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    • 1. 发明授权
    • Device with a sandwich structure for detecting thermal radiation, and method for the production thereof
    • 具有用于检测热辐射的夹层结构的装置及其制造方法
    • US08487257B2
    • 2013-07-16
    • US12601613
    • 2008-05-28
    • Carsten GiebelerMatthias SchreiterJörg Zapf
    • Carsten GiebelerMatthias SchreiterJörg Zapf
    • G01J5/00
    • H01L27/16G01J5/04G01J5/045G01J5/10G01J5/34H01L27/14618H01L2924/0002H01L2924/00
    • In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.
    • 在用于检测热辐射的装置和用于生产这种装置的方法中,叠层形成有具有用于将热辐射转换成电信号的检测器元件的检测器支架,具有读出电路的电路支架 用于读出电信号和盖以屏蔽检测器元件。 检测器支架和盖被布置成使得在检测器元件和盖之间形成第一堆叠空腔,并且在检测器支架和电路支架之间形成第二堆叠腔。 将第一堆叠空腔和/或第二堆叠空腔抽真空并密封。 在制造操作中,将功能化的硅衬底彼此堆叠,牢固地结合在一起并随后进行细分。 优选地,检测器元件是热电探测器元件。 该设备在运动检测器,存在记录器和热像摄像机中找到应用。
    • 2. 发明申请
    • DEVICE WITH A SANDWICH STRUCTURE FOR DETECTING THERMAL RADIATION, AND METHOD FOR THE PRODUCTION THEREOF
    • 具有用于检测热辐射的三面体结构的装置及其生产方法
    • US20100264311A1
    • 2010-10-21
    • US12601613
    • 2008-05-28
    • Carsten GiebelerMatthias SchreiterJörg Zapf
    • Carsten GiebelerMatthias SchreiterJörg Zapf
    • G01J5/10H01L21/02
    • H01L27/16G01J5/04G01J5/045G01J5/10G01J5/34H01L27/14618H01L2924/0002H01L2924/00
    • In a device for the detection of thermal radiation which and a method for production of such a device, a stack is formed with at least one detector support having at least one detector element for the conversion of the thermal radiation into an electric signal, at least one circuit support with at least one read-out circuit for reading out the electrical signal and at least one cover to shield the detector element, wherein the detector support and the cover are so arranged with respect to one another that a first stack cavity bounded by the detector support and the cover is provided between the detector element of the detector support and the cover and that the circuit support and the detector support are so arranged with respect to one another that at least one second stack cavity bounded by the circuit support and the detector support is provided between detector support and the circuit support and that the first hollow stack support and/or the second stack cavity is evacuated or can be evacuated. Preferably, the detector support, circuit support and cover are made of silicon. The manufacturing operation takes place at wafer-level. Functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detector, presence reporters and thermal-image cameras.
    • 在用于检测热辐射的装置及其制造方法中,堆叠形成有至少一个具有至少一个用于将热辐射转换成电信号的检测器元件的检测器支架,至少 一个电路支撑件,具有用于读出电信号的至少一个读出电路和用于屏蔽检测器元件的至少一个盖子,其中检测器支撑件和盖子相对于彼此布置成使得第一堆叠腔体被 检测器支撑件和盖被设置在检测器支撑件的检测器元件和盖之间,并且电路支撑件和检测器支撑件相对于彼此布置成使得由电路支撑件限定的至少一个第二堆叠空腔和 检测器支撑件设置在检测器支撑件和电路支撑件之间,并且第一中空堆叠支撑件和/或第二堆叠腔体被抽空或可以 被疏散 优选地,检测器支撑件,电路支撑件和盖子由硅制成。 制造操作在晶圆级进行。 功能化的硅衬底彼此堆叠,牢固地结合在一起并随后被细分。 优选地,检测器元件是热电探测器元件。 该装置在运动检测器,存在记录器和热像摄像机中找到应用。
    • 10. 发明授权
    • Electronic unit, circuit design for the same, and production method
    • 电子单元,电路设计相同,生产方法
    • US07483275B2
    • 2009-01-27
    • US10492923
    • 2002-09-06
    • Wolfgang ClemensWalter FixJörg Zapf
    • Wolfgang ClemensWalter FixJörg Zapf
    • H05K7/02H05K7/06H05K7/08H05K7/10
    • H01L27/28H01L25/16H01L51/0508H01L2223/6677H01L2924/0002H01L2924/00
    • A method for the production of an encapsulated and at least partly organic electronic device wherein the device comprises a combination of three groups of different electronic units or components which may be separate discrete structures arranged to be produced independently from one another electrically conductively interconnected, the groups including inorganic units, passive units and active units or active components such as antennae, diodes (rectifier diodes and/or light-emitting diodes), some of which units may be organic, e.g., organic transistors, and so on, and forming a resulting optimized circuit. The components of the three groups of units forming the resulting circuit are combined on a one piece flexible substrate film which can also serve as an encapsulation layer for the device.
    • 一种用于生产封装的和至少部分有机的电子器件的方法,其中所述器件包括三组不同的电子单元或组件的组合,所述三组不同的电子单元或组件可以是分离的离散结构,其被布置成彼此独立地被电连接,组 包括无机单元,无源单元和有源单元或诸如天线,二极管(整流二极管和/或发光二极管)的有源组件,其中一些单元可以是有机的,例如有机晶体管等,并且形成所得的 优化电路。 形成所得电路的三组单元的组件组合在一体的柔性基底膜上,该薄膜也可以用作该装置的封装层。