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1. 发明授权

US09768322B2 Metal oxide TFT with improved source/drain contacts and reliability 有权
公开(公告)号：US09768322B2
公开(公告)日：2017-09-19
申请号：US15225592
申请日：2016-08-01
申请人： Gang Yu , Chan-Long Shieh , Tian Xiao , Fatt Foong
发明人： Gang Yu , Chan-Long Shieh , Tian Xiao , Fatt Foong
IPC分类号： H01L29/786 , H01L29/49 , H01L29/66 , H01L23/00 , H01L21/8234 , H01L21/4763 , H01L21/324 , H01L21/321 , H01L21/383 , H01L21/477 , H01L21/428 , H01L29/45 , H01L21/44 , H01L23/31
CPC分类号： H01L29/7869 , H01L21/321 , H01L21/324 , H01L21/383 , H01L21/428 , H01L21/44 , H01L21/47635 , H01L21/477 , H01L21/823418 , H01L23/3171 , H01L23/564 , H01L29/45 , H01L29/4908 , H01L29/66742 , H01L29/66969 , H01L29/78606 , H01L29/78618 , H01L29/78648 , H01L29/78696 , H01L2924/0002 , H01L2924/00
摘要： A method including providing a substrate with a gate, a layer of gate insulator material adjacent the gate, and a layer of metal oxide semiconductor material positioned on the gate insulator opposite the gate, forming a selectively patterned etch stop passivation layer and heating at elevated temperature in an oxygen-containing or nitrogen-containing or inert ambience to selectively increase the carrier concentration in regions of the metal oxide semiconductor not covered by the etch stop layer, on which overlying and spaced apart source/drain metals are formed. Subsequently heating the transistor in an oxygen-containing or nitrogen-containing or inert ambience to further improve the source/drain contacts and adjust the threshold voltage to a desired level. Providing additional passivation layer(s) on top of the transistor with electric insulation and barrier property to moisture and chemicals in the surrounding environment.

2. 发明申请

US20150357480A1 STABLE METAL-OXIDE THIN FILM TRANSISTOR AND METHOD OF MAKING 审中-公开
标题翻译：稳定的金属氧化物薄膜晶体管及其制备方法
公开(公告)号：US20150357480A1
公开(公告)日：2015-12-10
申请号：US14829812
申请日：2015-08-19
申请人： Gang Yu , Chan-Long Shieh , Tian Xiao , Fatt Foong , Juergen Musulf , Karl Birger Kristoffer Ottosson
发明人： Gang Yu , Chan-Long Shieh , Tian Xiao , Fatt Foong , Juergen Musulf , Karl Birger Kristoffer Ottosson
IPC分类号： H01L29/786 , H01L21/28 , H01L29/49 , H01L29/66 , H01L29/417 , H01L29/423 , H01L21/283 , H01L21/324
CPC分类号： H01L29/78693 , H01L21/02554 , H01L21/02565 , H01L21/02592 , H01L21/324 , H01L29/42364 , H01L29/7869 , H01L51/052
摘要： A thin film semiconductor device has a semiconductor layer including a composite/blend/mixture of an amorphous/nanocrystalline semiconductor ionic metal oxide and an amorphous/nanocrystalline non-semiconducting covalent metal oxide. A pair of terminals is positioned in communication with the semiconductor layer and define a semiconductive channel, and agate terminal is positioned in communication with the semiconductive channel and further positioned to control conduction of the channel. The invention further includes a method of depositing the mixture including using nitrogen during the deposition process to control the carrier concentration in the resulting semiconductor layer.
摘要翻译：薄膜半导体器件具有包括非晶/纳米晶体半导体离子金属氧化物和非晶/纳米晶体非半导体共价金属氧化物的复合/共混物/混合物的半导体层。一对端子定位成与半导体层连通并且限定半导体通道，并且玛瑙端子被定位成与半导体沟道连通并进一步定位成控制沟道的传导。本发明还包括在沉积过程中沉积包括使用氮气的混合物的方法，以控制所得半导体层中的载流子浓度。

