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1. 发明申请

US20070053102A1 Magnetic write head having a first magnetic pole with a self aligned stepped notch 失效
标题翻译：磁写头，具有具有自对准阶梯式切口的第一磁极
公开(公告)号：US20070053102A1
公开(公告)日：2007-03-08
申请号：US11218701
申请日：2005-09-02
申请人： Bin Cao , Hung-Chin Guthrie , Wen-Chien Hsiao , Jyh-Shuey Lo
发明人： Bin Cao , Hung-Chin Guthrie , Wen-Chien Hsiao , Jyh-Shuey Lo
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/3163
摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a step notched first pole structure. The step notched structure includes a bottom notched portion that is wider than the second notched portion formed thereover. The upper, or narrower, notched portion has a width that is substantially equal to and self aligned with a second pole structure (P2) formed thereover. The invention may also include first and second wing portions formed in the first pole that are recessed from the ABS and that extend laterally from the first notched portions of the first pole. The formation of the winged portions is assisted by an ion mill resistant bump (alumina bump) formed thereover, which acts as a mask during the ion milling operations that are used to form the first and second notches.
摘要翻译：一种磁写头及其制造方法，其具有第一极结构，具有阶切口第一极结构。台阶缺口结构包括比形成在其上的第二切口部分更宽的底部切口部分。上部或更窄的切口部分具有基本上等于并与其上形成的第二极结构（P 2）自对准的宽度。本发明还可以包括形成在第一极中的从ABS凹入并从第一极的第一切口部横向延伸的第一和第二翼部。翼形部分的形成由在其上形成的离子磨耐磨凸起（氧化铝凸块）辅助，其在用于形成第一和第二凹口的离子铣削操作期间用作掩模。

2. 发明授权

US07551397B2 Magnetic write head having a first magnetic pole with a self aligned stepped notch 失效
标题翻译：磁写头，具有具有自对准阶梯式切口的第一磁极
公开(公告)号：US07551397B2
公开(公告)日：2009-06-23
申请号：US11218701
申请日：2005-09-02
申请人： Bin V. Cao , Hung-Chin Guthrie , Wen-Chien Hsiao , Jyh-Shuey Lo
发明人： Bin V. Cao , Hung-Chin Guthrie , Wen-Chien Hsiao , Jyh-Shuey Lo
IPC分类号： G11B5/187
CPC分类号： G11B5/3116 , G11B5/3163
摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a step notched first pole structure. The step notched structure includes a bottom notched portion that is wider than the second notched portion formed thereover. The upper, or narrower, notched portion has a width that is substantially equal to and self aligned with a second pole structure (P2) formed thereover. The invention may also include first and second wing portions formed in the first pole that are recessed from the ABS and that extend laterally from the first notched portions of the first pole. The formation of the winged portions is assisted by an ion mill resistant bump (alumina bump) formed thereover, which acts as a mask during the ion milling operations that are used to form the first and second notches.
摘要翻译：一种磁写头及其制造方法，其具有第一极结构，具有阶切口第一极结构。台阶缺口结构包括比形成在其上的第二切口部分更宽的底部切口部分。上部或更窄的切口部分具有与形成在其上的第二极结构（P2）基本相等并自对准的宽度。本发明还可以包括形成在第一极中的从ABS凹入并从第一极的第一切口部横向延伸的第一和第二翼部。翼形部分的形成由在其上形成的离子磨耐磨凸起（氧化铝凸块）辅助，其在用于形成第一和第二凹口的离子铣削操作期间用作掩模。

