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1. 发明授权

US07852487B2 Heterodyne interferometer device for optically measuring an object 有权
标题翻译：用于光学测量物体的异步干涉仪装置
公开(公告)号：US07852487B2
公开(公告)日：2010-12-14
申请号：US12040030
申请日：2008-02-29
申请人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
发明人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
IPC分类号： G01B9/02
CPC分类号： G01B9/02027 , G01B9/02002 , G01B9/02042 , G01B9/02045 , G01B9/0209 , G01B9/02091 , G01B2290/45
摘要： A device for the optic measuring of an object (1), including a signal processing unit (2) as well as an interferometer with a light source (3) and with at least one detector (4a, 4d). The interferometer is embodied such that a light beam (12) created by the light source (3) is split at least into a working beam (12a) and a reference beam (12b), with the working beam (12a) impinging the object (1) and the working beam (12a) is at least partially reflected by the object and interfered with the reference beam (12b) on the detector (4a, 4b). The signal processing unit (2) is connected to the detector (4a, 4b) and includes a vibrometer processing unit (2f), which detects the motion of the object (1) from the measuring signals of the detector (4a, 4d). It is essential that the light source (3) creates light with a coherence length shorter than 1 cm and that the interferometer comprises a device for changing the optic path length (11), and the signal processing unit comprises a focus control (2d) controlling a device for changing the optic path length which controls the device for changing the optic path length such that the optic path length of the working beam and the reference beam are approximately adjusted to each other.
摘要翻译：一种用于物体（1）的光学测量的装置，包括信号处理单元（2）以及具有光源（3）和至少一个检测器（4a，4d）的干涉仪。干涉仪被实施为使得由光源（3）产生的光束（12）至少分裂成工作光束（12a）和参考光束（12b），工作光束（12a）撞击物体（ 1），并且工作光束（12a）至少部分地被物体反射并且与检测器（4a，4b）上的参考光束（12b）干涉。信号处理单元（2）连接到检测器（4a，4b），并包括一个根据检测器（4a，4d）的测量信号检测物体（1）运动的振动计处理单元（2f）。重要的是，光源（3）产生具有短于1cm的相干长度的光，并且干涉仪包括用于改变光路长度（11）的装置，并且信号处理单元包括控制用于改变光路长度的装置，其控制用于改变光路长度的装置，使得工作光束和参考光束的光路长度彼此近似调整。

2. 发明申请

US20080285049A1 DEVICE FOR OPTICALLY MEASURING AN OBJECT 有权
标题翻译：用于光学测量对象的设备
公开(公告)号：US20080285049A1
公开(公告)日：2008-11-20
申请号：US12040030
申请日：2008-02-29
申请人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
发明人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
IPC分类号： G01B11/00
CPC分类号： G01B9/02027 , G01B9/02002 , G01B9/02042 , G01B9/02045 , G01B9/0209 , G01B9/02091 , G01B2290/45
摘要： A device for the optic measuring of an object (1), including a signal processing unit (2) as well as an interferometer with a light source (3) and with at least one detector (4a, 4d). The interferometer is embodied such that a light beam (12) created by the light source (3) is split at least into a working beam (12a) and a reference beam (12b), with the working beam (12a) impinging the object (1) and the working beam (12a) is at least partially reflected by the object and interfered with the reference beam (12b) on the detector (4a, 4b). The signal processing unit (2) is connected to the detector (4a, 4b) and includes a vibrometer processing unit (2f), which detects the motion of the object (1) from the measuring signals of the detector (4a, 4d). It is essential that the light source (3) creates light with a coherence length shorter than 1 cm and that the interferometer comprises a device for changing the optic path length (11), and the signal processing unit comprises a focus control (2d) controlling a device for changing the optic path length which controls the device for changing the optic path length such that the optic path length of the working beam and the reference beam are approximately adjusted to each other.
摘要翻译：一种用于物体（1）的光学测量的装置，包括信号处理单元（2）以及具有光源（3）和至少一个检测器（4a，4d）的干涉仪。干涉仪被实施为使得由光源（3）产生的光束（12）至少分裂成工作光束（12a）和参考光束（12b），其中工作光束（12a）撞击物体（1）和工作光束（12a）至少部分地被物体反射并干扰检测器（4a，4b）上的参考光束（12b）。所述信号处理单元（2）连接到所述检测器（4a，4b），并且包括用于从所述检测器（4a）的测量信号检测所述物体（1）的运动的振动计处理单元（2f），4 d）。重要的是，光源（3）产生具有短于1cm的相干长度的光，并且干涉仪包括用于改变光路长度（11）的装置，并且信号处理单元包括聚焦控制（2d）控制用于改变光路长度的装置，其控制装置以改变光路长度，使得工作光束和参考光束的光路长度彼此近似调整。

