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    • 1. 发明授权
    • Semiconductor device having bar type active pattern
    • 具有棒式有源图案的半导体器件
    • US08106464B2
    • 2012-01-31
    • US12461500
    • 2009-08-13
    • Keun-hwl ChoDong-won KimJun SeoMin-sang KimSung-min KimHyun-jun BaeJi-Myoung Lee
    • Keun-hwl ChoDong-won KimJun SeoMin-sang KimSung-min KimHyun-jun BaeJi-Myoung Lee
    • H01L27/088
    • H01L29/66795H01L27/10814H01L27/10873H01L27/10879H01L29/785
    • A semiconductor device having a bar type active pattern and a method of manufacturing the same are provided. The semiconductor device may include a semiconductor substrate having a semiconductor fin configured to protrude from a surface of the semiconductor substrate in a first direction, the semiconductor substrate having a first width and a second width crossing the first width, wherein the first width and the second width extend in a second direction. A plurality of active patterns may be arranged in the first direction with a separation gap from the semiconductor fin. A plurality of support patterns may be arranged between the semiconductor fin and one of the plurality of active patterns arranged closer to the semiconductor fin in the first direction, and between the plurality of active patterns arranged in the first direction to support the plurality of active patterns. A gate may be arranged to cross the plurality of active patterns in the second direction and to cover a portion of the at least one of the plurality of active patterns.
    • 提供了具有条形有源图案的半导体器件及其制造方法。 半导体器件可以包括具有半导体鳍片的半导体衬底,半导体鳍片被配置为在第一方向上从半导体衬底的表面突出,半导体衬底具有与第一宽度交叉的第一宽度和第二宽度,其中第一宽度和第二宽度 宽度在第二方向上延伸。 多个有源图案可以在第一方向上与半导体鳍片分离间隙布置。 多个支撑图案可以布置在半导体翅片与沿着第一方向布置得更靠近半导体鳍片的多个有源图案中的一个之间以及沿着第一方向布置的多个有源图案之间,以支撑多个有源图案 。 栅极可以布置成在第二方向上跨越多个有源图案并且覆盖多个有源图案中的至少一个的一部分。
    • 2. 发明申请
    • Semiconductor device having bar type active pattern
    • 具有棒式有源图案的半导体器件
    • US20100059807A1
    • 2010-03-11
    • US12461500
    • 2009-08-13
    • Keun-hwl ChoDong-won KimJun SeoMin-sang KimSung-min KimHyun-jun BaeJi-Myoung Lee
    • Keun-hwl ChoDong-won KimJun SeoMin-sang KimSung-min KimHyun-jun BaeJi-Myoung Lee
    • H01L27/108
    • H01L29/66795H01L27/10814H01L27/10873H01L27/10879H01L29/785
    • A semiconductor device having a bar type active pattern and a method of manufacturing the same are provided. The semiconductor device may include a semiconductor substrate having a semiconductor fin configured to protrude from a surface of the semiconductor substrate in a first direction, the semiconductor substrate having a first width and a second width crossing the first width, wherein the first width and the second width extend in a second direction. A plurality of active patterns may be arranged in the first direction with a separation gap from the semiconductor fin. A plurality of support patterns may be arranged between the semiconductor fin and one of the plurality of active patterns arranged closer to the semiconductor fin in the first direction, and between the plurality of active patterns arranged in the first direction to support the plurality of active patterns. A gate may be arranged to cross the plurality of active patterns in the second direction and to cover a portion of the at least one of the plurality of active patterns.
    • 提供了具有条形有源图案的半导体器件及其制造方法。 半导体器件可以包括具有半导体鳍片的半导体衬底,半导体鳍片被配置为在第一方向上从半导体衬底的表面突出,半导体衬底具有与第一宽度交叉的第一宽度和第二宽度,其中第一宽度和第二宽度 宽度在第二方向上延伸。 多个有源图案可以在第一方向上与半导体鳍片分离间隙布置。 多个支撑图案可以布置在半导体翅片与沿着第一方向布置得更靠近半导体鳍片的多个有源图案中的一个之间以及沿着第一方向布置的多个有源图案之间,以支撑多个有源图案 。 栅极可以布置成在第二方向上跨越多个有源图案并且覆盖多个有源图案中的至少一个的一部分。