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1. 发明授权

US5241366A Thin film thickness monitor 失效
标题翻译：薄膜厚度监视器
公开(公告)号：US5241366A
公开(公告)日：1993-08-31
申请号：US846207
申请日：1992-03-04
申请人： Christopher F. Bevis , Armand P. Neukermans , Stanley E. Stokowski , Ralph C. Wolf , Matthew B. Lutzker
发明人： Christopher F. Bevis , Armand P. Neukermans , Stanley E. Stokowski , Ralph C. Wolf , Matthew B. Lutzker
IPC分类号： G01B11/06
CPC分类号： G01B11/0625
摘要： A thin film thickness monitor using successive reflection of a polychromatic light beam off of reference thin film of variable optical thickness and a sample thin film whose thickness is to be determined, in which a monochromatic light source is used beforehand to first determine the actual optical thickness of the reference thin film at each relative position of the beam and reference thin film. In one embodiment, the ratio S/R of detected light intensity S from the sample thin film and detected light intensity R from the reference thin film is found for each relative position and the position at which the ratio is a maximum is determined. In another embodiment, this ratio is corrected by a corresponding ratio S.sub.1 /R.sub.1 derived from a bare wafer substrate. The sample can then be located behind additional optical surfaces, such as a vacuum port without causing substantial errors. In yet a third embodiment, the detected light intensity R2 from two reflections off of the reference thin film is used in place of intensity R, allowing very thin films to be accurately measured.
摘要翻译：一种薄膜厚度监视器，其使用从可变光学厚度的参考薄膜的多色光束的连续反射以及要确定其厚度的样品薄膜，其中预先使用单色光源以首先确定实际的光学厚度的参考薄膜在光束和参考薄膜的每个相对位置。在一个实施例中，对于每个相对位置找到来自样品薄膜的检测光强度S的比S / R和来自参考薄膜的检测光强度R，并且确定该比率是最大值的位置。在另一个实施例中，该比率由从裸晶片衬底衍生的对应比率S1 / R1进行校正。然后样品可以位于附加的光学表面之后，例如真空端口，而不会引起实质的错误。在第三实施例中，使用来自参考薄膜的两个反射的检测光强度R2代替强度R，从而允许精确测量非常薄的膜。

2. 发明授权

US5276498A Adaptive spatial filter for surface inspection 失效
标题翻译：用于表面检测的自适应空间滤波器
公开(公告)号：US5276498A
公开(公告)日：1994-01-04
申请号：US882047
申请日：1992-05-12
申请人： Lee K. Galbraith , John L. Vaught , Ralph C. Wolf , Brian Leslie , Armand P. Neukermans
发明人： Lee K. Galbraith , John L. Vaught , Ralph C. Wolf , Brian Leslie , Armand P. Neukermans
IPC分类号： H01L21/66 , G01N21/956 , G02B27/46 , G02F1/1343 , G01N21/00
CPC分类号： G02F1/134309 , G01N21/95623 , G02B27/46 , G01N2201/067
摘要： An inspection apparatus for a light diffracting surface employs a planar array of individually addressable light valves for use as a spatial filter in an imaged Fourier plane of a diffraction pattern, with valves having a stripe geometry corresponding to positions of members of the diffraction pattern, blocking light from those members. The remaining valve stripes, i.e. those not blocking light from diffraction order members, are open for transmission of light. Light directed onto the surface, such as a semiconductor wafer, forms elongated curved diffraction orders from repetitive patterns of circuit features. The curved diffraction orders are transformed to linear orders by a Fourier transform lens. The linear diffraction orders from repetitive patterns of circuit features are blocked, while light from non-repetitive features, such as dirt particles or defects is allowed to pass through the light valves to a detector. Patterns of stripes can be recorded corresponding to the repetitive features of different integrated circuits. Different filters may be rapidly switched electronically in synchronization with a beam scanning a patterned surface inspecting different light diffracting patterns in different positions, allowing scattered or diffracted light from non-repetitive features to pass through the filter to a detector. A logical AND combination of two filters may be used so that two regions may be inspected in a single scan of the beam.
摘要翻译：用于光衍射表面的检查装置采用独立寻址光阀的平面阵列，用作衍射图案的成像傅立叶平面中的空间滤光器，其中具有对应于衍射图案的部件的位置的条形几何形状的阀来自这些成员的光。剩余的阀条，即不阻挡来自衍射级构件的光的那些条纹是透光的。指向表面的光，例如半导体晶片，从电路特征的重复图案形成细长的弯曲衍射级。通过傅里叶变换透镜将弯曲的衍射级变换成线性阶数。来自电路特征的重复图案的线性衍射顺序被阻止，而来自非重复特征的光（例如污物颗粒或缺陷）允许通过光阀到达检测器。可以根据不同集成电路的重复特征对条纹进行记录。不同的滤波器可以与扫描图案化表面的光束同步地电子快速地切换，以在不同位置检查不同的光衍射图案，允许来自非重复特征的散射或衍射光通过滤光器到检测器。可以使用两个滤波器的逻辑AND组合，使得可以在波束的单次扫描中检查两个区域。