3. 发明申请

US20110090508A1 DEVICE AND METHOD FOR INTERFEROMETRIC VIBRATION MEASUREMENT OF AN OBJECT 有权
标题翻译：物体的非线性振动测量装置和方法
公开(公告)号：US20110090508A1
公开(公告)日：2011-04-21
申请号：US12907117
申请日：2010-10-19
申请人： Christian Rembe , Alexander Drabenstedt , Michael Gartner , Mike Herberich , Andreas Leonhardt
发明人： Christian Rembe , Alexander Drabenstedt , Michael Gartner , Mike Herberich , Andreas Leonhardt
IPC分类号： G01B9/02 , G01H9/00
CPC分类号： G01H9/00
摘要： A device for interferometric vibration measurement on an object (8), having a radiation source (1) for generating an original beam, a first beam splitter for dividing the original beam into a measuring beam and a reference beam (4, 5), a detector (10) and a focusing device (9). The device is implemented in such a way that the measuring beam at least partly reflected by the object and the reference beam are superimposed on a detection area of the detector, and the focusing device is arranged in the beam path of the measuring beam for focusing the measuring beam onto a measuring point (7) on the object. It is important that, by using the device, a measuring beam having a wavelength greater than 1100 nm can be generated and that the device additionally has an image unit (12) for two-dimensional imaging of at least a sub-region of the object surrounding the measuring point. The focusing device is arranged in the beam path between image unit and object and being constructed such that the focus of the measuring beam lies approximately in the focal plane of the image unit and, by use of the focusing device, the focal point of the measuring beam and the focal plane of the imaging unit are displaceable simultaneously. A method for interferometric vibration measurement on an object using the device is also provided.
摘要翻译：一种用于在物体（8）上进行干涉测量的装置，具有用于产生原始光束的辐射源（1），用于将原始光束分成测量光束的第一分束器和参考光束（4,5），检测器（10）和聚焦装置（9）。该装置的实现方式是将至少部分地由物体和参考光束反射的测量光束叠加在检测器的检测区域上，并且聚焦装置布置在测量光束的光束路径中，以便聚焦测量光束到物体上的测量点（7）上。重要的是，通过使用该装置，可以产生波长大于1100nm的测量束，并且该装置还具有用于对象的至少一个子区域的二维成像的图像单元（12）围绕测量点。聚焦装置布置在图像单元和物体之间的光束路径中，并且被构造成使得测量光束的焦点大致位于图像单元的焦平面中，并且通过使用聚焦装置，测量的焦点光束和成像单元的焦平面可同时移位。还提供了一种使用该装置对物体进行干涉测量的方法。

4. 发明授权

US09851243B2 Method and device for the optical non-contact oscillation measurement of an oscillating object 有权
公开(公告)号：US09851243B2
公开(公告)日：2017-12-26
申请号：US14112750
申请日：2012-03-16
申请人： Christian Rembe , Alexander Drabenstedt , Matthias Schussler , Christian Ehrmann , Volkmar Roth
发明人： Christian Rembe , Alexander Drabenstedt , Matthias Schussler , Christian Ehrmann , Volkmar Roth
IPC分类号： G01H9/00
CPC分类号： G01H9/00
摘要： A device for the optical non-contact vibration measurement of an vibrating object, including a laser Doppler vibrometer that has a laser as the light source for a laser beam, a first beam splitter assembly for splitting the laser beam into a measuring beam and a reference beam, a means for shifting the frequency of the reference beam or of the measuring beam in a defined manner, a second beam splitter assembly by which the measuring beam back-scattered by the oscillating object is merged with the reference beam and superimposed on the same, and a detector for receiving the superimposed measuring and reference beam and for generating a measurement signal. The laser is provided with a polarization filter arranged inside the optical resonator of the laser and the laser is frequency stabilized by regulating to a beat signal of the laser.

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