3. 发明申请

US20140346495A1 STABLE HIGH MOBILITY MOTFT AND FABRICATION AT LOW TEMPERATURE 有权
标题翻译：稳定的高移动性和低温制造
公开(公告)号：US20140346495A1
公开(公告)日：2014-11-27
申请号：US13902514
申请日：2013-05-24
申请人： Chan- Long Shieh , Gang Yu , Fatt Foong , Juergen Musolf
发明人： Chan- Long Shieh , Gang Yu , Fatt Foong , Juergen Musolf
IPC分类号： H01L29/786 , H01L29/66
CPC分类号： H01L29/66969 , H01L21/02063 , H01L21/02565 , H01L21/02631 , H01L21/76805 , H01L21/76814 , H01L21/76895 , H01L27/1225 , H01L29/247 , H01L29/42384 , H01L29/517 , H01L29/518 , H01L29/66742 , H01L29/78603 , H01L29/78606 , H01L29/78618 , H01L29/78693 , H01L29/78696 , H01L2021/775
摘要： A method of fabricating a stable high mobility amorphous MOTFT includes a step of providing a substrate with a gate formed thereon and a gate dielectric layer positioned over the gate. A carrier transport structure is deposited by sputtering on the gate dielectric layer. The carrier transport structure includes a layer of amorphous high mobility metal oxide adjacent the gate dielectric and a relatively inert protective layer of material deposited on the layer of amorphous high mobility metal oxide both deposited without oxygen and in situ. The layer of amorphous metal oxide has a mobility above 40 cm2/Vs and a carrier concentration in a range of approximately 1018 cm−3 to approximately 5×1019 cm−3. Source/drain contacts are positioned on the protective layer and in electrical contact therewith.
摘要翻译：制造稳定的高迁移率无定形MOTFT的方法包括提供其上形成有栅极的基板和位于栅极上方的栅介质层的步骤。通过溅射将载流子传输结构沉积在栅极介电层上。载流子传输结构包括邻近栅极电介质的非晶高迁移率金属氧化物层，以及沉积在无氧和原位沉积的无定形高迁移率金属氧化物层上的相对惰性的材料保护层。非晶金属氧化物层的迁移率高于40cm 2 / Vs，载流子浓度在约1018cm-3至约5×1019cm-3的范围内。源极/漏极触点位于保护层上并与其电接触。

4. 发明申请

US20140001462A1 HIGH MOBILITY STABILE METAL OXIDE TFT 有权
标题翻译：高移动性稳定的金属氧化物薄膜
公开(公告)号：US20140001462A1
公开(公告)日：2014-01-02
申请号：US13536641
申请日：2012-06-28
申请人： Chan-Long Shieh , Gang Yu , Fatt Foong , Tian Xiao , Juergen Musolf
发明人： Chan-Long Shieh , Gang Yu , Fatt Foong , Tian Xiao , Juergen Musolf
IPC分类号： H01L29/786 , H01L21/336
CPC分类号： H01L29/7869 , H01L21/467 , H01L21/4763 , H01L23/535 , H01L29/0649 , H01L29/41733 , H01L29/66969 , H01L29/78696
摘要： A method of fabricating a stable, high mobility metal oxide thin film transistor includes the steps of providing a substrate, positioning a gate on the substrate, and depositing a gate dielectric layer on the gate and portions of the substrate not covered by the gate. A multiple film active layer including a metal oxide semiconductor film and a metal oxide passivation film is deposited on the gate dielectric with the passivation film positioned in overlying relationship to the semiconductor film. An etch-stop layer is positioned on a surface of the passivation film and defines a channel area in the active layer. A portion of the multiple film active layer on opposite sides of the etch-stop layer is modified to form an ohmic contact and metal source/drain contacts are positioned on the modified portion of the multiple film active layer.
摘要翻译：一种制造稳定的高迁移率金属氧化物薄膜晶体管的方法包括以下步骤：提供衬底，将栅极定位在衬底上，以及在栅极上沉积栅极电介质层，并且将衬底部分未被栅极覆盖。包括金属氧化物半导体膜和金属氧化物钝化膜的多层膜活性层沉积在栅极电介质上，钝化膜位于与半导体膜的重叠关系中。蚀刻停止层位于钝化膜的表面上并限定有源层中的沟道区。在蚀刻停止层的相对侧上的多个膜有源层的一部分被修改以形成欧姆接触，并且金属源极/漏极触点位于多个膜有源层的修改部分上。

