movements is performed by variable tangential movements produced by a second stationary radial cam (12) with a bell-crank lever which is joined by a link (24) to the drive chamber (6).
    • 本发明涉及一种用于真空处理设备的驱动机构,通过该驱动机构,基板保持器可以从轴线(A-A)从入口气闸传送到出口气闸。 固定支撑柱(1)设置在中心,并且在其上具有旋转驱动室(6),其具有用于基板保持器的旋转和径向位移的控制杆(9)。 在旋转驱动室(6)中,在支撑柱(1)上布置有用于控制杆(9)的马达(4)和旋转位移驱动装置,控制杆主动地连接到相应的基板支架。 为了解决通过真空处理装置承载基板的问题,即使是没有紧固到基板保持器上的大面积,平滑地,与垂直方向成微小角度的基板,即使将a)马达(4)接合到 固定轴承架(5),其中安装有悬臂(14)的旋转星形阵列,b)悬臂(14)在一端铰接到钟形曲柄杆(16),每一个都具有枢轴 销(17),c)每个钟形杠杆(16)的另一端铰接到控制杆(9)中的一个,并且d)钟形曲柄杆(10)的枢轴销(17) 16)在其形状确定控制杆(9)的径向移动的第一固定径向凸轮(11)中引导。 径向运动的周期性可变叠加通过由具有连杆(24)连接到驱动室(6)的钟形曲柄杆的第二静止径向凸轮(12)产生的可变切向运动来执行。