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1. 发明申请

US20070059760A1 Multi-featured arrays with reflective coating 审中-公开
标题翻译：具有反光涂层的多功能阵列
公开(公告)号：US20070059760A1
公开(公告)日：2007-03-15
申请号：US11599523
申请日：2006-11-13
申请人： Andreas Dorsel , David King , Nicholas Sampas
发明人： Andreas Dorsel , David King , Nicholas Sampas
IPC分类号： C12Q1/68 , C12M1/34
CPC分类号： G01N21/6452 , G01N21/6428
摘要： A method and apparatus of interrogating an addressable array unit, which includes a substrate, a light reflecting layer on a front side of the substrate, and a plurality of features on a front side of the array. The method may include, for each of multiple features, illuminating the feature simultaneously with reflected and non-reflected interrogating light. A light emitted from respective features is detected. Either or both, constructive interference of interrogating light at the features, or constructive interference of light emitted from the features, can be obtained to allow lowering of light power from the source, enhanced signal, or reduced noise, or combinations of the foregoing. High depth discrimination may also be obtained without the need for a confocal detection system with conventional pinhole.
摘要翻译：一种询问可寻址阵列单元的方法和装置，其包括基板，在基板的前侧上的光反射层，以及阵列的前侧上的多个特征。对于多个特征中的每一个，该方法可以包括与反射和未反射的询问光同时照亮特征。检测从各个特征发射的光。可以获得在特征中询问光的建构性干扰或从特征发射的光的建构性干扰，以允许降低源的光功率，增强的信号或降低的噪声或前述的组合。也可以获得高深度鉴别，而不需要具有常规针孔的共焦检测系统。

2. 发明授权

US5585639A Optical scanning apparatus 失效
标题翻译：光学扫描装置
公开(公告)号：US5585639A
公开(公告)日：1996-12-17
申请号：US508021
申请日：1995-07-27
申请人： Andreas Dorsel , Nicholas Sampas
发明人： Andreas Dorsel , Nicholas Sampas
IPC分类号： G01N21/64
CPC分类号： G01N21/6452 , B01J2219/00707
摘要： An optical scanning apparatus for scanning an array of sample regions carried on the surface of a substrate is disclosed. The apparatus includes a beam generator for generating a light beam effective to produce detectable light from such sample regions, and scanning optics for scanning the beam in one direction corresponding to a linear array of such sample regions. Light emitted from the linear array is imaged through an imaging system whose optical axis is angularly offset from the optical axis of the illumination beam, onto a photodetector. The optical configuration achieves high performance with relatively simple optics.
摘要翻译：公开了一种用于扫描载体在衬底表面上的样品区域阵列的光学扫描装置。该装置包括用于产生有效产生来自这些样品区域的可检测光的光束的光束发生器，以及扫描光学元件，用于沿对应于这种样品区域的线性阵列的一个方向扫描光束。从线性阵列发射的光通过成像系统成像，该成像系统的光轴与照明光束的光轴成角度地偏移到光电检测器上。光学配置通过相对简单的光学器件实现高性能。

3. 发明申请

US20060177116A1 Method of extracting locations of nucleic acid array features 失效
公开(公告)号：US20060177116A1
公开(公告)日：2006-08-10
申请号：US11375658
申请日：2006-03-13
申请人： Herbert Cattell , Andreas Dorsel , John Sadler , Nicholas Sampas
发明人： Herbert Cattell , Andreas Dorsel , John Sadler , Nicholas Sampas
IPC分类号： C12Q1/68 , G06K9/00
CPC分类号： G06K9/3216 , B01J2219/00378 , B01J2219/00608 , B01J2219/00612 , B01J2219/00659 , B01J2219/00693 , B01J2219/00704 , B01J2219/00722 , B01J2219/00725 , C12Q1/6837 , G06F19/20 , G06F19/24 , G06T7/73 , G06T2207/30072
摘要： Methods for correcting systematic errors in the measured position of deposited features of a nucleic acid array on a substrate. Systematic errors are modeled by an algorithmic model based on measuring the positions (and possibly other properties) of a subset of the features, and a model is constructed for predicting deviations in feature position from an ideal grid. Deviations arising in the deposition process, the scanning process, or both may be corrected.

