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    • 6. 发明授权
    • SONOS component having high dielectric property
    • 具有高介电性能的SONOS组件
    • US06498377B1
    • 2002-12-24
    • US10101922
    • 2002-03-21
    • Hung-Sui LinNian Kai ZousHan Chao LaiTao Cheng Lu
    • Hung-Sui LinNian Kai ZousHan Chao LaiTao Cheng Lu
    • H01L29792
    • H01L29/513H01L29/518H01L29/7923
    • A nitride read only memory device that includes a substrate having a source region, a drain region, and a channel region formed therebetween, a first oxide layer formed over the channel region, a nitride layer formed over the first oxide layer, a second oxide layer formed over the nitride layer, a gate structure formed over the second oxide layer, wherein a region in the substrate underneath the gate structure excludes one of the source and drain regions, a plurality of sidewall spacers formed over the nitride layer and contiguous with the gate structure, and at least one injection point for injecting electrons into the nitride layer, wherein the injection point is located at a junction between the channel region and one of the source and drain regions, and wherein electron charges are stored in portions of the nitride layer underneath the sidewall spacers.
    • 一种氮化物只读存储器件,其包括具有源极区,漏极区和在其间形成的沟道区的衬底,形成在沟道区上的第一氧化物层,形成在第一氧化物层上的氮化物层,第二氧化物层 形成在所述氮化物层上方的栅极结构,形成在所述第二氧化物层上的栅极结构,其中所述栅极结构下方的所述衬底中的区域排除所述源极和漏极区之一;多个侧壁间隔物,形成在所述氮化物层上并与所述栅极连接 结构,以及用于将电子注入到氮化物层中的至少一个注入点,其中注入点位于沟道区域和源区域和漏极区域之间的结处,并且其中电子电荷存储在氮化物层的部分中 在侧壁间隔下面。