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1. 发明申请

US20060171069A1 P1 write pole with shoulder formation and method of fabrication 失效
标题翻译： P1写杆与肩部形成和制造方法
公开(公告)号：US20060171069A1
公开(公告)日：2006-08-03
申请号：US11046740
申请日：2005-01-31
申请人： Daniel Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Lee , Aron Pentek
发明人： Daniel Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Lee , Aron Pentek
IPC分类号： G11B5/147
CPC分类号： G11B5/1871 , G11B5/3116
摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.
摘要翻译：公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P 1层，在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

2. 发明申请

US20070236833A1 Method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head 失效
标题翻译：用于将台阶缺口和间隙凸起集成在写头中的极尖处的方法和装置
公开(公告)号：US20070236833A1
公开(公告)日：2007-10-11
申请号：US11399821
申请日：2006-04-07
申请人： Daniel Bedell , Wen-Chien Hsiao , Ming Jiang , Hieu Lam , Kim Lee , Jyh-Shuey Lo , Aron Pentek
发明人： Daniel Bedell , Wen-Chien Hsiao , Ming Jiang , Hieu Lam , Kim Lee , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , Y10T29/49043
摘要： A method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head is disclosed. A protective plated layer is formed over the bump to prevent the bump form being damaged during formation of the notch at the pole tip. The flux from the second pole outside of the track will be effectively channeled to the first pole piece under the alumina bump.
摘要翻译：公开了一种用于将写入头中的极尖处的台阶缺口和间隙凸起集成的方法和装置。在凸起之上形成保护镀层，以防止在极尖处形成凹口期间凸起形状被损坏。来自轨道外部的第二极的磁通将有效地引导到氧化铝凸块下方的第一极靴。

3. 发明申请

US20060070231A1 Process for creating a write head by forming a bump after the top pole is formed 失效
标题翻译：用于通过在形成顶极之后形成凸起来产生写入头的过程
公开(公告)号：US20060070231A1
公开(公告)日：2006-04-06
申请号：US10956221
申请日：2004-09-30
申请人： Amanda Baer , Hamid Balamane , Daniel Bedell , Jyh-Shuey Lo , Vladimir Nikitin , Aron Pentek , Yvette Winton
发明人： Amanda Baer , Hamid Balamane , Daniel Bedell , Jyh-Shuey Lo , Vladimir Nikitin , Aron Pentek , Yvette Winton
IPC分类号： G11B5/187
CPC分类号： G11B5/1871 , G11B5/3163 , Y10T29/49021 , Y10T29/49032 , Y10T29/49034 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Methods for creating a write head by forming a bump after the top pole is formed are provided. In one embodiment, a bottom pole is created out of a first layer. A non-magnetic gap material is applied to the surface of the wafer. A top pole is created out of a second layer. After creating the top pole, a bump is created. The bump is used to protect at least a portion of the first layer while etching to create a stray flux absorber.
摘要翻译：提供了通过在形成顶极之后形成凸块来创建写入头的方法。在一个实施例中，从第一层产生底极。将非磁隙材料施加到晶片的表面。第二层创建顶杆。创建顶极后，会创建一个凸起。凸块用于在蚀刻时保护第一层的至少一部分以产生杂散通量吸收体。

4. 发明申请

US20070058293A1 Magnetic write head having a self aligned, steep shoulder pole structure and method of manufacture thereof 失效
标题翻译：具有自对准陡肩极结构的磁写头及其制造方法
公开(公告)号：US20070058293A1
公开(公告)日：2007-03-15
申请号：US11228783
申请日：2005-09-15
申请人： Daniel Bedell , Hieu Lam , Kim Lee , Jyh-Shuey Lo
发明人： Daniel Bedell , Hieu Lam , Kim Lee , Jyh-Shuey Lo
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/3163
摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.
摘要翻译：一种磁写头及其制造方法，其具有第一极结构，其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。写头还包括具有非常窄的宽度（轨道宽度）并且与第一极结构的窄垂直切口结构自对准的第二极结构（P 2）。写头提供优异的磁性，包括非常窄的轨道宽度和最小的侧面写入，同时避免极点的磁饱和。