3. 发明授权

US07675709B2 Magnetic write head having a stair notched, steep shouldered pole and a write gap bump 失效
标题翻译：磁性写头具有阶梯式切口，陡峭的肩部极点和写入间隙凸起
公开(公告)号：US07675709B2
公开(公告)日：2010-03-09
申请号：US11525789
申请日：2006-09-21
申请人： Hung-Chin Guthrie , Wen-Chien David Hsiao , Jyh-Shuey Lo , Aron Pentek
发明人： Hung-Chin Guthrie , Wen-Chien David Hsiao , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/31 , G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A magnetic write head structure that maximizes write field strength while minimizing stray fields. The write pole structure maximizes write field strength by minimizing saturation of the magnetic pole tips, and minimizes stray field writing by preventing magnetic fields from extending laterally from the sides of the magnetic pole. The write head structure includes a write pole having a pole tip configured with a stair notched shape and a steep shouldered base beneath the stair notched portion. This configuration maximizes the amount of flux that can be delivered to the pole tip while also avoiding stray fields. The magnetic pole can also be configured with wing shaped extensions that extend laterally from the pole tip region but which are recessed from the ABS by a desired amount. The magnetic write head structure can be manufactured by forming a magnetic pole with a raised portion, depositing a write gap material over the magnetic pole and then forming a magnetic pedestal over the magnetic pole and write gap, the pedestal having a width significantly smaller than the width of the raised portion of the magnetic pole, a first ion mill can then be performed to notch and trim the magnetic pole. Then a non-magnetic layer such as alumina can be deposited and a second ion mill performed to form a stair notched configuration. An alumina bump can be formed prior to ion milling to provide a mask for forming the laterally extending, recessed wings in the pole tip of the magnetic pole.
摘要翻译：磁写头结构，使写入场强度最大化，同时最小化杂散场。写磁极结构通过最小化磁极尖端的饱和度来最大化写入场强度，并且通过防止磁场从磁极的侧面横向延伸来最小化杂散磁场写入。写头结构包括具有构造为具有阶梯形切口形状的极尖的写入极和在阶梯切口部下方的陡峭的肩部基座。该配置最大化可以传送到极尖的通量，同时也避免杂散场。磁极还可以配置有翼形延伸部，其从极尖区域横向延伸，但是从ABS凹入所需量。可以通过形成具有凸起部分的磁极来制造磁性写入头结构，在磁极上沉积写入间隙材料，然后在磁极和写入间隙上形成磁性基座，该基座具有明显小于磁极的凸起部分的宽度，然后可以执行第一离子磨机来切割和修整磁极。然后可以沉积诸如氧化铝的非磁性层，并且执行第二离子磨，以形成阶梯形缺口构型。可以在离子研磨之前形成氧化铝凸块，以提供用于在磁极的极尖中形成横向延伸的凹入的翼的掩模。

4. 发明申请

US20060171069A1 P1 write pole with shoulder formation and method of fabrication 失效
标题翻译： P1写杆与肩部形成和制造方法
公开(公告)号：US20060171069A1
公开(公告)日：2006-08-03
申请号：US11046740
申请日：2005-01-31
申请人： Daniel Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Lee , Aron Pentek
发明人： Daniel Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Lee , Aron Pentek
IPC分类号： G11B5/147
CPC分类号： G11B5/1871 , G11B5/3116
摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.
摘要翻译：公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P 1层，在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

5. 发明申请

US20080074782A1 Magnetic write head having a stair notched, steep shouldered pole and a write gap bump 失效
标题翻译：磁性写头具有阶梯式切口，陡峭的肩部极点和写入间隙凸起
公开(公告)号：US20080074782A1
公开(公告)日：2008-03-27
申请号：US11525789
申请日：2006-09-21
申请人： Hung-Chin Guthrie , Wen-Chien David Hsiao , Jyh-Shuey Lo , Aron Pentek
发明人： Hung-Chin Guthrie , Wen-Chien David Hsiao , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A magnetic write head structure that maximizes write field strength while minimizing stray fields. The write pole structure maximizes write field strength by minimizing saturation of the magnetic pole tips, and minimizes stray field writing by preventing magnetic fields from extending laterally from the sides of the magnetic pole. The write head structure includes a write pole having a pole tip configured with a stair notched shape and a steep shouldered base beneath the stair notched portion. This configuration maximizes the amount of flux that can be delivered to the pole tip while also avoiding stray fields. The magnetic pole can also be configured with wing shaped extensions that extend laterally from the pole tip region but which are recessed from the ABS by a desired amount. The magnetic write head structure can be manufactured by forming a magnetic pole with a raised portion, depositing a write gap material over the magnetic pole and then forming a magnetic pedestal over the magnetic pole and write gap, the pedestal having a width significantly smaller than the width of the raised portion of the magnetic pole, a first ion mill can then be performed to notch and trim the magnetic pole. Then a non-magnetic layer such as alumina can be deposited and a second ion mill performed to form a stair notched configuration. An alumina bump can be formed prior to ion milling to provide a mask for forming the laterally extending, recessed wings in the pole tip of the magnetic pole.
摘要翻译：磁写头结构，使写入场强度最大化，同时最小化杂散场。写磁极结构通过最小化磁极尖端的饱和度来最大化写入场强度，并且通过防止磁场从磁极的侧面横向延伸来最小化杂散磁场写入。写头结构包括具有构造为具有阶梯形切口形状的极尖的写入极和在阶梯切口部下方的陡峭的肩部基座。该配置最大化可以传送到极尖的通量，同时也避免杂散场。磁极还可以配置有翼形延伸部，其从极尖区域横向延伸，但是从ABS凹入所需量。可以通过形成具有凸起部分的磁极来制造磁性写入头结构，在磁极上沉积写入间隙材料，然后在磁极和写入间隙上形成磁性基座，该基座具有明显小于磁极的凸起部分的宽度，然后可以执行第一离子磨机来切割和修整磁极。然后可以沉积诸如氧化铝的非磁性层，并且执行第二离子磨，以形成阶梯形缺口构型。可以在离子研磨之前形成氧化铝凸块，以提供用于在磁极的极尖中形成横向延伸的凹入的翼的掩模。

