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    • 3. 发明授权
    • Exposure apparatus and exposure system
    • 曝光装置和曝光系统
    • US09417536B2
    • 2016-08-16
    • US14339608
    • 2014-07-24
    • BOE Technology Group Co., Ltd.Beijing BOE Display Technology Co., Ltd.
    • Changjun ZhaMin LiHongjiang Wu
    • G03B27/58G03F7/20
    • G03F7/7035G03F7/707G03F7/70783G03F7/70791
    • An exposure apparatus is provided. It comprises: a substrate stage on which a holding region is provided to hold a substrate to be exposed, the holding region being provided with a support portion thereon for supporting the substrate to be exposed; a supporter configured to support a mask; a light source system configured to provide an exposure light which is illuminated on the substrate to be exposed via the mask to reproduce a pattern of the mask onto the substrate, wherein the support portion has a height which decreases gradually from an outer periphery of the holding region to a center of the holding region, such that an exposure distance is constant at all of positions on the holding region. With the above structure, the graph dimension may be kept uniform on the substrate even if the mask becomes bent.
    • 提供曝光装置。 它包括:衬底台,其上设有保持区以保持要暴露的衬底,所述保持区在其上设置有用于支撑要暴露的衬底的支撑部; 配置为支持掩模的支撑件; 光源系统,被配置为提供照射在待通过掩模曝光的基板上的曝光光,以将掩模的图案再现到基板上,其中支撑部分具有从保持件的外周逐渐减小的高度 区域到保持区域的中心,使得曝光距离在保持区域上的所有位置都是恒定的。 利用上述结构,即使掩模弯曲,也可以在基板上保持图形尺寸均匀。
    • 10. 发明授权
    • Fly eye lens and proximity exposure machine optical system
    • 飞眼镜片和邻近曝光机光学系统
    • US09274433B2
    • 2016-03-01
    • US14065647
    • 2013-10-29
    • BOE Technology Group Co., Ltd.Beijing BOE Display Technology Co., Ltd.
    • Min LiHongjiang WuGyuhyun LeeJikai ZhangTonghua Yang
    • G03F7/20
    • G03F7/70083G03F7/70058G03F7/70066G03F7/70075G03F7/7035
    • An embodiment of the present invention provides a fly eye lens which is applied to a proximity exposure machine optical system. The fly lens includes a first lens assembly and a second lens assembly, wherein the first lens assembly includes a plurality of lenses which form a first lens face, and the second lens assembly includes a plurality of lenses which form a second lens face. The first lens face is used to split an incident broad light beam into narrow light beams and then refract the narrow light beams onto the second lens face, and the second lens face is used to dispersively refract the received narrow light beams onto a concave mirror in the optical system. A lens closer to a center of the second lens face has a higher transmittivity, and a lens farther from the center of the second lens face has a lower transmittivity. According to the embodiment of the present invention, since different lenses on the second lens face have different transmittivities, the illuminances of light radiated to different regions of a mask plate through the fly eye lens are different, and thus the uniformity of the critical dimensions of the exposed patterns can be improved to a certain extent.
    • 本发明的实施例提供了一种应用于接近曝光机光学系统的飞眼镜片。 飞行透镜包括第一透镜组件和第二透镜组件,其中第一透镜组件包括形成第一透镜面的多个透镜,并且第二透镜组件包括形成第二透镜面的多个透镜。 第一透镜面用于将入射的宽光束分裂成窄光束,然后将窄光束折射到第二透镜面上,并且使用第二透镜面将接收的窄光束分散地折射到凹面镜上 光系统。 靠近第二透镜面的中心的透镜具有更高的透射率,并且离第二透镜面的中心更远的透镜具有较低的透射率。 根据本发明的实施例,由于第二透镜面上的不同透镜具有不同的透射率,所以通过飞眼透镜辐射到掩模板的不同区域的光的照度是不同的,因此临界尺寸的均匀性 可以在一定程度上改善曝光图案。