4. 发明授权

US07719658B2 Imaging system for a microlithographical projection light system 有权
标题翻译：微光刻投影系统成像系统
公开(公告)号：US07719658B2
公开(公告)日：2010-05-18
申请号：US10597776
申请日：2005-01-13
申请人： Andreas Dorsel , Toralf Gruner , Bernhard Kneer , Susanne Beder , Alexander Epple , Norbert Wabra
发明人： Andreas Dorsel , Toralf Gruner , Bernhard Kneer , Susanne Beder , Alexander Epple , Norbert Wabra
IPC分类号： G03B27/52 , G03B27/42 , G03B27/54 , G03B27/32
CPC分类号： G03F7/70225 , G03F7/70241 , G03F7/70341 , G03F7/70958 , G03F7/70966
摘要： Imaging system of a microlithographic projection exposure apparatus, with a projection objective (200, 300, 500, 600) that serves to project an image of a mask which can be set into position in an object plane onto a light-sensitive coating layer which can be set into position in an image plane, and with a liquid-delivery device (205) serving to fill immersion liquid (202, 310, 507) into an interstitial space between the image plane and a last optical element (201, 309, 506) on the image-plane side of the projection objective; wherein the last optical element on the image-plane side of the projection objective is arranged so that, seen in the direction of gravity, it follows the image plane; and wherein the projection objective is configured in such a way that when the system is operating with immersion, the immersion liquid has at least in some areas a convex-curved surface facing in the direction away from the image plane. It is also proposed for the last optical element (201, 309, 506) on the image-plane side of the projection objective to be arranged below the image plane in such a way that the immersion liquid (202, 310, 507, 601) is held at least in part in a substantially tub-shaped area on the last optical element on the image-plane side. Also, a rotator can be provided which serves to rotate a substrate carrying the light-sensitive coating (401) between a transport orientation in which the light-sensitive coating lies on a substrate surface that faces against the direction of gravity and an exposure orientation in which the light-sensitive coating (401) lies on a substrate surface that faces in the direction of gravity.
摘要翻译：一种具有投影物镜（200,300,500,600）的投影物镜（200,300,500,600）的成像系统，该投影物镜用于投影能够将物镜平面中的位置的掩模图像投影到感光涂层上，该光敏涂层可以被设置在图像平面中的位置，并且具有用于将浸没液体（202,310,507a）填充到图像平面和最后光学元件（201,309,506）之间的间隙空间中的液体输送装置（205））在投影物镜的像平面侧; 其特征在于，所述投影物镜的像面侧的最后一个光学元件被布置为使得从重力方向看，所述光学元件遵循所述图像平面; 并且其中所述投影物镜被配置成使得当所述系统在浸没时操作时，所述浸没液体至少在一些区域中具有面向远离所述图像平面的方向的凸曲面。还提出将投影物镜的像面侧上的最后一个光学元件（201,309,506）布置在图像平面下方，使浸液（202,310,507,601）至少部分地保持在图像平面侧的最后一个光学元件上的基本上为盆形的区域中。此外，可以提供一种旋转器，其用于使承载感光涂层（401）的基板在其中感光涂层位于与重力方向相对的基板表面上的传送方向和曝光方向之间旋转，感光涂层（401）位于面向重力方向的基板表面上。

5. 发明申请

US20050110993A1 Simultaneously reading different regions of a chemical array 失效
标题翻译：同时读取化学阵列的不同区域
公开(公告)号：US20050110993A1
公开(公告)日：2005-05-26
申请号：US10954160
申请日：2004-09-28
申请人： Andreas Dorsel
发明人： Andreas Dorsel
IPC分类号： G01N21/25 , G01N21/64
CPC分类号： G01N21/6452 , G01N2021/6419 , G01N2021/6421 , G01N2021/6441
摘要： A method of interrogating an addressable array having a plurality of different chemical features. The method may include simultaneously illuminating different regions of the array with light of different intensities (which, for example, can, but need not be, also of a same waveband). Light emitted from the different regions in response to the illuminating (which light, for example, can, but need not be, of a same waveband) may be simultaneously detected with different detectors. An apparatus, addressable array unit, and related methods are further provided.
摘要翻译：一种询问具有多个不同化学特征的可寻址阵列的方法。该方法可以包括用不同强度的光（其例如可以但不必须是相同波段）同时照射阵列的不同区域。可以同时用不同的检测器同时检测从不同区域发射的光（例如，哪个光，但不一定是相同的波段）。还提供了一种装置，可寻址阵列单元和相关方法。