6. 发明授权

US07029376B1 Process of fabricating write pole in magnetic recording head using rhodium CMP stop layer 失效
标题翻译：使用铑CMP停止层在磁记录头中制造写柱的过程
公开(公告)号：US07029376B1
公开(公告)日：2006-04-18
申请号：US11225907
申请日：2005-09-14
申请人： Hung-Chin Guthrie , Ming Jiang , Jyh-Shuey Lo , Hong Zhang
发明人： Hung-Chin Guthrie , Ming Jiang , Jyh-Shuey Lo , Hong Zhang
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , Y10T29/49046 , Y10T29/49048
摘要： In the formation of the top magnetic write pole in a thin film magnetic recording head, a CMP stop layer comprising rhodium is deposited over the Al2O3 layer that overlies the top magnetic pole. A mixture of silicon dioxide, ammonium persulfate and benzotriazole is employed as a slurry in the CMP process that removes the portion of the Al2O3 layer covering the top magnetic pole. This eliminates the need for an extra thick layer of Al2O3 to be first deposited over the top pole and then removed to expose the top pole. The magnetic layer that forms the top pole can be plated to the target thickness of the top pole. As a result, the thickness of the photoresist layer that is used to define the size and shape of the top pole can be decreased to a desirable thickness, facilitating the use of DUV radiation to expose the photoresist layer.
摘要翻译：在薄膜磁记录头中形成顶磁写磁极时，包含铑的CMP停止层沉积在覆盖顶部的Al 2 O 3层上磁极。在CMP工艺中使用二氧化硅，过硫酸铵和苯并三唑的混合物作为浆料，其除去覆盖顶部磁极的部分Al 2 O 3 N 3层。这样就不需要首先沉积在顶极上的另外一层较厚的Al 2 O 3 3 3层，然后去除以暴露顶极。可以将形成顶极的磁性层电镀到顶极的目标厚度。结果，用于限定顶极的尺寸和形状的光致抗蚀剂层的厚度可以减小到期望的厚度，便于使用DUV辐射来曝光光致抗蚀剂层。

7. 发明授权

US07593186B2 P1 write pole with shoulder formation 失效
标题翻译： P1写柱与肩形
公开(公告)号：US07593186B2
公开(公告)日：2009-09-22
申请号：US11046740
申请日：2005-01-31
申请人： Daniel Wayne Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Hin Pong Lee , Aron Pentek
发明人： Daniel Wayne Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Hin Pong Lee , Aron Pentek
IPC分类号： G11B5/39 , G11B5/147
CPC分类号： G11B5/1871 , G11B5/3116
摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.
摘要翻译：公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P1层，在P1层上形成的间隙层和形成在间隙层上的P2层。 P1层包括具有颈部和斜面部分的肩部结构。还公开了具有具有肩部形成的P1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P1层的磁性记录头的写入磁极的方法。

