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1. 发明授权

US07449220B2 Method for manufacturing a plate-shaped workpiece 有权
标题翻译：板状工件的制造方法
公开(公告)号：US07449220B2
公开(公告)日：2008-11-11
申请号：US10835708
申请日：2004-04-30
申请人： Arthur Buechel , Werner Wieland , Christoph Ellert , Laurent Sansonnens
发明人： Arthur Buechel , Werner Wieland , Christoph Ellert , Laurent Sansonnens
IPC分类号： H05H1/03
CPC分类号： H01J37/32541 , C23C16/45565 , C23C16/5096
摘要： A method for producing a disk shaped workpiece with a dielectric substrate includes treatment in a plasma process volume between two electrode faces bounding a high-frequency plasma discharge. One electrode face is of dielectric material and is at a high-frequency potential with a varying distribution along the face. The other electrode face is metallic. Reactive gas is introduced into the process volume through an aperture pattern. The dielectric substrate, before treatment, is at least regionally coated with a layer material to whose specific resistance applies: 10−5 Ωcm≦≦10−1 Ωcm, and to the resulting surface resistance RS of the layer applies: 0
摘要翻译：用于制造具有电介质基片的圆盘形工件的方法包括在等离子体处理体积中处理两个界定高频等离子体放电的电极面。一个电极面是介电材料，并且处于高频电位，沿着面部具有不同的分布。另一个电极面是金属的。活性气体通过孔径图案引入过程体积。电介质基片在处理之前至少在区域上涂覆有电阻率适用：10 -5以下Omegacm <= <= 10 ＆lt; SUP＆gt; -1＆Omega;以及所得到的表面电阻R S S适用于：0 <= 10 < / SUP>欧米茄。随后，将涂覆的基板定位在金属电极表面上，并在等离子体处理体积等离子体增强下被反应地蚀刻或涂覆。

2. 发明申请

US20050241583A1 Method for the production of a disk-form workpiece based on a dielectric substrate as well as vacuum treatment installation for same 有权
标题翻译：用于制造基于电介质基板的圆盘形工件的方法以及用于其的真空处理装置
公开(公告)号：US20050241583A1
公开(公告)日：2005-11-03
申请号：US10835708
申请日：2004-04-30
申请人： Arthur Buechel , Werner Wieland , Christoph Ellert
发明人： Arthur Buechel , Werner Wieland , Christoph Ellert
IPC分类号： C23C16/00 , C23C16/509 , H01J37/32 , H05H1/24
CPC分类号： H01J37/32541 , C23C16/45565 , C23C16/5096
摘要： A method for producing a disk shaped workpiece with a dielectric substrate includes treatment in a plasma process volume between two electrode faces bounding a high-frequency plasma discharge. One electrode face is of dielectric material and is at a high-frequency potential with a varying distribution along the face. The other electrode face is metallic. Reactive gas is introduced into the process volume through an aperture pattern. The dielectric substrate, before treatment, is at least regionally coated with a layer material to whose specific resistance applies: 10−5 Ωcm≦≦10−1 Ωcm, and to the resulting surface resistance Rs of the layer applies: 0
摘要翻译：用于制造具有电介质基片的圆盘形工件的方法包括在等离子体处理体积中处理两个界定高频等离子体放电的电极面。一个电极面是介电材料，并且处于高频电位，沿着面部具有不同的分布。另一个电极面是金属的。活性气体通过孔径图案引入过程体积。电介质基片在处理之前至少是用特定电阻适用：10 ^{-5 Omegacm <= <= 10 ＆lt; Sup＆gt; -1＆Omega;以及所得到的表面电阻R 1 S 0适用于：0 欧米茄。随后，将涂覆的基板定位在金属电极表面上，并在等离子体处理体积等离子体增强下被反应地蚀刻或涂覆。}

3. 发明授权

US08205572B2 Vacuum treatment installation for the production of a disk-shaped workpiece based on a dielectric substrate 有权
标题翻译：用于生产基于电介质基片的盘形工件的真空处理设备
公开(公告)号：US08205572B2
公开(公告)日：2012-06-26
申请号：US12235845
申请日：2008-09-23
申请人： Arthur Buechel , Werner Wieland , Christoph Ellert
发明人： Arthur Buechel , Werner Wieland , Christoph Ellert
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： H01J37/32541 , C23C16/45565 , C23C16/5096
摘要： A vacuum treatment installation has a vacuum receptacle with a first planar metallic electrode face, a second dielectric electrode face facing the first planar metallic electrode face which forms a surface of a dielectric areal configuration, a metallic coupling face facing a backside of the areal configuration, electric connections on the coupling and on the first electrode face, a gas line system through the coupling face and an areal distributed pattern of apertures through the areal configuration and wherein the areal dielectric configuration is formed by several ceramic tiles.
摘要翻译：真空处理装置具有真空容器，该真空容器具有第一平面金属电极面，面对形成电介质面形状的表面的第一平面金属电极面的第二电介质电极面，面对配置结构的背面的金属结合面，联接器和第一电极面上的电连接，通过耦合面的气体管线系统和通过面形结构的孔的分布图案，并且其中所述面电介质构造由几个瓷砖形成。

