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    • 3. 发明授权
    • High-speed logarithmic photo-detector
    • 高速对数光电探测器
    • US06177665B1
    • 2001-01-23
    • US09392062
    • 1999-09-08
    • Ralph C. Wolf
    • Ralph C. Wolf
    • H01J4330
    • H01J43/18G01J1/44H01J43/30
    • According to the present invention, a photomultiplier tube is used with a high-speed feedback mechanism to continuously modulate the gain of the tube in response to the size of the input signal. The gain of the tube and the anode current are independently converted to ideal logarithms. These signals are then subtracted from one another to reconstruct a true logarithmic representation of the optical signal. This log-light-level signal has a higher dynamic range and faster temporal response than has previously been achieved by other methods.
    • 根据本发明,光电倍增管采用高速反馈机构,以响应于输入信号的大小来连续调制管的增益。 管和阳极电流的增益被独立地转换成理想的对数。 然后将这些信号彼此减去以重建光信号的真对数表示。 该对数光级信号具有比先前通过其他方法实现的更高的动态范围和更快的时间响应。
    • 6. 发明授权
    • Thin film thickness monitor
    • 薄膜厚度监视器
    • US5241366A
    • 1993-08-31
    • US846207
    • 1992-03-04
    • Christopher F. BevisArmand P. NeukermansStanley E. StokowskiRalph C. WolfMatthew B. Lutzker
    • Christopher F. BevisArmand P. NeukermansStanley E. StokowskiRalph C. WolfMatthew B. Lutzker
    • G01B11/06
    • G01B11/0625
    • A thin film thickness monitor using successive reflection of a polychromatic light beam off of reference thin film of variable optical thickness and a sample thin film whose thickness is to be determined, in which a monochromatic light source is used beforehand to first determine the actual optical thickness of the reference thin film at each relative position of the beam and reference thin film. In one embodiment, the ratio S/R of detected light intensity S from the sample thin film and detected light intensity R from the reference thin film is found for each relative position and the position at which the ratio is a maximum is determined. In another embodiment, this ratio is corrected by a corresponding ratio S.sub.1 /R.sub.1 derived from a bare wafer substrate. The sample can then be located behind additional optical surfaces, such as a vacuum port without causing substantial errors. In yet a third embodiment, the detected light intensity R2 from two reflections off of the reference thin film is used in place of intensity R, allowing very thin films to be accurately measured.
    • 一种薄膜厚度监视器,其使用从可变光学厚度的参考薄膜的多色光束的连续反射以及要确定其厚度的样品薄膜,其中预先使用单色光源以首先确定实际的光学厚度 的参考薄膜在光束和参考薄膜的每个相对位置。 在一个实施例中,对于每个相对位置找到来自样品薄膜的检测光强度S的比S / R和来自参考薄膜的检测光强度R,并且确定该比率是最大值的位置。 在另一个实施例中,该比率由从裸晶片衬底衍生的对应比率S1 / R1进行校正。 然后样品可以位于附加的光学表面之后,例如真空端口,而不会引起实质的错误。 在第三实施例中,使用来自参考薄膜的两个反射的检测光强度R2代替强度R,从而允许精确测量非常薄的膜。
    • 7. 发明授权
    • Safety mechanism for high security lock
    • 高安全锁的安全机制
    • US4601504A
    • 1986-07-22
    • US603087
    • 1984-04-23
    • Ralph C. Wolf
    • Ralph C. Wolf
    • E05B63/18E05C1/16
    • E05B63/18Y10T292/0959Y10T292/552
    • A high security lock of the type having a base, a bolt which moves on the base and engages a strike, and a dead lock tripper which interacts with the strike to automatically lock the bolt is improved by including a lock prevent member in association with the bolt. The lock prevent member inhibits the bolt from moving from an unlocked to a locked position in spite of the dead lock tripper interacting with the strike. A secondary key can be used to inactivate the lock prevent member such that the lock returns to its normal mode of operation with the interaction of the dead lock tripper and the strike automatically locking the lock.
