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    • 4. 发明授权
    • Diffractive light modulator having continuously deformable surface
    • 衍射光调制器具有连续变形的表面
    • US07359106B1
    • 2008-04-15
    • US11230874
    • 2005-09-20
    • David T. AmmAlexander P. PayneJames A. Hunter
    • David T. AmmAlexander P. PayneJames A. Hunter
    • G02B26/00
    • G02B26/0808G02B26/0825
    • A light modulator and a method of manufacturing the same are provided having a continuously deformable optical surface. Generally, the modulator includes a substrate, a membrane disposed above and spaced apart from an upper surface of the substrate, the membrane having a continuously deformable light reflective surface formed on its upper side facing away from the upper surface of the substrate, and a means for deflecting the deformable surface relative to the substrate. Light reflected from different points of the deformable surface can interfere to modulate light reflected from the modulator in 0th order applications. In one embodiment, the membrane includes a static reflective surface surrounding the deformable surface. Light reflected from the static surface and the deformable surface can interfere to modulate light reflected from the modulator in non-0th order applications. Preferably, the static surface is substantially planar and the deformable surface are sized and shaped to define substantially equal areas. In one embodiment, the static surface circumscribes the deformable surface to define a parabolic reflector.
    • 光调制器及其制造方法具有连续变形的光学表面。 通常,调制器包括基板,设置在基板的上表面上方并与其间隔开的膜,所述膜具有形成在其远离基板的上表面的上侧上的可连续变形的光反射表面, 用于使可变形表面相对于基底偏转。 从可变形表面的不同点反射的光可能会干扰在第0级应用中调制从调制器反射的光。 在一个实施例中,膜包括围绕可变形表面的静态反射表面。 从静态表面和可变形表面反射的光可以干扰在非0级以上的应用中调制从调制器反射的光。 优选地,静态表面基本上是平面的,并且可变形表面的尺寸和形状被设计成限定基本相等的面积。 在一个实施例中,静态表面围绕可变形表面以限定抛物面反射器。
    • 5. 发明授权
    • Spatial light modulator with robust mirror substrate condition
    • 空间光调制器,具有鲁棒的镜面基板条件
    • US07085059B2
    • 2006-08-01
    • US11087230
    • 2005-03-23
    • Alexander P. PayneJames A. HunterDavid T. Amm
    • Alexander P. PayneJames A. HunterDavid T. Amm
    • G02B1/10
    • G02B26/0808
    • A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer overlying the substrate, and a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer. The second layer has a predetermined thickness selected in relation to an index of refraction of the second layer and to a wavelength of the incident light such that the light reflecting off an interface between the first and second layers constructively interferes with light reflected from the top surface. Preferably, the first layer also has a predetermined thickness selected such that the light reflecting off an interface between the first layer and the substrate constructively interferes with light reflected from the top surface.
    • 提供一种光调制器及其制造方法,具有在其上形成有反射增强层的基板。 这些层至少包括用于接收入射光的顶表面,覆盖衬底的第一层,以及顶表面和第一层之间的第二层,第二层覆盖并邻接第一层。 第二层具有相对于第二层的折射率和入射光的波长选择的预定厚度,使得从第一和第二层之间的界面反射的光建构性地干扰从顶表面反射的光 。 优选地,第一层还具有选择的预定厚度,使得从第一层和衬底之间的界面反射的光构造地干扰从顶表面反射的光。
    • 6. 发明授权
    • Spatial light modulator for holographic data storage
    • 用于全息数据存储的空间光调制器
    • US07986603B1
    • 2011-07-26
    • US12286295
    • 2008-09-29
    • Jahja I. TrisnadiAlexander P. PayneClinton B. Carlisle
    • Jahja I. TrisnadiAlexander P. PayneClinton B. Carlisle
    • G11B7/00
    • G11B7/128G11B7/083
    • A holographic data storage (HDS) system and method are provided. Generally, the system includes: a light source for generating a coherent light; beam-forming optics for forming the light into collimated object and reference beams; holographic storage medium; a spatial light modulator (SLM) located in a path of the object beam from the beam-forming optics to the storage medium, the SLM having a number of pixels for encoding data to be stored in the medium into the object beam. Preferably, the SLM can modulate both the amplitude and phase of light from every pixel on the SLM. More preferably, the SLM is also located in a path of the reference beam to the storage medium to modulate the phase of the light to store multiple holographic pages of data in the same physical volume of medium through phase multiplexing. Other embodiments are also described.
