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1. 发明申请

US20090207511A1 ASSEMBLY FOR ADJUSTING AN OPTICAL ELEMENT 审中-公开
标题翻译：用于调整光学元件的组件
公开(公告)号：US20090207511A1
公开(公告)日：2009-08-20
申请号：US11914055
申请日：2006-05-09
申请人： Armin Schoeppach , Manfred Steinbach , Thomas Schletterer , Ernesto Lopez-Real
发明人： Armin Schoeppach , Manfred Steinbach , Thomas Schletterer , Ernesto Lopez-Real
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G02B7/005 , G02B7/023 , G03F7/70258
摘要： An assembly for fixation or adjusting of an optical element (1) with, regard to an outer mount or support (4) wherein the optical element (1) is alignable with regard to a structure of the optical arrangement, particularly the objective structure or the objective barrel, having an optical axis or with regard to neighbouring mounts by means of an adjusting arrangement, is characterized in that the adjusting arrangement comprises at least an elastic means (9), particularly a spring, an elastic rod or stick, an elastic tape or an elastic gear wheel or an elastic gear box by which a force or a torque is applicable to the optical element (1). The assembly is particularly suitable for use in a microlithographic exposure apparatus. In some embodiments an intermediate ring (27) positioned between the optical element (24) and the outer mount or support (26) is used to reduce deformations.
摘要翻译：一种用于相对于外部安装件或支撑件（4）固定或调节光学元件（1）的组件，其中光学元件（1）可相对于光学装置的结构，特别是物镜结构或具有光轴或通过调节装置相对于相邻安装件的物镜筒的特征在于，所述调节装置至少包括弹性装置（9），特别是弹簧，弹性杆或杆，弹性带或弹性齿轮或弹性齿轮箱，通过该弹性齿轮箱，力或转矩适用于光学元件（1）。该组件特别适用于微光刻曝光设备。在一些实施例中，位于光学元件（24）和外部安装件或支撑件（26）之间的中间环（27）用于减小变形。

2. 发明申请

US20100128367A1 PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD 审中-公开
标题翻译：一种微电脑设备和方法的投影目标
公开(公告)号：US20100128367A1
公开(公告)日：2010-05-27
申请号：US12403526
申请日：2009-03-13
申请人： Mariella Beckenbach , Klaus Rief , Andreas Bertele , Benjamin Sigel , Sascha Bleidistel , Wolfgang Hummel , Andreas Frommeyer , Toralf Gruner , Jochen Schwaer , Baerbel Schwaer , Thomas Schletterer , Artur Hoegele , Armin Schoeppach
发明人： Mariella Beckenbach , Klaus Rief , Andreas Bertele , Benjamin Sigel , Sascha Bleidistel , Wolfgang Hummel , Andreas Frommeyer , Toralf Gruner , Jochen Schwaer , Baerbel Schwaer , Thomas Schletterer , Artur Hoegele , Armin Schoeppach
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G02B7/023 , G02B13/14 , G02B27/0068 , G03F7/70058 , G03F7/70266
摘要： A projection objective for a microlithography apparatus with improved imaging properties is provided. A manipulator for a projection objective is provided. A microlithography apparatus including a projection objective of this type and/or a manipulator of this type is provided. A method for improving the imaging properties of a projection objective is provided.
摘要翻译：提供了具有改善的成像特性的微光刻设备的投影物镜。提供了一种用于投影物镜的操纵器。提供包括这种类型的投影物镜和/或这种类型的操纵器的微光刻设备。提供了一种用于改善投影物镜的成像特性的方法。

3. 发明授权

US07636209B2 Precision mechanical-optical system and method for producing a composite from optical elements held individually in mounts 失效
标题翻译：精密机械光学系统以及分别安装在安装座上的光学元件制造复合材料的方法
公开(公告)号：US07636209B2
公开(公告)日：2009-12-22
申请号：US12143176
申请日：2008-06-20
申请人： Thomas Schletterer , Andre Hillner , Manfred Steinbach
发明人： Thomas Schletterer , Andre Hillner , Manfred Steinbach
IPC分类号： G02B7/02
CPC分类号： G02B7/021 , G02B7/023
摘要： In a precision mechanical-optical system, there is the problem of guaranteeing, for the production of a composite made from a plurality of mounted optical lenses, the mutual alignment of the optical axes during assembly and high strength of the composite after assembly with low expense in terms of equipment. Flanges are formed on the mounts for the optical elements, these flanges projecting outward in the radial direction and for adjacent mounts, abutting each other with facing joint surfaces, and are clamped by threaded connections tightening in the axial direction between paired, opposing bending elements.
摘要翻译：在精密机械光学系统中，存在的问题是，为了生产由多个安装的光学透镜制成的复合材料，组装期间光轴的相互对准和组装后的复合材料的高强度具有低成本在设备方面。在用于光学元件的安装件上形成有法兰，这些凸缘在径向方向上向外突出并且用于相邻的安装件，彼此邻接并具有面对的接合表面，并且通过在成对的相对的弯曲元件之间沿轴向方向紧固的螺纹连接来夹紧。