5. 发明申请

US20060096081A1 Methods of making magnetic write heads with use of a resist channel shrinking solution having corrosion inhibitors 审中-公开
标题翻译：使用具有腐蚀抑制剂的抗蚀剂通道收缩溶液制造磁性写入头的方法
公开(公告)号：US20060096081A1
公开(公告)日：2006-05-11
申请号：US11312064
申请日：2005-12-19
申请人： Christian Bonhote , Jila Tabib , Dennis McKean , Daniel Bedell , Jyh-Shuey Lo , Hieu Lam , Kim Lee
发明人： Christian Bonhote , Jila Tabib , Dennis McKean , Daniel Bedell , Jyh-Shuey Lo , Hieu Lam , Kim Lee
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048 , Y10T29/49052
摘要： One preferred method for use in making a magnetic write head with use of the resist channel shrinking solution includes the steps of forming a first pole piece layer of a first pole piece; forming a gap layer over the first pole piece layer; forming a patterned resist over the first pole piece layer and the gap layer; electroplating a first pedestal portion of a second pole piece over the gap layer within a channel of the patterned resist; forming an oxide layer over the first pedestal portion; applying the resist channel shrinking solution comprising the resist channel shrinking film and the corrosion inhibitors over the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel; removing the resist channel shrinking solution; electroplating a second pedestal portion of the second pole piece within the reduced-width channel of the patterned resist; removing the patterned resist; and milling the structure. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pole piece during the act of baking the resist channel shrinking solution.
摘要翻译：使用抗蚀剂通道收缩溶液制造磁性写入头的一种优选方法包括以下步骤：形成第一极片的第一极片层; 在所述第一极片层上形成间隙层; 在所述第一极片层和所述间隙层上形成图案化的抗蚀剂; 在图案化的抗蚀剂的通道内的间隙层上电镀第二极片的第一基座部分; 在所述第一基座部分上形成氧化物层; 在图案化的抗蚀剂上施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液，从而减小通道的宽度; 去除抗蚀剂通道收缩溶液; 在所述图案化抗蚀剂的所述减小宽度的通道内电镀所述第二极靴的第二基座部分; 去除图案化的抗蚀剂; 并研磨结构。有利地，抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用期间减少极片中的腐蚀。

6. 发明申请

US20070020386A1 Encapsulation of chemically amplified resist template for low pH electroplating 审中-公开
标题翻译：封装化学放大抗蚀剂模板，用于低pH电镀
公开(公告)号：US20070020386A1
公开(公告)日：2007-01-25
申请号：US11186166
申请日：2005-07-20
申请人： Daniel Bedell , John Lam , Matthew Last , Kim Lee , Jyh-Shuey Lo , Dennis McKean , Chun-Ming (Albert) Wang , Yi Zheng
发明人： Daniel Bedell , John Lam , Matthew Last , Kim Lee , Jyh-Shuey Lo , Dennis McKean , Chun-Ming (Albert) Wang , Yi Zheng
IPC分类号： B05D5/12 , B05D5/00 , B05D1/36 , B05C11/02
CPC分类号： G03F7/40 , C25D5/022 , C25D7/12 , G03F7/2024
摘要： Systems and methods for encapsulation of chemically amplified resist template for low pH electroplating are disclosed. In a first method embodiment, a resist template structure is formed on a wafer. Substantially all surfaces of the resist template structure are encapsulated to form an encapsulated structure. Magnetic materials are plated onto the encapsulated structure.
摘要翻译：公开了用于封装用于低pH电镀的化学放大抗蚀剂模板的系统和方法。在第一方法实施例中，在晶片上形成抗蚀剂模板结构。基本上将抗蚀剂模板结构的所有表面封装形成封装结构。将磁性材料电镀在封装结构上。

7. 发明申请

US20070124917A1 Integration of small flash field, zero bias, and non-reactive ion milling for pole tip uniformity 有权
标题翻译：集成小闪场，零偏置和非反应离子铣削，使刀尖均匀
公开(公告)号：US20070124917A1
公开(公告)日：2007-06-07
申请号：US11297228
申请日：2005-12-07
申请人： Hamid Balamame , Daniel Bedell , Mary Gutberlet , Clarence Hsieh , Aron Pentek , Yi Zheng
发明人： Hamid Balamame , Daniel Bedell , Mary Gutberlet , Clarence Hsieh , Aron Pentek , Yi Zheng
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49039 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
摘要翻译：一种制造磁写头的方法，其提供改进的极关键尺寸控制，例如改进的轨道宽度控制（改进的σ）和改进的闪点控制。该方法涉及几个工艺改进的组合，例如使用零印刷偏压光刻地图案化限定光致抗蚀剂框架的P 2极尖端并且还使用小的闪光场。该方法还涉及使用非反应性离子蚀刻来使用第二极（P 2）作为掩模将第一极（P1）切口。