3. 发明授权

US08147544B2 Therapeutic appliance for cochlea 有权
标题翻译：耳蜗治疗器具
公开(公告)号：US08147544B2
公开(公告)日：2012-04-03
申请号：US10494345
申请日：2002-10-26
申请人： S. George Lesinski , Armand P. Neukermans
发明人： S. George Lesinski , Armand P. Neukermans
IPC分类号： A61B17/32
CPC分类号： A61B17/1679 , A61N1/0541 , A61N1/36036
摘要： A fenestration (36) piercing the otic capsule bone of the cochlea (34) receives a therapeutic appliance, such as a microactuator (78), plug (92), micropump for drug or therapeutic agent delivery, electrode (102), etc. Disclosed are several different ways of achieving a “water tight” seal between the otic capsule bone and the therapeutic appliance. Also disclosed are specific ways of implanting the therapeutic appliance both with and without a sheath (72) lining the wall of the fenestration (36) formed using specialized surgical burrs (122, 124, 162, 164).
摘要翻译：刺穿耳蜗（34）耳廓胶囊骨的开窗（36）接收诸如微型致动器（78），塞子（92），用于药物或治疗剂递送的微型泵，电极（102）等治疗用具。公开是在耳廓胶囊骨和治疗器具之间实现“水密”密封的几种不同方式。还公开了一种植入治疗器具的具体方式，其具有和不使用衬套在使用专门的手术毛刺（122,124,162,164）形成的开窗壁（36）的壁上的护套（72）。

4. 发明授权

US07031045B2 Two-dimensional micro-mirror array enhancements 失效
公开(公告)号：US07031045B2
公开(公告)日：2006-04-18
申请号：US10695109
申请日：2003-10-28
申请人： Armand P. Neukermans , Timothy G. Slater , Marc R. Schuman , Jack D. Foster , Sam Calmes , Sateesh S. Bajikar , Arun Malhotra , Jane Ang , Jerry Hurst , John Green
发明人： Armand P. Neukermans , Timothy G. Slater , Marc R. Schuman , Jack D. Foster , Sam Calmes , Sateesh S. Bajikar , Arun Malhotra , Jane Ang , Jerry Hurst , John Green
IPC分类号： G02B26/00
CPC分类号： G02B6/3584 , G02B6/262 , G02B6/32 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B6/359 , G02B6/4249 , G02B26/0833 , G02B26/0841 , G02B26/085
摘要： A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

5. 发明授权

US06561231B2 Method for filling acoustic implantable transducers 失效
公开(公告)号：US06561231B2
公开(公告)日：2003-05-13
申请号：US10057388
申请日：2002-01-25
申请人： Armand P. Neukermans
发明人： Armand P. Neukermans
IPC分类号： B65B104
CPC分类号： A61F11/04
摘要： Methods for filling transducers of a fully implantable hearing aid system with liquids having either a high or a low vapor pressure are described. Methods are also described for avoiding damage to transducers during their testing and shipment.

6. 发明授权

US06230051B1 Device for enhancing transdermal agent delivery or sampling 失效
标题翻译：用于增强透皮药物递送或取样的装置
公开(公告)号：US06230051B1
公开(公告)日：2001-05-08
申请号：US08877153
申请日：1997-06-17
申请人： Michel J. N. Cormier , Avtar S. Nat , Armand P. Neukermans , Barry Block
发明人： Michel J. N. Cormier , Avtar S. Nat , Armand P. Neukermans , Barry Block
IPC分类号： A61N130
CPC分类号： A61M37/0015 , A61B5/14514 , A61B5/150022 , A61B5/150099 , A61B5/150282 , A61B5/150427 , A61B5/150969 , A61B5/150984 , A61B5/15105 , A61B5/15113 , A61B5/15142 , A61B10/0045 , A61B17/205 , A61M2037/0007 , A61M2037/0023 , A61M2037/0038 , A61M2037/0046 , A61M2037/0053 , A61N1/30 , A61N1/303
摘要： A percutaneous agent delivery or sampling device comprising a sheet having a plurality of microblades for piercing the skin for increasing transdermal flux of an agent. The microblades having a relatively sharp angled leading edge which transitions to a relatively gradually angled blade edge.
摘要翻译：一种经皮剂递送或取样装置，包括具有多个微刀片的片材，用于刺穿皮肤以增加药剂的经皮通量。微型刀片具有相对尖锐的前缘，其转变成相对逐渐倾斜的叶片边缘。

