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    • 2. 发明申请
    • Semiconductor device having bar type active pattern
    • 具有棒式有源图案的半导体器件
    • US20100059807A1
    • 2010-03-11
    • US12461500
    • 2009-08-13
    • Keun-hwl ChoDong-won KimJun SeoMin-sang KimSung-min KimHyun-jun BaeJi-Myoung Lee
    • Keun-hwl ChoDong-won KimJun SeoMin-sang KimSung-min KimHyun-jun BaeJi-Myoung Lee
    • H01L27/108
    • H01L29/66795H01L27/10814H01L27/10873H01L27/10879H01L29/785
    • A semiconductor device having a bar type active pattern and a method of manufacturing the same are provided. The semiconductor device may include a semiconductor substrate having a semiconductor fin configured to protrude from a surface of the semiconductor substrate in a first direction, the semiconductor substrate having a first width and a second width crossing the first width, wherein the first width and the second width extend in a second direction. A plurality of active patterns may be arranged in the first direction with a separation gap from the semiconductor fin. A plurality of support patterns may be arranged between the semiconductor fin and one of the plurality of active patterns arranged closer to the semiconductor fin in the first direction, and between the plurality of active patterns arranged in the first direction to support the plurality of active patterns. A gate may be arranged to cross the plurality of active patterns in the second direction and to cover a portion of the at least one of the plurality of active patterns.
    • 提供了具有条形有源图案的半导体器件及其制造方法。 半导体器件可以包括具有半导体鳍片的半导体衬底,半导体鳍片被配置为在第一方向上从半导体衬底的表面突出,半导体衬底具有与第一宽度交叉的第一宽度和第二宽度,其中第一宽度和第二宽度 宽度在第二方向上延伸。 多个有源图案可以在第一方向上与半导体鳍片分离间隙布置。 多个支撑图案可以布置在半导体翅片与沿着第一方向布置得更靠近半导体鳍片的多个有源图案中的一个之间以及沿着第一方向布置的多个有源图案之间,以支撑多个有源图案 。 栅极可以布置成在第二方向上跨越多个有源图案并且覆盖多个有源图案中的至少一个的一部分。
    • 5. 发明申请
    • METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING NOTCHED GATE MOSFET
    • 制造具有栅极MOSFET的半导体器件的方法
    • US20090267137A1
    • 2009-10-29
    • US12498615
    • 2009-07-07
    • Byung-yong ChoiChoong-ho LeeDong-won KimDong-gun Park
    • Byung-yong ChoiChoong-ho LeeDong-won KimDong-gun Park
    • H01L29/792
    • H01L21/26586H01L29/665H01L29/66537H01L29/66553H01L29/6656H01L29/6659H01L29/66621H01L29/7833H01L29/7834
    • Provided is a method of manufacturing a semiconductor device, by which a cell transistor formed on a cell array area of a semiconductor substrate employs a structure in which an electrode in the shape of spacers is used to form a gate and a multi-bit operation is possible using localized bits, and transistors having structures optimized to satisfy different requirements depending upon functions of the transistors can be formed on a peripheral circuit area which is the residual area of the semiconductor substrate. In this method, a cell transistor is formed on the cell array area. The cell transistor includes a notch gate structure, a first channel region formed on a semiconductor substrate under the notch gate structure, a source region and a drain region formed on both sides of the first channel region, a first gate insulation film formed between the first channel region and the notch gate structure, and a memory layer locally formed on areas adjacent to the source and drain regions between the first channel region and the notch gate structure. At the same time that the cell transistor is formed, a plurality of peripheral circuit transistors including at least one transistor having a different structure from the cell transistor are formed on the peripheral circuit area.
