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1. 发明授权

US07852487B2 Heterodyne interferometer device for optically measuring an object 有权
标题翻译：用于光学测量物体的异步干涉仪装置
公开(公告)号：US07852487B2
公开(公告)日：2010-12-14
申请号：US12040030
申请日：2008-02-29
申请人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
发明人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
IPC分类号： G01B9/02
CPC分类号： G01B9/02027 , G01B9/02002 , G01B9/02042 , G01B9/02045 , G01B9/0209 , G01B9/02091 , G01B2290/45
摘要： A device for the optic measuring of an object (1), including a signal processing unit (2) as well as an interferometer with a light source (3) and with at least one detector (4a, 4d). The interferometer is embodied such that a light beam (12) created by the light source (3) is split at least into a working beam (12a) and a reference beam (12b), with the working beam (12a) impinging the object (1) and the working beam (12a) is at least partially reflected by the object and interfered with the reference beam (12b) on the detector (4a, 4b). The signal processing unit (2) is connected to the detector (4a, 4b) and includes a vibrometer processing unit (2f), which detects the motion of the object (1) from the measuring signals of the detector (4a, 4d). It is essential that the light source (3) creates light with a coherence length shorter than 1 cm and that the interferometer comprises a device for changing the optic path length (11), and the signal processing unit comprises a focus control (2d) controlling a device for changing the optic path length which controls the device for changing the optic path length such that the optic path length of the working beam and the reference beam are approximately adjusted to each other.
摘要翻译：一种用于物体（1）的光学测量的装置，包括信号处理单元（2）以及具有光源（3）和至少一个检测器（4a，4d）的干涉仪。干涉仪被实施为使得由光源（3）产生的光束（12）至少分裂成工作光束（12a）和参考光束（12b），工作光束（12a）撞击物体（ 1），并且工作光束（12a）至少部分地被物体反射并且与检测器（4a，4b）上的参考光束（12b）干涉。信号处理单元（2）连接到检测器（4a，4b），并包括一个根据检测器（4a，4d）的测量信号检测物体（1）运动的振动计处理单元（2f）。重要的是，光源（3）产生具有短于1cm的相干长度的光，并且干涉仪包括用于改变光路长度（11）的装置，并且信号处理单元包括控制用于改变光路长度的装置，其控制用于改变光路长度的装置，使得工作光束和参考光束的光路长度彼此近似调整。

2. 发明申请

US20080285049A1 DEVICE FOR OPTICALLY MEASURING AN OBJECT 有权
标题翻译：用于光学测量对象的设备
公开(公告)号：US20080285049A1
公开(公告)日：2008-11-20
申请号：US12040030
申请日：2008-02-29
申请人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
发明人： Christian Rembe , Alexander Drabenstedt , Georg Siegmund
IPC分类号： G01B11/00
CPC分类号： G01B9/02027 , G01B9/02002 , G01B9/02042 , G01B9/02045 , G01B9/0209 , G01B9/02091 , G01B2290/45
摘要： A device for the optic measuring of an object (1), including a signal processing unit (2) as well as an interferometer with a light source (3) and with at least one detector (4a, 4d). The interferometer is embodied such that a light beam (12) created by the light source (3) is split at least into a working beam (12a) and a reference beam (12b), with the working beam (12a) impinging the object (1) and the working beam (12a) is at least partially reflected by the object and interfered with the reference beam (12b) on the detector (4a, 4b). The signal processing unit (2) is connected to the detector (4a, 4b) and includes a vibrometer processing unit (2f), which detects the motion of the object (1) from the measuring signals of the detector (4a, 4d). It is essential that the light source (3) creates light with a coherence length shorter than 1 cm and that the interferometer comprises a device for changing the optic path length (11), and the signal processing unit comprises a focus control (2d) controlling a device for changing the optic path length which controls the device for changing the optic path length such that the optic path length of the working beam and the reference beam are approximately adjusted to each other.
摘要翻译：一种用于物体（1）的光学测量的装置，包括信号处理单元（2）以及具有光源（3）和至少一个检测器（4a，4d）的干涉仪。干涉仪被实施为使得由光源（3）产生的光束（12）至少分裂成工作光束（12a）和参考光束（12b），其中工作光束（12a）撞击物体（1）和工作光束（12a）至少部分地被物体反射并干扰检测器（4a，4b）上的参考光束（12b）。所述信号处理单元（2）连接到所述检测器（4a，4b），并且包括用于从所述检测器（4a）的测量信号检测所述物体（1）的运动的振动计处理单元（2f），4 d）。重要的是，光源（3）产生具有短于1cm的相干长度的光，并且干涉仪包括用于改变光路长度（11）的装置，并且信号处理单元包括聚焦控制（2d）控制用于改变光路长度的装置，其控制装置以改变光路长度，使得工作光束和参考光束的光路长度彼此近似调整。