4. 发明申请

US20090002854A1 PRECISION MECHANICAL-OPTICAL SYSTEM AND METHOD FOR PRODUCING A COMPOSITE FROM OPTICAL ELEMENTS HELD INDIVIDUALLY IN MOUNTS 失效
标题翻译：精密机械光学系统及其制造方法，用于生产从单元中单独投射的光学元件的复合材料
公开(公告)号：US20090002854A1
公开(公告)日：2009-01-01
申请号：US12143176
申请日：2008-06-20
申请人： Thomas Schletterer , Andre Hillner , Manfred Steinbach
发明人： Thomas Schletterer , Andre Hillner , Manfred Steinbach
IPC分类号： G02B7/02
CPC分类号： G02B7/021 , G02B7/023
摘要： In a precision mechanical-optical system, there is the problem of guaranteeing, for the production of a composite made from a plurality of mounted optical lenses, the mutual alignment of the optical axes during assembly and high strength of the composite after assembly with low expense in terms of equipment. Flanges are formed on the mounts for the optical elements, these flanges projecting outward in the radial direction and for adjacent mounts, abutting each other with facing joint surfaces, and are clamped by threaded connections tightening in the axial direction between paired, opposing bending elements.
摘要翻译：在精密机械光学系统中，存在的问题是，为了生产由多个安装的光学透镜制成的复合材料，组装期间光轴的相互对准和组装后的复合材料的高强度具有低成本在设备方面。在用于光学元件的安装件上形成有法兰，这些凸缘在径向方向上向外突出并且用于相邻的安装件，彼此邻接并具有面对的接合表面，并且通过在成对的相对的弯曲元件之间沿轴向方向紧固的螺纹连接来夹紧。

5. 发明授权

US08488261B2 Replacement apparatus for an optical element 有权
公开(公告)号：US08488261B2
公开(公告)日：2013-07-16
申请号：US13170951
申请日：2011-06-28
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.

6. 发明申请

US20100073786A1 Optical Mounting and Optical Component Comprising Said Type of Optical Mounting 失效
标题翻译：光学安装和光学组件包括所述类型的光学安装
公开(公告)号：US20100073786A1
公开(公告)日：2010-03-25
申请号：US12532016
申请日：2008-03-19
申请人： Marco Bornschein , Thomas Schletterer
发明人： Marco Bornschein , Thomas Schletterer
IPC分类号： G02B7/04
CPC分类号： G02B7/008 , G02B7/005 , G02B7/023 , G03F7/70825
摘要： The invention relates to an optical mounting comprising a stationary outer mounting and an inner mounting part embodied to receive an optical element. The aim of the invention is to enlarge the adjustment path in the direction of the optical axis of the optical element that is to be mounted, and as a result, obtaining high stability and rigidity that is perpendicular to the optical axis. Also, the invention aims at keeping the space requirements and the manufacturing and mounting costs as low as possible.
摘要翻译：本发明涉及一种光学安装件，其包括固定的外部安装件和实现为接收光学元件的内部安装部件。本发明的目的是扩大在要安装的光学元件的光轴的方向上的调节路径，从而获得垂直于光轴的高稳定性和刚度。此外，本发明的目的在于保持空间要求和制造和安装成本尽可能低。

7. 发明授权

US07085080B2 Low-deformation support device of an optical element 失效
标题翻译：光学元件的低变形支撑装置
公开(公告)号：US07085080B2
公开(公告)日：2006-08-01
申请号：US11004692
申请日：2004-12-03
申请人： Dirk Schaffer , Andreas Wurmbrand , Thomas Schletterer
发明人： Dirk Schaffer , Andreas Wurmbrand , Thomas Schletterer
IPC分类号： G02B7/02
CPC分类号： G03F7/70825
摘要： In a low-deformation support device of an optical element (8, 24), in particular an end plate (14) of a projection objective (7) of a projection exposure machine (3) for microlithography for the purpose of producing semiconductor components, in a mount (13), the optical element (8, 14) is connected to the mount (13) at least partly via a bonded connection. The bonded connection is located between the adjacent circumferential wails of mount (13) and optical element (14). The mount (13) is provided with at least three bearing elements (20) which are distributed over the circumference and by means of which the optical element (8, 14) is laterally and axially supported. The mount (13) has spring elements (15) which are constructed monolithically with the bearing elements (20) and are soft in axial and radial directions.
摘要翻译：在用于制造半导体部件的光学元件（8,24）的低变形支撑装置中，特别是用于微光刻的投影曝光机（3）的投影物镜（7）的端板（14）在安装件（13）中，光学元件（8,14）至少部分地通过粘合连接件连接到安装件（13）。接合连接位于安装件（13）和光学元件（14）的相邻周向部分之间。安装件（13）设置有至少三个轴承元件（20），其分布在圆周上并且光学元件（8,14）被横向和轴向支撑。安装件（13）具有与轴承元件（20）整体构造并且在轴向和径向方向上柔软的弹簧元件（15）。

