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1. 发明授权

US09209096B2 Photoluminescence measurement 有权
标题翻译：光致发光测量
公开(公告)号：US09209096B2
公开(公告)日：2015-12-08
申请号：US13195163
申请日：2011-08-01
申请人： Arnold Allenic , Douglas Bacon , Benyamin Buller , John Christiansen , Erel Milshtein , Avner Regev , Igor Sankin
发明人： Arnold Allenic , Douglas Bacon , Benyamin Buller , John Christiansen , Erel Milshtein , Avner Regev , Igor Sankin
IPC分类号： G01J1/58 , H01L21/66 , G01N21/64 , G01N21/95 , G01N21/84
CPC分类号： H01L22/12 , G01N21/6489 , G01N21/9501 , G01N2021/6419 , G01N2021/6421 , G01N2021/646 , G01N2021/8411 , G01N2021/845
摘要： A photoluminescence measurement system can include an optical source.
摘要翻译：光致发光测量系统可以包括光源。

2. 发明申请

US20120025100A1 PHOTOLUMINESCENCE MEASUREMENT 有权
标题翻译：光致发光测量
公开(公告)号：US20120025100A1
公开(公告)日：2012-02-02
申请号：US13195163
申请日：2011-08-01
申请人： Arnold Allenic , Douglas Bacon , Benyamin Buller , John Christiansen , Erel Milshtein , Avner Regev , Igor Sankin
发明人： Arnold Allenic , Douglas Bacon , Benyamin Buller , John Christiansen , Erel Milshtein , Avner Regev , Igor Sankin
IPC分类号： G01J1/58
CPC分类号： H01L22/12 , G01N21/6489 , G01N21/9501 , G01N2021/6419 , G01N2021/6421 , G01N2021/646 , G01N2021/8411 , G01N2021/845
摘要： A photoluminescence measurement system can include an optical source.
摘要翻译：光致发光测量系统可以包括光源。

3. 发明授权

US06257564B1 Vacuum chuck having vacuum-nipples wafer support 失效
标题翻译：真空吸盘具有真空接头晶片支架
公开(公告)号：US06257564B1
公开(公告)日：2001-07-10
申请号：US09079196
申请日：1998-05-15
申请人： Israel Avneri , Eyal Duzi , Dvir Keren , Avner Regev
发明人： Israel Avneri , Eyal Duzi , Dvir Keren , Avner Regev
IPC分类号： B25B1100
CPC分类号： H01L21/6875 , B25B11/005 , G03F7/707 , H01L21/6838
摘要： A vacuum chuck is disclosed which has nipples as support structure and for vacuum delivery. In the preferred embodiment, two types of nipples are used: “plain” nipples which provide only support and vacuum nipples which provide support and deliver vacuum to retain the wafer on the chuck. The contact surface of the plain nipples is made smaller than that of the vacuum nipples. The chuck is secured to a stage using special supports which have limited flexibility in two axis with respect to the chuck, so as to prevent warping the chuck. Special vacuum nipples are disclosed which do not deliver vacuum unless the wafer exerts sufficient predetermined pressure on the nipple. The chuck is designed to hold both 200 mm and 300 mm wafers.
摘要翻译：公开了一种真空吸盘，其具有作为支撑结构和用于真空输送的接头。在优选实施例中，使用两种类型的接头：“普通”接头，其仅提供支撑和真空接头，其提供支撑并提供真空以将晶片保持在卡盘上。使平头接头的接触表面比真空接头的接触表面小。使用在两个轴线上相对于卡盘具有有限柔性的特殊支撑件将卡盘固定到台架上，以防止卡盘翘曲。公开了不提供真空的特殊的真空接头，除非晶片在乳头上施加足够的预定压力。卡盘设计用于保持200 mm和300 mm的晶圆。

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