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    • 1. 发明授权
    • Production of conductive metal silicide films from ultrafine powders
    • 从超细粉末制造导电金属硅化物薄膜
    • US4617237A
    • 1986-10-14
    • US609628
    • 1984-05-14
    • Arunava GuptaGary A. WestJames T. Yardley
    • Arunava GuptaGary A. WestJames T. Yardley
    • C04B41/87C23C24/08H01L21/28B05D3/06B05D5/12B32B9/04B32B19/00
    • C23C24/082H01L21/28097
    • A method of producing a thin film comprising a conductive metal silicide and the products produced therefrom are disclosed. The method is much less complex than methods employed in the prior art for producing conductive thin films and the method reduces substrate damage by maintaining processing temperatures at about 1,000.degree. C. or less. The process employs a stable suspension comprising ultrafine powders in a solvent. This suspension is deposited on a surface of a substrate and is subsequently heated to form a thin conductive film. The thin conductive film comprises polycrystalline metal silicide, preferably a refractory metal silicide, and may also contain silicon. Composites comprising the thin conductive films and a substrate are also disclosed. The process and products are particularly suited for use in VLSI and VVLSI production.
    • 公开了一种制造包含导电金属硅化物的薄膜及其产生的产品的方法。 该方法比用于制造导电薄膜的现有技术中使用的方法复杂得多,并且该方法通过将处理温度维持在约1000℃以下来降低基板损伤。 该方法采用在溶剂中包含超细粉末的稳定悬浮液。 将该悬浮液沉积在基材的表面上,随后被加热以形成薄的导电膜。 薄导电膜包括多晶金属硅化物,优选难熔金属硅化物,并且还可以含有硅。 还公开了包括薄导电膜和基底的复合材料。 该工艺和产品特别适用于VLSI和VVLSI生产。
    • 10. 发明授权
    • Direct view display device with array of tapered waveguide on viewer side
    • 在观察器侧具有锥形波导阵列的直视显示装置
    • US5481385A
    • 1996-01-02
    • US86414
    • 1993-07-01
    • Scott M. ZimmermanKarl W. BeesonMichael J. McFarlandJames T. YardleyPaul M. Ferm
    • Scott M. ZimmermanKarl W. BeesonMichael J. McFarlandJames T. YardleyPaul M. Ferm
    • G02F1/1335
    • G02F1/133524
    • A direct view display including a light generating means for generating light, a modulating means for modulating light from said light generating means to form an image, and an image display means for displaying said image from said modulating means positioned adjacent to the light output surface of said modulating means, said display means comprising an array of tapered optical waveguides on a planar substrate the tapered end of each of said waveguides extending outward from said substrate and having a light input surface adjacent said substrate and a light output surface distal from said light input surface. The area of the light input surface of each waveguide is greater than the area of its light output surface, and the center-to-center distance between the light input surfaces of adjacent waveguides in said array is equal to the center-to-center distance between the light output surfaces thereof, so that the angular distribution of light emerging from the output surfaces of the waveguides is larger than the angular distribution of light entering the waveguides. Also, the waveguides in said array are separated by interstitial regions with a lower refractive index than the refractive index of said waveguides.
    • 一种包括用于产生光的发光装置的直视图显示器,用于调制来自所述光产生装置的光以形成图像的调制装置,以及用于显示所述图像从所述调制装置显示所述图像的图像显示装置,所述调制装置邻近所述光输出表面 所述调制装置,所述显示装置包括在平面基板上的锥形光波导阵列,每个所述波导的锥形端从所述基板向外延伸并且具有与所述基板相邻的光输入表面和远离所述光输入的光输出表面 表面。 每个波导的光输入表面的面积大于其光输出表面的面积,并且所述阵列中相邻波导的光输入表面之间的中心到中心距离等于中心到中心距离 在其光输出表面之间,使得从波导的输出表面出射的光的角分布大于进入波导的光的角分布。 此外,所述阵列中的波导通过具有比所述波导的折射率更低的折射率的间隙区域分开。