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1. 发明授权

US09799485B2 Particle beam system and method for operating a particle optical unit 有权
公开(公告)号：US09799485B2
公开(公告)日：2017-10-24
申请号：US14730505
申请日：2015-06-04
申请人： Carl Zeiss Microscopy GmbH
发明人： Ingo Mueller , Nicole Bengesser , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
IPC分类号： H01J37/21 , H01J37/10 , H01J37/28
CPC分类号： H01J37/21 , H01J37/10 , H01J37/28 , H01J2237/0435 , H01J2237/0492 , H01J2237/28 , H01J2237/31764 , H01J2237/31774
摘要： A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.

2. 发明申请

US20150357157A1 PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT 有权
标题翻译：粒子束系统和操作颗粒光单元的方法
公开(公告)号：US20150357157A1
公开(公告)日：2015-12-10
申请号：US14730505
申请日：2015-06-04
申请人： Carl Zeiss Microscopy GmbH
发明人： Ingo Mueller , Nicole Bengesser , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
IPC分类号： H01J37/21 , H01J37/26 , H01J37/10
CPC分类号： H01J37/21 , H01J37/10 , H01J37/28 , H01J2237/0435 , H01J2237/0492 , H01J2237/28 , H01J2237/31764 , H01J2237/31774
摘要： A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.
摘要翻译：用于操作多光束粒子光学单元的方法包括提供粒子 - 光学部件的效果的第一设置，其中粒子 - 光学成像可以通过至少两个参数来表征。该方法还包括确定矩阵A和确定矩阵S.该方法还包括定义表征期望成像的参数值，以及以这样的方式提供组件的效果的第二设置，使得粒子光学成像可以通过具有定义值的参数来表征。

3. 发明申请

US20150069235A1 Particle Optical System 有权
标题翻译：粒子光学系统
公开(公告)号：US20150069235A1
公开(公告)日：2015-03-12
申请号：US14481823
申请日：2014-09-09
申请人： Carl Zeiss Microscopy GmbH
发明人： Thomas Kemen , Pascal Anger , Dirk Zeidler , Gerd Benner
IPC分类号： H01J37/26 , H01J37/147 , H01J37/10 , H01J37/20 , H01J37/244
CPC分类号： H01J37/265 , H01J37/04 , H01J37/10 , H01J37/1472 , H01J37/1474 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/2802
摘要： A particle optical system comprises a beam generating system (3) configured to generate a plurality of particle beams (5) and to direct the plurality of particle beams (5) onto an object plane (7), a first deflector arrangement (35) arranged in the beam path of the particle beams (5) upstream of the object plane (7) and configured to deflect the plurality of particle beams (5) before they are incident on the object plane (7), an object holder (15) configured to hold an object (17) to be inspected in the object plane (7), a plurality of detectors (27) configured to receive and to detect the plurality of particle beams (5) having traversed the object plane (7), wherein the detectors are arranged in a detection plane (21) on a side of the object plane (7) opposite to the beam generating system (3), at least one first particle optical lens (19) configured to collect particles of the particle beams emanating from the object plane on the detectors (27), and a controller (31) configured to control the first deflector arrangement (35) in order to deflect locations of incidence (9) of the particle beams (5) on the object plane (7) by deflecting the particle beams (5).
摘要翻译：粒子光学系统包括：束生成系统（3），其被配置为产生多个粒子束（5）并将多个粒子束（5）引导到物平面（7）上;第一偏转器装置（35）被布置在物体平面（7）上游的粒子束（5）的光束路径中，并且被配置为在多个粒子束（5）入射到物体平面（7）之前使多个粒子束（5）偏转，配置有物体保持器为了保持在物体平面（7）中被检查的物体（17），被配置为接收和检测已经穿过物体平面（7）的多个粒子束（5）的多个检测器（27），其中，检测器被布置在物镜平面（7）与光束产生系统（3）相对的一侧的检测平面（21）中，至少一个第一粒子光学透镜（19）被配置为收集从检测器（27）上的物体平面，以及配置成共用的控制器（31）控制第一偏转器装置（35），以通过偏转粒子束（5）来偏转物体平面（7）上的粒子束（5）的入射（9）的位置。

