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1. 发明授权

US06649987B1 MEMS hybrid structure having flipped silicon with external standoffs 有权
标题翻译： MEMS混合结构具有外部支架翻转硅
公开(公告)号：US06649987B1
公开(公告)日：2003-11-18
申请号：US09975119
申请日：2001-10-09
申请人： Bryan P. Staker , Douglas L. Teeter, Jr. , Andres Fernandez , David T. Amm
发明人： Bryan P. Staker , Douglas L. Teeter, Jr. , Andres Fernandez , David T. Amm
IPC分类号： H01L2982
CPC分类号： B81B3/0086
摘要： A structure of a hybrid MEMS structure is provided wherein a plate comprises a thin actuatable layer of conductive silicon, such as a MEMS actuatable element, and a thicker handle layer of conductive silicon to provide structural integrity which are separated by a thin oxide, together forming an SOI wafer. This plate is mounted to a substrate, typically ceramic, with the thin actuatable layer facing the substrate and separated by an air gap that is formed by creating, on the substrate, insulator standoffs which come in contact with the plate. A suitable dielectric material useful as a standoff on the substrate is a footrest that permits high aspect ratios.
摘要翻译：提供了混合MEMS结构的结构，其中板包括导电硅的薄可致动层，例如MEMS可致动元件，以及较厚的导电硅手柄层，以提供由薄氧化物分隔的结构完整性，一起形成 SOI晶片。该板被安装到通常为陶瓷的基板上，薄的可致动层面向基板，并由通过在基板上产生与板接触的绝缘体间隙而形成的气隙分开。用作衬底上的支座的合适的介电材料是允许高纵横比的搁脚板。

2. 发明授权

US06635158B1 Electro ceramic MEMS structure with controlled actuator gap 有权
标题翻译：电陶瓷MEMS结构具有受控的执行器间隙
公开(公告)号：US06635158B1
公开(公告)日：2003-10-21
申请号：US09919569
申请日：2001-07-30
申请人： Bryan P. Staker , Douglas L. Teeter, Jr. , David T. Amm
发明人： Bryan P. Staker , Douglas L. Teeter, Jr. , David T. Amm
IPC分类号： C25D1700
CPC分类号： B81B3/0086 , B81B2201/042
摘要： In an array apparatus, each MEMS element, comprising an actuatable element and a supportive handle, is mounted over a plurality of electrodes wherein the air gap is controlled by the thickness of the electrodes and not primarily by the structure of the handle. The structure of electrostatic actuation electrodes in specific embodiments is disclosed. While the invention is primarily a technique for reducing the air gap without unduly limiting the thickness of the handle, the invention may also be used to establish an air gap greater than the thickness of the handle.
摘要翻译：在阵列装置中，包括可致动元件和支撑手柄的每个MEMS元件安装在多个电极上，其中气隙由电极的厚度控制，而不是主要由手柄的结构控制。在具体实施例中公开了静电致动电极的结构。虽然本发明主要是用于减小气隙而不过度地限制手柄的厚度的技术，但是本发明也可用于建立大于手柄厚度的气隙。

3. 发明授权

US06509816B1 Electro ceramic MEMS structure with oversized electrodes 有权
标题翻译：电陶瓷MEMS结构超大电极
公开(公告)号：US06509816B1
公开(公告)日：2003-01-21
申请号：US09918897
申请日：2001-07-30
申请人： Bryan P. Staker , Douglas L. Teeter, Jr. , Thomas A. DeBey , David T. Amm
发明人： Bryan P. Staker , Douglas L. Teeter, Jr. , Thomas A. DeBey , David T. Amm
IPC分类号： H01H5122
CPC分类号： H01H59/0009
摘要： An array apparatus has a micromachined SOI structure, such as a MEMS array, mounted directly on a class of substrate, such as low temperature co-fired ceramic, in which is embedded electrostatic actuation electrodes disposed in substantial alignment with the individual MEMS elements, where the electrostatic electrodes are configured for substantial fanout and the electrodes are oversized such that in combination with the ceramic assembly are configured to allow for placement of the vias within a tolerance of position relative to electrodes such that contact is not lost therebetween at the time of manufacturing.
摘要翻译：阵列装置具有微加工SOI结构，例如MEMS阵列，其直接安装在一类基底上，例如低温共烧陶瓷，其中嵌入的静电致动电极与各个MEMS元件基本对齐，其中静电电极被配置为实质上扇出并且电极尺寸过大，使得与陶瓷组件结合使得能够将通孔放置在相对于电极的位置公差范围内，使得在制造时不会在其间失去接触。

