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    • 2. 发明授权
    • Method for manufacturing bipolar devices
    • 制造双极器件的方法
    • US06362066B1
    • 2002-03-26
    • US09469395
    • 1999-12-22
    • Byung Ryul RyumTae Hyeon HanSoo Min LeeDeok Ho Cho
    • Byung Ryul RyumTae Hyeon HanSoo Min LeeDeok Ho Cho
    • H01L21331
    • H01L29/66287H01L29/66242
    • The present invention is related to a bipolar transistor in which the in-situ doped epitaxial Si or SiGe base layer is used instead of using an ion-implanted Si base, in order to achieve higher cutoff frequency. The SiGe base having the narrower energy bandgap than the Si emitter allows to enhance the current gain, the cutoff frequency (fT), and the maximum oscillation frequency (fmax). The narrow bandgap SiGe base also allows to have higher base doping concentration. As a result, the intrinsic base resistance is lowered and the noise figure is thus lowered. Parasitic base resistance is also minimized by using a metallic silicide base ohmic electrode. The present invention is focused on low cost, high repeatability and reliability by simplifying the manufacturing process step.
    • 本发明涉及一种双极晶体管,其中使用原位掺杂的外延Si或SiGe基层代替使用离子注入的Si基,以便实现更高的截止频率。 具有比Si发射器更窄的能带隙的SiGe基极允许增强电流增益,截止频率(fT)和最大振荡频率(fmax)。 窄带隙SiGe基极还允许具有较高的基极掺杂浓度。 结果,本征基极电阻降低,噪声系数降低。 通过使用金属硅化物基极欧姆电极也使寄生基极电阻最小化。 通过简化制造工艺步骤,本发明集中在低成本,高重复性和可靠性上。
    • 3. 发明授权
    • Method of manufacturing a silicon/silicon germanium heterojunction
bipolar transistor
    • 制造硅/硅锗异质结双极晶体管的方法
    • US5897359A
    • 1999-04-27
    • US987474
    • 1997-12-09
    • Deok Ho ChoSoo Min LeeTae Hyeon HanByung Ryul RyumKwang Eui Pyun
    • Deok Ho ChoSoo Min LeeTae Hyeon HanByung Ryul RyumKwang Eui Pyun
    • H01L29/74H01L21/331H01L29/737H01L21/8222
    • H01L29/66242H01L29/7378
    • There is disclosed a method of manufacturing a silicon/silicon germanium heterojunction bipolar transistor having a good conformity and an improved speed characteristic, which includes the steps of sequentially laminating an underlying nitride film, an oxide film, a polycrystalline silicon film and an upper nitride on a semiconductor substrate on which devices are separated and a collector is formed; sequentially etching said upper nitride film and said polycrystalline silicon film using the emitter as a mask, and then forming a side wall nitride film; selectively wet-etching said oxide film to form a side base linker opening; burying said base linker opening with a polycrystalline silicon; oxidizing said polycrystalline silicon film buried into said base linker opening and then removing said oxide film by means of the selective wet-etch process; removing said upper nitride and then forming a silicon/silicon germanium film as a base film on the exposed thereof; and forming an emitter said silicon/silicon germanium film.
    • 公开了一种制造具有良好一致性和改进的速度特性的硅/硅锗异质结双极晶体管的方法,其包括以下步骤:将下面的氮化物膜,氧化物膜,多晶硅膜和上部氮化物依次层压在 半导体衬底,器件分离并形成集电极; 使用发射极作为掩模,依次蚀刻所述上部氮化物膜和所述多晶硅膜,然后形成侧壁氮化物膜; 选择性地湿蚀刻所述氧化膜以形成侧基连接器开口; 用多晶硅掩埋所述基底连接器开口; 氧化所述多晶硅膜,所述多晶硅膜埋入所述基底连接器开口中,然后通过选择性湿蚀刻工艺除去所述氧化物膜; 去除所述上部氮化物,然后在其暴露时形成硅/硅锗膜作为基膜; 以及形成所述硅/硅锗膜的发射极。
    • 4. 发明授权
    • Bipolar junction device
    • 双极连接器
    • US06462397B2
    • 2002-10-08
    • US10027583
    • 2001-10-22
    • Byung Ryul RyumTae Hyeon HanSoo Min LeeDeok Ho Cho
    • Byung Ryul RyumTae Hyeon HanSoo Min LeeDeok Ho Cho
    • H01L27082
    • H01L29/66287H01L29/66242
    • The present invention is related to a bipolar transistor in which the in-situ doped epitaxial Si or SiGe base layer is used instead of using an ion-implanted Si base, in order to achieve higher cutoff frequency. The SiGe base having the narrower energy bandgap than the Si emitter allows to enhance the current gain, the cutoff frequency(fT), and the maximum oscillation frequency (fmax). The narrow bandgap SiGe base also allows to have higher base doping concentration. As a result, the intrinsic base resistance is lowered and the noise figure is thus lowered. Parasitic base resistance is also minimized by using a metallic silicide base ohmic electrode. The present invention is focused on low cost, high repeatability and reliability by simplifying the manufacturing process step.
    • 本发明涉及一种双极晶体管,其中使用原位掺杂的外延Si或SiGe基层代替使用离子注入的Si基,以便实现更高的截止频率。 具有比Si发射器更窄的能带隙的SiGe基极允许增强电流增益,截止频率(fT)和最大振荡频率(fmax)。 窄带隙SiGe基极还允许具有较高的基极掺杂浓度。 结果,本征基极电阻降低,噪声系数降低。 通过使用金属硅化物基极欧姆电极也使寄生基极电阻最小化。 通过简化制造工艺步骤,本发明集中在低成本,高重复性和可靠性上。