6. 发明授权

US5185643A Arrangement for operating a laser diode 失效
标题翻译：用于操作激光二极管的布置
公开(公告)号：US5185643A
公开(公告)日：1993-02-09
申请号：US804060
申请日：1991-12-09
申请人： Uwe Vry , Andreas Dorsel , Berthold Schierle , Martin Blumentritt , Peter Greve
发明人： Uwe Vry , Andreas Dorsel , Berthold Schierle , Martin Blumentritt , Peter Greve
IPC分类号： H01S5/0683 , H01S5/0687
CPC分类号： H01S5/0687 , H01S5/02415 , H01S5/0612 , H01S5/06837
摘要： The invention is directed to an arrangement for operating a laser diode. A two-stage stabilization circuit is provided for stabilizing the wavelength of a laser diode to exactly defined values for its use in distance measuring interferometers. In addition to presetting the operating parameters of current and temperature of the laser diode, the emitted wavelength of the laser diode is controlled to a predetermined transmission maximum of a Fabry-Perot interferometer. At switch-on, a control program can be called up and compute new values for the operating parameters premised on the last measured values of the operating parameters and initially determined and stored coefficients. In this way, the program always reliably sets the wavelength of the laser diode to the same transmission maximum.
摘要翻译：本发明涉及一种用于操作激光二极管的装置。提供了一个两级稳定电路，用于将激光二极管的波长稳定在精确定义的值上，用于测距干涉仪。除了预设激光二极管的电流和温度的操作参数之外，激光二极管的发射波长被控制到法布里 - 珀罗干涉仪的预定透射最大值。在接通时，可以调用控制程序，并计算操作参数的新值，其基于操作参数的最后测量值和初始确定和存储的系数。以这种方式，程序总是可靠地将激光二极管的波长设置为相同的传输最大值。

7. 发明授权

US5042041A Radiation source for partially coherent radiation 失效
标题翻译：部分相干辐射的辐射源
公开(公告)号：US5042041A
公开(公告)日：1991-08-20
申请号：US593894
申请日：1990-10-05
申请人： Uwe Vry , Klaus Freischlad , Michael Kuchel , Andreas Dorsel
发明人： Uwe Vry , Klaus Freischlad , Michael Kuchel , Andreas Dorsel
IPC分类号： H01S5/06 , H01S5/042 , H01S5/062 , H01S5/40
CPC分类号： H01S5/0622 , H01S5/06213 , H01S5/4025 , H01S5/0427 , H01S5/0652
摘要： The injection current for a laser diode is modulated so that a pregiven coherence function is obtained which drops off continuously at both ends outside of the coherence length. Several laser diodes are used for a very short coherence length for which the modulated wave numbers of the emitted radiation follow one another or overlap.
摘要翻译：对激光二极管的注入电流进行调制，从而获得在相干长度以外的两端连续下降的预先相干函数。几个激光二极管用于非常短的相干长度，其中发射的辐射的调制波数彼此相邻或重叠。