4. 发明申请

US20090025632A1 VACUUM TREATMENT INSTALLATION FOR THE PRODUCTION OF A DISK-SHAPED WORKPIECE BASED ON A DIELECTRIC SUBSTRATE 有权
标题翻译：用于生产基于介质基板的盘形工件的真空处理安装
公开(公告)号：US20090025632A1
公开(公告)日：2009-01-29
申请号：US12235845
申请日：2008-09-23
申请人： ARTHUR BUECHEL , Werner Wieland , Christoph Ellert
发明人： ARTHUR BUECHEL , Werner Wieland , Christoph Ellert
IPC分类号： C23C14/00
CPC分类号： H01J37/32541 , C23C16/45565 , C23C16/5096
摘要： A vacuum treatment installation has a vacuum receptacle with a first planar metallic electrode face, a second dielectric electrode face facing the first planar metallic electrode face which forms a surface of a dielectric areal configuration, a metallic coupling face facing a backside of the areal configuration, electric connections on the coupling and on the first electrode face, a gas line system through the coupling face and an areal distributed pattern of apertures through the areal configuration and wherein the areal dielectric configuration is formed by several ceramic tiles.
摘要翻译：真空处理装置具有真空容器，该真空容器具有第一平面金属电极面，面对形成电介质面形状的表面的第一平面金属电极面的第二电介质电极面，面对配置结构的背面的金属结合面，联接器和第一电极面上的电连接，通过耦合面的气体管线系统和通过面形结构的孔的分布图案，并且其中所述面电介质构造由几个瓷砖形成。

5. 发明申请

US20110162582A1 DEPOSITION OF ACTIVE FILMS 有权
标题翻译：活性膜的沉积
公开(公告)号：US20110162582A1
公开(公告)日：2011-07-07
申请号：US12680239
申请日：2008-09-16
申请人： Christoph Ellert , Werner Wieland , Daniele Zorzi , Abed al hay Taha
发明人： Christoph Ellert , Werner Wieland , Daniele Zorzi , Abed al hay Taha
IPC分类号： C23C16/509 , C23C16/455
CPC分类号： H01J37/32541 , H01J37/32091
摘要： A plasma reactor (1) for treating a substrate (40), comprises at least two electrodes (20, 30) arranged within the reactor (1) defining an internal process space (13) there between, whereas the two electrodes (20, 30) are located opposed to each other and parallel with respect to a first surface (20a) of the electrodes (20, 30). Further it comprises a gas inlet (11) and a gas outlet (12) for transporting gas in and out of the plasma reactor (1), a radiofrequency generator (21) connected to at least one of the electrodes (20, 30). At least one of the electrodes (20, 30) has a corrective layer having a non planar shape along a surface (20a) facing the internal process space (13) which has in a first cross section along a radius of the electrode (20) a profile comprising three consecutive and adjacent segments, namely a first, a second and a third segment, where the third segment is adjacent to an edge of the electrode (20) and whereas medium gradient in the first segment is less than a medium gradient in the second segment and a medium gradient in the second segment is larger than a medium gradient in the third segment. An electrode (20) shaped in the above described manner provides for uniform plasma intensity along the surface of the substrate (40) and therefore provides for a treating which is homogenous and features uniform thickness. This invention further allows a compact construction of the vacuum treatment apparatus (1).
摘要翻译：一种用于处理衬底（40）的等离子体反应器（1），包括布置在所述反应器（1）内的至少两个电极（20,30），其在其间限定内部处理空间（13），而所述两个电极（20,30））相对于彼此相对并且相对于电极（20,30）的第一表面（20a）平行。此外，它包括用于输入和输出等离子体反应器（1）中的气体的气体入口（11）和气体出口（12），连接到至少一个电极（20,30）的射频发生器（21）。电极（20,30）中的至少一个具有沿着面向内部处理空间（13）的表面（20a）的非平面形状的校正层，该处理空间沿着电极（20）的半径具有第一横截面，包括三个连续且相邻的段，即第一段，第二和第三段的轮廓，其中第三段与电极（20）的边缘相邻，而第一段中的中等梯度小于中等梯度第二段中的第二段和中等梯度大于第三段中的中等梯度。以上述方式成形的电极（20）提供沿衬底（40）表面的均匀等离子体强度，因此提供均匀且具有均匀厚度的处理。本发明还允许真空处理装置（1）的紧凑结构。

