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    • 7. 发明授权
    • Method of forming finFET device
    • 形成finFET器件的方法
    • US07615443B2
    • 2009-11-10
    • US12030210
    • 2008-02-13
    • Chih-Hao ChengTzung-Han Lee
    • Chih-Hao ChengTzung-Han Lee
    • H01L21/8242
    • H01L29/66795H01L27/10876H01L27/10879
    • The invention discloses a method of forming a finFET device. A hard mask layer is formed on an active area of a semiconductor substrate. A portion of the hard mask layer is etched to form a recess. A conformal gate defining layer is deposited on the recess and a tilt angle ion implantation process is performed. A part of the gate defining layer is removed to define a fin pattern. The fin pattern is subsequently transferred to the hard mask layer. The patterned hard mask layer having the fin pattern is utilized as an etching mask, and the semiconductor substrate is etched to form a fin structure.
    • 本发明公开了一种形成finFET器件的方法。 在半导体衬底的有源区上形成硬掩模层。 硬掩模层的一部分被蚀刻以形成凹部。 在凹槽上沉积保形栅极限定层,并执行倾斜角度离子注入工艺。 去除栅极限定层的一部分以限定鳍状图案。 翅片图案随后转移到硬掩模层。 将具有翅片图案的图案化的硬掩模层用作蚀刻掩模,并且蚀刻半导体衬底以形成翅片结构。
    • 10. 发明申请
    • NON-VOLATILE MEMORY AND MANUFACTURING METHOD THEREOF
    • 非易失性存储器及其制造方法
    • US20060192241A1
    • 2006-08-31
    • US11066994
    • 2005-02-25
    • Tzung-Han LeeWen-Jeng LinKuang-Pi LeeBlue Larn
    • Tzung-Han LeeWen-Jeng LinKuang-Pi LeeBlue Larn
    • H01L21/336H01L29/76
    • H01L29/792H01L27/115H01L27/11568H01L29/6653
    • A non-volatile memory comprising a substrate, a stacked gate structure, a conductive spacer, an oxide/nitride/oxide layer, buried doping regions, a control gate and an insulating layer. The stacked gate structure is disposed on the substrate. The stacked gate structure comprises a gate dielectric layer, a select gate and a cap layer. The conductive spacer is disposed on the sidewalls of the stacked gate structure. The oxide/nitride/oxide layer is disposed between the conductive spacer and the stacked gate structure and between the conductive spacer and the substrate. The buried doping regions are disposed in the substrate outside the conductive spacer on each side of the stacked gate structure. The control gate is disposed over the stacked gate structure and electrically connected to the conductive spacer. The insulating layer is disposed between the buried doping layer and the control gate.
    • 包括衬底,堆叠栅极结构,导电间隔物,氧化物/氮化物/氧化物层,掩埋掺杂区域,控制栅极和绝缘层的非易失性存储器。 层叠的栅极结构设置在基板上。 堆叠栅极结构包括栅极介电层,选择栅极和盖层。 导电间隔物设置在堆叠栅结构的侧壁上。 氧化物/氮化物/氧化物层设置在导电间隔物和层叠栅极结构之间以及导电间隔物和衬底之间。 掩埋掺杂区域设置在层叠栅极结构的每一侧上的导电间隔物外部的衬底中。 控制栅极设置在堆叠的栅极结构上并电连接到导电间隔物。 绝缘层设置在掩埋掺杂层和控制栅极之间。