    • 具有基座,在基座上移动并接合罢工的螺栓的类型的高安全锁以及与罢工相互作用以自动锁定螺栓的死锁脱扣器通过包括与 螺栓。 尽管死锁脱扣器与罢工相互作用,锁定防止构件禁止螺栓从解锁状态移动到锁定位置。 可以使用次级键来使锁定防止构件失效,使得锁定恢复到其正常操作模式,并且死锁触发器和罢工的相互作用自动锁定锁定。
    • 8. 发明授权
    • Apparatus and methods for optically inspecting a sample for anomalies
    • 用于光学检查样品异常的装置和方法
    • US07012683B2
    • 2006-03-14
    • US10993473
    • 2004-11-18
    • Ralph C. WolfEva L. BenitezDongsheng (Don) ChenJohn D. GreeneJamie M. SullivanEric N. VellaKhiem D. Vo
    • Ralph C. WolfEva L. BenitezDongsheng (Don) ChenJohn D. GreeneJamie M. SullivanEric N. VellaKhiem D. Vo
    • G01N21/88
    • G01N21/956G01N21/47G01N21/9501
    • Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e.g., scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor. The non-linear component is arranged to generate a non-linear detected signal based on the detected signal. The detector further includes a first analog-to-digital converter (ADC) coupled to the non-linear component. The first ADC is arranged to digitize the non-linear detected signal into a digitized detected signal.
    • 公开了用于检测来自诸如半导体晶片的样品的光束(例如,散射光,反射光或二次电子)的相对宽的动态范围的方法和装置。 换句话说,检查系统提供检测到的具有宽动态范围的输出信号。 然后可以分析检测到的输出信号,以确定样品中是否存在缺陷。 例如,将来自目标管芯的强度值与来自参考管芯的相应部分的强度值进行比较,其中将显着的强度差定义为缺陷。 在具体实施例中,公开了一种用于检测样品上的缺陷的检查系统。 该系统包括用于将入射光束引向样品表面的光束发生器,以及响应入射光束检测来自样品表面的检测光束的检测器。 检测器具有用于检测检测到的光束并基于检测到的光束产生检测信号的传感器和耦合到传感器的非线性分量。 非线性分量被布置成基于检测到的信号产生非线性检测信号。 检测器还包括耦合到非线性分量的第一模数转换器(ADC)。 第一ADC被布置成将非线性检测信号数字化为数字化的检测信号。
    • 9. 发明授权
    • Apparatus and methods for optically inspecting a sample for anomalies
    • 用于光学检查样品异常的装置和方法
    • US06833913B1
    • 2004-12-21
    • US10180807
    • 2002-06-24
    • Ralph C. WolfEva L. BenitezDongsheng Don ChenJohn D. GreeneJamie M. SullivanEric N. VellaKhiem D. Vo
    • Ralph C. WolfEva L. BenitezDongsheng Don ChenJohn D. GreeneJamie M. SullivanEric N. VellaKhiem D. Vo
    • G01N2188
    • G01N21/956G01N21/47G01N21/9501
    • Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e.g., scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor. The non-linear component is arranged to generate a non-linear detected signal based on the detected signal. The detector further includes a first analog-to-digital converter (ADC) coupled to the non-linear component. The first ADC is arranged to digitize the non-linear detected signal into a digitized detected signal.
    • 公开了用于检测来自诸如半导体晶片的样品的光束(例如,散射光,反射光或二次电子)的相对宽的动态范围的方法和装置。 换句话说,检查系统提供检测到的具有宽动态范围的输出信号。 然后可以分析检测到的输出信号,以确定样品中是否存在缺陷。 例如,将来自目标管芯的强度值与来自参考管芯的对应部分的强度值进行比较,其中将显着的强度差定义为缺陷。 在具体实施例中,公开了一种用于检测样品上的缺陷的检查系统。 该系统包括用于将入射光束引向样品表面的光束发生器,以及响应入射光束检测来自样品表面的检测光束的检测器。 检测器具有用于检测检测到的光束并基于检测到的光束产生检测信号的传感器和耦合到传感器的非线性分量。 非线性分量被布置成基于检测到的信号产生非线性检测信号。 检测器还包括耦合到非线性分量的第一模数转换器(ADC)。 第一ADC被布置成将非线性检测信号数字化为数字化的检测信号。