4. 发明申请

US20130292566A1 Transmission Electron Microscopy System and Method of Operating a Transmission Electron Microscopy System 有权
标题翻译：透射电子显微镜系统和透射电子显微镜系统的操作方法
公开(公告)号：US20130292566A1
公开(公告)日：2013-11-07
申请号：US13864600
申请日：2013-04-17
申请人： Carl Zeiss Microscopy GmbH
发明人： Gerd Benner
IPC分类号： H01J37/244
CPC分类号： H01J37/244 , H01J37/04 , H01J37/26 , H01J2237/0492
摘要： A transmission electron microscopy system comprises: an illumination system (2), an objective lens system (13), a first projection system (21) imaging the diffraction plane (15) objective lens system into a first intermediate diffraction plane (25), a second projection system (41) imaging the first intermediate diffraction plane into a second intermediate diffraction plane (43), a first aperture (27) located in the first intermediate diffraction plane and having a central opening of a first radius (r1), and a bright field detector (45) located in the second intermediate diffraction plane and having a detection surface defined by an inner edge (49) of a second radius (r2), wherein the first radius and the second radius define a maximum angle and a minimum angle, respectively, relative to the optical axis of directions of bright field electrons traversing the sample plane and detectable by the bright field detector.
摘要翻译：透射电子显微镜系统包括：照明系统（2），物镜系统（13），将衍射平面（15）物镜系统成像为第一中间衍射平面（25）的第一投影系统（21），将第一中间衍射平面成像为第二中间衍射平面（43）的第二投影系统（41），位于第一中间衍射平面中并具有第一半径（r1）的中心开口的第一孔（27）位于第二中间衍射平面中并具有由第二半径（r2）的内边缘（49）限定的检测表面的明场检测器（45），其中第一半径和第二半径限定最大角度和最小角度分别相对于穿过样品平面并由亮场检测器检测的亮场电子的方向的光轴。

5. 发明申请

US20180040454A1 PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT 有权
公开(公告)号：US20180040454A1
公开(公告)日：2018-02-08
申请号：US15788338
申请日：2017-10-19
申请人： Carl Zeiss Microscopy GmbH
发明人： Ingo Mueller , Nicole Rauwolf , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
IPC分类号： H01J37/21 , H01J37/28 , H01J37/10
CPC分类号： H01J37/21 , H01J37/10 , H01J37/28 , H01J2237/0435 , H01J2237/0492 , H01J2237/28 , H01J2237/31764 , H01J2237/31774
摘要： A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.

6. 发明授权

US09349571B2 Particle optical system 有权
标题翻译：粒子光学系统
公开(公告)号：US09349571B2
公开(公告)日：2016-05-24
申请号：US14481823
申请日：2014-09-09
申请人： Carl Zeiss Microscopy GmbH
发明人： Thomas Kemen , Pascal Anger , Dirk Zeidler , Gerd Benner
IPC分类号： H01J37/26 , G21K5/04 , H01J37/10 , H01J37/147 , H01J37/20 , H01J37/244 , H01J37/28 , H01J37/04
CPC分类号： H01J37/265 , H01J37/04 , H01J37/10 , H01J37/1472 , H01J37/1474 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/2802
摘要： A particle optical system comprises a beam generating system (3) configured to generate a plurality of particle beams (5) and to direct the plurality of particle beams (5) onto an object plane (7), a first deflector arrangement (35) arranged in the beam path of the particle beams (5) upstream of the object plane (7) and configured to deflect the plurality of particle beams (5) before they are incident on the object plane (7), an object holder (15) configured to hold an object (17) to be inspected in the object plane (7), a plurality of detectors (27) configured to receive and to detect the plurality of particle beams (5) having traversed the object plane (7), wherein the detectors are arranged in a detection plane (21) on a side of the object plane (7) opposite to the beam generating system (3), at least one first particle optical lens (19) configured to collect particles of the particle beams emanating from the object plane on the detectors (27), and a controller (31) configured to control the first deflector arrangement (35) in order to deflect locations of incidence (9) of the particle beams (5) on the object plane (7) by deflecting the particle beams (5).
摘要翻译：粒子光学系统包括：束生成系统（3），其被配置为产生多个粒子束（5）并将多个粒子束（5）引导到物平面（7）上;第一偏转器装置（35）被布置在物体平面（7）上游的粒子束（5）的光束路径中，并且被配置为在多个粒子束（5）入射到物体平面（7）之前使多个粒子束（5）偏转，配置有物体保持器为了保持在物体平面（7）中被检查的物体（17），被配置为接收和检测已经穿过物体平面（7）的多个粒子束（5）的多个检测器（27），其中，检测器布置在与光束产生系统（3）相对的物平面（7）侧的检测平面（21）中，至少一个第一粒子光学透镜（19）被配置成收集从检测器（27）上的物体平面，以及配置成共用的控制器（31）控制第一偏转器装置（35），以通过偏转粒子束（5）来偏转物体平面（7）上的粒子束（5）的入射（9）的位置。

7. 发明授权

US09991089B2 Particle beam system and method for operating a particle optical unit 有权
公开(公告)号：US09991089B2
公开(公告)日：2018-06-05
申请号：US15788338
申请日：2017-10-19
申请人： Carl Zeiss Microscopy GmbH
发明人： Ingo Mueller , Nicole Rauwolf , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
IPC分类号： H01J37/21 , H01J37/28 , H01J37/10
CPC分类号： H01J37/21 , H01J37/10 , H01J37/28 , H01J2237/0435 , H01J2237/0492 , H01J2237/28 , H01J2237/31764 , H01J2237/31774
摘要： A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.

