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    • 4. 发明授权
    • Method for forming a thin film of a non-stoichiometric metal oxide
    • 用于形成非化学计量的金属氧化物薄膜的方法
    • US5750188A
    • 1998-05-12
    • US705361
    • 1996-08-29
    • Eric P. Menu
    • Eric P. Menu
    • C09K11/08C09K11/60C23C14/00C23C14/08B05D5/13
    • C23C14/0021C09K11/0811C09K11/605C23C14/086
    • A method for forming a thin film (220) of luminescent zinc oxide includes the steps of: (i) providing a mixture (170) of powdered zinc oxide and powdered graphite, (ii) providing a substrate (140) at a distance of about 9 millimeters from the mixture (170), (iii) disposing the mixture (170) and substrate (140) within an apparatus (100) that provides a confined environment having a partial pressure of oxygen of about 0.21 atmospheres, (iv) heating the mixture (170) to a temperature of about 850 degrees Celsius, and (v) establishing a temperature gradient between the substrate (140) and the mixture (170) of about 15 degrees, the temperature of the substrate (140) being less than the temperature of the mixture (170).
    • 形成发光氧化锌薄膜(220)的方法包括以下步骤:(i)提供粉状氧化锌和粉状石墨的混合物(170),(ii)提供距离约 离开混合物(170)9毫米,(iii)将混合物(170)和基底(140)设置在提供约0.21大气压的氧分压的限制环境的设备(100)内,(iv)加热 混合物(170)至约850摄氏度的温度,和(v)在衬底(140)和混合物(170)之间建立约15度的温度梯度,衬底(140)的温度小于 混合物的温度(170)。