8. 发明申请

US20070017087A1 Method for making magnetic write head 失效
标题翻译：磁头写入方法
公开(公告)号：US20070017087A1
公开(公告)日：2007-01-25
申请号：US11186174
申请日：2005-07-21
申请人： Daniel Bedell , Aron Pentek , Katalin Pentek , Yi Zheng
发明人： Daniel Bedell , Aron Pentek , Katalin Pentek , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052
摘要： After defining the P2 pole of a magnetic read head, alumina is deposited over it and planarized by CMP, with the portion of the alumina overlaying the ABS region of the P2 pole subsequently being masked by a photoresist layer and with the portions of the alumina overlaying the flare area, back gap region, and center tap regions of the P2 pole not being masked. A reactive ion mill is performed to expose the flare area, back gap region, and center tap regions of the P2 pole by removing the alumina over these portions, so that subsequent steps such as forming a layer of coiled conductors, forming a return pole, and forming stud connections along with removing the respective seed layers can be executed with the ABS region protected by the alumina and with the flare area, back gap region, and center tap region exposed.
摘要翻译：在定义磁读头的P2极之后，将氧化铝沉积在其上并通过CMP平坦化，其中覆盖P2极的ABS区域的氧化铝的部分随后被光致抗蚀剂层掩蔽，并且氧化铝的部分覆盖 P2极的光斑区域，背隙区域和中心抽头区域不被掩蔽。通过在这些部分上除去氧化铝，进行反应离子磨，以暴露P2极的火炬区域，后隙区域和中心抽头区域，从而形成后续步骤，例如形成线圈导体层，形成返回极，并且可以利用由氧化铝保护的ABS区域和暴露的火炬区域，后隙区域和中心抽头区域来执行形成螺柱连接以及移除相应的种子层。

9. 发明申请

US20070146931A1 Method for fabricating a side shield for a flux guide layer for perpendicular magnetic recording 失效
标题翻译：用于制造用于垂直磁记录的磁通引导层的侧屏蔽的方法
公开(公告)号：US20070146931A1
公开(公告)日：2007-06-28
申请号：US11317917
申请日：2005-12-22
申请人： Amanda Baer , Daniel Bedell , Quang Le , Aron Pentek
发明人： Amanda Baer , Daniel Bedell , Quang Le , Aron Pentek
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/3163
摘要： A magnetic head for use in a perpendicular recording system having a novel shield structure that provides exceptional magnetic shielding from extraneous magnetic fields such as from a write coil, shaping layer or return pole of the write head. The shield structure is constructed to have a bottom or leading surface that is generally coplanar with the bottom or leading surface of the shaping layer, but all or a portion of the shield structure is not as thick as the shaping layer so as to have a top surface that does not extend to the same elevation (in a trailing direction) as that of the shaping layer. Making the shields extend to a lower level than the shaping layer improves magnetic performance by reducing flux leakage from the write pole, and also provides manufacturing advantages, such as during the manufacturing of the write pole. These manufacturing advantages include the advantage of having the shields covered with a protective layer of, for example, alumina during the ion milling of the write pole.
摘要翻译：一种用于垂直记录系统的磁头，其具有新的屏蔽结构，其提供例如来自写入磁头的写入线圈，成形层或返回磁极的外部磁场的卓越的磁屏蔽。屏蔽结构被构造成具有与成形层的底部或前表面大致共面的底部或前表面，但是屏蔽结构的全部或一部分不像成形层那样厚，以便具有顶部表面不延伸到与成形层相同的高度（在拖尾方向上）。使屏蔽层延伸到比成形层更低的水平，通过减小来自写入极的磁通泄漏来提高磁性能，并且还提供制造优点，例如在写入磁极的制造期间。这些制造优点包括在写入极的离子铣削期间使屏蔽覆盖有例如氧化铝的保护层的优点。

10. 发明授权

US07263762B2 Method for reducing pole height loss in the formation of a write pole for a magnetic write head 失效
标题翻译：降低写入磁头写磁极的磁极高度损失的方法
公开(公告)号：US07263762B2
公开(公告)日：2007-09-04
申请号：US10957038
申请日：2004-09-30
申请人： Daniel Bedell , Jennifer A. Loo , Aron Pentek , Murali Ramasubramanian
发明人： Daniel Bedell , Jennifer A. Loo , Aron Pentek , Murali Ramasubramanian
IPC分类号： G11B5/127 , G11B5/187
CPC分类号： G11B5/3163 , G11B5/187 , Y10T29/49021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for reducing plated pole height loss in the formation of a write pole for a magnetic write head is disclosed. The method includes forming a conductive layer on a thin film substrate, forming a photoresist layer on the conductive layer and forming a trench in the photoresist layer. A thick seed layer is then placed on the trench and on the photoresist layer surface using a collimator. Moreover, the process includes plating while applying a voltage to the thin film substrate where the electrically isolated seed layer is removed and the trench is filled with plating material, removing the photoresist layer, and removing the exposed portions of the conductive layer on the thin film substrate.
摘要翻译：本发明公开了一种在形成写磁头写磁极时降低电极高度损耗的方法。该方法包括在薄膜基板上形成导电层，在导电层上形成光致抗蚀剂层，并在光刻胶层中形成沟槽。然后使用准直器将厚的种子层放置在沟槽和光致抗蚀剂层表面上。此外，该方法包括电镀，同时向薄膜基板施加电压，其中去除电隔离种子层，并且沟槽填充有电镀材料，去除光致抗蚀剂层，以及去除薄膜上的导电层的暴露部分基质。

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