8. 发明授权

US09543115B2 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：US09543115B2
公开(公告)日：2017-01-10
申请号：US14552607
申请日：2014-11-25
申请人： Carl Zeiss Microscopy GmbH
发明人： Gerd Benner , Marko Matijevic
IPC分类号： H01J37/00 , H01J37/26 , H01J37/244 , H01J37/141
CPC分类号： H01J37/26 , H01J37/141 , H01J37/244
摘要： An electron microscope includes an electron beam source, a first electromagnet, a second electromagnet and a detector. The field generated by the first electromagnet has an effect of three lenses subsequently arranged along the beam path. A first lens of these lenses is arranged upstream of the object plane and focuses the beam at the object plane. The second lens of these three lenses is arranged downstream of the object plane. The third lens of these three lenses generates an image of a diffraction plane of the second lens at the detector. The magnetic field generated by the second electromagnet has an effect of a fourth lens and can be changed in order to change a size of the image of the diffraction plane of the second lens on the detector.
摘要翻译：电子显微镜包括电子束源，第一电磁体，第二电磁体和检测器。由第一电磁体产生的场具有随后沿光束路径布置的三个透镜的效果。这些透镜的第一透镜布置在物平面的上游，并将光束聚焦在物平面处。这三个透镜的第二透镜布置在物平面的下游。这三个透镜的第三透镜在检测器处产生第二透镜的衍射平面的图像。由第二电磁体产生的磁场具有第四透镜的效果，并且可以改变以改变检测器上的第二透镜的衍射平面的图像的尺寸。

9. 发明申请

US20150144787A1 ELECTRON MICROSCOPE 有权
标题翻译：电子显微镜
公开(公告)号：US20150144787A1
公开(公告)日：2015-05-28
申请号：US14552607
申请日：2014-11-25
申请人： Carl Zeiss Microscopy GmbH
发明人： Gerd Benner , Marko Matijevic
IPC分类号： H01J37/26 , H01J37/141 , H01J37/244
CPC分类号： H01J37/26 , H01J37/141 , H01J37/244
摘要： An electron microscope includes an electron beam source, a first electromagnet, a second electromagnet and a detector. The field generated by the first electromagnet has an effect of three lenses subsequently arranged along the beam path. A first lens of these lenses is arranged upstream of the object plane and focuses the beam at the object plane. The second lens of these three lenses is arranged downstream of the object plane. The third lens of these three lenses generates an image of a diffraction plane of the second lens at the detector. The magnetic field generated by the second electromagnet has an effect of a fourth lens and can be changed in order to change a size of the image of the diffraction plane of the second lens on the detector.
摘要翻译：电子显微镜包括电子束源，第一电磁体，第二电磁体和检测器。由第一电磁体产生的场具有随后沿光束路径布置的三个透镜的效果。这些透镜的第一透镜布置在物平面的上游，并将光束聚焦在物平面处。这三个透镜的第二透镜布置在物平面的下游。这三个透镜的第三透镜在检测器处产生第二透镜的衍射平面的图像。由第二电磁体产生的磁场具有第四透镜的效果，并且可以改变以改变检测器上的第二透镜的衍射平面的图像的尺寸。

10. 发明授权

US08748819B2 Transmission electron microscopy system and method of operating a transmission electron microscopy system 有权
标题翻译：透射电子显微镜系统和透射电子显微镜系统的操作方法
公开(公告)号：US08748819B2
公开(公告)日：2014-06-10
申请号：US13864600
申请日：2013-04-17
申请人： Carl Zeiss Microscopy GmbH
发明人： Gerd Benner
IPC分类号： H01J37/26 , H01J37/063 , H01J37/12
CPC分类号： H01J37/244 , H01J37/04 , H01J37/26 , H01J2237/0492
摘要： A transmission electron microscopy system has an illumination system and an objective lens system. A first projection system images the diffraction plane of the objective lens system into a first intermediate diffraction plane. A second projection system images the first intermediate diffraction plane into a second intermediate diffraction plane. A first aperture located in the first intermediate diffraction plane has a central opening of a first radius. A bright field detector located in the second intermediate diffraction plane has a detection surface defined by an inner edge of a second radius. The first radius and the second radius define a maximum angle and a minimum angle, respectively, relative to the optical axis of directions of bright field electrons traversing the sample plane and detectable by the bright field detector.
摘要翻译：透射电子显微镜系统具有照明系统和物镜系统。第一投影系统将物镜系统的衍射平面成像为第一中间衍射平面。第二投影系统将第一中间衍射平面成像为第二中间衍射平面。位于第一中间衍射平面中的第一孔具有第一半径的中心开口。位于第二中间衍射平面中的明场检测器具有由第二半径的内边缘限定的检测表面。第一半径和第二半径分别相对于穿过采样平面的可见光场检测器的亮场电子的方向的光轴分别确定最大角度和最小角度。

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