8. 发明申请

US20070285637A1 Imaging System for a Microlithographical Projection Light System 有权
标题翻译：微光刻投影光系统成像系统
公开(公告)号：US20070285637A1
公开(公告)日：2007-12-13
申请号：US10597776
申请日：2005-01-13
申请人： Andreas Dorsel , Toralf Gruner , Bernhard Kneer , Susanne Beder , Alexander Epple , Norbert Wabra
发明人： Andreas Dorsel , Toralf Gruner , Bernhard Kneer , Susanne Beder , Alexander Epple , Norbert Wabra
IPC分类号： G03B27/42
CPC分类号： G03F7/70225 , G03F7/70241 , G03F7/70341 , G03F7/70958 , G03F7/70966
摘要： Imaging system of a microlithographic projection exposure apparatus with a projection objective (200, 300, 500, 600) that serves to project an image of a mask which can be set into position in an object plane onto a light-sensitive coating layer which can be set into position in an image plane, and with a liquid-delivery device (205) serving to fill immersion liquid (202, 310, 507) into an interstitial space between the image plane and a last optical element (201, 309, 506) on the image-plane side of the projection objective; wherein the last optical element on the image-plane side of the projection objective is arranged so that, seen in the direction of gravity, it follows the image plane; and wherein the projection objective is configured in such a way that when the system is operating with immersion, the immersion liquid has at least in some areas a convex-curved surface facing in the direction away from the image plane. It is also proposed for the last optical element (201, 309, 506) on the image-plane side of the projection objective to be arranged below the image plane in such a way that the immersion liquid (202, 310, 507, 601) is held at least in part in a substantially tub-shaped area on the last optical element on the image-plane side. Also, a rotator can be provided which serves to rotate a substrate carrying the light-sensitive coating (401) between a transport orientation in which the light-sensitive coating lies on a substrate surface that faces against the direction of gravity and an exposure orientation in which the light-sensitive coating (401) lies on a substrate surface that faces in the direction of gravity.
摘要翻译：具有投影物镜（200,300,500,600）的微光刻投影曝光装置的成像系统，其用于投射能够被设置在物平面内的掩模的图像到感光涂层上，该感光涂层可以是设置在图像平面中的位置，以及用于将浸没液体（202,310,507）填充到图像平面和最后光学元件（201,309,506）之间的间隙空间中的液体输送装置（205）在投影物镜的像平面侧; 其特征在于，所述投影物镜的像面侧的最后一个光学元件被布置为使得从重力方向看，所述光学元件遵循所述图像平面; 并且其中所述投影物镜被配置成使得当所述系统在浸没时操作时，所述浸没液体至少在一些区域中具有面向远离所述图像平面的方向的凸曲面。还提出将投影物镜的像面侧上的最后一个光学元件（201,309,506）布置在图像平面下方，使浸液（202,310,507,601）至少部分地保持在图像平面侧上的最后一个光学元件上的大致桶形区域中。此外，可以提供旋转器，其用于使承载感光涂层（401）的基板在传感方向之间旋转，其中感光涂层位于与重力方向相对的基板表面上，并且曝光取向感光涂层（401）位于面向重力方向的基板表面上。

9. 发明申请

US20050061990A1 Maximum sensitivity optical scanning system 有权
公开(公告)号：US20050061990A1
公开(公告)日：2005-03-24
申请号：US10910552
申请日：2004-08-02
申请人： Bo Curry , Andreas Dorsel , Kyle Schleifer , Debra Sillman
发明人： Bo Curry , Andreas Dorsel , Kyle Schleifer , Debra Sillman
IPC分类号： G01N21/64 , G01T1/10
CPC分类号： G01N21/6456 , G01N2021/6419 , G01N2021/6441 , G01N2021/6463 , G01N2021/6484
摘要： A maximum sensitivity optical scanning system is disclosed. It finds use in a variety of applications, including the reading of biopolymeric arrays. It operates by scanning sample at a setting selected to result in signal saturation for some, but not all available data. Subsequent scans of the same area are taken at lower sensitivity settings (in terms of detector gain and/or excitation light source gain or attenuation) and data from at least the previously saturated regions is obtained. If system sensitivity is set too low to produce useful results, optional features may adjust sensitivity upward and follow with an increased sensitivity scan as a remedial measure. Full signal sensitivity is better preserved as most needed in taking data for the weakest signals first with the high-level scan. Data for sample producing stronger signals that can better tolerate photobleaching is then taken in one way or another.

10. 发明申请

US20050029468A1 Reading multi-featured arrays 失效
标题翻译：阅读多功能阵列
公开(公告)号：US20050029468A1
公开(公告)日：2005-02-10
申请号：US10881688
申请日：2004-06-29
申请人： Andreas Dorsel , Glenda Delenstarr , Kenneth Staton , George Tsai
发明人： Andreas Dorsel , Glenda Delenstarr , Kenneth Staton , George Tsai
IPC分类号： C40B40/06 , C40B70/00 , G01N21/64 , G01J1/58
CPC分类号： G01N21/6452 , B01J2219/00527 , B01J2219/00529 , B01J2219/00547 , B01J2219/00585 , B01J2219/00596 , B01J2219/00605 , B01J2219/00608 , B01J2219/00659 , B01J2219/00702 , B01J2219/00722 , C40B40/06 , C40B70/00
摘要： A method, apparatus, and computer program product for reading fluorescence signals from an array of chemical moieties (such as different sequence peptides or polynucleotides, for example different DNA sequences). In the method the spatial sequence of scanned locations need not be the same as the temporal sequence. For example, a later illuminated line may be spatially closer to an earlier illuminated line than is a temporally intervening illuminated line.
摘要翻译：用于从化学部分阵列（例如不同序列肽或多核苷酸，例如不同DNA序列）读取荧光信号的方法，装置和计算机程序产品。在该方法中，扫描位置的空间序列不必与时间序列相同。例如，稍后的照明线可以在空间上比在时间上插入的照明线更靠近较早的照明线。

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