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    • 1. 发明申请
    • Method and system for defect evaluation using quiescent power plane current (IDDQ) voltage linearity
    • 使用静态功率平面电流(IDDQ)电压线性度进行缺陷评估的方法和系统
    • US20050125711A1
    • 2005-06-09
    • US10728172
    • 2003-12-03
    • Anne GattikerPhillip Nigh
    • Anne GattikerPhillip Nigh
    • G01R31/30G06F11/00
    • G01R31/3008
    • A method and system for defect evaluation using IDDQ voltage linearity provides improved IDDQ testing for determining whether manufacturing defects in a VLSI device are likely to cause functional faults. IDDQ data is collected at multiple power plane voltages (VDDs) for a test vector at which a fault is activated. The IDDQ vs. VDD is then examined and a range of VDDs over which the characteristic IDDQs are non-linear with respect to VDD is determined. Peaks in the first derivative of the IDDQ vs. VDD curve indicate a particular VDD at which the onset of non-linearity in the IDDQ occurs. The VDD point below which the curve is non-linear indicates the relative resistance of a fault with respect to the driving point resistance of the node at which the fault is located. The relative resistance is directly determinative of additional circuit delay cause by the fault and/or whether the fault will cause a logic level transmission failure. Therefore, the range of VDDs for which the IDDQ curve is linear provides a pass/fail indication that can be used to reject devices in manufacturing test.
    • 使用IDDQ电压线性度进行缺陷评估的方法和系统提供改进的IDDQ测试,用于确定VLSI设备中的制造缺陷是否可能导致功能故障。 IDDQ数据在多个电源平面电压(VDD)下收集,用于启动故障的测试矢量。 然后检查IDDQ与VDD,并确定特性IDDQ相对于VDD是非线性的VDD范围。 IDDQ与VDD曲线的一阶导数中的峰值表示IDDQ中发生非线性发生的特定VDD。 曲线非线性以下的VDD点表示故障相对于故障位置的节点的驱动点电阻的相对电阻。 相对电阻直接决定了故障引起的附加电路延迟和/或故障是否会导致逻辑电平传输故障。 因此,IDDQ曲线为线性的VDD的范围提供了可用于在制造测试中拒绝器件的通过/失败指示。
    • 4. 发明申请
    • Method and system for analyzing quiescent power plane current (IDDQ) test data in very-large scale integrated (VLSI) circuits
    • US20050090996A1
    • 2005-04-28
    • US10695554
    • 2003-10-28
    • Anne Gattiker
    • Anne Gattiker
    • G01R19/00G01R31/30
    • G01R31/3008
    • A method and system for analyzing quiescent power plane current test data in a very large scale integrated (VLSI) circuit provides diagnostic information and improved IDDQ testing for analyzing and detecting manufacturing defects in a VLSI device. A set of IDDQ test values is collected over a set of test vectors for a group of devices. Values that are detected as corresponding to activated defects (e.g., shorts) are discarded from the data set and the data set is checked for correlation between the remaining ostensibly defect-free data values and devices (or alternatively vectors) that do not correlate are discarded from the data set. Then, a regression is generated for each vector from and IDDQ values for each vector and the IDDQ values at a selected reference vector (excepting the reference vector). Next, the IDDQ values at each vector for each device are normalized by estimating an expected IDDQ value for that vector and device from the regression for the vector and the device's measured reference vector IDDQ value. A cross-correlation check is performed to determine whether the set of measurements represents a good set of ostensibly defect-free measurements. New values that are detected as corresponding to an activated defect are discarded and previously discarded values are potentially reclaimed. The above regression, normalization and discard procedure is repeated until the set of non-defect activated vectors is stable and the IDDQ measurements can be categorized into discrete categories. The categorized IDDQ values may be used for identifying and potentially diagnosing defective devices and/or acceptability of devices can be determined from the normalized IDDQ values.