5. 发明授权

US08273600B2 Self-aligned metal oxide TFT with reduced number of masks 有权
标题翻译：具有减少掩模数量的自对准金属氧化物TFT
公开(公告)号：US08273600B2
公开(公告)日：2012-09-25
申请号：US13195882
申请日：2011-08-02
申请人： Chan-Long Shieh , Gang Yu , Fatt Foong
发明人： Chan-Long Shieh , Gang Yu , Fatt Foong
IPC分类号： H01L21/00
CPC分类号： H01L29/7869 , H01L21/02554 , H01L21/02565
摘要： A method of fabricating MOTFTs on transparent substrates by positioning opaque gate metal on the substrate front surface and depositing gate dielectric material overlying the gate metal and a surrounding area and metal oxide semiconductor material on the dielectric material. Depositing selectively removable etch stop material on the semiconductor material and photoresist on the etch stop material to define an isolation area in the semiconductor material. Removing uncovered portions of the etch stop. Exposing the photoresist from the substrate rear surface using the gate metal as a mask and removing exposed portions leaving the etch stop material overlying the gate metal covered. Etching the semiconductor material to isolate the TFT. Selectively etching the etch stop layer to leave a portion overlying the gate metal defining a channel area. Depositing and patterning conductive material to form source and drain areas on opposed sides of the channel area.
摘要翻译：一种在透明基板上制造MOTFT的方法，该方法是将不透明栅极金属定位在衬底前表面上，并沉积覆盖在栅极金属上的栅介质材料以及介电材料上的周围区域和金属氧化物半导体材料。在半导体材料和蚀刻停止材料上的光致抗蚀剂上沉积选择性可移除的蚀刻停止材料以限定半导体材料中的隔离区域。去除蚀刻停止件的未覆盖部分。使用栅极金属作为掩模从基板后表面露出光致抗蚀剂，并去除暴露部分，留下覆盖栅极金属的蚀刻停止材料。蚀刻半导体材料以隔离TFT。选择性地蚀刻蚀刻停止层以留下覆盖栅极金属的部分限定沟道区域。沉积和图案化导电材料以在通道区域的相对侧上形成源区和漏区。

6. 发明申请

US20170033227A1 METAL OXIDE TFT WITH IMPROVED SOURCE/DRAIN CONTACTS AND RELIABILITY 有权
标题翻译：具有改进的源/漏联系和可靠性的金属氧化物薄膜
公开(公告)号：US20170033227A1
公开(公告)日：2017-02-02
申请号：US15225592
申请日：2016-08-01
申请人： Gang Yu , Chan-Long Shieh , Tian Xiao , Fatt Foong
发明人： Gang Yu , Chan-Long Shieh , Tian Xiao , Fatt Foong
IPC分类号： H01L29/786 , H01L23/00 , H01L23/31 , H01L29/49
CPC分类号： H01L29/7869 , H01L21/321 , H01L21/324 , H01L21/383 , H01L21/428 , H01L21/44 , H01L21/47635 , H01L21/477 , H01L21/823418 , H01L23/3171 , H01L23/564 , H01L29/45 , H01L29/4908 , H01L29/66742 , H01L29/66969 , H01L29/78606 , H01L29/78618 , H01L29/78648 , H01L29/78696 , H01L2924/0002 , H01L2924/00
摘要： A method including providing a substrate with a gate, a layer of gate insulator material adjacent the gate, and a layer of metal oxide semiconductor material positioned on the gate insulator opposite the gate, forming a selectively patterned etch stop passivation layer and heating at elevated temperature in an oxygen-containing or nitrogen-containing or inert ambience to selectively increase the carrier concentration in regions of the metal oxide semiconductor not covered by the etch stop layer, on which overlying and spaced apart source/drain metals are formed. Subsequently heating the transistor in an oxygen-containing or nitrogen-containing or inert ambience to further improve the source/drain contacts and adjust the threshold voltage to a desired level. Providing additional passivation layer(s) on top of the transistor with electric insulation and barrier property to moisture and chemicals in the surrounding environment.
摘要翻译：一种方法，包括提供具有栅极的衬底，与栅极相邻的栅极绝缘体材料层和位于与栅极相对的栅极绝缘体上的金属氧化物半导体材料层，形成选择性图案化的蚀刻停止钝化层并在高温下加热在含氧或含氮或惰性气氛中选择性地增加未被蚀刻停止层覆盖的金属氧化物半导体的区域中的载流子浓度，其上形成有上层和间隔开的源极/漏极金属。随后在含氧或含氮或惰性气氛中加热晶体管，以进一步改善源极/漏极接触，并将阈值电压调节到期望的水平。在晶体管的顶部提供额外的钝化层，具有电气绝缘和对周围环境中的潮湿和化学物质的阻隔性能。

