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    • 6. 发明授权
    • Process and plant for the production of a gaseous mixture containing a carrier gas an oxidizing gas and a silane
    • 用于生产含有载气的氧化性气体和硅烷的气态混合物的方法和装置
    • US06177134B1
    • 2001-01-23
    • US09007333
    • 1998-01-15
    • Alain VillermetFrançois CoeuretPanayotis CocoliosMichel Inizan
    • Alain VillermetFrançois CoeuretPanayotis CocoliosMichel Inizan
    • C23C1600
    • C23C16/45512B01F3/026C23C16/402C23C16/45561
    • Process for the production of a final gaseous mixture comprising a carrier gas, an oxidizing gas and a silane, with a predetermined content of each of the three gaseous components, comprising the steps of: a) preparing a primary gaseous mixture comprising a neutral gas and the silane, wherein the silane is present in the primary gaseous mixture at a content below a self-ignition limit of that particular silane in air; b) providing a first gas stream, comprising the carrier gas and a controlled residual content of the oxidizing gas; c) preparing the final mixture according to one or other of the following two procedures, as a function of the residual content of oxidizing gas in the gas stream comprising the carrier gas: P1: mixing the first gas stream with a second stream of the primary gaseous mixture and with a third stream of the oxidizing gas in proportions which make it possible to obtain the final mixture, the addition of the oxidizing gas stream being carried out under dynamic conditions; P2: mixing the first gas stream with a second stream of the primary gaseous mixture, in proportions which make it possible to obtain the final mixture, the addition of the primary mixture stream being carried out under dynamic conditions.
    • 用于生产包含三种气体组分中的每一种的预定含量的载体气体,氧化气体和硅烷的最终气体混合物的方法包括以下步骤:a)制备包含中性气体和 硅烷,其中硅烷以低于特定硅烷在空气中的自燃极限的含量存在于初级气体混合物中; b)提供第一气流,其包含载气和受控的氧化气体残留量 ; c)根据以下两种方法中的一种或其它方法制备最终混合物,作为包含载气的气流中的氧化气体的残留含量的函数:P1:将第一气流与第二气流混合 初级气体混合物和第三条氧化气体的比例使得可以获得最终的混合物,在动态条件下加入氧化气体流 离子; P2:将第一气流与主要气体混合物的第二流混合,使得可以获得最终混合物的比例,在动态条件下进行初级混合物流的添加。