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    • 2. 发明授权
    • Multiple channel interferometer
    • 多通道干涉仪
    • US4329059A
    • 1982-05-11
    • US126959
    • 1980-03-03
    • Charles R. PondPatrick D. TexeiraReynold E. Wilbert
    • Charles R. PondPatrick D. TexeiraReynold E. Wilbert
    • G01B9/02G02B27/10
    • G01B9/02028G01B9/02003G01B9/02081G01B2290/45G01B2290/70
    • A filter and beam combiner is comprised of a small glass plate having a microscopic two sided elliptical mirror on one side thereof. The signal beam is spatially filtered on one side of the mirror and then directed to a target. On the other side of the mirror there is a compensating glass plate through which the reference beam passes, to correct for refraction relative to its passing through the first plate, before it enters the other glass plate and is directed onto said other side. The reference beam is spatially filtered by the mirror for combination with the signal beam, which returns from the target substantially enlarged by diffraction so as to pass around the mirror and through the plate to be combined with the reference beam.The signal beam is passed through acousto-optic modulator (AOM). The reference beam is passed through an 81 MHz AOM. The AOM's produce a doppler shift of the coherent light source frequency as the light is diffracted by a moving sound wave in the modulator. When the two beams are combined, the fringe position is proportional to the phase of the 1 MHz frequency modulation difference frequency.The signal beam and the reference beam are combined as the former passes around the mirror and the latter is reflected thereby, forming a composite beam to form interference patterns, and from which can be extracted, with extremely high resolution, information concerning the physical characteristics of the target.
    • 滤光器和光束组合器由在其一侧具有微观双面椭圆镜的小玻璃板组成。 信号光束在镜子的一侧进行空间滤波,然后被定向到目标。 在反射镜的另一侧,有一个补偿玻璃板,参考光束通过该补偿玻璃板,以在其进入另一个玻璃板之前相对于其穿过第一板而校正折射并被引导到另一侧。 参考光束由镜子进行空间滤波,与信号光束组合,该信号光束从靶上大幅度地通过衍射返回,以便绕过反射镜并通过板与参考光束进行组合。 信号光束通过声光调制器(AOM)。 参考光束通过81 MHz AOM。 当调制器中的光被移动的声波衍射时,AOM产生相干光源频率的多普勒频移。 当两个光束组合时,边缘位置与1MHz频率调制差频率的相位成比例。 信号光束和参考光束被组合,因为前者通过反射镜并且后者被反射,从而形成复合光束以形成干涉图案,从而可以以非常高的分辨率提取关于物理特性的信息 目标。
    • 4. 发明授权
    • Scanning interferometer
    • 扫描干涉仪
    • US4890921A
    • 1990-01-02
    • US253362
    • 1988-09-29
    • Charles R. PondPatrick D. TexeiraRobert W. Rudeen
    • Charles R. PondPatrick D. TexeiraRobert W. Rudeen
    • G01B9/02G01B11/16
    • G01B9/02057G01B11/161G01B9/02002G01B9/02021G01B9/02027G01B9/02069G01B2290/45G01B2290/70
    • A scanning interferometer that is capable of measuring the complete relative movement of up to 10 or more measurement sites on a test structure, to determine thermal distortion or expansion. The interferometer includes means for dividing a source beam into signal and reference beams, and an acousto-optic deflector for deflecting the signal beam in response to a control signal to produce a deflected signal beam. The control signal is generated such that deflected signal beams are sequentially directed to the different measurement sites. Reflection means at each measurement site reflects the deflected signal beam to produce a reflected signal beam. Each reflected signal beam is combined with the reference beam to produce an interference pattern, and a photodetector positioned in the interference pattern produces a fringe signal. Signal processing means are provided for periodically measuring the phase of the fringe signal for each deflected signal beam, to thereby measure the movement of each measurement site. In a preferred embodiment, each reflection means produces nine reflected signal beams, and the signal processing means simultaneously measures the phases of the nine resulting fringe signals.