4. 发明授权

US06764881B2 Method for manufacturing electro ceramic components 有权
标题翻译：电陶瓷部件的制造方法
公开(公告)号：US06764881B2
公开(公告)日：2004-07-20
申请号：US10193972
申请日：2002-07-12
申请人： Bryan P. Staker , Douglas L. Teeter, Jr. , Eric L. Bogatin
发明人： Bryan P. Staker , Douglas L. Teeter, Jr. , Eric L. Bogatin
IPC分类号： H01L2144
CPC分类号： B81B7/0006 , G02B6/3518 , G02B6/357 , G02B6/3582 , G02B6/3584 , G02B2006/12104
摘要： An array apparatus has a micromachined SOI structure, such as a MEMS array, mounted directly on a class of insulative substrate, such as low temperature co-fired ceramic or a thermal-coefficient of expansion matched glass, in which is embedded electrostatic electrodes disposed in alignment with the individual MEMS elements, where the electrostatic electrodes are configured for substantial fanout. In a specific embodiment in order to compensate for differences in thermal-expansion characteristics between SOI and ceramic, a flexible mounting is effected by means of posts, bridges and/or mechanical elements which allow uneven expansion in x and y while maintaining z-axis stability. Methods according to the invention include fabrication steps wherein electrodes are fabricated to a post-fired ceramic substrate and coupled via traces through the ceramic substrate to driver modules.
摘要翻译：阵列装置具有微机械加工SOI结构，例如MEMS阵列，其直接安装在一类绝缘基底上，例如低温共烧陶瓷或热膨胀系数匹配玻璃，其中嵌入静电电极与各个MEMS元件对准，其中静电电极被配置为实质上扇出。在一个具体实施例中，为了补偿SOI和陶瓷之间的热膨胀特性的差异，通过柱，桥和/或机械元件实现柔性安装，其允许x和y中的不均匀膨胀，同时保持z轴稳定性。根据本发明的方法包括制造步骤，其中电极被制造成后烧制陶瓷衬底，并且经由陶瓷衬底的迹线耦合到驱动器模块。

5. 发明申请

US20120099852A1 METHOD AND SYSTEM FOR IMAGING HIGH DENSITY BIOCHEMICAL ARRAYS WITH SUB-PIXEL ALIGNMENT 有权
标题翻译：用于用子像素对准成像高密度生物化学阵列的方法和系统
公开(公告)号：US20120099852A1
公开(公告)日：2012-04-26
申请号：US12912641
申请日：2010-10-26
申请人： Bryan P. Staker , Craig E. Uhrich
发明人： Bryan P. Staker , Craig E. Uhrich
IPC分类号： G02B21/36 , H04N17/00
CPC分类号： G02B21/365 , G01B11/272 , G02B21/002 , G02B21/025 , G02B21/361 , H04N5/37206 , H04N7/18
摘要： A system and associated method for imaging high density biochemical arrays comprises one or more imaging channels that share a common objective lens and a corresponding one or more time delay integration-type imaging cameras with optical alignment mechanisms that permit independent inter-channel and intra-channel adjustment of each of four degrees: X, Y, rotation and scale. The imaging channels are configured to independently examine different spectra of the image of the biochemical arrays.
摘要翻译：用于对高密度生物化学阵列进行成像的系统和相关方法包括共享共同物镜的一个或多个成像通道和具有光学对准机构的相应的一个或多个时间延迟积分型成像相机，其允许独立的通道间和通道内四度调整：X，Y，旋转和刻度。成像通道被配置为独立地检查生物化学阵列的图像的不同光谱。

6. 发明授权

US06693735B1 MEMS structure with surface potential control 有权
标题翻译：具有表面电位控制的MEMS结构
公开(公告)号：US06693735B1
公开(公告)日：2004-02-17
申请号：US09919219
申请日：2001-07-30
申请人： Lawrence P. Muray , Bryan P. Staker , Andres Fernandez
发明人： Lawrence P. Muray , Bryan P. Staker , Andres Fernandez
IPC分类号： G02B2600
CPC分类号： G02B26/0841 , B81B3/0086 , B81B2201/042
摘要： In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.
摘要翻译：在静电控制装置中，例如具有围绕电极形成的空腔的MEMS阵列，其直接安装在电介质基底上，其中嵌入的静电致动电极与各个MEMS元件对齐设置，提供了可控地中和多余电荷的机构并且在MEMS元件和静电致动电极之间建立受控电位。

7. 发明申请

US20120224050A1 HIGH-DENSITY BIOCHEMICAL ARRAY CHIPS 有权
标题翻译：高密度生物化学阵列
公开(公告)号：US20120224050A1
公开(公告)日：2012-09-06
申请号：US13221648
申请日：2011-08-30
申请人： Bryan P. Staker
发明人： Bryan P. Staker
IPC分类号： H04N7/18 , C40B40/06
CPC分类号： G01N21/6452 , B01J19/0046 , B01J2219/00531 , B01J2219/00659 , B01J2219/00662 , B01J2219/00693 , C40B20/02 , G01N21/6428 , G01N21/6458
摘要： An array chip useful for biochemical assays is provided wherein the chip includes a field region arranged with attachment sites according to a first pitch and at least one track region having a one-dimensional spot pattern arranged according to a second pitch that is less dense and is a non-integer multiple of the first pitch so that one-dimensional Moiré averaging may be applied in the track region, thereby to attain alignment of the chip to the optical instrumentation with a higher density of attachment sites.
摘要翻译：提供了一种可用于生物化学测定的阵列芯片，其中芯片包括根据第一间距布置有附接位置的场区域和至少一个具有根据第二节距排列的一维点图案的轨道区域，该第二间距不太密集，第一节距的非整数倍，使得可以在轨道区域中施加一维莫尔平均，从而以更高密度的附着位置实现芯片与光学仪器的对准。