7. 发明授权

US6068589A Biocompatible fully implantable hearing aid transducers 失效
标题翻译：生物相容性完全植入式助听器
公开(公告)号：US6068589A
公开(公告)日：2000-05-30
申请号：US801056
申请日：1997-02-14
申请人： Armand P. Neukermans
发明人： Armand P. Neukermans
IPC分类号： H04R17/00 , H04R25/00
CPC分类号： H04R25/606 , H04R17/00 , H04R25/405 , H04R2225/67 , H04R25/505
摘要： An improved fully implantable hearing aid (10) in a first aspect includes at least two microphones (28) to provide improved noise cancellation, and, with an array (132) of microphones (28), improved directivity. In a second aspect, the hearing aid (10) includes an improved microactuator (32') in which deflections of a pair of piezoelectric plates (68) are coupled by liquid (52') to a flexible diaphragm (44') for stimulating fluid (20a) within an inner ear (17) of a subject (12). In a third aspect, the improved hearing aid (10) includes a directional booster (200) that the subject (12), having an implanted hearing aid (10), may wear on their head (122) for increasing directivity of perceived sound. A fourth aspect of the present invention is an improved implantable microactuator (32", 32'") that generates a mechanical displacement of a diaphragm (82) or a face (96) in response to an applied electrical signal. A liquid coupling between the piezoelectric transducer (54", 54'") and the diaphragm (82) or face (96) provides a mechanical impedance match for the transducer (54", 54'").
摘要翻译：改进的完全植入式助听器（10）在第一方面包括至少两个麦克风（28），以提供改进的噪声消除，并且与麦克风（28）的阵列（132）相比，改进了方向性。在第二方面，助听器（10）包括改进的微致动器（32'），其中一对压电板（68）的偏转由液体（52'）耦合到柔性隔膜（44'），用于刺激流体（20a）在被检体（12）的内耳（17）内。在第三方面，改进的助听器（10）包括定向助力器（200），所述对象（12）具有植入的助听器（10）可能在其头部（122）上磨损，以增加感知到的声音的方向性。本发明的第四方面是一种改进的可植入微致动器（32“，32”），其响应于所施加的电信号而产生振动膜（82）或面（96）的机械位移。压电换能器（54“，54”“）和隔膜（82）或面（96）之间的液体耦合为换能器（54”，54“'）提供了机械阻抗匹配。

8. 发明授权

US6064779A Handheld document scanner 失效
标题翻译：手持文档扫描仪
公开(公告)号：US6064779A
公开(公告)日：2000-05-16
申请号：US121439
申请日：1998-07-23
申请人： Armand P. Neukermans , James P. Downing , Timothy G. Slater
发明人： Armand P. Neukermans , James P. Downing , Timothy G. Slater
IPC分类号： G06T1/00 , H04N1/00 , H04N1/107 , H04N1/12 , H04N1/193 , H04N1/40
CPC分类号： H04N1/00689 , H04N1/00891 , H04N1/0476 , H04N1/107 , H04N1/1072 , H04N1/1078 , H04N1/121 , H04N1/00885 , H04N1/193 , H04N2201/0096 , H04N2201/0471
摘要： A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.
摘要翻译：用于扫描器（100）的文件传送装置具有邻近文件（134）设置的柔性细长的手指（226），并且施加到手指（226）的力促使手指（226）上的齿（233）接触其中文档（134）沿着通过扫描器（100）的路径敦促文档（134）。向手指（226）施加力的压电板（222）仅需要少量的电力。为了横穿扫描器（100），文档（134）也可以沿着引导件（272）手动馈送。沿着由文件（134）穿过的路径设置的第一和第二速度感测检测器（276a和276b）允许扫描器（100）确定手动馈送的文件（134）穿过扫描仪（100）的速度，。为了节省电能，扫描器（100）还包括用于在存在待扫描的文件（134）时启动扫描器（100）的原稿存在检测器（274）。