3. 发明申请

US20090251706A1 VIBROMETER AND METHOD FOR OPTICALLY MEASURING AN OBJECT 有权
标题翻译：用于光学测量对象的振动器和方法
公开(公告)号：US20090251706A1
公开(公告)日：2009-10-08
申请号：US12417107
申请日：2009-04-02
申请人： Christian Rembe , Georg Siegmund , Tian-Hua Xu
发明人： Christian Rembe , Georg Siegmund , Tian-Hua Xu
IPC分类号： G01B9/02
CPC分类号： G01H9/00 , G01B9/02002
摘要： A vibrometer and a method for optically measuring oscillations at an object, including a radiation source for creating a source beam, a beam splitter to split the source beam into a measuring beam and a reference beam, an optic interference device for interfering the reference beam with a measuring beam, at least partially reflected by the object, and a detector, with the interference device and the detector being embodied cooperating such that a measuring beam, at least partially deflected by the object, and the reference beam interfere on the detector. The vibrometer is embodied as a heterodyne vibrometer, having an optic frequency shift unit, which is arranged in the optical path of the vibrometer, to form a carrier frequency by creating a frequency difference between the measuring beam and the reference beam. The beam splitter and the frequency shift unit are embodied as an acousto-optic modulator in an optic construction element to deflect the source beam, with the acousto-optic modulator being embodied such that the source beam entering the acousto-optic modulator can be split into at least two diffraction beams: a first diffraction beam of diffraction order of 1 and a second diffraction beam of diffraction order of −1, and the acousto-optic modulator is arranged in the optical path of the vibrometer such that one of the two diffraction beams represents the measurement beam and the other diffraction beam represents the reference beam.
摘要翻译：一种振动计和一种用于光学测量物体上的振荡的方法，包括用于产生源光束的辐射源，用于将源光束分裂成测量光束的分束器和参考光束，用于干扰参考光束的光学干涉装置，至少部分地由物体反射的测量光束和检测器，其中所述干涉装置和检测器被配置为使得至少部分地被物体偏转的测量光束和参考光束干扰检测器。振动计被实施为外差式振动计，其具有布置在振动计的光路中的光学频移单元，以通过在测量光束和参考光束之间产生频率差而形成载波频率。分束器和频移单元被实现为光学构造元件中的声光调制器以偏转源束，其中声光调制器被实现为使得进入声光调制器的源束可以被分成至少两个衍射光束：衍射级为1的第一衍射光束和衍射级为-1的第二衍射光束，并且声光调制器布置在振动计的光路中，使得两个衍射光束表示测量光束，另一个衍射光束表示参考光束。

4. 发明授权

US08199331B2 Vibrometer and method for optically measuring an object 有权
标题翻译：振动计和光学测量物体的方法
公开(公告)号：US08199331B2
公开(公告)日：2012-06-12
申请号：US12417107
申请日：2009-04-02
申请人： Christian Rembe , Georg Siegmund , Tian-Hua Xu
发明人： Christian Rembe , Georg Siegmund , Tian-Hua Xu
IPC分类号： G01B11/02
CPC分类号： G01H9/00 , G01B9/02002
摘要： A vibrometer and a method for optically measuring oscillations at an object, including a radiation source for creating a source beam, a beam splitter to split the source beam into a measuring beam and a reference beam, an optic interference device for interfering the reference beam with a measuring beam, at least partially reflected by the object, and a detector, with the interference device and the detector being embodied cooperating such that a measuring beam, at least partially deflected by the object, and the reference beam interfere on the detector. The vibrometer is embodied as a heterodyne vibrometer, having an optic frequency shift unit, which is arranged in the optical path of the vibrometer, to form a carrier frequency by creating a frequency difference between the measuring beam and the reference beam. The beam splitter and the frequency shift unit are embodied as an acousto-optic modulator in an optic construction element to deflect the source beam, with the acousto-optic modulator being embodied such that the source beam entering the acousto-optic modulator can be split into at least two diffraction beams: a first diffraction beam of diffraction order of 1 and a second diffraction beam of diffraction order of −1, and the acousto-optic modulator is arranged in the optical path of the vibrometer such that one of the two diffraction beams represents the measurement beam and the other diffraction beam represents the reference beam.
摘要翻译：一种振动计和一种用于光学测量物体上的振荡的方法，包括用于产生源光束的辐射源，用于将源光束分裂成测量光束的分束器和参考光束，用于干扰参考光束的光学干涉装置，至少部分地由物体反射的测量光束和检测器，其中所述干涉装置和检测器被配置为使得至少部分地被物体偏转的测量光束和参考光束干扰检测器。振动计被实施为外差式振动计，其具有布置在振动计的光路中的光学频移单元，以通过在测量光束和参考光束之间产生频率差而形成载波频率。分束器和频移单元被实现为光学构造元件中的声光调制器以偏转源束，其中声光调制器被实现为使得进入声光调制器的源束可以被分成至少两个衍射光束：衍射级为1的第一衍射光束和衍射级为-1的第二衍射光束，并且声光调制器布置在振动计的光路中，使得两个衍射光束表示测量光束，另一个衍射光束表示参考光束。

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