    • 扫描干涉仪能够测量测试结构上多达10个或更多个测量点的完全相对运动,以确定热失真或膨胀。 干涉仪包括用于将源光束分成信号和参考光束的装置,以及用于响应于控制信号偏转信号光束以产生偏转的信号光束的声光偏转器。 生成控制信号,使得偏转的信号光束被顺序地指向不同的测量位置。 每个测量点处的反射意味着反射偏转的信号光束以产生反射信号光束。 每个反射信号光束与参考光束组合以产生干涉图案,并且位于干涉图案中的光电检测器产生边缘信号。 提供信号处理装置,用于周期性地测量每个偏转信号光束的条纹信号的相位,从而测量每个测量部位的移动。 在优选实施例中,每个反射装置产生九个反射信号光束,信号处理装置同时测量九个所产生的条纹信号的相位。
    • 5. 发明授权
    • Holographic angle sensor
    • 全息角传感器
    • US4227807A
    • 1980-10-14
    • US901244
    • 1978-04-28
    • Charles R. PondPatrick D. Texeira
    • Charles R. PondPatrick D. Texeira
    • G01B11/26G01J9/02G01B9/02
    • G01B11/26G01J9/02
    • A shearing interferometer which includes a laser source, a reflector structure and an interference detection system. The reflector structure is mounted on an object, the angle of which, relative to a reference line, is to be determined. The reflector structure includes a transmission hologram and a retroreflector, wherein the transmission hologram is so constructed and positioned relative to the retroreflector that two or more parallel beams of preselected separation (shear) are produced for each incident beam. The difference in optical path length of a given pair of the parallel beams will vary depending on the object angle, and hence, the interference effect of the given pair of parallel beams will also vary in accordance with object angle. The interference effect is summed at a detector, and then analyzed by a tracking circuit to determine object angle.
    • 一种剪切干涉仪,包括激光源,反射器结构和干涉检测系统。 反射器结构安装在物体上,其角度相对于参考线将被确定。 反射器结构包括透射全息图和后向反射器,其中透射全息图相对于后向反射器被构造和定位,对于每个入射光束产生两个或更多个预选分离(剪切)的平行光束。 给定的一对平行光束的光程长度的差异将根据物体角度而变化,因此,给定的一对平行光束的干涉效应也将根据物体角度而变化。 干扰效应在检测器处相加,然后由跟踪电路分析以确定物体角度。
    • 6. 发明授权
    • Electro-optical device for use in improved interferometers
    • 用于改进干涉仪的电光装置
    • US4105336A
    • 1978-08-08
    • US690034
    • 1976-05-25
    • Charles R. Pond
    • Charles R. Pond
    • G01B9/02G02B9/02
    • G01B9/02
    • A device for use in an interferometer, and the combination thereof, the device itself combining the functions of filter, beam combiner, and modulator. In structure, the device includes a relatively small glass plate, which has deposited on opposite faces thereof two extremely small elliptical mirrors which each function as a reflecting spatial filter. In the improved interferometer which includes such a device, reference and signal beams are produced from a single coherent source. The signal beam is spatially filtered by the mirrors and directed to a target. The returning signal beam, reflected from the target, is combined with the reference beam by the mirrors to form a composite beam which forms interference patterns, from which can then be extracted, with extremely high resolution, information concerning the physical characteristics of the target.
    • 用于干涉仪的装置及其组合,该装置本身组合了滤波器,光束组合器和调制器的功能。 在结构上,该装置包括相对较小的玻璃板,其在相对的两个表面上沉积有两个极小的椭圆镜,每个都用作反射空间滤光器。 在包括这种装置的改进的干涉仪中,从单个相干光源产生参考和信号光束。 信号光束被镜子空间过滤并被引导到目标。 从目标反射的返回信号光束通过反射镜与参考光束组合,形成一个复合光束,该光束形成​​干涉图案,然后可以以非常高的分辨率提取关于目标物理特性的信息。