6. 发明授权

US08689734B2 Deposition of active films 有权
标题翻译：沉积活性膜
公开(公告)号：US08689734B2
公开(公告)日：2014-04-08
申请号：US12680239
申请日：2008-09-16
申请人： Christoph Ellert , Werner Wieland , Daniele Zorzi , Abed al hay Taha
发明人： Christoph Ellert , Werner Wieland , Daniele Zorzi , Abed al hay Taha
IPC分类号： C23C16/509 , C23C16/455
CPC分类号： H01J37/32541 , H01J37/32091
摘要： A plasma reactor (1) for treating a substrate (40), comprises at least two electrodes (20, 30) arranged within the reactor (1) defining an internal process space (13) there between, whereas the two electrodes (20, 30) are located opposed to each other and parallel with respect to a first surface (20a) of the electrodes (20, 30). Further it comprises a gas inlet (11) and a gas outlet (12) for transporting gas in and out of the plasma reactor (1), a radiofrequency generator (21) connected to at least one of the electrodes (20, 30). At least one of the electrodes (20, 30) has a corrective layer having a non planar shape along a surface (20a) facing the internal process space (13) which has in a first cross section along a radius of the electrode (20) a profile comprising three consecutive and adjacent segments, namely a first, a second and a third segment, where the third segment is adjacent to an edge of the electrode (20) and whereas medium gradient in the first segment is less than a medium gradient in the second segment and a medium gradient in the second segment is larger than a medium gradient in the third segment. An electrode (20) shaped in the above described manner provides for uniform plasma intensity along the surface of the substrate (40) and therefore provides for a treating which is homogenous and features uniform thickness. This invention further allows a compact construction of the vacuum treatment apparatus (1).
摘要翻译：一种用于处理衬底（40）的等离子体反应器（1），包括布置在所述反应器（1）内的至少两个电极（20,30），其在其间限定内部处理空间（13），而所述两个电极（20,30））相对于彼此相对并且相对于电极（20,30）的第一表面（20a）平行。此外，它包括用于输入和输出等离子体反应器（1）中的气体的气体入口（11）和气体出口（12），连接到至少一个电极（20,30）的射频发生器（21）。电极（20,30）中的至少一个具有沿着面向内部处理空间（13）的表面（20a）的非平面形状的校正层，该处理空间沿着电极（20）的半径具有第一横截面，包括三个连续且相邻的段，即第一段，第二和第三段的轮廓，其中第三段与电极（20）的边缘相邻，而第一段中的中等梯度小于中等梯度第二段中的第二段和中等梯度大于第三段中的中等梯度。以上述方式成形的电极（20）提供沿衬底（40）表面的均匀等离子体强度，因此提供均匀且具有均匀厚度的处理。本发明还允许真空处理装置（1）的紧凑结构。

7. 发明授权

US5662786A Electrochemical sensor 失效
标题翻译：电化学传感器
公开(公告)号：US5662786A
公开(公告)日：1997-09-02
申请号：US807163
申请日：1991-12-13
申请人： Karl-Hermann Friese , Helmut Weyl , Werner Wieland , Hans-Martin Wiedenmann
发明人： Karl-Hermann Friese , Helmut Weyl , Werner Wieland , Hans-Martin Wiedenmann
IPC分类号： G01N27/407 , G01N27/409
CPC分类号： G01N27/4075
摘要： The electrochemical sensor for determination of an oxygen content of exhaust gases, includes a probe element including a tube made from a raw material mixture consisting essentially of an ionically conductive solid electrolyte; an outer electrode located on the outer surface of the tube; a substantially pore-free conductor strip layer located on the outer surface, connected to the outer electrode, and extending toward the open end, the conductor strip layer having a portion in close proximity to the tube open end; and a substantially pore-free cover layer hermetically covering at least the portion of the pore-free conductor strip layer in close proximity to the open end of the tube, the cover layer being made from a cover layer material including the ionically conductive solid electrolyte. The cover layer material advantageously a sintering activity which is at least equal to that of the raw material mixture from which the tube is made. The conductor strip layer consists essentially of a ceramic supporting framework and an electron-conducting material. The ceramic ceramic binder has at least the same sintering activity as the cover layer material.
摘要翻译：用于确定废气氧含量的电化学传感器包括探针元件，其包括由基本上由离子导电固体电解质组成的原料混合物制成的管; 位于所述管的外表面上的外电极; 位于所述外表面上的基本上无孔的导体条带层，其连接到所述外电极并且朝向所述开口端延伸，所述导体带层具有紧邻所述管开口端的部分; 以及基本无孔的覆盖层，其至少密封地覆盖无孔导体带层的靠近管的开口端的部分，覆盖层由包括离子导电固体电解质的覆盖层材料制成。覆盖层材料有利地是至少等于制造管的原料混合物的烧结活性。导体带层基本上由陶瓷支撑框架和电子传导材料组成。陶瓷陶瓷粘合剂具有与覆盖层材料至少相同的烧结活性。