8. 发明申请

US20050128607A1 Low-deformation support device of an optical element 失效
标题翻译：光学元件的低变形支撑装置
公开(公告)号：US20050128607A1
公开(公告)日：2005-06-16
申请号：US11004692
申请日：2004-12-03
申请人： Dirk Schaffer , Andreas Wurmbrand , Thomas Schletterer
发明人： Dirk Schaffer , Andreas Wurmbrand , Thomas Schletterer
IPC分类号： G03F7/20 , G02B7/02
CPC分类号： G03F7/70825
摘要： In a low-deformation support device of an optical element (8, 14), in particular an end plate (14) of a projection objective (7) of a projection exposure machine (3) for microlithography for the purpose of producing semiconductor components, in a mount (13), the optical element (8, 14) is connected to the mount (13) at least partly via a bonded connection. The bonded connection is located between the adjacent circumferential walls of mount (13) and optical element (14). The mount (13) is provided with at least three bearing elements (20) which are distributed over the circumference and by means of which the optical element (8, 14) is laterally and axially supported. The mount (13) has spring elements (15) which are constructed monolithically with the bearing elements (20) and are soft in axial and radial directions.
摘要翻译：在用于制造半导体部件的光学元件（8,14）的低变形支撑装置中，特别是用于微光刻的投影曝光机（3）的投影物镜（7）的端板（14）在安装件（13）中，光学元件（8,14）至少部分地通过粘合连接件连接到安装件（13）。粘合连接位于安装件（13）和光学元件（14）的相邻周壁之间。安装件（13）设置有至少三个轴承元件（20），其分布在圆周上并且光学元件（8,14）被横向和轴向支撑。安装件（13）具有与轴承元件（20）整体构造并且在轴向和径向方向上柔软的弹簧元件（15）。

9. 发明授权

US07529046B2 Optical element 有权
标题翻译：光学元件
公开(公告)号：US07529046B2
公开(公告)日：2009-05-05
申请号：US11578364
申请日：2005-04-13
申请人： Thomas Schletterer , Franz Sorg
发明人： Thomas Schletterer , Franz Sorg
IPC分类号： G02B7/02
CPC分类号： G02B7/022 , G02B7/023 , G03F7/70825
摘要： There is provided an optical element. The optical element includes an element body having an optically effective region that has an optical axis and a peripheral region extending in a circumferential direction of the element body, a holding region disposed in the peripheral region, and a contact region in the holding region. The holding region co-operates with a holding device to hold the element body. The contact region is configured with a first contact surface and a second contact surface that are (a) spaced apart from one another in a direction of the optical axis, (b) both inclined with respect to the optical axis; and (c) not parallel to one another.
摘要翻译：提供了一种光学元件。光学元件包括具有光学有效区域的元件体，该光学有效区域具有沿着元件体的圆周方向延伸的光轴和周边区域，设置在周边区域中的保持区域和保持区域中的接触区域。保持区域与保持装置配合以保持元件主体。所述接触区域被构造为具有第一接触表面和第二接触表面，所述第一接触表面和第二接触表面（a）在所述光轴的方向上彼此间隔开，（b）相对于所述光轴倾斜; 和（c）彼此不平行。

10. 发明申请

US20080130145A1 Closing module for an optical arrangement 审中-公开
标题翻译：光学装置封闭模块
公开(公告)号：US20080130145A1
公开(公告)日：2008-06-05
申请号：US11983115
申请日：2007-11-07
申请人： Thomas Schletterer
发明人： Thomas Schletterer
IPC分类号： G02B7/02
CPC分类号： G03F7/70933 , G02B7/023 , G02B27/0006 , G03B27/52 , G03F7/70341 , G03F7/70808 , G03F7/70833
摘要： Closing module for an optical arrangement, in particular for an objective for microlithography, comprising an optically active closing element having a first axis and a holding device that fixes the closing element at least in the direction of the first axis, the holding device being configured for radial clamping of the closing element.
摘要翻译：用于光学装置的闭合模块，特别是用于微光刻的目的，包括具有第一轴线的光学活动闭合元件和至少沿着第一轴线的方向固定闭合元件的保持装置，所述保持装置被配置用于关闭元件的径向夹紧。

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