7. 发明授权

US09412623B2 Metal oxide TFT with improved source/drain contacts and reliability 有权
标题翻译：金属氧化物TFT具有改善的源极/漏极触点和可靠性
公开(公告)号：US09412623B2
公开(公告)日：2016-08-09
申请号：US14833462
申请日：2015-08-24
申请人： Gang Yu , Chan-Long Shieh , Tian Xiao , Fatt Foong
发明人： Gang Yu , Chan-Long Shieh , Tian Xiao , Fatt Foong
IPC分类号： H01L21/383 , H01L29/786 , H01L29/49 , H01L29/66 , H01L23/00 , H01L21/8234 , H01L21/4763 , H01L21/324 , H01L21/321 , H01L21/477 , H01L21/428 , H01L29/45
CPC分类号： H01L29/7869 , H01L21/321 , H01L21/324 , H01L21/383 , H01L21/428 , H01L21/44 , H01L21/47635 , H01L21/477 , H01L21/823418 , H01L23/3171 , H01L23/564 , H01L29/45 , H01L29/4908 , H01L29/66742 , H01L29/66969 , H01L29/78606 , H01L29/78618 , H01L29/78648 , H01L29/78696 , H01L2924/0002 , H01L2924/00
摘要： A method including providing a substrate with a gate, a layer of gate insulator material adjacent the gate, and a layer of metal oxide semiconductor material positioned on the gate insulator opposite the gate, forming a selectively patterned etch stop passivation layer and heating at elevated temperature in an oxygen-containing or nitrogen-containing or inert ambience to selectively increase the carrier concentration in regions of the metal oxide semiconductor not covered by the etch stop layer, on which overlying and spaced apart source/drain metals are formed. Subsequently heating the transistor in an oxygen-containing or nitrogen-containing or inert ambience to further improve the source/drain contacts and adjust the threshold voltage to a desired level. Providing additional passivation layer(s) on top of the transistor with electric insulation and barrier property to moisture and chemicals in the surrounding environment.
摘要翻译：一种方法，包括提供具有栅极的衬底，与栅极相邻的栅极绝缘体材料层和位于与栅极相对的栅极绝缘体上的金属氧化物半导体材料层，形成选择性图案化的蚀刻停止钝化层并在高温下加热在含氧或含氮或惰性气氛中选择性地增加未被蚀刻停止层覆盖的金属氧化物半导体的区域中的载流子浓度，其上形成有上层和间隔开的源极/漏极金属。随后在含氧或含氮或惰性气氛中加热晶体管，以进一步改善源极/漏极接触并将阈值电压调节到所需的电平。在晶体管的顶部提供额外的钝化层，具有电气绝缘和对周围环境中的潮湿和化学物质的阻隔性能。

8. 发明申请

US20160204278A1 SELF-ALIGNED METAL OXIDE TFT WITH REDUCED NUMBER OF MASKS AND WITH REDUCED POWER CONSUMPTION 有权
标题翻译：自对准金属氧化物膜，具有减少数量的掩模和降低功耗
公开(公告)号：US20160204278A1
公开(公告)日：2016-07-14
申请号：US15080231
申请日：2016-03-24
申请人： Chan-Long Shieh , Gang Yu , Fatt Foong
发明人： Chan-Long Shieh , Gang Yu , Fatt Foong
IPC分类号： H01L29/786 , H01L27/12
CPC分类号： H01L29/78696 , H01L21/02554 , H01L21/02565 , H01L21/707 , H01L27/1225 , H01L27/124 , H01L27/1288 , H01L29/66969 , H01L29/78606 , H01L29/7869
摘要： A method of fabricating MO TFTs includes positioning opaque gate metal on a transparent substrate to define a gate area. Depositing gate dielectric material overlying the gate metal and a surrounding area, and depositing metal oxide semiconductor material thereon. Depositing etch stop material on the semiconductor material. Positioning photoresist defining an isolation area in the semiconductor material, the etch stop material and the photoresist being selectively removable. Exposing the photoresist from the rear surface of the substrate and removing exposed portions to leave the etch stop material uncovered except for a portion overlying and aligned with the gate metal. Etching uncovered portions of the semiconductor material to isolate the TFT. Using the photoresist, selectively etching the etch stop layer to leave a portion overlying and aligned with the gate metal and defining a channel area in the semiconductor material. Depositing and patterning conductive material to form source and drain areas.
摘要翻译：一种制造MO TFT的方法包括将不透明栅极金属定位在透明基板上以限定栅极区域。覆盖栅极金属和周围区域的沉积栅介质材料，以及在其上沉积金属氧化物半导体材料。在半导体材料上沉积蚀刻停止材料。定义在半导体材料中限定隔离区域的光致抗蚀剂，蚀刻停止材料和光致抗蚀剂可选择性地移除。从基板的后表面露出光致抗蚀剂，除去暴露的部分以使蚀刻停止材料未被覆盖，除了覆盖并与栅极金属对准的部分之外。蚀刻半导体材料的未覆盖部分以隔离TFT。使用光致抗蚀剂，选择性地蚀刻蚀刻停止层以留下覆盖并与栅极金属对准的部分并限定半导体材料中的沟道区域。沉积和图案化导电材料以形成源区和漏区。