8. 发明申请

US20080113160A1 Method And Apparatus For Localized Bonding 审中-公开
标题翻译：用于局部粘合的方法和装置
公开(公告)号：US20080113160A1
公开(公告)日：2008-05-15
申请号：US11559831
申请日：2006-11-14
申请人： Andres Fernandez , Bryan P. Staker , Alexander P. Kindwall , Windsor E. Owens
发明人： Andres Fernandez , Bryan P. Staker , Alexander P. Kindwall , Windsor E. Owens
IPC分类号： B32B7/14 , B32B37/02 , B32B37/14
CPC分类号： B32B37/1292 , B32B7/12 , B32B2309/68 , B32B2457/00 , B81C3/001 , B81C2203/032 , B81C2203/035 , Y10T428/24612 , Y10T428/2462
摘要： One or more cavities are formed in the bonding surfaces of one, all, or some of the elements to be bonded. These cavities serve as receptacles for the bonding material and are where the bonds are localized. The cavities are of sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements are brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mated with nominally zero separation. Once solidified, the bonding material forms a localized bond inside each cavity. Different cavity shapes, such as, rectangular, circular, or any other shape that can be injected or filled with adhesive material may be used.
摘要翻译：在待结合的一个，全部或一些元件的接合表面中形成一个或多个空腔。这些空腔用作接合材料的接收器，并且是键的位置。空腔具有足够的尺寸和形状，使得它们的体积大于形成结合的粘合材料的体积。这确保了当元件彼此接触以配合时，可以在凝固成粘合之前流动的粘合材料将流入空腔中，并且不会阻碍部件的分离。这允许零件与标称零分离配合。一旦固化，接合材料在每个空腔内形成局部粘合。可以使用不同的腔体形状，例如矩形，圆形或可以用粘合剂材料注射或填充的任何其它形状。

9. 发明授权

US06917733B1 Three-dimensional optical switch with offset input-output ports 有权
标题翻译：具有偏移输入输出端口的三维光开关
公开(公告)号：US06917733B1
公开(公告)日：2005-07-12
申请号：US10406947
申请日：2003-04-03
申请人： Eugene W. Campbell , Bryan P. Staker
发明人： Eugene W. Campbell , Bryan P. Staker
IPC分类号： G02B6/35
CPC分类号： G02B6/3556 , G02B6/3512
摘要： An optical switch globally minimizes maximum tilt angles used to route optical signals from input to output by disposition of an input array of first tiltable micromirrors within a first boundary typically having top-bottom reflection symmetry and left-right reflection symmetry and by disposition of an output array of second tiltable micromirrors within a second boundary a symmetry which matches the symmetry for the input array, the output array and the input array being disposed opposing one another and normal to parallel central axes and further being offset from one another in the plane of the normals to the arrays, so that a collimated beamlet impinging on the center the input array and reflected off at an equivalent angle intersects the output array at an offset.
摘要翻译：光学开关全局地最小化用于通过在通常具有顶部底部反射对称性和左右反射对称性的第一边界内的第一可倾斜微反射器的输入阵列的布置和通过布置输出来将输入到输出的光信号路由到的最大倾斜角度最小化在第二边界内的第二可倾斜微镜的阵列，其对应于输入阵列的对称性，输出阵列和输入阵列被布置为彼此相对并垂直于平行的中心轴，并且还在第二边界的平面中彼此偏移使阵列上的准直子束入射到输入阵列的中心并以等效的角度反射，与偏移的输出阵列相交。

10. 发明授权

US06805454B2 MEMS structure with mechanical overdeflection limiter 有权
标题翻译：具有机械超限制器件的MEMS结构
公开(公告)号：US06805454B2
公开(公告)日：2004-10-19
申请号：US10625883
申请日：2003-07-22
申请人： Bryan P. Staker , James P. Spallas , Lawrence P. Muray , Andres Fernandez
发明人： Bryan P. Staker , James P. Spallas , Lawrence P. Muray , Andres Fernandez
IPC分类号： G02B7182
CPC分类号： B81B3/0051 , B81B2201/042 , G02B26/0841
摘要： A MEMS device having a fixed element and a movable element wherein one or the other of the fixed element and the movable element has at least one radially-extended stop or overdeflection limiter. A fixed overlayer plate forms an aperture. The aperture is sized to minimize vignetting and may be beveled on the margin. Overdeflection limitation occurs during deflection before the movable element can impinge on an underlying electrode. The overdeflection limiter may be conveniently placed adjacent a gimbaled hinge.
摘要翻译：具有固定元件和可移动元件的MEMS器件，其中固定元件和可移动元件中的一个或另一个具有至少一个径向延伸的止动或超限制器。固定的覆盖板形成孔。孔径的大小可使晕影最小化，并可在边缘上倾斜。在可移动元件可能撞击下面的电极之前，在偏转期间发生过度偏差限制。过度限制器可以方便地放置在万向铰链附近。

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