会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Electron beam inspection system and method
    • 电子束检查系统及方法
    • US5578821A
    • 1996-11-26
    • US371458
    • 1995-01-11
    • Dan MeisbergerAlan D. BrodieAnil A. DesaiDennis G. EmgeZhong-Wei ChenRichard SimmonsDave E. A. SmithApril DuttaJ. Kirkwood H. RoughLeslie A. HonfiHenry Pearce-PercyJohn McMurtryEric Munro
    • Dan MeisbergerAlan D. BrodieAnil A. DesaiDennis G. EmgeZhong-Wei ChenRichard SimmonsDave E. A. SmithApril DuttaJ. Kirkwood H. RoughLeslie A. HonfiHenry Pearce-PercyJohn McMurtryEric Munro
    • G01B15/00G01B15/08G01N23/04G01N23/203G01N23/225G01R31/28G01R31/302G03F1/08G03F1/16H01J37/28H01J37/30H01L21/027H01L21/66H01J37/00
    • H01J37/28H01J37/3005H01J2237/2817
    • A method and apparatus for a charged particle scanning system and an automatic inspection system, including wafers and masks used in microcircuit fabrication. A charged particle beam is directed at the surface of a substrate for scanning that substrate and a selection of detectors are included to detect at least one of the secondary charged particles, back-scattered charged particles and transmitted charged particles from the substrate. The substrate is mounted on an x-y stage to provide at least one degree of freedom while the substrate is being scanned by the charged particle beam. The substrate is also subjected to an electric field on it's surface to accelerate the secondary charged particles. The system facilitates inspection at low beam energies on charge sensitive insulating substrates and has the capability to accurately measure the position of the substrate with respect to the charged particle beam. Additionally, there is an optical alignment system for initially aligning the substrate beneath the charged particle beam. To function most efficiently there is also a vacuum system for evacuating and repressurizing a chamber containing the substrate. The vacuum system can be used to hold one substrate at vacuum while a second one is being loaded/unloaded, evacuated or repressurized. Alternately, the vacuum system can simultaneously evacuate a plurality of substrates prior to inspection and repressurize the same plurality of substrates following inspection. In the inspection configuration, there is also a comparison system for comparing the pattern on the substrate with a second pattern.
    • 一种带电粒子扫描系统和自动检查系统的方法和装置,包括微电路制造中使用的晶片和掩模。 带电粒子束被引导到用于扫描该衬底的衬底的表面,并且包括选择的检测器以检测来自衬底的次级带电粒子,反向散射带电粒子和透射带电粒子中的至少一个。 衬底被安装在x-y平台上以在通过带电粒子束扫描衬底的同时提供至少一个自由度。 衬底也在其表面上经受电场以加速次级带电粒子。 该系统便于对电荷敏感绝缘基板上的近光束能量进行检查,并且能够准确地测量基板相对于带电粒子束的位置。 另外,存在用于使带电粒子束下面的衬底最初对准的光学对准系统。 为了最有效地起作用,还有一个真空系统用于对含有基底的腔室进行抽空和再加压。 真空系统可用于将一个基板保持在真空状态,而第二个基板正在装载/卸载,抽真空或重新加压。 或者,真空系统可以在检查之前同时抽空多个基板,并且在检查之后重新加压相同的​​多个基板。 在检查配置中,还存在用于将衬底上的图案与第二图案进行比较的比较系统。
    • 6. 发明申请
    • Molded bracket to join structural members
    • 模制支架加入结构件
    • US20060038094A1
    • 2006-02-23
    • US11118571
    • 2005-04-29
    • Richard Simmons
    • Richard Simmons
    • F16M11/16E04G3/00
    • A47F5/14F16B7/0486
    • According to one embodiment of the present invention, a molded, thermoplastic bracket for joining structural elements includes a plurality of substantially identical, attachable bracket members and at least one fastener. Each of the plurality of bracket members includes an outer wall and a face. The face of each of the plurality of bracket members has a first cavity and a second cavity formed therein. The first and second cavities are adapted to receive a first and second structural member, respectively. The face of each of the plurality of bracket members also has at least one pin and at least one hole formed thereon that are adapted to align at least two of the plurality of bracket members. The at least one fastener is adapted to attach at least two of the plurality of bracket members.
    • 根据本发明的一个实施例,用于接合结构元件的模制的热塑性支架包括多个基本相同的可连接支架构件和至少一个紧固件。 多个支架构件中的每一个包括外壁和面。 多个支架构件中的每一个的表面具有形成在其中的第一空腔和第二空腔。 第一和第二腔分别适于接收第一和第二结构构件。 多个支架构件中的每一个的表面还具有形成在其上的至少一个销和至少一个孔,其适于对准多个支架构件中的至少两个。 所述至少一个紧固件适于附接所述多个托架构件中的至少两个。
    • 9. 发明申请
    • Method and system for assembling databases in multiple-party proceedings
    • 在多方程序中组装数据库的方法和系统
    • US20060004823A1
    • 2006-01-05
    • US11219152
    • 2005-09-02
    • Richard Simmons
    • Richard Simmons
    • G06F17/00
    • G06Q50/18G06F16/24575G06Q10/10
    • Methods and systems for assembling databases in multiple-party proceedings. Class members or their agents can file claims online using a computer network connected to the database. The online connection may be provided as a web site accessible through the Internet. Users file claims by submitting Identifying Information and Claim Information, both of which may be validated in order to prevent fraudulent or otherwise invalid claims. Class members may be provided with reference strings prior to filing the claim. The users are prompted to submit the reference strings when filing the claims for purposes of administration and to verify the authenticity of the filing. The filed claims are stored in a database which may be accessible to parties in the class action.
    • 在多方程序中组装数据库的方法和系统。 类成员或其代理人可以使用连接到数据库的计算机网络在线提出索赔。 在线连接可以作为可通过因特网访问的网站来提供。 用户通过提交识别信息和索赔信息来提出索赔,两者都可以被验证,以防止欺诈或其他无效的索赔。 在提交索赔之前,会员可以提供参考字符串。 提交用户在为管理目的提交索赔时提交引用字符串,并验证归档的真实性。 所提交的权利要求存储在数据库中,可以在集体诉讼中对方进行访问。