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    • 3. 发明授权
    • Fabry-Perot micro filter-detector
    • 法布里 - 珀罗微滤器检测器
    • US5550373A
    • 1996-08-27
    • US367491
    • 1994-12-30
    • Barrett E. ColeBernard S. FritzRobert D. Horning
    • Barrett E. ColeBernard S. FritzRobert D. Horning
    • B81B1/00G01J3/26G01J3/28G01J5/20G02B26/00G01B9/02G01J3/45
    • G01J3/2823G01J3/02G01J3/0208G01J3/0256G01J3/26G01J5/20G02B26/001
    • A monolithically constructed infrared, tunable Fabry-Perot cavity filter-detector for spectroscopic detection of particular substances having an absorption line in the wavelength range from 2 to 12 microns. The filter-detector has a hermetically sealed Fabry-Perot cavity that has a mirror which has an adjustable distance relative to another mirror of the cavity. The former mirror is adjusted by piezoelectric film on the mirror support or with piezoelectric stacks or wall supporting the mirror. There may be electrodes situated near the mirrors for capacitive sensing of the distance between the mirrors. Light to be filtered and detected comes in through a window wafer which may have diffractive or refractive microlenses, plus an optional spatial filter. After passing through the window wafer, the light is filtered by the tunable mirrors of the Fabry-Perot cavity. The portion of the light that is passed by the cavity is detected by an infrared microbolometer or a CCD array. The cavity and detector are hermetically sealed in a vacuum.
    • 用于光谱检测具有2至12微米波长范围内的吸收线的特定物质的单片构造的红外可调谐法布里 - 珀罗腔滤波器检测器。 过滤器检测器具有气密密封的法布里 - 珀罗腔,其具有相对于空腔的另一反射镜具有可调距离的反射镜。 前镜由反射镜支架上的压电膜或支撑镜子的压电叠层或墙壁调节。 可能存在位于反射镜附近的用于电容感测反射镜之间的距离的电极。 要过滤和检测的光通过可能具有衍射或折射微透镜的窗玻璃加上可选的空间滤光片进入。 通过窗玻璃后,光被法布里 - 珀罗腔的可调镜过滤。 由空腔通过的光的部分由红外微辐射热计或CCD阵列检测。 空腔和检测器在真空中气密密封。