9. 发明授权

US09240437B2 Flexible TFT backpanel by glass substrate removal 有权
标题翻译：玻璃基板去除灵活的TFT背板
公开(公告)号：US09240437B2
公开(公告)日：2016-01-19
申请号：US14216920
申请日：2014-03-17
申请人： Chan-Long Shieh , Fatt Foong , Gang Yu , Guangming Wang
发明人： Chan-Long Shieh , Fatt Foong , Gang Yu , Guangming Wang
IPC分类号： H01L21/84 , H01L27/32 , H01L51/00 , H01L27/12 , H01L29/786 , H01L51/56 , H01L51/52
CPC分类号： H01L27/3244 , H01L27/1259 , H01L27/322 , H01L29/78603 , H01L51/003 , H01L51/0097 , H01L51/5246 , H01L51/56 , H01L2227/323 , H01L2251/5338
摘要： A process of fabricating a flexible TFT back-panel on a glass support includes a step of providing a flat glass support member sufficiently thick to prevent bending during the processing. A layer of etch stop material is positioned on the upper surface of the glass support member and an insulating buffer layer is positioned on the layer of etch stop material. A TFT back-panel is positioned on the insulating buffer layer and a flexible plastic carrier is affixed to the TFT back-panel. The glass support member is etched away, whereby a flexible TFT back-panel is provided. The TFT back-panel can include a matrix of either OLED cells or LCD cells.
摘要翻译：在玻璃支架上制造柔性TFT背板的工艺包括提供足够厚的平板玻璃支撑件以防止加工过程中弯曲的步骤。一层蚀刻停止材料定位在玻璃支撑构件的上表面上，并且绝缘缓冲层位于蚀刻停止材料层上。 TFT背板位于绝缘缓冲层上，柔性塑料载体固定在TFT后面板上。蚀刻玻璃支撑构件，由此提供柔性TFT背面板。 TFT背面板可以包括OLED单元或LCD单元的矩阵。

10. 发明申请

US20140138673A1 SELF-ALIGNED METAL OXIDE TFT WITH REDUCED NUMBER OF MASKS AND WITH REDUCED POWER CONSUMPTION 有权
标题翻译：自对准金属氧化物膜，具有减少数量的掩模和降低功耗
公开(公告)号：US20140138673A1
公开(公告)日：2014-05-22
申请号：US14071644
申请日：2013-11-05
申请人： Chan- Long Shieh , Gang Yu , Fatt Foong
发明人： Chan- Long Shieh , Gang Yu , Fatt Foong
IPC分类号： H01L29/66 , H01L27/12 , H01L29/786
CPC分类号： H01L29/78696 , H01L21/02554 , H01L21/02565 , H01L21/707 , H01L27/1225 , H01L27/124 , H01L27/1288 , H01L29/66969 , H01L29/78606 , H01L29/7869
摘要： A method of fabricating MOTFTs includes positioning opaque gate metal on a transparent substrate, depositing gate dielectric material overlying the gate metal and a surrounding area, and depositing metal oxide semiconductor material thereon. Etch stop material is deposited on the semiconductor material. Photoresist defines an isolation area in the semiconductor material. Exposing the photoresist from the rear surface of the substrate and removing exposed portions to leave the etch stop material uncovered except for a portion overlying and aligned with the gate metal. Etching uncovered portions of the semiconductor material to isolate the TFT. Using the photoresist, selectively etching the etch stop layer to leave a portion overlying and aligned with the gate metal and defining a channel area in the semiconductor material. Depositing and patterning conductive material to form source and drain areas.
摘要翻译：制造MOTFT的方法包括将不透明栅极金属定位在透明基板上，沉积覆盖栅极金属的栅介质材料和周围区域，以及在其上沉积金属氧化物半导体材料。蚀刻停止材料沉积在半导体材料上。光致抗蚀剂界定半导体材料中的隔离区。从基板的后表面露出光致抗蚀剂，除去暴露的部分以使蚀刻停止材料未被覆盖，除了覆盖并与栅极金属对准的部分之外。蚀刻半导体材料的未覆盖部分以隔离TFT。使用光致抗蚀剂，选择性地蚀刻蚀刻停止层以留下覆盖并与栅极金属对准的部分并限定半导体材料中的沟道区域。沉积和图案化导电材料以形成源区和漏区。

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