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    • 5. 发明授权
    • Method for fabricating a high-voltage high-power integrated circuit device
    • 高压大功率集成电路器件的制造方法
    • US06855581B2
    • 2005-02-15
    • US10153975
    • 2002-05-23
    • Tae Moon RohDae Woo LeeYil Suk YangIl Yong ParkSang Gi KimJin Gun KooJong Dae Kim
    • Tae Moon RohDae Woo LeeYil Suk YangIl Yong ParkSang Gi KimJin Gun KooJong Dae Kim
    • H01L21/76H01L21/84H01L27/12
    • H01L27/1203H01L21/84
    • The present invention relates to a method of fabricating a high-voltage high-power integrated circuit device using a substrate of a SOI structure in which an insulating film and a silicon layer are sequentially stacked on a silicon substrate. The method comprising the steps of sequentially forming an oxide film and a photoresist film on the silicon layer and then performing a photolithography process using a trench mask to pattern the photoresist film; patterning the oxide film using the patterned photoresist film as a mask and then removing the photoresist film remained after the patterning; etching the silicon layer using the patterned oxide film as a mask until the insulating film is exposed to form a trench; forming a nitride film on the entire surface including the trench, performing an annealing process and depositing polysilicon on the entire surface so that the trench is buried; and sequentially removing the polysilicon and the nitride film until the silicon layer is exposed to flatten the surface, thus forming a device isolating film for electrical isolation between devices within the trench. Therefore, the present invention can effectively reduce the isolation area of the trench between the high-voltage high-power device and the logic CMOS device and can easily control the concentration of a deep well.
    • 本发明涉及使用其中绝缘膜和硅层依次层叠在硅衬底上的SOI结构的衬底的高压大功率集成电路器件的制造方法。 该方法包括以下步骤:在硅层上依次形成氧化物膜和光致抗蚀剂膜,然后使用沟槽掩模进行光刻工艺以对光刻胶膜进行图案化; 使用图案化的光致抗蚀剂膜作为掩模来图案化氧化膜,然后在图案化之后除去光致抗蚀剂膜; 使用所述图案化氧化膜作为掩模蚀刻所述硅层,直到所述绝缘膜暴露以形成沟槽; 在包括沟槽的整个表面上形成氮化物膜,执行退火处理并在整个表面上沉积多晶硅,使得沟槽被埋置; 并且顺序地去除多晶硅和氮化物膜,直到硅层暴露以使表面变平,从而形成用于在沟槽内的器件之间进行电隔离的器件隔离膜。 因此,本发明能够有效地降低高压大功率器件与逻辑CMOS器件之间的沟槽的隔离面积,能够容易地控制深井的浓度。
    • 6. 发明授权
    • Input and output port circuit
    • 输入输出端口电路
    • US06774697B2
    • 2004-08-10
    • US10325929
    • 2002-12-23
    • Yil Suk YangJong Dae KimTae Moon RohJin Gun KooDae Woo LeeSang Gi KimIl Yong Park
    • Yil Suk YangJong Dae KimTae Moon RohJin Gun KooDae Woo LeeSang Gi KimIl Yong Park
    • H03L500
    • H03K19/0016
    • The present invention relates to an input and output port circuit. The input and output port circuit comprises a signal register for storing output signals, an input/output register at which an input/output control signal for determining an input/output direction is stored, a plurality of control registers, a power supply switch circuit for selectively supplying a low voltage or a high voltage depending on a power mode control signal, a signal direction control circuit for determining the direction of the signal depending on a value of the signal register and a value of the input/output register, an output control circuit driven depending on the value of the control register and an output of the signal direction control circuit, and an output driving circuit for outputting the low voltage, the high voltage or the ground value depending on an output of the signal direction control circuit and an output of the output control circuit. The high voltage and the low voltage can be simultaneously driven using only a single output driving circuit and the single output driving circuit is constructed in multiple stages and is selectively driven by the output control register. Therefore, the power consumption can be saved.
    • 本发明涉及输入和输出端口电路。 输入输出端口电路包括用于存储输出信号的信号寄存器,存储用于确定输入/输出方向的输入/输出控制信号的输入/输出寄存器,多个控制寄存器,用于 选择性地根据功率模式控制信号提供低电压或高电压;信号方向控制电路,用于根据信号寄存器的值确定信号的方向,以及输入/输出寄存器的值,输出控制 电路根据控制寄存器的值和信号方向控制电路的输出驱动,以及输出驱动电路,用于根据信号方向控制电路的输出输出低电压,高电压或接地值,以及 输出控制电路的输出。 高电压和低电压可以使用单个输出驱动电路同时驱动,单输出驱动电路构成多级,由输出控制寄存器有选择地驱动。 因此,可以节省功耗。
    • 8. 发明授权
    • Ferroelectric memory cell array and method of storing data using the same
    • 铁电存储单元阵列及使用其存储数据的方法
    • US06636435B2
    • 2003-10-21
    • US10032987
    • 2001-12-27
    • Yil Suk YangTae Moon RohJong Dae KimByoung Gon Yu
    • Yil Suk YangTae Moon RohJong Dae KimByoung Gon Yu
    • G11C1122
    • G11C11/22
    • The present invention relates to a ferroelectric memory cell array formed of a single transistor, and method of storing data using the same. The ferroelectric memory cell array includes a plurality of word lines connected to gates of the memory cells located at respective rows, a plurality of bit lines connected to drains of the memory cells located at respective columns, a common source line commonly connecting sources of the memory cells, and a plurality of well lines each connected to wells in which the memory cells are each formed, wherein a bias voltage of an unit pulse shape is applied to a gate of a selected memory cell and a bias voltage of a pulse shape is applied to a well line. Therefore, the present invention allows a random access without a disturbance since data can be written by means of the polarity characteristic of the ferroelectric.
    • 本发明涉及由单个晶体管形成的铁电存储单元阵列,以及使用该晶体管存储数据的方法。 铁电存储单元阵列包括连接到位于各行的存储单元的栅极的多条字线,连接到位于相应列的存储单元的漏极的多个位线,通常连接存储器的源极的公共源极线 单元和多个井管线,每个阱管线连接到其中形成有存储单元的阱,其中单位脉冲形状的偏置电压被施加到所选存储单元的栅极并施加脉冲形状的偏置电压 到一条井线 因此,本发明允许无障碍地随机存取,因为可以通过铁电体的极性特性写入数据。