    • 提供一种制造半导体器件的方法,通过该方法,形成在半导体衬底的单元阵列区域上的单元晶体管采用其中使用间隔物形状的电极形成栅极并且多位操作是 可能使用局部位,并且可以在作为半导体衬底的剩余区域的外围电路区域上形成具有根据晶体管的功能而被优化以满足不同要求的结构的晶体管。 在该方法中,在单元阵列区域上形成单元晶体管。 单元晶体管包括陷波门结构,在陷波栅结构下形成在半导体衬底上的第一沟道区,形成在第一沟道区的两侧的源区和漏区,形成在第一沟道区之间的第一栅极绝缘膜 沟道区域和陷波门结构,以及局部地形成在与第一沟道区和陷波栅结构之间的源极和漏极区相邻的区域上的存储层。 在形成单元晶体管的同时,在外围电路区域上形成有包含至少一个具有与单元晶体管不同的结构的晶体管的多个外围电路晶体管。
    • 6. 发明授权
    • Method of fabricating a MOS field effect transistor having plurality of channels
    • 制造具有多个通道的MOS场效应晶体管的方法
    • US07588977B2
    • 2009-09-15
    • US11452066
    • 2006-06-13
    • Sung-dae SukSung-young LeeDong-won KimSung-min Kim
    • Sung-dae SukSung-young LeeDong-won KimSung-min Kim
    • H01L29/768
    • H01L29/42392H01L29/0673H01L29/66484H01L29/7831
    • A method of fabricating a MOSFET provides a plurality of nanowire-shaped channels in a self-aligned manner. According to the method, a first material layer and a semiconductor layer are sequentially formed on a semiconductor substrate. A first mask layer pattern is formed on the semiconductor layer, and recess regions are formed using the first mask layer pattern as an etch mask. A first reduced mask layer pattern is formed, and a filling material layer is formed on the surface of the substrate. A pair of second mask layer patterns are formed, and a first opening is formed. Then, the filling material layer is etched to form a second opening, the exposed first material layer is removed to expose the semiconductor layer, and a gate insulation layer and a gate electrode layer enclosing the exposed semiconductor layer are formed.
    • 制造MOSFET的方法以自对准方式提供多个纳米线状通道。 根据该方法,在半导体衬底上依次形成第一材料层和半导体层。 在半导体层上形成第一掩模层图案,并且使用第一掩模层图案作为蚀刻掩模形成凹陷区域。 形成第一缩小的掩模层图案,并且在基板的表面上形成填充材料层。 形成一对第二掩模层图案,形成第一开口。 然后,蚀刻填充材料层以形成第二开口,去除暴露的第一材料层以暴露半导体层,并且形成包围暴露的半导体层的栅极绝缘层和栅极电极层。
    • 8. 发明授权
    • Method of manufacturing semiconductor device having notched gate MOSFET
    • 具有开槽栅极MOSFET的半导体器件的制造方法
    • US08044451B2
    • 2011-10-25
    • US12498615
    • 2009-07-07
    • Byung-yong ChoiChoong-ho LeeDong-won KimDong-gun Park
    • Byung-yong ChoiChoong-ho LeeDong-won KimDong-gun Park
    • H01L29/788
    • H01L21/26586H01L29/665H01L29/66537H01L29/66553H01L29/6656H01L29/6659H01L29/66621H01L29/7833H01L29/7834
    • Provided is a method of manufacturing a semiconductor device, by which a cell transistor formed on a cell array area of a semiconductor substrate employs a structure in which an electrode in the shape of spacers is used to form a gate and a multi-bit operation is possible using localized bits, and transistors having structures optimized to satisfy different requirements depending upon functions of the transistors can be formed on a peripheral circuit area which is the residual area of the semiconductor substrate. In this method, a cell transistor is formed on the cell array area. The cell transistor includes a notch gate structure, a first channel region formed on a semiconductor substrate under the notch gate structure, a source region and a drain region formed on both sides of the first channel region, a first gate insulation film formed between the first channel region and the notch gate structure, and a memory layer locally formed on areas adjacent to the source and drain regions between the first channel region and the notch gate structure. At the same time that the cell transistor is formed, a plurality of peripheral circuit transistors including at least one transistor having a different structure from the cell transistor are formed on the peripheral circuit area.
    • 提供一种制造半导体器件的方法,通过该方法,形成在半导体衬底的单元阵列区域上的单元晶体管采用其中使用间隔物形状的电极形成栅极并且多位操作是 可能使用局部位,并且可以在作为半导体衬底的剩余区域的外围电路区域上形成具有根据晶体管的功能而被优化以满足不同要求的结构的晶体管。 在该方法中,在单元阵列区域上形成单元晶体管。 单元晶体管包括陷波门结构,在陷波栅结构下形成在半导体衬底上的第一沟道区,形成在第一沟道区的两侧的源区和漏区,形成在第一沟道区之间的第一栅极绝缘膜 沟道区域和陷波门结构,以及局部地形成在与第一沟道区和陷波栅结构之间的源极和漏极区相邻的区域上的存储层。 在形成单元晶体管的同时,在外围电路区域上形成有包含至少一个具有与单元晶体管不同的结构的晶体管的多个外围电路晶体管。