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    • 1. 发明申请
    • METHOD AND SYSTEM FOR EXPOSURE OF A PHASE SHIFT MASK
    • 相移屏幕曝光方法与系统
    • US20080241707A1
    • 2008-10-02
    • US11695186
    • 2007-04-02
    • Chih-Ming ChenYa-Ping TsengMing-Tao Ho
    • Chih-Ming ChenYa-Ping TsengMing-Tao Ho
    • G03F1/02
    • G03F1/32
    • The present disclosure provides a method of making a mask. The method includes providing a substrate having a first attenuating layer on the substrate and a first imaging layer on the first attenuating layer; performing a first exposure to the first imaging layer using a first radiation energy in writing mode; performing a first etching to the first attenuating layer; performing a second etching to the substrate; forming a second imaging layer on the first attenuating layer and the substrate; performing a second exposure to the second imaging layer using a light energy and another mask; and performing a third etching to the first attenuating layer after the second exposure.
    • 本公开提供了制作掩模的方法。 该方法包括提供在衬底上具有第一衰减层的衬底和在第一衰减层上的第一成像层; 在写入模式下使用第一辐射能量执行对第一成像层的第一曝光; 对所述第一衰减层进行第一蚀刻; 对衬底进行第二蚀刻; 在所述第一衰减层和所述衬底上形成第二成像层; 使用光能和另一掩模对所述第二成像层进行第二曝光; 以及在所述第二曝光之后对所述第一衰减层执行第三蚀刻。
    • 2. 发明授权
    • Method and system for exposure of a phase shift mask
    • 用于曝光相移掩模的方法和系统
    • US08288081B2
    • 2012-10-16
    • US11695186
    • 2007-04-02
    • Chih-Ming ChenYa-Ping TsengMing-Tao Ho
    • Chih-Ming ChenYa-Ping TsengMing-Tao Ho
    • G03F1/00
    • G03F1/32
    • The present disclosure provides a method of making a mask. The method includes providing a substrate having a first attenuating layer on the substrate and a first imaging layer on the first attenuating layer; performing a first exposure to the first imaging layer using a first radiation energy in writing mode; performing a first etching to the first attenuating layer; performing a second etching to the substrate; forming a second imaging layer on the first attenuating layer and the substrate; performing a second exposure to the second imaging layer using a light energy and another mask; and performing a third etching to the first attenuating layer after the second exposure.
    • 本公开提供了制作掩模的方法。 该方法包括提供在衬底上具有第一衰减层的衬底和在第一衰减层上的第一成像层; 在写入模式下使用第一辐射能量执行对第一成像层的第一曝光; 对所述第一衰减层进行第一蚀刻; 对衬底进行第二蚀刻; 在所述第一衰减层和所述衬底上形成第二成像层; 使用光能和另一掩模对所述第二成像层进行第二曝光; 以及在所述第二曝光之后对所述第一衰减层执行第三蚀刻。
    • 10. 发明申请
    • DRIVING SYSTEM FOR VIRTUAL WEB CAMERA
    • 虚拟网络摄像机驱动系统
    • US20120257066A1
    • 2012-10-11
    • US13079814
    • 2011-04-05
    • Chih-Ming Chen
    • Chih-Ming Chen
    • H04N5/225
    • H04N5/232
    • A driving system for virtual web camera enabling several applications to access corresponding virtual web cameras is disclosed. The driving system includes the operations of: linking an upper filter to top of USB Video Class Driver as a driver for the virtual web camera through an upper filter driver mechanism provided by an operating system; executing the upper filter to perform initialization and generate device objects, each corresponding to a real web camera as the virtual web camera and having a specific device name; a file handle for the device object being assigned to the application, which opens the device object and then communicates with the web camera without changing the source code; and releasing the file handle when the file handle is closed at the request of the application such that another application can open and use the device object without interfering with other current applications.
    • 公开了一种用于允许多个应用访问相应的虚拟网络摄像机的虚拟网络摄像机的驱动系统。 驱动系统包括以下操作:通过由操作系统提供的上部过滤器驱动器机构将上部过滤器连接到USB视频类驱动器顶部作为虚拟网络摄像机的驱动程序; 执行上级滤波器以执行初始化并生成每个对应于作为虚拟网络摄像机的真实网络摄像机并具有特定设备名称的设备对象; 分配给应用的设备对象的文件句柄,其打开设备对象然后与网络摄像机通信而不改变源代码; 并且当应用程序的请求关闭文件句柄时释放文件句柄,使得另一个应用程序可以打开并使用设备对象而不干扰其他当前应用程序。