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1. 发明申请

US20200185191A1 PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE BEAM SYSTEM 审中-公开
公开(公告)号：US20200185191A1
公开(公告)日：2020-06-11
申请号：US16705953
申请日：2019-12-06
申请人： Carl Zeiss Microscopy GmbH
发明人： Björn Gamm , Marko Matijevic
IPC分类号： H01J37/304 , H01J37/244
摘要： A particle beam system includes first and second particle beam columns. In a first operating mode, an end cap having an opening therein is outside a beam path of a first particle beam. In a second operating mode, the beam path of the first particle beam can extend through the opening of the end cap so that secondary particles coming from a work region can pass through the opening of the end cap to a detector in the interior of the first particle beam column. While the particle beam system is in the first operating mode, an image of an object arranged in the work region is recorded using the first particle beam column. While the particle beam system is in the second operating mode, the object is processed using a second particle beam.

2. 发明授权

US10984983B2 Particle beam system and method for operating a particle beam system 有权
公开(公告)号：US10984983B2
公开(公告)日：2021-04-20
申请号：US16705953
申请日：2019-12-06
申请人： Carl Zeiss Microscopy GmbH
发明人： Björn Gamm , Marko Matijevic
IPC分类号： H01J37/304 , H01J37/244
摘要： A particle beam system includes first and second particle beam columns. In a first operating mode, an end cap having an opening therein is outside a beam path of a first particle beam. In a second operating mode, the beam path of the first particle beam can extend through the opening of the end cap so that secondary particles coming from a work region can pass through the opening of the end cap to a detector in the interior of the first particle beam column. While the particle beam system is in the first operating mode, an image of an object arranged in the work region is recorded using the first particle beam column. While the particle beam system is in the second operating mode, the object is processed using a second particle beam.

3. 发明授权

US09543115B2 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：US09543115B2
公开(公告)日：2017-01-10
申请号：US14552607
申请日：2014-11-25
申请人： Carl Zeiss Microscopy GmbH
发明人： Gerd Benner , Marko Matijevic
IPC分类号： H01J37/00 , H01J37/26 , H01J37/244 , H01J37/141
CPC分类号： H01J37/26 , H01J37/141 , H01J37/244
摘要： An electron microscope includes an electron beam source, a first electromagnet, a second electromagnet and a detector. The field generated by the first electromagnet has an effect of three lenses subsequently arranged along the beam path. A first lens of these lenses is arranged upstream of the object plane and focuses the beam at the object plane. The second lens of these three lenses is arranged downstream of the object plane. The third lens of these three lenses generates an image of a diffraction plane of the second lens at the detector. The magnetic field generated by the second electromagnet has an effect of a fourth lens and can be changed in order to change a size of the image of the diffraction plane of the second lens on the detector.
摘要翻译：电子显微镜包括电子束源，第一电磁体，第二电磁体和检测器。由第一电磁体产生的场具有随后沿光束路径布置的三个透镜的效果。这些透镜的第一透镜布置在物平面的上游，并将光束聚焦在物平面处。这三个透镜的第二透镜布置在物平面的下游。这三个透镜的第三透镜在检测器处产生第二透镜的衍射平面的图像。由第二电磁体产生的磁场具有第四透镜的效果，并且可以改变以改变检测器上的第二透镜的衍射平面的图像的尺寸。

4. 发明申请

US20150144787A1 ELECTRON MICROSCOPE 有权
标题翻译：电子显微镜
公开(公告)号：US20150144787A1
公开(公告)日：2015-05-28
申请号：US14552607
申请日：2014-11-25
申请人： Carl Zeiss Microscopy GmbH
发明人： Gerd Benner , Marko Matijevic
IPC分类号： H01J37/26 , H01J37/141 , H01J37/244
CPC分类号： H01J37/26 , H01J37/141 , H01J37/244
摘要： An electron microscope includes an electron beam source, a first electromagnet, a second electromagnet and a detector. The field generated by the first electromagnet has an effect of three lenses subsequently arranged along the beam path. A first lens of these lenses is arranged upstream of the object plane and focuses the beam at the object plane. The second lens of these three lenses is arranged downstream of the object plane. The third lens of these three lenses generates an image of a diffraction plane of the second lens at the detector. The magnetic field generated by the second electromagnet has an effect of a fourth lens and can be changed in order to change a size of the image of the diffraction plane of the second lens on the detector.
摘要翻译：电子显微镜包括电子束源，第一电磁体，第二电磁体和检测器。由第一电磁体产生的场具有随后沿光束路径布置的三个透镜的效果。这些透镜的第一透镜布置在物平面的上游，并将光束聚焦在物平面处。这三个透镜的第二透镜布置在物平面的下游。这三个透镜的第三透镜在检测器处产生第二透镜的衍射平面的图像。由第二电磁体产生的磁场具有第四透镜的效果，并且可以改变以改变检测器上的第二透镜的衍射平面的图像的尺寸。

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