    • 提供了全息数据存储(HDS)系统和方法。 通常,该系统包括:用于产生相干光的光源; 用于将光成型为准直物体和参考光束的光束形成光学器件; 全息存储介质; 位于物镜光束从光束形成光学器件到存储介质的路径中的空间光调制器(SLM),SLM具有多个像素,用于将待存储在介质中的数据编码到物体光束中。 优选地,SLM可以调制SLM上每个像素的光的幅度和相位。 更优选地,SLM还位于参考光束到存储介质的路径中,以调制光的相位,以通过相位多路复用在相同物理体积的介质中存储数据的多个全息页。 还描述了其它实施例。
    • 7. 发明授权
    • Dielectric spacer for enhanced squeeze-film damping of movable members of MEMS devices
    • 用于增强MEMS器件可移动部件的挤压膜阻尼的介质间隔件
    • US07310180B2
    • 2007-12-18
    • US11264959
    • 2005-11-01
    • Alexander P. PayneOmar S. Leung
    • Alexander P. PayneOmar S. Leung
    • G02B26/00
    • G02B26/0808
    • In one embodiment, a capacitive micro electro-mechanical systems (MEMS) device includes a dielectric spacer between a bottom electrode and a movable member. The movable member may serve as a top electrode. A gap separates the top electrode from the dielectric spacer. The movable member may be actuated to deflect towards the bottom electrode by electrostatic force. The dielectric spacer reduces the height of the gap that would otherwise be formed between a top surface of the bottom electrode and a bottom surface of the movable member, thereby improving squeeze-film damping. The movable member may be a ribbon of a ribbon-type diffractive spatial light modulator, for example.
    • 在一个实施例中,电容式微电子机械系统(MEMS)装置包括在底部电极和可移动​​部件之间的介电隔离件。 可动构件可以用作顶部电极。 间隙将顶部电极与电介质间隔物分开。 可动构件被致动以通过静电力向底部电极偏转。 电介质间隔物减小了底部电极的顶表面和可移动部件的底表面之间将形成的间隙的高度,从而改善了挤压膜阻尼。 可动构件例如可以是带状衍射空间光调制器的带状物。
    • 9. 发明授权
    • Two dimensional spatial light modulator
    • 二维空间光调制器
    • US07064883B2
    • 2006-06-20
    • US11001364
    • 2004-11-30
    • Alexander P. PayneJahja I. Trisnadi
    • Alexander P. PayneJahja I. Trisnadi
    • G02B26/00
    • G02B26/001G02B26/0808
    • A spatial light modulator is provided having a two-dimensional (2D), close-packed MEMS (Micro-Electromechanical System) array of diffractive pixels. Each pixel includes a number of diffractive elements or diffractors. Each diffractor includes a tent member disposed above and spaced apart from an upper surface of a substrate, a movable actuator disposed between the substrate and the tent member, and a driver moving the actuator. The tent member has a first planar light reflective surface facing away from the substrate, the first planar light reflective surface having an aperture formed therein. The actuator has a second planar light reflective surface parallel to and potentially coplanar with the first planar light reflective surface and positioned relative to the aperture to receive light passing therethrough. The aperture may be sized and shaped to define an area with reflectivity substantially equal to the reflectivity of an area of the first planar light reflective surface surrounding the aperture to provide a maximum contrast ratio.
    • 提供具有二维(2D),紧密堆积的MEMS(微机电系统)衍射像素阵列的空间光调制器。 每个像素包括多个衍射元件或衍射体。 每个衍射器包括设置在基板的上表面上方并与其间隔开的帐篷构件,设置在基板和帐篷构件之间的可移动致动器以及使致动器移动的驱动器。 帐篷构件具有背离衬底的第一平面光反射表面,第一平面光反射表面具有形成在其中的孔。 致动器具有与第一平面光反射表面平行并且可能与第一平面光反射表面共面并且相对于孔定位的第二平面光反射表面,以接收穿过其中的光。 孔可以被定尺寸和成形以限定具有基本上等于围绕孔的第一平面光反射表面的区域的反射率的反射率以提供最大对比度的区域。