8. 发明申请

US20070258167A1 Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
标题翻译：具有磁写入磁极的垂直磁性写头具有凹形后缘
公开(公告)号：US20070258167A1
公开(公告)日：2007-11-08
申请号：US11411556
申请日：2006-04-25
申请人： Donald Allen , Amanda Baer , Michael Feldbaum , Hung-Chin Guthrie , Wen-Chien Hsiao , Yimin Hsu , Ming Jiang , Yinshi Liu , Aron Neuhaus , Vladimir Nikitin , Aron Pentek , Katalin Pentek , Yi Zheng
发明人： Donald Allen , Amanda Baer , Michael Feldbaum , Hung-Chin Guthrie , Wen-Chien Hsiao , Yimin Hsu , Ming Jiang , Yinshi Liu , Aron Neuhaus , Vladimir Nikitin , Aron Pentek , Katalin Pentek , Yi Zheng
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/1871 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.
摘要翻译：用于垂直磁记录的磁写头，具有带有凹后缘的写极。磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。凹形后边缘提高磁性能，例如通过改善转变曲率。构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

9. 发明授权

US07804662B2 Perpendicular magnetic recording head including wrap around shield with notched top write gap and method of fabricating the same 有权
标题翻译：垂直磁记录头包括带有凹口顶部写入间隙的屏蔽罩及其制造方法
公开(公告)号：US07804662B2
公开(公告)日：2010-09-28
申请号：US11645390
申请日：2006-12-26
申请人： Tsung Yuan Chen , Hung-Chin Guthrie , Yimin Hsu , Ming Jiang
发明人： Tsung Yuan Chen , Hung-Chin Guthrie , Yimin Hsu , Ming Jiang
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： In a perpendicular recording head, a notch is formed in the top write gap at a location on top of the main pole. A perpendicular head with this notched top write gap structure has less transition curvature and better writability while reducing the adjacent track interference (ATI). Also, the process used to fabricate the head ensures that the trailing edge (writing edge) of the main pole is extremely flat with no corner rounding.
摘要翻译：在垂直记录头中，在主极顶部的位置处，在顶部写入间隙中形成凹口。具有该切口顶部写入间隙结构的垂直头部具有较小的转变曲率和较好的可编写性，同时减小了相邻的轨道干涉（ATI）。此外，用于制造头的过程确保主极的后缘（书写边缘）非常平坦，没有圆角。

10. 发明授权

US07722436B2 Run-to-run control of backside pressure for CMP radial uniformity optimization based on center-to-edge model 有权
标题翻译：基于中心到边缘模型的用于CMP径向均匀性优化的背侧压力的运行控制控制
公开(公告)号：US07722436B2
公开(公告)日：2010-05-25
申请号：US11832455
申请日：2007-08-01
申请人： Hung-Chin Guthrie , Ming Jiang , Yeak-Chong Wong
发明人： Hung-Chin Guthrie , Ming Jiang , Yeak-Chong Wong
IPC分类号： B24B49/00
CPC分类号： B24B49/03 , B24B37/042
摘要： During planarization of wafers, the thickness of a layer of a wafer is measured at a number of locations, after the wafer has been planarized by chemical mechanical polishing. The thickness measurements are used to automatically determine, from a center to edge profile model to which the measurements are fit, a parameter that controls chemical mechanical polishing, called “backside pressure.” Backside pressure is determined in some embodiments by a logic test based on the center-to-edge profile model, coefficient of determination R-square of the model, and current value of backside pressure. Note that a “backside pressure” set point is adjusted only if the fit of the measurements to the model is good, e.g. as indicated by R-square being greater than a predetermined limit. Next, the backside pressure that has been determined from the model is used in planarizing a subsequent wafer.
摘要翻译：在晶片的平坦化期间，在通过化学机械抛光对晶片进行平面化之后，在多个位置测量晶片层的厚度。厚度测量用于自动确定从测量结合到的中心到边缘轮廓模型，控制称为“后侧压力”的化学机械抛光的参数。背面压力在一些实施例中通过基于中心到边缘轮廓模型，模型的确定系数R平方和背侧压力的当前值。注意，仅当对模型的测量的拟合良好时才调整“背侧压力”设定点。如R平方所示大于预定极限。接下来，将从模型确定的背面压力用于平面化后续晶片。

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