9. 发明授权

US5772575A Implantable hearing aid 失效
标题翻译：植入式助听器
公开(公告)号：US5772575A
公开(公告)日：1998-06-30
申请号：US532398
申请日：1995-09-22
申请人： S. George Lesinski , Armand P. Neukermans
发明人： S. George Lesinski , Armand P. Neukermans
IPC分类号： H04R17/02 , H04R25/00
CPC分类号： H04R25/606 , H04R1/46 , H04R17/025 , H04R2460/13
摘要： A hearing aid includes an implantable microphone, signal-processing amplifier, battery, and microactuator. An electrical signal from the microphone is amplified and processed by the amplifier before being applied to the microactuator. The microactuator is adapted for implantation in a subject at a location from which it may mechanically create vibrations in the perilymph fluid within a subject's inner ear. A transducer of the microactuator is preferably a thin circular disk, 2 to 8 mils thick, of stress-biased PLZT. Disks of this stress-biased PLZT material can be mounted as drumheads in various different ways, preferably in conjunction with a flexible diaphragm, to small threaded metal tubes, e.g. 1.4 mm in diameter and 2.0 mm long. These tubes may be implanted into a fenestration formed through the promontory adjacent to the oval window of a subject's inner ear. Securing the disk to a tube having a larger diameter than that implanted into the fenestration and filling the tube with fluid provides hydraulic amplification of the transducer's displacement. The implantable microphone is preferably fabricated from a thin sheet of PVDF that is overcoated with inert metal electrodes.
摘要翻译：助听器包括可植入麦克风，信号处理放大器，电池和微型致动器。来自麦克风的电信号在施加到微致动器之前被放大器放大和处理。微致动器适于在受试者的内耳内的外淋巴液中机械地产生振动的位置处植入受试者中。微致动器的换能器优选为2至8密耳厚的应力偏置PLZT的薄圆盘。这种受应力偏压的PLZT材料的磁盘可以以各种不同的方式安装为鼓头，优选与柔性隔膜一起安装到小螺纹金属管，例如，直径1.4毫米，长2.0毫米。这些管可以被植入通过邻近受检者内耳的椭圆形窗口的海角形成的开窗。将盘固定到具有比注入开窗的植入物大的直径的管，并且用流体填充管提供换能器位移的液压放大。可植入麦克风优选地由用惰性金属电极涂覆的PVDF薄片制成。

10. 发明授权

US4468282A Method of making an electron beam window 失效
标题翻译：制造电子束窗的方法
公开(公告)号：US4468282A
公开(公告)日：1984-08-28
申请号：US443709
申请日：1982-11-22
申请人： Armand P. Neukermans
发明人： Armand P. Neukermans
IPC分类号： B41J2/05 , H01J5/18 , H01J9/24 , H01J33/04 , B44C1/22 , C03C15/00 , C03C25/06
CPC分类号： H01J5/18 , H01J33/04 , H01J9/244
摘要： A method of making an electron permeable window is provided which entails depositing a thin film of an inert, high strength material or compound having a low atomic number onto a substrate by chemical vapor deposition (CVD). Following that deposition, a window pattern and window support perimeter are photolithographically defined and the substrate is etched to leave the desired window structure. For a particular class of materials including SiC, BN, B.sub.4 C, Si.sub.3 N.sub.4, and Al.sub.4 C.sub.3, films are provided which are exceedingly tough and pinhole free, and which exhibit nearly zero internal stress. Furthermore, due to their extreme strength, these materials allow fabrication of extremely thin windows. In addition, because of their low atomic number and density, they have excellent electron penetration characteristics at low beam voltages (15 to 30 kV), so that most conventional CRT deflection schemes can be used to direct the beam. Also, such films are remarkably resilient and chemically inert even when very thin and can easily withstand large pressure differences.
摘要翻译：提供一种制造电子透视窗的方法，其需要通过化学气相沉积（CVD）将具有低原子序数的惰性高强度材料或化合物的薄膜沉积到基底上。在沉积之后，窗光图案和窗口支撑周边被光刻定义，并且蚀刻衬底以留下所需的窗口结构。对于包括SiC，BN，B4C，Si3N4和Al4C3在内的特定类型的材料，提供了非常坚固和无针孔的膜，其表现出几乎零的内应力。此外，由于它们的极强的强度，这些材料允许制造极薄的窗户。另外，由于它们的原子数和密度低，它们在低光束电压（15至30kV）下具有优异的电子穿透特性，因此大多数传统的CRT偏转方案可用于引导光束。此外，即使非常薄并且容易承受较大的压力差，这些膜也具有显着的弹性和化学惰性。

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