8. 发明授权

US4050132A Method of producing a housing for circular piston combustion engine of trochoid type 失效
标题翻译：摆线型圆柱形活塞式内燃机壳体的制造方法
公开(公告)号：US4050132A
公开(公告)日：1977-09-27
申请号：US635950
申请日：1975-11-28
申请人： Werner Wieland
发明人： Werner Wieland
IPC分类号： F02B53/00 , F02B55/08 , B23P17/00
CPC分类号： F02B55/08 , F02B2053/005 , F02B2730/018 , F02B53/00 , Y10T29/49234
摘要： A housing for circular piston combustion engines of trochoid type is produced with at least one annular shell having an inner peripheral wall in the shape of a multi-arcuate trochoid, an outer peripheral wall, and end walls parallel to each other and adjoined to the ends of the shell, end pieces parallel to each other having end walls parallel to each other and an inner and an outer peripheral wall. In the case of a multiple engine at least one end piece constitutes a middle piece between neighboring shells.
摘要翻译：制造了具有次摆线型的圆柱形活塞式内燃机的壳体，其具有至少一个环形壳体，该环形壳体具有多弧形多次摆线形状的内周壁，外周壁和彼此平行并与端部相邻的端壁壳体彼此平行的端部件具有彼此平行的端壁和内周壁和外周壁。在多重发动机的情况下，至少一个端件构成相邻壳体之间的中间件。

9. 发明授权

US5435901A Electrochemical measuring sensor 失效
标题翻译：电化学测量传感器
公开(公告)号：US5435901A
公开(公告)日：1995-07-25
申请号：US121961
申请日：1993-09-15
申请人： Karl-Hermann Friese , Helmut Weyl , Werner Wieland
发明人： Karl-Hermann Friese , Helmut Weyl , Werner Wieland
IPC分类号： G01N27/407 , G01N27/409
CPC分类号： G01N27/4078 , G01N27/407
摘要： An electrochemical measuring sensor is proposed for determining the oxygen content in exhaust gases which has a base body made of an ion-conducting solid electrolyte in the form of a tube closed at one end, an inner electrode, an outer electrode disposed on the external surface of the probe block and having a conductor track on the connection side which has a covering layer, a ceramic protective layer and a metallic sealing ring for sealing the reference space from the exhaust gas space and for making an electrical contact to the housing in which the measuring sensor is to be inserted. The electrochemical covering layer covering the conductor track is brought down on the reference side of the probe block to below the metallic sealing ring and the track is formed with uncovered lateral extensions making electrical contact with the ring. This makes it possible to significantly prolong the service life of the measuring sensor.
摘要翻译：提出一种电化学测量传感器，用于确定废气中的氧含量，其具有由一端封闭的管形式的离子导电固体电解质制成的基体，内电极，设置在外表面上的外电极并且具有在连接侧上的具有覆盖层的导体轨道，陶瓷保护层和金属密封环，用于将参考空间与废气空间密封并用于与壳体电接触，其中，测量传感器将被插入。覆盖导体轨道的电化学覆盖层在探针块的参考侧下降到金属密封环的下方，并且轨道形成有与环形成电接触的未覆盖的侧向延伸部。这样可以显着延长测量传感器的使用寿命。

10. 发明授权

US3942917A Housing for circular piston combustion engine of trochoid type and method of producing the same 失效
标题翻译：摆线式圆柱形活塞燃烧发动机的壳体及其制造方法
公开(公告)号：US3942917A
公开(公告)日：1976-03-09
申请号：US427417
申请日：1973-12-21
申请人： Werner Wieland
发明人： Werner Wieland
IPC分类号： F01C21/10 , F02B53/00 , F02B55/08 , F02B55/10 , F01C21/06
CPC分类号： F02B55/08 , F02B2053/005 , F02B2730/018 , F02B53/00
摘要： A housing for circular piston combustion engines of trochoid type is produced with at least one annular shell having an inner peripheral wall in the shape of a multi-arcuate trochoid, an outer peripheral wall, and end walls parallel to each other and adjoined to the ends of the shell, end pieces parallel to each other having end walls parallel to each other and an inner and an outer peripheral wall. In the case of a multiple engine at least one end piece constitutes a middle piece between neighboring shells.
摘要翻译：制造了具有次摆线型的圆柱形活塞式内燃机的壳体，其具有至少一个环形壳体，该环形壳体具有多弧形多次摆线形状的内周壁，外周壁和彼此平行并与端部相邻的端壁壳体彼此平行的端部件具有彼此平行的端壁和内周壁和外周壁。在多重发动机的情况下，至少一个端件构成相邻壳体之间的中间件。

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